JP2008193118A5 - - Google Patents

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Publication number
JP2008193118A5
JP2008193118A5 JP2008111347A JP2008111347A JP2008193118A5 JP 2008193118 A5 JP2008193118 A5 JP 2008193118A5 JP 2008111347 A JP2008111347 A JP 2008111347A JP 2008111347 A JP2008111347 A JP 2008111347A JP 2008193118 A5 JP2008193118 A5 JP 2008193118A5
Authority
JP
Japan
Prior art keywords
vacuum processing
cassette
wafer
wafers
transfer means
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2008111347A
Other languages
English (en)
Japanese (ja)
Other versions
JP2008193118A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2008111347A priority Critical patent/JP2008193118A/ja
Priority claimed from JP2008111347A external-priority patent/JP2008193118A/ja
Publication of JP2008193118A publication Critical patent/JP2008193118A/ja
Publication of JP2008193118A5 publication Critical patent/JP2008193118A5/ja
Withdrawn legal-status Critical Current

Links

JP2008111347A 2008-04-22 2008-04-22 真空処理装置及び真空処理方法 Withdrawn JP2008193118A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2008111347A JP2008193118A (ja) 2008-04-22 2008-04-22 真空処理装置及び真空処理方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008111347A JP2008193118A (ja) 2008-04-22 2008-04-22 真空処理装置及び真空処理方法

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2008011462A Division JP4252103B2 (ja) 2008-01-22 2008-01-22 真空処理方法及び真空処理装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2009104066A Division JP5107961B2 (ja) 2009-04-22 2009-04-22 真空処理装置及び真空処理方法

Publications (2)

Publication Number Publication Date
JP2008193118A JP2008193118A (ja) 2008-08-21
JP2008193118A5 true JP2008193118A5 (enExample) 2009-05-07

Family

ID=39752839

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008111347A Withdrawn JP2008193118A (ja) 2008-04-22 2008-04-22 真空処理装置及び真空処理方法

Country Status (1)

Country Link
JP (1) JP2008193118A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015138856A (ja) * 2014-01-22 2015-07-30 株式会社ディスコ 切削装置

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