JP2008153690A5 - - Google Patents

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Publication number
JP2008153690A5
JP2008153690A5 JP2008040026A JP2008040026A JP2008153690A5 JP 2008153690 A5 JP2008153690 A5 JP 2008153690A5 JP 2008040026 A JP2008040026 A JP 2008040026A JP 2008040026 A JP2008040026 A JP 2008040026A JP 2008153690 A5 JP2008153690 A5 JP 2008153690A5
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JP
Japan
Prior art keywords
wafer
cassette
transfer means
processing
processing apparatuses
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2008040026A
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English (en)
Japanese (ja)
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JP2008153690A (ja
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Publication date
Application filed filed Critical
Priority to JP2008040026A priority Critical patent/JP2008153690A/ja
Priority claimed from JP2008040026A external-priority patent/JP2008153690A/ja
Publication of JP2008153690A publication Critical patent/JP2008153690A/ja
Publication of JP2008153690A5 publication Critical patent/JP2008153690A5/ja
Pending legal-status Critical Current

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JP2008040026A 2008-02-21 2008-02-21 真空処理方法及び真空処理装置 Pending JP2008153690A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2008040026A JP2008153690A (ja) 2008-02-21 2008-02-21 真空処理方法及び真空処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008040026A JP2008153690A (ja) 2008-02-21 2008-02-21 真空処理方法及び真空処理装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2008011462A Division JP4252103B2 (ja) 2008-01-22 2008-01-22 真空処理方法及び真空処理装置

Publications (2)

Publication Number Publication Date
JP2008153690A JP2008153690A (ja) 2008-07-03
JP2008153690A5 true JP2008153690A5 (enExample) 2009-04-30

Family

ID=39655460

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008040026A Pending JP2008153690A (ja) 2008-02-21 2008-02-21 真空処理方法及び真空処理装置

Country Status (1)

Country Link
JP (1) JP2008153690A (enExample)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3238432B2 (ja) * 1991-08-27 2001-12-17 東芝機械株式会社 マルチチャンバ型枚葉処理装置
JPH05226453A (ja) * 1992-02-17 1993-09-03 Hitachi Ltd 真空処理装置
JP3560633B2 (ja) * 1994-03-15 2004-09-02 東芝機械株式会社 加熱処理装置
US5486080A (en) * 1994-06-30 1996-01-23 Diamond Semiconductor Group, Inc. High speed movement of workpieces in vacuum processing

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