JP2008166830A5 - - Google Patents

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Publication number
JP2008166830A5
JP2008166830A5 JP2008011466A JP2008011466A JP2008166830A5 JP 2008166830 A5 JP2008166830 A5 JP 2008166830A5 JP 2008011466 A JP2008011466 A JP 2008011466A JP 2008011466 A JP2008011466 A JP 2008011466A JP 2008166830 A5 JP2008166830 A5 JP 2008166830A5
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JP
Japan
Prior art keywords
cassette
wafer
process processing
processing apparatus
transfer means
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2008011466A
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English (en)
Japanese (ja)
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JP2008166830A (ja
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Publication date
Application filed filed Critical
Priority to JP2008011466A priority Critical patent/JP2008166830A/ja
Priority claimed from JP2008011466A external-priority patent/JP2008166830A/ja
Publication of JP2008166830A publication Critical patent/JP2008166830A/ja
Publication of JP2008166830A5 publication Critical patent/JP2008166830A5/ja
Pending legal-status Critical Current

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JP2008011466A 2008-01-22 2008-01-22 真空処理方法及び真空処理装置 Pending JP2008166830A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2008011466A JP2008166830A (ja) 2008-01-22 2008-01-22 真空処理方法及び真空処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008011466A JP2008166830A (ja) 2008-01-22 2008-01-22 真空処理方法及び真空処理装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2004153482A Division JP4121480B2 (ja) 2004-05-24 2004-05-24 真空処理方法及び真空処理装置

Publications (2)

Publication Number Publication Date
JP2008166830A JP2008166830A (ja) 2008-07-17
JP2008166830A5 true JP2008166830A5 (enExample) 2009-04-30

Family

ID=39695744

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008011466A Pending JP2008166830A (ja) 2008-01-22 2008-01-22 真空処理方法及び真空処理装置

Country Status (1)

Country Link
JP (1) JP2008166830A (enExample)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3238432B2 (ja) * 1991-08-27 2001-12-17 東芝機械株式会社 マルチチャンバ型枚葉処理装置
JPH07106215A (ja) * 1993-10-08 1995-04-21 Kokusai Electric Co Ltd 半導体製造装置における障害処理方法
JP3328869B2 (ja) * 1995-06-27 2002-09-30 東京エレクトロン株式会社 処理方法及び処理装置
JPH0950948A (ja) * 1995-08-08 1997-02-18 Kokusai Electric Co Ltd 半導体製造装置の障害対処システム

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