JP2008109134A5 - - Google Patents

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Publication number
JP2008109134A5
JP2008109134A5 JP2007270341A JP2007270341A JP2008109134A5 JP 2008109134 A5 JP2008109134 A5 JP 2008109134A5 JP 2007270341 A JP2007270341 A JP 2007270341A JP 2007270341 A JP2007270341 A JP 2007270341A JP 2008109134 A5 JP2008109134 A5 JP 2008109134A5
Authority
JP
Japan
Prior art keywords
cassette
vacuum processing
wafer
wafers
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2007270341A
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English (en)
Japanese (ja)
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JP2008109134A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2007270341A priority Critical patent/JP2008109134A/ja
Priority claimed from JP2007270341A external-priority patent/JP2008109134A/ja
Publication of JP2008109134A publication Critical patent/JP2008109134A/ja
Publication of JP2008109134A5 publication Critical patent/JP2008109134A5/ja
Pending legal-status Critical Current

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JP2007270341A 2007-10-17 2007-10-17 真空処理装置及び真空処理方法 Pending JP2008109134A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007270341A JP2008109134A (ja) 2007-10-17 2007-10-17 真空処理装置及び真空処理方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007270341A JP2008109134A (ja) 2007-10-17 2007-10-17 真空処理装置及び真空処理方法

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2004153482A Division JP4121480B2 (ja) 2004-05-24 2004-05-24 真空処理方法及び真空処理装置

Publications (2)

Publication Number Publication Date
JP2008109134A JP2008109134A (ja) 2008-05-08
JP2008109134A5 true JP2008109134A5 (enExample) 2009-04-30

Family

ID=39442185

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007270341A Pending JP2008109134A (ja) 2007-10-17 2007-10-17 真空処理装置及び真空処理方法

Country Status (1)

Country Link
JP (1) JP2008109134A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5470002B2 (ja) * 2008-12-10 2014-04-16 株式会社日立国際電気 基板処理装置及び基板処理装置における表示方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4715921A (en) * 1986-10-24 1987-12-29 General Signal Corporation Quad processor
JPH03274746A (ja) * 1990-03-24 1991-12-05 Sony Corp マルチチャンバ装置
JP3238432B2 (ja) * 1991-08-27 2001-12-17 東芝機械株式会社 マルチチャンバ型枚葉処理装置
JPH05226453A (ja) * 1992-02-17 1993-09-03 Hitachi Ltd 真空処理装置
JPH0697261A (ja) * 1992-09-09 1994-04-08 Kokusai Electric Co Ltd ウェーハ移載制御装置及びその制御方法
JP3151582B2 (ja) * 1993-04-28 2001-04-03 東京エレクトロン株式会社 真空処理装置
JP3492417B2 (ja) * 1994-05-24 2004-02-03 東京エレクトロン株式会社 処理装置
JPH0950948A (ja) * 1995-08-08 1997-02-18 Kokusai Electric Co Ltd 半導体製造装置の障害対処システム

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