JP2007248082A - 荷電粒子線装置に用いられる標準試料，荷電粒子線装置、及び荷電粒子線装置に用いられる標準試料の製造方法 - Google Patents

荷電粒子線装置に用いられる標準試料，荷電粒子線装置、及び荷電粒子線装置に用いられる標準試料の製造方法 Download PDF

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JP2007248082A
JP2007248082A JP2006068471A JP2006068471A JP2007248082A JP 2007248082 A JP2007248082 A JP 2007248082A JP 2006068471 A JP2006068471 A JP 2006068471A JP 2006068471 A JP2006068471 A JP 2006068471A JP 2007248082 A JP2007248082 A JP 2007248082A
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Prior art keywords
standard sample
charged particle
particle beam
sample
magnification
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JP2006068471A
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English (en)
Japanese (ja)
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JP2007248082A5 (enExample
Inventor
Norie Yaguchi
紀恵 矢口
Takeo Ueno
武夫 上野
Yoshifumi Taniguchi
佳史 谷口
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Hitachi High Tech Corp
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Hitachi High Technologies Corp
Hitachi High Tech Corp
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Priority to JP2006068471A priority Critical patent/JP2007248082A/ja
Priority to US11/717,094 priority patent/US7622714B2/en
Publication of JP2007248082A publication Critical patent/JP2007248082A/ja
Publication of JP2007248082A5 publication Critical patent/JP2007248082A5/ja
Pending legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
    • G01N23/04—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y15/00—Nanotechnology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/261—Details
    • H01J37/263—Contrast, resolution or power of penetration
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/30—Accessories, mechanical or electrical features
    • G01N2223/303—Accessories, mechanical or electrical features calibrating, standardising
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/30—Accessories, mechanical or electrical features
    • G01N2223/303—Accessories, mechanical or electrical features calibrating, standardising
    • G01N2223/3037—Accessories, mechanical or electrical features calibrating, standardising standards (constitution)
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26—Electron or ion microscopes
    • H01J2237/282—Determination of microscope properties
    • H01J2237/2826—Calibration
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/30—Electron or ion beam tubes for processing objects
    • H01J2237/317—Processing objects on a microscale
    • H01J2237/3174—Etching microareas
    • H01J2237/31745—Etching microareas for preparing specimen to be viewed in microscopes or analyzed in microanalysers

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  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Biochemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Molecular Biology (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Sampling And Sample Adjustment (AREA)
JP2006068471A 2006-03-14 2006-03-14 荷電粒子線装置に用いられる標準試料，荷電粒子線装置、及び荷電粒子線装置に用いられる標準試料の製造方法 Pending JP2007248082A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2006068471A JP2007248082A (ja) 2006-03-14 2006-03-14 荷電粒子線装置に用いられる標準試料，荷電粒子線装置、及び荷電粒子線装置に用いられる標準試料の製造方法
US11/717,094 US7622714B2 (en) 2006-03-14 2007-03-13 Standard specimen for a charged particle beam apparatus, specimen preparation method thereof, and charged particle beam apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006068471A JP2007248082A (ja) 2006-03-14 2006-03-14 荷電粒子線装置に用いられる標準試料，荷電粒子線装置、及び荷電粒子線装置に用いられる標準試料の製造方法

Related Child Applications (1)

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JP2011185444A Division JP5560246B2 (ja) 2011-08-29 2011-08-29 荷電粒子線装置に用いられる標準試料，及び荷電粒子線装置に用いられる標準試料の製造方法

Publications (2)

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JP2007248082A true JP2007248082A (ja) 2007-09-27
JP2007248082A5 JP2007248082A5 (enExample) 2009-08-20

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Country Link
US (1) US7622714B2 (enExample)
JP (1) JP2007248082A (enExample)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012103534A1 (en) * 2011-01-28 2012-08-02 Fei Company Tem sample preparation
JP2013101791A (ja) * 2011-11-08 2013-05-23 Hitachi High-Technologies Corp 走査透過電子顕微鏡、および試料観察方法
CN103493171A (zh) * 2011-04-28 2014-01-01 株式会社日立高新技术 电子显微镜用试样保持装置以及电子显微镜装置
WO2024034155A1 (ja) * 2022-08-08 2024-02-15 株式会社日立製作所 透過電子顕微鏡に用いられる標準試料及びその製造方法、透過電子顕微鏡の調整方法、透過電子顕微鏡で得られた観察画像の解析方法
CN121114114A (zh) * 2025-11-12 2025-12-12 上海季丰电子股份有限公司 一种扫描电子显微镜的放大倍率校准方法

