JP6676370B2 - 配線基板及び配線基板の製造方法 - Google Patents
配線基板及び配線基板の製造方法 Download PDFInfo
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- JP6676370B2 JP6676370B2 JP2015255104A JP2015255104A JP6676370B2 JP 6676370 B2 JP6676370 B2 JP 6676370B2 JP 2015255104 A JP2015255104 A JP 2015255104A JP 2015255104 A JP2015255104 A JP 2015255104A JP 6676370 B2 JP6676370 B2 JP 6676370B2
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- insulating layer
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Description
なお、添付図面は、便宜上、特徴を分かりやすくするために特徴となる部分を拡大して示している場合があり、各構成要素の寸法比率などが実際と同じであるとは限らない。また、断面図では、各部材の断面構造を分かりやすくするために、一部の部材のハッチングを梨地模様に代えて示し、一部の部材のハッチングを省略している。
本例のシード層50は、絶縁層31の上面31Aを被覆する金属膜51と、その金属膜51の上面を被覆する金属膜52とが順に積層された2層構造のシード層である。金属膜51,52としては、例えば、スパッタリング法により形成された金属膜(スパッタ膜)を用いることができる。金属膜51は、例えば、金属膜52や金属層53(例えば、Cu層)から絶縁層31にCuが拡散することを抑制する金属バリア膜として機能する。金属膜51の材料としては、金属膜52を構成する金属(例えば、Cu)よりも絶縁層31との密着性が高い金属であることが好ましい。また、金属膜51の材料としては、金属膜52を構成する金属(例えば、Cu)よりも耐腐食性の高い金属であることが好ましい。このような金属膜51の材料としては、例えば、チタン(Ti)、窒化チタン(TiN)、窒化タンタル(TaN)、タンタル(Ta)、クロム(Cr)を用いることができる。一方、金属膜52の材料としては、例えば、銅や銅合金を用いることができる。なお、金属膜51の厚さは例えば20〜50nm程度とすることができ、金属膜52の厚さは例えば100〜300nm程度とすることができる。
次に、配線基板10の製造方法について説明する。ここでは、配線基板10のうち図1(b)に示した構造体の製造方法について説明する。
(実験条件)
まず、評価用のサンプルを10種類作製した。具体的には、各サンプルでは、絶縁層31の上面31A上に、プリカーサとしてTMAを用い、反応ガスとしてH2Oを用いたALD法により、膜厚20nmのアルミナ膜を形成した。このとき、ALD法における成膜温度を各サンプルで異なる温度に設定した。具体的には、サンプルA,B,C,D,E,F,G,H,I,Jにおける成膜温度をそれぞれ、30℃、50℃、70℃、80℃、90℃、110℃、130℃、180℃、230℃、250℃に設定した。なお、成膜温度以外のALD法における成膜条件は全てのサンプルA〜Jで同一に設定されている。
以上説明したXPS法により測定された各サンプルA〜Jの炭素原子含有率は以下の通りである。
サンプルB(成膜温度50℃):炭素原子含有率=2atomic%
サンプルC(成膜温度70℃):炭素原子含有率=0.9atomic%
サンプルD(成膜温度80℃):炭素原子含有率=0.4atomic%
サンプルE(成膜温度90℃):炭素原子含有率=0.2atomic%
サンプルF(成膜温度110℃):炭素原子含有率=0.1atomic%
サンプルG(成膜温度130℃):炭素原子含有率=0atomic%
サンプルH(成膜温度180℃):炭素原子含有率=0atomic%
サンプルI(成膜温度230℃):炭素原子含有率=0atomic%
サンプルJ(成膜温度250℃):炭素原子含有率=0atomic%
以上の結果をグラフ化して図10に示した。図10から明らかなように、アルミナ膜の成膜温度を低くするほど、そのアルミナ膜中の炭素原子含有率が大きくなることが分かる。具体的には、従来のALD法のように成膜温度を130℃以上の高温に設定した場合(サンプルG〜J)には、アルミナ膜中の炭素原子含有率がXPS法による検出限界以下(ここでは、0.1atomic%未満)であった。これに対し、ALD法における成膜温度を110℃以下の低温に設定すると、その成膜温度を低温に設定するほど、アルミナ膜中の炭素原子含有率が大きくなる。
続いて、図4(c)に示す工程では、絶縁層34及びバリア膜33を厚さ方向に貫通するビアホール34Xを形成する。ビアホール34Xは、例えば、CO2レーザやYAGレーザ等によるレーザ加工法によって形成することができる。また、フォトリソグラフィ法により、絶縁層34を厚さ方向に貫通する貫通孔を形成し、その貫通孔に露出するバリア膜33をドライエッチングやウェットエッチングにより除去することにより、ビアホール34Xを形成することもできる。なお、バリア膜33をエッチング除去する場合には、金属層53に対してバリア膜33が選択的にエッチングされるようにエッチング液等の条件が設定される。
