JP2008244447A5 - - Google Patents

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Publication number
JP2008244447A5
JP2008244447A5 JP2008032526A JP2008032526A JP2008244447A5 JP 2008244447 A5 JP2008244447 A5 JP 2008244447A5 JP 2008032526 A JP2008032526 A JP 2008032526A JP 2008032526 A JP2008032526 A JP 2008032526A JP 2008244447 A5 JP2008244447 A5 JP 2008244447A5
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JP
Japan
Prior art keywords
heat treatment
thin film
organic solvent
manufacturing
insulating film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2008032526A
Other languages
English (en)
Japanese (ja)
Other versions
JP5604034B2 (ja
JP2008244447A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2008032526A priority Critical patent/JP5604034B2/ja
Priority claimed from JP2008032526A external-priority patent/JP5604034B2/ja
Publication of JP2008244447A publication Critical patent/JP2008244447A/ja
Publication of JP2008244447A5 publication Critical patent/JP2008244447A5/ja
Application granted granted Critical
Publication of JP5604034B2 publication Critical patent/JP5604034B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2008032526A 2007-02-26 2008-02-14 発光装置の作製方法 Expired - Fee Related JP5604034B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2008032526A JP5604034B2 (ja) 2007-02-26 2008-02-14 発光装置の作製方法

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2007045146 2007-02-26
JP2007045146 2007-02-26
JP2008032526A JP5604034B2 (ja) 2007-02-26 2008-02-14 発光装置の作製方法

Publications (3)

Publication Number Publication Date
JP2008244447A JP2008244447A (ja) 2008-10-09
JP2008244447A5 true JP2008244447A5 (enExample) 2011-03-31
JP5604034B2 JP5604034B2 (ja) 2014-10-08

Family

ID=39716390

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008032526A Expired - Fee Related JP5604034B2 (ja) 2007-02-26 2008-02-14 発光装置の作製方法

Country Status (4)

Country Link
US (1) US20080206997A1 (enExample)
JP (1) JP5604034B2 (enExample)
KR (1) KR20080079205A (enExample)
CN (1) CN101256956A (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
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JP5178569B2 (ja) * 2009-02-13 2013-04-10 株式会社東芝 固体撮像装置
WO2013038953A1 (ja) * 2011-09-14 2013-03-21 エムテックスマート株式会社 Ｌｅｄの製造方法、ｌｅｄの製造装置およびｌｅｄ
CN102646595A (zh) * 2011-11-11 2012-08-22 京东方科技集团股份有限公司 薄膜晶体管及其制造方法、显示器件
JP7107106B2 (ja) * 2018-08-30 2022-07-27 富士電機株式会社 窒化ガリウム系半導体装置および窒化ガリウム系半導体装置の製造方法
TWI864232B (zh) * 2020-02-19 2024-12-01 日商東京威力科創股份有限公司 基板處理方法及基板處理系統
KR102826508B1 (ko) * 2020-06-02 2025-06-27 삼성디스플레이 주식회사 표시 장치 및 그 제조 방법

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