JP2007501518A - 非対称の側壁スペーサの形成方法 - Google Patents
非対称の側壁スペーサの形成方法 Download PDFInfo
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- 238000000034 method Methods 0.000 title claims abstract description 71
- 125000006850 spacer group Chemical group 0.000 title claims abstract description 59
- 229920002120 photoresistant polymer Polymers 0.000 claims abstract description 72
- 238000010884 ion-beam technique Methods 0.000 claims abstract description 66
- 239000004065 semiconductor Substances 0.000 claims abstract description 33
- 238000005530 etching Methods 0.000 claims abstract description 26
- 239000002019 doping agent Substances 0.000 claims description 8
- 238000004519 manufacturing process Methods 0.000 abstract description 28
- 239000000758 substrate Substances 0.000 abstract description 20
- 230000005855 radiation Effects 0.000 abstract description 8
- 150000002500 ions Chemical class 0.000 description 20
- 230000008569 process Effects 0.000 description 12
- 230000008901 benefit Effects 0.000 description 7
- 238000013461 design Methods 0.000 description 7
- 230000015572 biosynthetic process Effects 0.000 description 6
- 238000002513 implantation Methods 0.000 description 5
- 238000000151 deposition Methods 0.000 description 3
- 239000007943 implant Substances 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 229910052732 germanium Inorganic materials 0.000 description 2
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 2
- 238000010849 ion bombardment Methods 0.000 description 2
- 230000000873 masking effect Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 150000004767 nitrides Chemical class 0.000 description 2
- 238000005457 optimization Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 229910052814 silicon oxide Inorganic materials 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- XPDWGBQVDMORPB-UHFFFAOYSA-N Fluoroform Chemical compound FC(F)F XPDWGBQVDMORPB-UHFFFAOYSA-N 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- -1 SiO 2 Chemical compound 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 229910021417 amorphous silicon Inorganic materials 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 238000013440 design planning Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000011982 device technology Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- OKZIUSOJQLYFSE-UHFFFAOYSA-N difluoroboron Chemical compound F[B]F OKZIUSOJQLYFSE-UHFFFAOYSA-N 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 230000003116 impacting effect Effects 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 229910052754 neon Inorganic materials 0.000 description 1
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 238000013439 planning Methods 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 238000003847 radiation curing Methods 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
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- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
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- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
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- H01L21/8232—Field-effect technology
- H01L21/8234—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type
- H01L21/823468—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type with a particular manufacturing method of the gate sidewall spacers, e.g. double spacers, particular spacer material or shape
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- H01L21/823425—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type with a particular manufacturing method of the source or drain structures, e.g. specific source or drain implants or silicided source or drain structures or raised source or drain structures manufacturing common source or drain regions between a plurality of conductor-insulator-semiconductor structures
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- H01L21/8238—Complementary field-effect transistors, e.g. CMOS
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- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
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- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
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- H01L29/66742—Thin film unipolar transistors
- H01L29/66772—Monocristalline silicon transistors on insulating substrates, e.g. quartz substrates
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Abstract
Description
Claims (10)
- 半導体デバイスの形成方法であって、
第1の方向に面する第1の側と、第2の方向に面する第2の側とを有する第1のゲート構造を形成するステップと、前記第1の側と前記第2の側が互いに平行であり、前記第1の方向が、前記第2の方向と実質的に反対であり、
