JP2008141070A - 配線基板及びその製造方法 - Google Patents
配線基板及びその製造方法 Download PDFInfo
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- JP2008141070A JP2008141070A JP2006327493A JP2006327493A JP2008141070A JP 2008141070 A JP2008141070 A JP 2008141070A JP 2006327493 A JP2006327493 A JP 2006327493A JP 2006327493 A JP2006327493 A JP 2006327493A JP 2008141070 A JP2008141070 A JP 2008141070A
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- H—ELECTRICITY
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- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/11—Printed elements for providing electric connections to or between printed circuits
- H05K1/111—Pads for surface mounting, e.g. lay-out
- H05K1/112—Pads for surface mounting, e.g. lay-out directly combined with via connections
- H05K1/113—Via provided in pad; Pad over filled via
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- H05K1/02—Details
- H05K1/11—Printed elements for providing electric connections to or between printed circuits
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
- H01L21/4814—Conductive parts
- H01L21/4846—Leads on or in insulating or insulated substrates, e.g. metallisation
- H01L21/4857—Multilayer substrates
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- H—ELECTRICITY
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- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
- H01L21/4814—Conductive parts
- H01L21/4846—Leads on or in insulating or insulated substrates, e.g. metallisation
- H01L21/486—Via connections through the substrate with or without pins
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- H—ELECTRICITY
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- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6835—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/12—Mountings, e.g. non-detachable insulating substrates
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- H—ELECTRICITY
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- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
- H01L23/49822—Multilayer substrates
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
- H01L23/49827—Via connections through the substrates, e.g. pins going through the substrate, coaxial cables
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/14—Structural association of two or more printed circuits
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
- H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
- H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L2221/68304—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L2221/68345—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support used as a support during the manufacture of self supporting substrates
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/03—Conductive materials
- H05K2201/0332—Structure of the conductor
- H05K2201/0335—Layered conductors or foils
- H05K2201/0341—Intermediate metal, e.g. before reinforcing of conductors by plating
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/09—Shape and layout
- H05K2201/09209—Shape and layout details of conductors