(1)成膜温度を90℃以下の低温に設定したALD法により、絶縁層31の上面31Aと配線層32の上面及び側面とを被覆するバリア膜33を形成した。これにより、バリア膜33に、そのバリア膜33上に形成される絶縁層34の樹脂成分と同じ炭素原子を含有させることができる。このバリア膜33中に含有された炭素原子によって、バリア膜33と絶縁層34との密着強度を向上させることができる。この結果、配線層32及びバリア膜33及び絶縁層34の界面で剥離が生じることを好適に抑制できる。
ここで、上述したように、バリア膜33に炭素原子を含有させることによってバリア膜33と絶縁層34との密着強度が向上することを裏付ける実験結果について説明する。
各サンプル1〜6の構造体に対してバイアスHASTを実施した。バイアスHASTの条件は、温度:130℃、湿度:85%RH、印加電圧:3.5V、時間:96時間である。バイアスHASTの実施後における各サンプル1〜6の構造体の断面を走査イオン顕微鏡(SIM)により観察し、配線層32及びバリア膜33及び絶縁層34の界面の剥離状態を観察した。また、上記SIMにより、配線層32の腐食具合についても観察した。
図11に示すように、ALD法における成膜温度を130℃と高温に設定したサンプル6(つまり、バリア膜33に炭素原子が含有されていないサンプル6)では、配線層32及びバリア膜33及び絶縁層34の界面で剥離が発生していることが確認された。また、サンプル6では、配線層32に腐食が発生していることが確認された。これは、バリア膜33と絶縁層34との密着性が弱く、配線層32及びバリア膜33及び絶縁層34の界面で剥離が生じると、その剥離によって生じた空間にバイアスHAST時に水分が溜まり、その水分に起因して配線層32の表面が酸化等により腐食するためと考えられる。さらに、サンプル6では、5個のサンプル中1個のサンプルで配線間絶縁劣化が確認され、配線抵抗の上昇率も10.8%(≧10%)であった。これは、配線層32の表面が腐食したことに起因して、隣接する配線層32間に位置する絶縁層34の抵抗値が低下し、配線層32の抵抗値が上昇したためと考えられる。
なお、上記実施形態は、これを適宜変更した以下の態様にて実施することもできる。
・上記実施形態の配線基板10において、コア基板20の上面と、配線層22の上面及び側面とを被覆するバリア膜を形成するようにしてもよい。また、コア基板20の下面と、配線層23の下面及び側面を被覆するバリア膜を形成するようにしてもよい。
・上記実施形態の配線構造40における配線層42,45及び絶縁層41,44の層数や配線の取り回しなどは様々に変形・変更することが可能である。
・上記実施形態では、コア基板20を有する配線基板10に具体化したが、コア基板20を有していない配線基板10に具体化してもよい。
31 絶縁層(第1絶縁層)
32 配線層(第1配線層)
33 バリア膜
34 絶縁層(第2絶縁層)
34X ビアホール
35 配線層(第2配線層)
39 ビア配線
50,60 シード層
51,52,61,62 金属膜
Claims (8)
- 第1絶縁層と、
前記第1絶縁層の上面に形成された配線層と、
前記第1絶縁層の上面及び前記配線層の上面及び側面を被覆するバリア膜と、
前記バリア膜の上面及び側面を被覆する第2絶縁層と、を有し、
前記配線層は、シード層と、前記シード層上に形成された金属層とからなり、
前記バリア膜は、前記金属層の上面と、前記金属層の側面と、前記シード層の側面とを被覆しており、
前記バリア膜は、炭素原子含有率が0.2〜3.6atomic%の範囲となるアルミナ膜であることを特徴とする配線基板。 - 前記バリア膜は、前記炭素原子含有率が0.2〜2.0atomic%の範囲となるアルミナ膜であることを特徴とする請求項1に記載の配線基板。
- 前記バリア膜は、前記アルミナ膜中のAl原子に結合したCHX基を有することを特徴とする請求項1又は2に記載の配線基板。
- 前記配線層のラインアンドスペースは、2μm/2μm以下であることを特徴とする請求項1〜3のいずれか一項に記載の配線基板。
- 第1絶縁層の上面に第1配線層を形成する工程と、
前記第1絶縁層の上面及び前記第1配線層の上面及び側面を被覆するバリア膜を形成する工程と、
前記バリア膜の上面及び側面を被覆する第2絶縁層を形成する工程と、を有し、
前記第1配線層は、シード層と、前記シード層上に形成された金属層とからなり、
前記バリア膜は、前記金属層の上面と、前記金属層の側面と、前記シード層の側面とを被覆するように形成され、
前記バリア膜は、プリカーサとしてトリメチルアルミニウムを用い、反応ガスとしてH2O又はO3を用いて成膜温度を90℃以下に設定したALD(Atomic Layer Deposition)法により形成されることを特徴とする配線基板の製造方法。 - 前記バリア膜を形成する工程では、前記ALD法における前記成膜温度を30〜90℃の範囲に設定したことを特徴とする請求項5に記載の配線基板の製造方法。
- 前記バリア膜を形成する工程では、前記ALD法における前記成膜温度を50〜90℃の範囲に設定したことを特徴とする請求項5に記載の配線基板の製造方法。
- 前記第2絶縁層及び前記バリア膜を厚さ方向に貫通し、前記第1配線層の上面の一部を露出するビアホールを形成する工程と、
前記ビアホールを充填するビア配線を形成するとともに、前記ビア配線上及び前記第2絶縁層上に、前記ビア配線を介して前記第1配線層と電気的に接続される第2配線層を形成する工程と、を更に有する請求項5〜7のいずれか一項に記載の配線基板の製造方法。
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