JP2007526496A5 - - Google Patents

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Publication number
JP2007526496A5
JP2007526496A5 JP2006517641A JP2006517641A JP2007526496A5 JP 2007526496 A5 JP2007526496 A5 JP 2007526496A5 JP 2006517641 A JP2006517641 A JP 2006517641A JP 2006517641 A JP2006517641 A JP 2006517641A JP 2007526496 A5 JP2007526496 A5 JP 2007526496A5
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JP
Japan
Prior art keywords
photoresist composition
polymer
formula
hydrocarbyl
individually
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JP2006517641A
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English (en)
Japanese (ja)
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JP2007526496A (ja
JP4725739B2 (ja
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Priority claimed from PCT/US2004/020351 external-priority patent/WO2005003198A1/en
Publication of JP2007526496A publication Critical patent/JP2007526496A/ja
Publication of JP2007526496A5 publication Critical patent/JP2007526496A5/ja
Application granted granted Critical
Publication of JP4725739B2 publication Critical patent/JP4725739B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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JP2006517641A 2003-06-26 2004-06-25 フォトレジストポリマー組成物 Expired - Lifetime JP4725739B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US48331003P 2003-06-26 2003-06-26
US60/483,310 2003-06-26
PCT/US2004/020351 WO2005003198A1 (en) 2003-06-26 2004-06-25 Photoresist polymer compositions

Publications (3)

Publication Number Publication Date
JP2007526496A JP2007526496A (ja) 2007-09-13
JP2007526496A5 true JP2007526496A5 (enExample) 2010-06-24
JP4725739B2 JP4725739B2 (ja) 2011-07-13

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006517641A Expired - Lifetime JP4725739B2 (ja) 2003-06-26 2004-06-25 フォトレジストポリマー組成物

Country Status (9)

Country Link
US (1) US7510817B2 (enExample)
EP (1) EP1641848B1 (enExample)
JP (1) JP4725739B2 (enExample)
KR (1) KR101057570B1 (enExample)
CN (1) CN100549051C (enExample)
AT (1) ATE370975T1 (enExample)
DE (1) DE602004008468T2 (enExample)
TW (1) TWI358609B (enExample)
WO (1) WO2005003198A1 (enExample)

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