- H05K2201/095—Conductive through-holes or vias
- H05K2201/09563—Metal filled via
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/09—Shape and layout
- H05K2201/09209—Shape and layout details of conductors
- H05K2201/095—Conductive through-holes or vias
- H05K2201/096—Vertically aligned vias, holes or stacked vias
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- H—ELECTRICITY
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- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
- H05K3/108—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern by semi-additive methods; masks therefor
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
- H05K3/20—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern by affixing prefabricated conductor pattern
- H05K3/205—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern by affixing prefabricated conductor pattern using a pattern electroplated or electroformed on a metallic carrier
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/46—Manufacturing multilayer circuits
- H05K3/4644—Manufacturing multilayer circuits by building the multilayer layer by layer, i.e. build-up multilayer circuits
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49117—Conductor or circuit manufacturing
- Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
- Y10T29/49155—Manufacturing circuit on or in base
Abstract
【解決手段】積層された複数の金属層よりなるパッド12と、パッド12と接続されるビア13とを備えた配線基板10であって、複数の金属層は、配線基板10から露出された金属層26と、金属層26とビア13との間に設けられ、ビア13に含まれる金属が金属層26に拡散することを防止する金属層27とを有し、ビア13と金属層27との間に金属層27よりも酸化されにくい金属層28を設け、ビア13を金属層28と接続した。
【選択図】図13
Description
図13は、本発明の第1の実施の形態に係る配線基板の断面図である。
は、−32kcalよりも小さい金属により構成されている。金属層27としては、例えば、Ni層を用いることができる。Niの酸素1グラム原子当たりの酸化に伴う自由エネルギー変化量
は、−46.1kcalである。金属層27としてNi層を用いた場合、金属層27の厚さは、例えば、10μmとすることができる。
が−32kcalよりも大きい金属からなる金属層を用いることができる。このような金属層に適用可能な金属としては、例えば、
等がある。酸化されにくい金属層28としては、例えば、Cu層、Ag層、Au層、及びPd層等を用いることができる。金属層28としてCu層を用いた場合、金属層28の厚さは、例えば、10μmとすることができる。なお、Cu層、Ag層、Au層、及びPd層のうち、少なくとも2つの層を積層させたものを金属層28として用いてもよい。
は、−32kcalよりも小さい金属により構成されている。金属層27としては、例えば、Ni層を用いることができる。Niの酸素1グラム原子当たりの酸化に伴う自由エネルギー変化量
は、−46.1kcalである。金属層27の厚さは、例えば、10μmとすることができる。
が−32kcalよりも大きい金属からなる金属層のことである。このような金属としては、
等がある。金属層28としては、例えば、Cu層、Ag層、Au層、及びPd層等を用いることができる。金属層28としてCu層を用いた場合、金属層28の厚さは、例えば、10μmとすることができる。なお、Cu層、Ag層、Au層、及びPd層のうち、少なくとも2つの層を積層させたものを酸化されにくい金属層28として用いてもよい。
図25は、本発明の第2の実施の形態に係る配線基板の断面図である。図25において、第1の実施の形態の配線基板10と同一構成部分には同一符号を付す。
11,16,21 絶縁層
11A,16A,21A,46A 上面
11B,26A 下面
12,61 パッド
13,17,22 ビア
14,18,23 配線
25,34,39,47A,49A 開口部
26〜28,63 金属層
31A,31B,36A,36B,41A,41B シード層
32A,32B,37A,37B,42A,42B Cu膜
46 金属板
47,49 レジスト膜
Claims (4)
- 積層された複数の金属層よりなるパッドと、前記パッドと接続されるビアとを備えた配線基板であって、
前記複数の金属層は、前記配線基板から露出された金属層と、前記金属層と前記ビアとの間に設けられ、前記ビアに含まれる金属が前記金属層に拡散することを防止する第1の金属層とを有し、
前記ビアと前記第1の金属層との間に、前記第1の金属層よりも酸化されにくい第2の金属層を設け、前記ビアを前記第2の金属層と接続したことを特徴とする配線基板。 - 前記第2の金属層は、Cu層、Ag層、Au層、及びPd層のうちの少なくとも1つの層からなることを特徴とする請求項1記載の配線基板。
- 積層された複数の金属層よりなるパッドと、前記パッドと接続されるビアとを備えた配線基板の製造方法であって、
前記複数の金属層は、前記配線基板から露出された金属層と、前記金属層と前記ビアとの間に設けられ、前記ビアに含まれる金属が前記金属層に拡散することを防止する第1の金属層と、前記ビアと前記第1の金属層との間に設けられ、前記第1の金属層よりも酸化されにくい第2の金属層を有しており、
めっき法により、前記第1の金属層と前記第2の金属層とを連続して形成する第1及び第2の金属層形成工程と、