前記第1のゲート構造の上に側壁層を形成するステップと、前記側壁層が、前記第1の側の上にある第1の側壁層部分と、前記第2の側の上にある第2の側壁層部分とを含み、
前記第1の側壁層部分をイオンドーズにさらす一方で、前記第2の側壁層部分がイオンドーズにさらされないステップとを含む、方法。 - 前記第1の方向に面する第1の側と、前記第2の方向に面する第2の側とを有する第2のゲート構造を形成するステップと、
前記第2のゲート構造の上に側壁層を形成するステップと、前記側壁層が、前記第2のゲート構造の前記第1の側の上にある第3の側壁層部分と、前記第2のゲート構造の前記第2の側の上にある第4の側壁層部分とを含み、
前記第1のゲートの前記第1の側が、イオンドーズにさらされるとき、前記第3の側壁層部分をイオンドーズから遮蔽するステップとを含む、請求項1に記載の方法。 - 前記第1の側にスペーサを形成するために、前記第1の側の上にある前記第1の側壁層部分の第1の部分を異方性エッチングするステップと、
前記第2の側にスペーサを形成するために、前記第2の側の上にある前記第2の側壁層部分の第2の部分を異方性エッチングするステップと、
前記第1の側に隣接するソースエクステンションエリアと、前記第2の側に隣接するドレインエクステンションエリアとを形成するようにドーパントを注入するステップとをさらに含み、前記ソースエクステンションエリアが、前記ドレインエクステンションエリアより広くゲート構造の下にある、請求項1に記載の方法。 - 前記第1の側に隣接してフォトレジスト構造を形成するステップをさらに含む、請求項1に記載の方法。
- 前記第2の側に隣接してフォトレジスト構造を形成するステップをさらに含む、請求項1に記載の方法。
- イオンビームの経路と、前記ゲート構造の実質的に水平な表面との間に非直交入射角を形成するように、前記ゲート構造の実質的に水平な表面を配向するステップをさらに含む、請求項1に記載の方法。
- 前記非直交入射角が、7度〜45度の範囲のものである、請求項5に記載の方法。
- 前記非直交入射角が、前記側壁層の厚さおよびフォトレジスト構造の垂直方向の寸法に基づく、請求項5に記載の方法。
- 前記イオンドーズが、1012〜1015cm−2の範囲のものである、請求項1に記載の方法。
- 第1の厚さを有する前記第1の側に隣接したスペーサと、第2の厚さを有する前記第2の側に隣接したスペーサとを形成するように、前記側壁層をエッチングするステップをさらに含む、請求項1に記載の方法。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/633,981 US6794256B1 (en) | 2003-08-04 | 2003-08-04 | Method for asymmetric spacer formation |
PCT/US2004/017708 WO2005017993A1 (en) | 2003-08-04 | 2004-06-04 | Method for asymmetric sidewall spacer formation |
Publications (2)
Publication Number | Publication Date |
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JP2007501518A true JP2007501518A (ja) | 2007-01-25 |
JP2007501518A5 JP2007501518A5 (ja) | 2009-05-28 |
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Application Number | Title | Priority Date | Filing Date |
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JP2006522548A Pending JP2007501518A (ja) | 2003-08-04 | 2004-06-04 | 非対称の側壁スペーサの形成方法 |
Country Status (8)
Country | Link |
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US (1) | US6794256B1 (ja) |
JP (1) | JP2007501518A (ja) |
KR (1) | KR101065048B1 (ja) |
CN (1) | CN100477125C (ja) |
DE (1) | DE112004001441B4 (ja) |
GB (1) | GB2421854B (ja) |
TW (1) | TWI342061B (ja) |
WO (1) | WO2005017993A1 (ja) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
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WO2008114392A1 (ja) * | 2007-03-19 | 2008-09-25 | Fujitsu Microelectronics Limited | 半導体装置及びその製造方法 |
WO2008120335A1 (ja) * | 2007-03-28 | 2008-10-09 | Fujitsu Microelectronics Limited | 半導体装置およびその製造方法 |
JP2012516556A (ja) * | 2009-01-30 | 2012-07-19 | アドバンスト・マイクロ・ディバイシズ・インコーポレイテッド | 減少させられたゲート電極ピッチを有する非対称トランジスタのための段階的なウエル注入 |
JP2012234941A (ja) * | 2011-04-28 | 2012-11-29 | Denso Corp | 半導体装置の製造方法及び半導体装置 |
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JP4867171B2 (ja) * | 2005-01-21 | 2012-02-01 | 富士電機株式会社 | 半導体装置の製造方法 |
DE102005009023B4 (de) * | 2005-02-28 | 2011-01-27 | Advanced Micro Devices, Inc., Sunnyvale | Verfahren zum Herstellen einer Gateelektrodenstruktur mit asymmetrischen Abstandselementen und Gateestruktur |
JP5170490B2 (ja) * | 2005-06-09 | 2013-03-27 | セイコーエプソン株式会社 | 半導体装置 |
US7396713B2 (en) * | 2005-10-07 | 2008-07-08 | International Business Machines Corporation | Structure and method for forming asymmetrical overlap capacitance in field effect transistors |
US20070090406A1 (en) * | 2005-10-26 | 2007-04-26 | International Business Machines Corporation | Structure and method for manufacturing high performance and low leakage field effect transistor |
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US7892928B2 (en) * | 2007-03-23 | 2011-02-22 | International Business Machines Corporation | Method of forming asymmetric spacers and methods of fabricating semiconductor device using asymmetric spacers |
KR100950473B1 (ko) * | 2007-12-28 | 2010-03-31 | 주식회사 하이닉스반도체 | 균일한 두께의 게이트스페이서막을 갖는 반도체소자의제조방법 |
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US9016236B2 (en) | 2008-08-04 | 2015-04-28 | International Business Machines Corporation | Method and apparatus for angular high density plasma chemical vapor deposition |
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Also Published As
Publication number | Publication date |
---|---|
DE112004001441B4 (de) | 2010-06-17 |
GB2421854A (en) | 2006-07-05 |
GB2421854B (en) | 2007-01-24 |
US6794256B1 (en) | 2004-09-21 |
TW200507170A (en) | 2005-02-16 |
CN1830074A (zh) | 2006-09-06 |
DE112004001441T5 (de) | 2006-06-08 |
KR20060055533A (ko) | 2006-05-23 |
CN100477125C (zh) | 2009-04-08 |
GB0604133D0 (en) | 2006-04-12 |
TWI342061B (en) | 2011-05-11 |
KR101065048B1 (ko) | 2011-09-20 |
WO2005017993A1 (en) | 2005-02-24 |
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