JP2008034437A - 基板の処理方法、プログラム、プログラムを読み取り可能な記録媒体及び基板の処理システム - Google Patents
基板の処理方法、プログラム、プログラムを読み取り可能な記録媒体及び基板の処理システム Download PDFInfo
- Publication number
- JP2008034437A JP2008034437A JP2006203066A JP2006203066A JP2008034437A JP 2008034437 A JP2008034437 A JP 2008034437A JP 2006203066 A JP2006203066 A JP 2006203066A JP 2006203066 A JP2006203066 A JP 2006203066A JP 2008034437 A JP2008034437 A JP 2008034437A
- Authority
- JP
- Japan
- Prior art keywords
- exposure
- processing
- substrate
- processing system
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000012545 processing Methods 0.000 title claims abstract description 185
- 238000003672 processing method Methods 0.000 title claims description 15
- 238000011161 development Methods 0.000 claims abstract description 17
- 230000015572 biosynthetic process Effects 0.000 claims abstract description 4
- 238000000034 method Methods 0.000 claims description 114
- 230000008569 process Effects 0.000 claims description 110
- 238000010438 heat treatment Methods 0.000 claims description 73
- 239000000758 substrate Substances 0.000 claims description 59
- 238000012546 transfer Methods 0.000 claims description 59
- 238000004140 cleaning Methods 0.000 claims description 47
- 239000007788 liquid Substances 0.000 claims description 26
- 230000032258 transport Effects 0.000 claims description 14
- 238000011282 treatment Methods 0.000 abstract description 13
- 235000012431 wafers Nutrition 0.000 description 157
- 238000001816 cooling Methods 0.000 description 27
- 238000000576 coating method Methods 0.000 description 24
- 239000011248 coating agent Substances 0.000 description 23
- 230000003028 elevating effect Effects 0.000 description 8
- 230000002093 peripheral effect Effects 0.000 description 4
- 238000007689 inspection Methods 0.000 description 3
- 239000011261 inert gas Substances 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- 238000005406 washing Methods 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
- G03F7/2022—Multi-step exposure, e.g. hybrid; backside exposure; blanket exposure, e.g. for image reversal; edge exposure, e.g. for edge bead removal; corrective exposure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
- H01L21/0271—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers
- H01L21/0273—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers characterised by the treatment of photoresist layers
- H01L21/0274—Photolithographic processes
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0035—Multiple processes, e.g. applying a further resist layer on an already in a previously step, processed pattern or textured surface
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/38—Treatment before imagewise removal, e.g. prebaking
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70425—Imaging strategies, e.g. for increasing throughput or resolution, printing product fields larger than the image field or compensating lithography- or non-lithography errors, e.g. proximity correction, mix-and-match, stitching or double patterning
- G03F7/70466—Multiple exposures, e.g. combination of fine and coarse exposures, double patterning or multiple exposures for printing a single feature
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
- G03F7/7055—Exposure light control in all parts of the microlithographic apparatus, e.g. pulse length control or light interruption
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/308—Chemical or electrical treatment, e.g. electrolytic etching using masks