前記第2の金属層上に前記ビアを形成するビア形成工程と、を含むことを特徴とする配線基板の製造方法。 - 前記第2の金属層は、Cu層、Ag層、Au層、及びPd層のうちの少なくとも1つの層からなることを特徴とする請求項3記載の配線基板の製造方法。
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006327493A JP5214139B2 (ja) | 2006-12-04 | 2006-12-04 | 配線基板及びその製造方法 |
KR1020070124500A KR101436035B1 (ko) | 2006-12-04 | 2007-12-03 | 배선 기판 및 그 제조방법 |
US11/987,617 US8476536B2 (en) | 2006-12-04 | 2007-12-03 | Wiring substrate and method for manufacturing the same |
EP07122244.2A EP1930946B1 (en) | 2006-12-04 | 2007-12-04 | Method for manufacturing wiring substrate |
CNA2007101959256A CN101198213A (zh) | 2006-12-04 | 2007-12-04 | 布线基板以及制造布线基板的方法 |
TW096146072A TWI407852B (zh) | 2006-12-04 | 2007-12-04 | 佈線基板及其製造方法 |
EP12164665.7A EP2479788B1 (en) | 2006-12-04 | 2007-12-04 | Wiring substrate and method for manufacturing the same |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006327493A JP5214139B2 (ja) | 2006-12-04 | 2006-12-04 | 配線基板及びその製造方法 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2012093164A Division JP2012138632A (ja) | 2012-04-16 | 2012-04-16 | 配線基板及びその製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2008141070A true JP2008141070A (ja) | 2008-06-19 |
JP5214139B2 JP5214139B2 (ja) | 2013-06-19 |
Family
ID=39273240
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Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006327493A Active JP5214139B2 (ja) | 2006-12-04 | 2006-12-04 | 配線基板及びその製造方法 |
Country Status (6)
Country | Link |
---|---|
US (1) | US8476536B2 (ja) |
EP (2) | EP1930946B1 (ja) |
JP (1) | JP5214139B2 (ja) |
KR (1) | KR101436035B1 (ja) |
CN (1) | CN101198213A (ja) |
TW (1) | TWI407852B (ja) |
Cited By (7)
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---|---|---|---|---|
JP2012074576A (ja) * | 2010-09-29 | 2012-04-12 | Hitachi Chem Co Ltd | 半導体素子搭載用パッケージ基板の製造方法 |
JP2012235166A (ja) * | 2012-08-23 | 2012-11-29 | Shinko Electric Ind Co Ltd | 配線基板及びその製造方法 |
JP2012248891A (ja) * | 2012-09-03 | 2012-12-13 | Shinko Electric Ind Co Ltd | 配線基板及びその製造方法 |
US8399779B2 (en) | 2008-09-12 | 2013-03-19 | Shinko Electric Industries Co., Ltd. | Wiring board and method of manufacturing the same |
JP2013102248A (ja) * | 2013-03-08 | 2013-05-23 | Shinko Electric Ind Co Ltd | 配線基板の製造方法及び半導体パッケージの製造方法 |
JP2021019184A (ja) * | 2019-07-17 | 2021-02-15 | サムソン エレクトロ−メカニックス カンパニーリミテッド. | コイル部品 |
US20210358684A1 (en) * | 2020-05-18 | 2021-11-18 | Samsung Electro-Mechanics Co., Ltd. | Coil component |
Families Citing this family (18)
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KR100881303B1 (ko) * | 2005-11-02 | 2009-02-03 | 이비덴 가부시키가이샤 | 반도체 장치용 다층 프린트 배선판 및 그 제조 방법 |
JP2010118635A (ja) * | 2008-11-12 | 2010-05-27 | Ibiden Co Ltd | 多層プリント配線板 |
US8686300B2 (en) | 2008-12-24 | 2014-04-01 | Ibiden Co., Ltd. | Printed wiring board and method for manufacturing the same |
JP5561460B2 (ja) * | 2009-06-03 | 2014-07-30 | 新光電気工業株式会社 | 配線基板および配線基板の製造方法 |
JP5355504B2 (ja) * | 2009-07-30 | 2013-11-27 | 株式会社東芝 | 半導体装置の製造方法および半導体装置 |
JP5479073B2 (ja) * | 2009-12-21 | 2014-04-23 | 新光電気工業株式会社 | 配線基板及びその製造方法 |
JP5603600B2 (ja) * | 2010-01-13 | 2014-10-08 | 新光電気工業株式会社 | 配線基板及びその製造方法、並びに半導体パッケージ |