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4966719B2 (ja) * 2007-04-11 2012-07-04 株式会社日立ハイテクノロジーズ 校正用標準部材及びその作製方法、並びにそれを用いた電子ビーム装置
KR100945875B1 (ko) * 2007-12-26 2010-03-05 주식회사 동부하이텍 에프아이비를 이용한 티이엠 분석 방법 및 그 구조
US12259343B2 (en) * 2019-09-20 2025-03-25 The Regents Of The University Of California Systems and methods for structurally characterizing compounds
CN111474200B (zh) * 2020-04-16 2023-09-26 宸鸿科技(厦门)有限公司 制备电子元件显微结构样品的方法
CN115901827A (zh) * 2022-12-26 2023-04-04 闳康科技(厦门)有限公司 一种应用于fib加工及分析的样品结构及其制备方法

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09229629A (ja) * 1996-12-25 1997-09-05 Hitachi Ltd 試料ステージ
JPH10302703A (ja) * 1997-04-24 1998-11-13 Hitachi Ltd 倍率、傾斜角測定法
JP2000162102A (ja) * 1998-11-25 2000-06-16 Hitachi Ltd 試料作製装置および試料作製方法
JP2000338020A (ja) * 1999-06-01 2000-12-08 Seiko Instruments Inc 透過電子顕微鏡用試料作成方法
JP2001264220A (ja) * 2000-03-15 2001-09-26 Jeol Ltd 集束イオンビーム装置用標準試料
JP2004251682A (ja) * 2003-02-19 2004-09-09 Hitachi High-Technologies Corp 測長用標準部材およびその作製方法、並びにそれを用いた電子ビーム測長装置
JP2005195353A (ja) * 2003-12-26 2005-07-21 Tdk Corp 試料評価方法、評価用基板及び評価用基板形成方法
JP2006058210A (ja) * 2004-08-23 2006-03-02 Hitachi High-Technologies Corp 荷電粒子線顕微方法、荷電粒子線顕微装置、測長方法及び測長装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3488745B2 (ja) 1994-07-20 2004-01-19 独立行政法人産業技術総合研究所 寸法校正試料搭載ステ−ジ、及び寸法校正試料
JP2544588B2 (ja) 1994-07-29 1996-10-16 株式会社日立製作所 測長用校正部材及びその作製方法
JP2003279321A (ja) 2002-03-22 2003-10-02 Hitachi High-Technologies Corp 微小寸法校正用標準試料
US6750447B2 (en) * 2002-04-12 2004-06-15 Agere Systems, Inc. Calibration standard for high resolution electron microscopy
US6875982B2 (en) * 2003-08-29 2005-04-05 International Business Machines Corporation Electron microscope magnification standard providing precise calibration in the magnification range 5000X-2000,000X

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09229629A (ja) * 1996-12-25 1997-09-05 Hitachi Ltd 試料ステージ
JPH10302703A (ja) * 1997-04-24 1998-11-13 Hitachi Ltd 倍率、傾斜角測定法
JP2000162102A (ja) * 1998-11-25 2000-06-16 Hitachi Ltd 試料作製装置および試料作製方法
JP2000338020A (ja) * 1999-06-01 2000-12-08 Seiko Instruments Inc 透過電子顕微鏡用試料作成方法
JP2001264220A (ja) * 2000-03-15 2001-09-26 Jeol Ltd 集束イオンビーム装置用標準試料
JP2004251682A (ja) * 2003-02-19 2004-09-09 Hitachi High-Technologies Corp 測長用標準部材およびその作製方法、並びにそれを用いた電子ビーム測長装置
JP2005195353A (ja) * 2003-12-26 2005-07-21 Tdk Corp 試料評価方法、評価用基板及び評価用基板形成方法
JP2006058210A (ja) * 2004-08-23 2006-03-02 Hitachi High-Technologies Corp 荷電粒子線顕微方法、荷電粒子線顕微装置、測長方法及び測長装置

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012103534A1 (en) * 2011-01-28 2012-08-02 Fei Company Tem sample preparation
CN103403520A (zh) * 2011-01-28 2013-11-20 Fei公司 Tem样品制备
US9177760B2 (en) 2011-01-28 2015-11-03 Fei Company TEM sample preparation
CN103403520B (zh) * 2011-01-28 2015-12-23 Fei公司 Tem样品制备
US9378925B2 (en) 2011-01-28 2016-06-28 Fei Company TEM sample preparation
CN103493171A (zh) * 2011-04-28 2014-01-01 株式会社日立高新技术 电子显微镜用试样保持装置以及电子显微镜装置
CN103493171B (zh) * 2011-04-28 2016-02-17 株式会社日立高新技术 电子显微镜用试样保持装置以及电子显微镜装置
JP2013101791A (ja) * 2011-11-08 2013-05-23 Hitachi High-Technologies Corp 走査透過電子顕微鏡、および試料観察方法
WO2024034155A1 (ja) * 2022-08-08 2024-02-15 株式会社日立製作所 透過電子顕微鏡に用いられる標準試料及びその製造方法、透過電子顕微鏡の調整方法、透過電子顕微鏡で得られた観察画像の解析方法
CN121114114A (zh) * 2025-11-12 2025-12-12 上海季丰电子股份有限公司 一种扫描电子显微镜的放大倍率校准方法

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