- H01L21/3083—Chemical or electrical treatment, e.g. electrolytic etching using masks characterised by their size, orientation, disposition, behaviour, shape, in horizontal or vertical plane
- H01L21/3086—Chemical or electrical treatment, e.g. electrolytic etching using masks characterised by their size, orientation, disposition, behaviour, shape, in horizontal or vertical plane characterised by the process involved to create the mask, e.g. lift-off masks, sidewalls, or to modify the mask, e.g. pre-treatment, post-treatment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/308—Chemical or electrical treatment, e.g. electrolytic etching using masks
- H01L21/3083—Chemical or electrical treatment, e.g. electrolytic etching using masks characterised by their size, orientation, disposition, behaviour, shape, in horizontal or vertical plane
- H01L21/3088—Process specially adapted to improve the resolution of the mask
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67748—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber horizontal transfer of a single workpiece
Abstract
【解決手段】レジスト膜が形成されたウェハは、露光装置に搬送され露光処理されるQ2。その後、第2の処理システムにおいてウェハは露光後ベークされるQ3。その後、ウェハは再び露光装置に搬送され露光処理されるQ4。2回目の露光処理が終了したウェハは、第1の処理システムに搬送され再度露光後ベークされるQ5。露光処理の終了時から露光後ベークの開始時までの時間は、1回目と2回目で同じになるように制御される。
【選択図】図6
Description
10 第1の処理システム
11 第2の処理システム
94〜99、130〜133 露光後ベーク装置
120 ウェハ搬送装置
220 制御部
A 露光装置
W ウェハ
Claims (18)
- 基板の処理方法であって、
レジスト膜の形成処理と現像処理との間に行われる露光処理を複数回行い、当該各回の露光処理が終了する度に基板の加熱処理を行うことを特徴とする、基板の処理方法。 - 各回の露光処理の終了時から加熱処理の開始時までの時間は、互いに同じになるように制御されていることを特徴とする、請求項1に記載の基板の処理方法。
- 前記各回の露光処理毎に異なる露光条件を設定することを特徴とする、請求項1又は2に記載の基板の処理方法。
- 2回目以降の露光処理の露光条件は、直前の回の露光処理よりも露光量が少なくなるように設定されることを特徴とする、請求項3に記載の基板の処理方法。
- 前記各回の露光処理後の加熱処理毎に異なる加熱条件を設定することを特徴とする、請求項1〜4のいずれかに記載の基板の処理方法。
- 2回目以降の加熱処理の加熱条件は、直前の回の加熱処理よりも、加熱時間が短いか又は加熱温度が低いかの少なくともいずれかに設定されることを特徴とする、請求項5に記載の基板の処理方法。
- 前記露光処理は、基板表面の液体中に光を透過して基板を露光するものであり、
前記各回の露光処理後であって加熱処理の前に、基板を洗浄する洗浄処理を行うことを特徴とする、請求項1〜6のいずれかに記載の基板の処理方法。 - 請求項1〜7のいずれかに記載の基板の処理方法を、コンピュータに実現させるためのプログラム。
- 請求項1〜7のいずれかに記載の基板の処理方法をコンピュータに実現させるためのプログラムを記録したコンピュータ読み取り可能な記録媒体。
- 基板の処理システムであって、
基板にレジスト膜を形成するレジスト膜形成装置と、
レジスト膜が形成され、その後露光処理された基板を現像処理する現像処理装置と、
基板を加熱処理する加熱処理装置と、を有し、
レジスト膜の形成と現像処理との間に複数回の露光処理が行われ、当該各回の露光処理が終了する度に前記加熱処理装置において基板の加熱処理が行われることを特徴とする、基板の処理システム。 - 前記レジスト膜形成装置と、前記現像処理装置と、前記加熱処理装置を有する第1の処理システムと、
前記加熱処理装置を有する第2の処理システムと、を有し、
前記第1の処理システムは、露光装置の一端に接続され、前記第2の処理システムは、前記第1の処理システムの反対側の露光装置の他端に接続され、
前記第1の処理システム及び第2の処理システムは、前記露光装置に対して基板を搬送可能に構成されていることを特徴とする、請求項10に記載の基板の処理システム。 - 前記第2の処理システムには、前記露光装置と前記第2の処理システム内の加熱処理装置との間で基板の搬送を行う搬送装置が設けられていることを特徴とする、請求項11に記載の基板の処理システム。
- 前記第2の処理システムには、複数の基板を収容する収容部が設けられていることを特徴とする、請求項11又は12に記載の基板の処理システム。
- 前記第2の処理システムには、基板を洗浄する洗浄装置が設けられていることを特徴とする、請求項11〜13のいずれかに記載の基板の処理システム。
- 最終回の露光処理の後の加熱処理は、前記第1の処理システムの加熱処理装置において行われ、
最終回以外の露光処理の後の加熱処理は、前記第2の処理システムの加熱処理装置において行われることを特徴とする、請求項11〜14のいずれかに記載の基板の処理システム。 - 前記レジスト膜形成装置と前記現像処理装置を有する処理部と、
前記処理部の前記露光装置側に面し、前記処理部と露光装置との間で基板を搬送する搬送部と、を有し、
前記加熱処理装置は、前記搬送部と前記処理部にそれぞれ設けられていることを特徴とする、請求項10に記載の基板の処理システム。 - 前記搬送部には、基板を洗浄する洗浄装置が設けられていることを特徴とする、請求項16に記載の基板の処理システム。
- 最終回の露光処理の後の加熱処理は、前記処理部にある加熱処理装置において行われ、
最終回以外の露光処理の後の加熱処理は、前記搬送部にある加熱処理装置において行われていることを特徴とする、請求項16又は17に記載の基板の処理システム。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006203066A JP4965925B2 (ja) | 2006-07-26 | 2006-07-26 | 基板の処理システム |
US12/307,936 US7901149B2 (en) | 2006-07-26 | 2007-07-19 | Substrate processing method, program, computer-readable recording medium, and substrate processing system |