JP5800674B2 (ja) * | 2011-10-25 | 2015-10-28 | 日本特殊陶業株式会社 | 配線基板及びその製造方法 |
JP2013093405A (ja) * | 2011-10-25 | 2013-05-16 | Ngk Spark Plug Co Ltd | 配線基板及びその製造方法 |
KR20140030918A (ko) * | 2012-09-04 | 2014-03-12 | 삼성전기주식회사 | 인쇄회로기판 |
US9165878B2 (en) * | 2013-03-14 | 2015-10-20 | United Test And Assembly Center Ltd. | Semiconductor packages and methods of packaging semiconductor devices |
US9653419B2 (en) * | 2015-04-08 | 2017-05-16 | Intel Corporation | Microelectronic substrate having embedded trace layers with integral attachment structures |
US10115579B2 (en) * | 2016-11-30 | 2018-10-30 | Asm Technology Singapore Pte Ltd | Method for manufacturing wafer-level semiconductor packages |
TWI633822B (zh) * | 2017-05-08 | 2018-08-21 | 欣興電子股份有限公司 | 線路板單元與其製作方法 |
WO2019066977A1 (en) | 2017-09-29 | 2019-04-04 | Intel Corporation | FIRST-LEVEL THIN-LEVEL INTERCONNECTIONS DEFINED BY AUTOCATALYTIC METAL FOR LITHOGRAPHIC INTERCONNECTION HOLES |
CN109712897B (zh) * | 2017-10-26 | 2020-12-18 | 中芯国际集成电路制造(上海)有限公司 | 一种半导体器件及其制作方法、电子装置 |
CN111343802B (zh) * | 2018-12-19 | 2022-02-22 | 庆鼎精密电子(淮安)有限公司 | 电路板及其制作方法 |
US20220312591A1 (en) * | 2021-03-26 | 2022-09-29 | Juniper Networks, Inc. | Substrate with conductive pads and conductive layers |
Citations (5)
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- 2007-12-04 EP EP07122244.2A patent/EP1930946B1/en active Active
- 2007-12-04 CN CNA2007101959256A patent/CN101198213A/zh active Pending
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US8399779B2 (en) | 2008-09-12 | 2013-03-19 | Shinko Electric Industries Co., Ltd. | Wiring board and method of manufacturing the same |
US9024207B2 (en) | 2008-09-12 | 2015-05-05 | Shinko Electric Industries Co., Ltd. | Method of manufacturing a wiring board having pads highly resistant to peeling |
JP2012074576A (ja) * | 2010-09-29 | 2012-04-12 | Hitachi Chem Co Ltd | 半導体素子搭載用パッケージ基板の製造方法 |
JP2012235166A (ja) * | 2012-08-23 | 2012-11-29 | Shinko Electric Ind Co Ltd | 配線基板及びその製造方法 |
JP2012248891A (ja) * | 2012-09-03 | 2012-12-13 | Shinko Electric Ind Co Ltd | 配線基板及びその製造方法 |
JP2013102248A (ja) * | 2013-03-08 | 2013-05-23 | Shinko Electric Ind Co Ltd | 配線基板の製造方法及び半導体パッケージの製造方法 |
JP2021019184A (ja) * | 2019-07-17 | 2021-02-15 | サムソン エレクトロ−メカニックス カンパニーリミテッド. | コイル部品 |
US11443894B2 (en) | 2019-07-17 | 2022-09-13 | Samsung Electro-Mechanics Co., Ltd. | Coil component |
US20210358684A1 (en) * | 2020-05-18 | 2021-11-18 | Samsung Electro-Mechanics Co., Ltd. | Coil component |
US11676759B2 (en) * | 2020-05-18 | 2023-06-13 | Samsung Electro-Mechanics Co., Ltd. | Coil component |
Also Published As
Publication number | Publication date |
---|---|
EP2479788A2 (en) | 2012-07-25 |
EP2479788B1 (en) | 2017-05-03 |
KR101436035B1 (ko) | 2014-09-01 |
CN101198213A (zh) | 2008-06-11 |
EP2479788A3 (en) | 2015-02-25 |
TWI407852B (zh) | 2013-09-01 |
EP1930946A3 (en) | 2009-09-09 |
US20080149383A1 (en) | 2008-06-26 |
US8476536B2 (en) | 2013-07-02 |
KR20080051093A (ko) | 2008-06-10 |
TW200833201A (en) | 2008-08-01 |
EP1930946B1 (en) | 2017-01-25 |
EP1930946A2 (en) | 2008-06-11 |
JP5214139B2 (ja) | 2013-06-19 |
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