JP2007525025A - Ｍｅｍｓスキャナの製造方法および装置 - Google Patents

Ｍｅｍｓスキャナの製造方法および装置 Download PDF

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Publication number
JP2007525025A
JP2007525025A JP2006552358A JP2006552358A JP2007525025A JP 2007525025 A JP2007525025 A JP 2007525025A JP 2006552358 A JP2006552358 A JP 2006552358A JP 2006552358 A JP2006552358 A JP 2006552358A JP 2007525025 A JP2007525025 A JP 2007525025A
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wafer
shapes
semiconductor
silicon wafer
manufacturing
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JP2007525025A5 (enExample
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リンデン，ケリー，ディー．
ヘルセル，マーク，ピー．
ブラウン，ディーン，アール．
スピローグ，ランダル，ビー．
デイビス，ワイアット，オー．
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マイクロビジョン，インク．
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0866—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by thermal means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/105—Scanning systems with one or more pivoting mirrors or galvano-mirrors

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Micromachines (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Pressure Sensors (AREA)
  • Facsimile Scanning Arrangements (AREA)
  • Facsimile Heads (AREA)
  • Laser Beam Printer (AREA)
JP2006552358A 2004-02-09 2005-02-09 Ｍｅｍｓスキャナの製造方法および装置 Withdrawn JP2007525025A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US54289604P 2004-02-09 2004-02-09
US57113304P 2004-05-14 2004-05-14
PCT/US2005/004068 WO2005078772A2 (en) 2004-02-09 2005-02-09 Method and apparatus for making a mems scanner

Publications (2)

Publication Number Publication Date
JP2007525025A true JP2007525025A (ja) 2007-08-30
JP2007525025A5 JP2007525025A5 (enExample) 2008-03-21

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Family Applications (4)

Application Number Title Priority Date Filing Date
JP2006552358A Withdrawn JP2007525025A (ja) 2004-02-09 2005-02-09 Ｍｅｍｓスキャナの製造方法および装置
JP2006552357A Withdrawn JP2007527551A (ja) 2004-02-09 2005-02-09 光線を走査する方法および装置
JP2006553203A Pending JP2007522529A (ja) 2004-02-09 2005-02-09 性能を改良したｍｅｍｓ走査システム
JP2006553201A Withdrawn JP2007522528A (ja) 2004-02-09 2005-02-09 高性能ｍｅｍスキャナ

Family Applications After (3)

Application Number Title Priority Date Filing Date
JP2006552357A Withdrawn JP2007527551A (ja) 2004-02-09 2005-02-09 光線を走査する方法および装置
JP2006553203A Pending JP2007522529A (ja) 2004-02-09 2005-02-09 性能を改良したｍｅｍｓ走査システム
JP2006553201A Withdrawn JP2007522528A (ja) 2004-02-09 2005-02-09 高性能ｍｅｍスキャナ

Country Status (6)

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US (3) US7482730B2 (enExample)
EP (4) EP1719011A2 (enExample)
JP (4) JP2007525025A (enExample)
KR (4) KR20070012650A (enExample)
AT (1) ATE551293T1 (enExample)
WO (4) WO2005078509A2 (enExample)

Cited By (7)

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JP2010002637A (ja) * 2008-06-19 2010-01-07 Canon Electronics Inc 光走査装置
US8472096B2 (en) 2007-11-14 2013-06-25 Canon Kabushiki Kaisha Method of manufacturing oscillator device, and optical deflector and optical instrument with oscillator device
JP2018520892A (ja) * 2015-05-18 2018-08-02 ローベルト ボツシユ ゲゼルシヤフト ミツト ベシユレンクテル ハフツングＲｏｂｅｒｔ Ｂｏｓｃｈ Ｇｍｂｈ マイクロマシン式のばねデバイス及びマイクロマシン式のばねデバイスの製造方法
KR20190106216A (ko) * 2018-03-08 2019-09-18 주식회사 에스오에스랩 전후방 측정이 가능한 라이다 스캐닝 장치
US10613224B2 (en) 2018-01-08 2020-04-07 SOS Lab co., Ltd LiDAR device
US11953626B2 (en) 2018-01-08 2024-04-09 SOS Lab co., Ltd LiDAR device
US12135393B2 (en) 2018-05-14 2024-11-05 Sos Lab Co., Ltd. LiDAR device comprising a plurality of beam steering cells for steering a laser beam

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