CN201010271367.9A CN101976646B (zh) | 2006-07-26 | 2007-07-19 | 衬底处理方法、程序、计算机可读的记录介质以及衬底处理系统 |
PCT/JP2007/064620 WO2008013211A1 (en) | 2006-07-26 | 2007-07-19 | Substrate processing method, program, computer-readable recording medium, and substrate processing system |
CN2007800281107A CN101496139B (zh) | 2006-07-26 | 2007-07-19 | 衬底处理方法 |
KR1020097001602A KR101207172B1 (ko) | 2006-07-26 | 2007-07-19 | 기판 처리 방법, 컴퓨터 판독 가능한 기록 매체, 및 기판 처리 시스템 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006203066A JP4965925B2 (ja) | 2006-07-26 | 2006-07-26 | 基板の処理システム |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2008034437A true JP2008034437A (ja) | 2008-02-14 |
JP4965925B2 JP4965925B2 (ja) | 2012-07-04 |
Family
ID=38981522
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006203066A Active JP4965925B2 (ja) | 2006-07-26 | 2006-07-26 | 基板の処理システム |
Country Status (5)
Country | Link |
---|---|
US (1) | US7901149B2 (ja) |
JP (1) | JP4965925B2 (ja) |
KR (1) | KR101207172B1 (ja) |
CN (2) | CN101976646B (ja) |
WO (1) | WO2008013211A1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2011099221A1 (ja) * | 2010-02-09 | 2011-08-18 | 東京エレクトロン株式会社 | 基板処理方法 |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4519037B2 (ja) * | 2005-08-31 | 2010-08-04 | 東京エレクトロン株式会社 | 加熱装置及び塗布、現像装置 |
JP5433290B2 (ja) * | 2009-04-20 | 2014-03-05 | 東京エレクトロン株式会社 | 基板収納方法及び制御装置 |
CN102103333B (zh) * | 2009-12-17 | 2013-08-14 | 上海微电子装备有限公司 | 一种烘烤光刻胶的方法及使用该方法的装置 |
JP6792368B2 (ja) * | 2016-07-25 | 2020-11-25 | 株式会社Screenホールディングス | 熱処理装置、基板処理装置および熱処理方法 |
KR102000013B1 (ko) * | 2017-11-10 | 2019-07-17 | 세메스 주식회사 | 기판 처리 장치 및 기판 처리 방법 |
KR102037900B1 (ko) * | 2017-11-10 | 2019-10-29 | 세메스 주식회사 | 기판 처리 장치 및 기판 처리 방법 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH10284413A (ja) * | 1997-04-10 | 1998-10-23 | Dainippon Screen Mfg Co Ltd | 基板処理装置および基板処理用露光装置 |
JPH11199830A (ja) * | 1998-01-13 | 1999-07-27 | Sony Corp | ポリイミド膜の形成方法 |
JP2002043214A (ja) * | 2000-07-26 | 2002-02-08 | Toshiba Corp | 走査型露光方法 |
JP2002057100A (ja) * | 2000-05-31 | 2002-02-22 | Canon Inc | 露光装置、コートデベロップ装置、デバイス製造システム、デバイス製造方法、半導体製造工場および露光装置の保守方法 |
JP2005223321A (ja) * | 2004-01-28 | 2005-08-18 | Asml Netherlands Bv | 2重露光による増強されたリソグラフィ分解能 |
JP2006049757A (ja) * | 2004-08-09 | 2006-02-16 | Tokyo Electron Ltd | 基板処理方法 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07147219A (ja) | 1993-11-24 | 1995-06-06 | Sony Corp | パターンの形成方法 |
JP4555437B2 (ja) | 2000-07-10 | 2010-09-29 | Ntn株式会社 | 磁気浮上型ポンプ装置 |
JP3793004B2 (ja) * | 2000-08-09 | 2006-07-05 | 東京エレクトロン株式会社 | 基板の搬送方法 |
US6461986B2 (en) | 2000-07-24 | 2002-10-08 | Tokyo Electron Limited | Substrate processing method apparatus and substrate carrying method |
US6881524B2 (en) * | 2002-11-27 | 2005-04-19 | Promos Technologies, Inc. | Photolithography method including a double exposure/double bake |
JP4343151B2 (ja) * | 2004-08-11 | 2009-10-14 | 東京エレクトロン株式会社 | 加熱プレートの温度測定方法、基板処理装置及び加熱プレートの温度測定用のコンピュータプログラム |
KR100639680B1 (ko) * | 2005-01-17 | 2006-10-31 | 삼성전자주식회사 | 반도체 소자의 미세 패턴 형성방법 |
JP4704221B2 (ja) * | 2006-01-26 | 2011-06-15 | 株式会社Sokudo | 基板処理装置および基板処理方法 |
US7767385B2 (en) * | 2006-03-09 | 2010-08-03 | International Business Machines Corporation | Method for lithography for optimizing process conditions |
-
2006
- 2006-07-26 JP JP2006203066A patent/JP4965925B2/ja active Active
-
2007
- 2007-07-19 CN CN201010271367.9A patent/CN101976646B/zh active Active
