JP2007518276A5 - - Google Patents

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Publication number
JP2007518276A5
JP2007518276A5 JP2006549381A JP2006549381A JP2007518276A5 JP 2007518276 A5 JP2007518276 A5 JP 2007518276A5 JP 2006549381 A JP2006549381 A JP 2006549381A JP 2006549381 A JP2006549381 A JP 2006549381A JP 2007518276 A5 JP2007518276 A5 JP 2007518276A5
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JP
Japan
Prior art keywords
dielectric material
semiconductor wafer
integrated circuit
channel
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2006549381A
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English (en)
Japanese (ja)
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JP2007518276A (ja
JP5147242B2 (ja
Filing date
Publication date
Priority claimed from US10/707,713 external-priority patent/US7098544B2/en
Application filed filed Critical
Publication of JP2007518276A publication Critical patent/JP2007518276A/ja
Publication of JP2007518276A5 publication Critical patent/JP2007518276A5/ja
Application granted granted Critical
Publication of JP5147242B2 publication Critical patent/JP5147242B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2006549381A 2004-01-06 2005-01-06 低ｋ相互配線構造物用のしなやかな不動態化エッジシール Expired - Fee Related JP5147242B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US10/707,713 2004-01-06
US10/707,713 US7098544B2 (en) 2004-01-06 2004-01-06 Edge seal for integrated circuit chips
PCT/US2005/000289 WO2005067598A2 (en) 2004-01-06 2005-01-06 Compliant passivated edge seal for low-k interconnect structures

Publications (3)

Publication Number Publication Date
JP2007518276A JP2007518276A (ja) 2007-07-05
JP2007518276A5 true JP2007518276A5 (enExample) 2007-11-22
JP5147242B2 JP5147242B2 (ja) 2013-02-20

Family

ID=34710368

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006549381A Expired - Fee Related JP5147242B2 (ja) 2004-01-06 2005-01-06 低ｋ相互配線構造物用のしなやかな不動態化エッジシール

Country Status (7)

Country Link
US (2) US7098544B2 (enExample)
EP (1) EP1721334A4 (enExample)
JP (1) JP5147242B2 (enExample)
KR (1) KR100962906B1 (enExample)
CN (1) CN100552928C (enExample)
TW (1) TWI339901B (enExample)
WO (1) WO2005067598A2 (enExample)

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