- 2007-07-19 WO PCT/JP2007/064620 patent/WO2008013211A1/en active Application Filing
- 2007-07-19 US US12/307,936 patent/US7901149B2/en not_active Expired - Fee Related
- 2007-07-19 CN CN2007800281107A patent/CN101496139B/zh active Active
- 2007-07-19 KR KR1020097001602A patent/KR101207172B1/ko active IP Right Grant
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH10284413A (ja) * | 1997-04-10 | 1998-10-23 | Dainippon Screen Mfg Co Ltd | 基板処理装置および基板処理用露光装置 |
JPH11199830A (ja) * | 1998-01-13 | 1999-07-27 | Sony Corp | ポリイミド膜の形成方法 |
JP2002057100A (ja) * | 2000-05-31 | 2002-02-22 | Canon Inc | 露光装置、コートデベロップ装置、デバイス製造システム、デバイス製造方法、半導体製造工場および露光装置の保守方法 |
JP2002043214A (ja) * | 2000-07-26 | 2002-02-08 | Toshiba Corp | 走査型露光方法 |
JP2005223321A (ja) * | 2004-01-28 | 2005-08-18 | Asml Netherlands Bv | 2重露光による増強されたリソグラフィ分解能 |
JP2006049757A (ja) * | 2004-08-09 | 2006-02-16 | Tokyo Electron Ltd | 基板処理方法 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2011099221A1 (ja) * | 2010-02-09 | 2011-08-18 | 東京エレクトロン株式会社 | 基板処理方法 |
JP2011165896A (ja) * | 2010-02-09 | 2011-08-25 | Tokyo Electron Ltd | 基板処理方法 |
Also Published As
Publication number | Publication date |
---|---|
CN101496139A (zh) | 2009-07-29 |
US20090208879A1 (en) | 2009-08-20 |
CN101496139B (zh) | 2011-07-27 |
CN101976646B (zh) | 2012-12-05 |
WO2008013211A1 (en) | 2008-01-31 |
JP4965925B2 (ja) | 2012-07-04 |
KR101207172B1 (ko) | 2012-12-03 |
KR20090046800A (ko) | 2009-05-11 |
US7901149B2 (en) | 2011-03-08 |
CN101976646A (zh) | 2011-02-16 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP4527670B2 (ja) | 加熱処理装置、加熱処理方法、制御プログラムおよびコンピュータ読取可能な記憶媒体 | |
JP4328667B2 (ja) | 基板の処理膜の表面荒れを改善する方法及び基板の処理装置 | |
JP4965925B2 (ja) | 基板の処理システム | |
TWI501338B (zh) | A heat treatment method and a recording medium and a heat treatment apparatus for recording a program for carrying out the heat treatment method | |
JP2009135169A (ja) | 基板処理システムおよび基板処理方法 | |
JP2008177471A (ja) | 基板の処理方法、塗布膜除去装置及び基板処理システム | |
JP5174098B2 (ja) | 熱処理方法及びその熱処理方法を実行させるためのプログラムを記録した記録媒体並びに熱処理装置 | |
JP4079861B2 (ja) | 基板処理装置 | |
JP2006228820A (ja) | 熱処理板の温度設定方法,熱処理板の温度設定装置,プログラム及びプログラムを記録したコンピュータ読み取り可能な記録媒体 | |
JP5017147B2 (ja) | 基板の処理方法、プログラム及びコンピュータ記憶媒体及び基板処理システム | |
JP4970882B2 (ja) | 基板の測定方法、プログラム、プログラムを記録したコンピュータ読み取り可能な記録媒体及び基板の測定システム | |
JP4917652B2 (ja) | 基板処理方法 | |
JP5258082B2 (ja) | 基板処理装置及び基板処理方法 | |
JP4954693B2 (ja) | 基板の処理方法、基板の処理システム及びプログラムを記録したコンピュータ読み取り可能な記録媒体 | |
JP4920317B2 (ja) | 基板の処理方法、プログラム、コンピュータ読み取り可能な記録媒体及び基板の処理システム | |
JP4906140B2 (ja) | 基板処理システム | |
WO2011099221A1 (ja) | 基板処理方法 | |
JP3793063B2 (ja) | 処理方法及び処理装置 | |
JP4777232B2 (ja) | 基板の処理方法、基板の処理システム及びプログラムを記憶したコンピュータ読み取り可能な記憶媒体 | |
JP2010192559A (ja) | 基板処理システム | |
JP2008300777A (ja) | 基板の処理方法、基板の処理装置及びコンピュータ読み取り可能な記憶媒体 | |
JP2007220741A (ja) | 加熱処理装置、加熱処理方法、コンピュータ読取可能な記憶媒体 | |
JP2009016653A (ja) | 基板の処理方法及びコンピュータ読み取り可能な記憶媒体 | |
JP2001230171A (ja) | 加熱処理装置及び加熱処理方法 | |
JP2010161408A (ja) | 基板処理システム |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20080910 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20110830 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20111020 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20120327 |
|
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20120330 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 4965925 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20150406 Year of fee payment: 3 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |