JP2007227912A - リッジ構造を有する半導体レーザダイオード - Google Patents
リッジ構造を有する半導体レーザダイオード Download PDFInfo
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- JP2007227912A JP2007227912A JP2007025821A JP2007025821A JP2007227912A JP 2007227912 A JP2007227912 A JP 2007227912A JP 2007025821 A JP2007025821 A JP 2007025821A JP 2007025821 A JP2007025821 A JP 2007025821A JP 2007227912 A JP2007227912 A JP 2007227912A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/20—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers
- H01S5/22—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers having a ridge or stripe structure
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/04—Processes or apparatus for excitation, e.g. pumping, e.g. by electron beams
- H01S5/042—Electrical excitation ; Circuits therefor
- H01S5/0425—Electrodes, e.g. characterised by the structure
- H01S5/04256—Electrodes, e.g. characterised by the structure characterised by the configuration
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/30—Structure or shape of the active region; Materials used for the active region
- H01S5/34—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers
- H01S5/343—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser
- H01S5/34333—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser with a well layer based on Ga(In)N or Ga(In)P, e.g. blue laser
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/04—Processes or apparatus for excitation, e.g. pumping, e.g. by electron beams
- H01S5/042—Electrical excitation ; Circuits therefor
- H01S5/0425—Electrodes, e.g. characterised by the structure
- H01S5/04256—Electrodes, e.g. characterised by the structure characterised by the configuration
- H01S5/04257—Electrodes, e.g. characterised by the structure characterised by the configuration having positive and negative electrodes on the same side of the substrate
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- Optics & Photonics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
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- Life Sciences & Earth Sciences (AREA)
- Semiconductor Lasers (AREA)
Abstract
【解決手段】基板20上に順次に形成された第1半導体層、活性層24、第2半導体層、及び電極27を備える半導体レーザダイオードであって、第2半導体層は、リッジ構造を有し、電極27は、第2半導体層のリッジ構造上にリッジ幅W1よりも狭い幅W2を有するように形成されている。
【選択図】図4
Description
21 n型半導体層、
22 n型クラッド層、
23 n型光ガイド層、
24 活性層、
25 p型光ガイド層、
26 p型クラッド層、
27 p型電極、
29 n型電極、
W1 リッジ幅、
W2 p型電極の幅。
Claims (13)
- 基板上に順次に形成された第1半導体層、活性層、第2半導体層、及び電極を備える半導体レーザダイオードにおいて、
前記第2半導体層は、リッジ構造を有し、
前記電極は、前記第2半導体層のリッジ構造上にリッジの幅よりも狭い幅を有するように形成されたことを特徴とする半導体レーザダイオード。 - 前記電極の幅の中心と前記リッジの幅の中心とは相互に一致しないことを特徴とする請求項1に記載の半導体レーザダイオード。
- 前記電極は、半導体レーザダイオード内でのキャリアの移動経路から遠い前記リッジの一側に偏って形成されたことを特徴とする請求項2に記載の半導体レーザダイオード。
- 前記リッジは、3μm以上の幅を有することを特徴とする請求項3に記載の半導体レーザダイオード。
- 前記電極の幅は、前記リッジ幅の50〜80%の範囲であることを特徴とする請求項3に記載の半導体レーザダイオード。
- 前記リッジの幅の方向に、前記リッジの一側端部とそれに近接した前記電極の端部との間隔が、前記リッジ幅の0〜10%の範囲であることを特徴とする請求項5に記載の半導体レーザダイオード。
- 前記リッジは、3μm以上の幅を有することを特徴とする請求項1に記載の半導体レーザダイオード。
- 前記電極の幅は、前記リッジ幅の50〜80%の範囲であることを特徴とする請求項1に記載の半導体レーザダイオード。
- 前記リッジの幅方向に、前記リッジの一側端部とそれに近接した前記電極の端部との間隔が、前記リッジ幅の0〜10%の範囲であることを特徴とする請求項8に記載の半導体レーザダイオード。
- 前記第1半導体層はn型半導体層であり、前記第2半導体層はp型半導体層であり、前記電極はp型電極であることを特徴とする請求項1〜請求項9のうちのいずれか1項に記載の半導体レーザダイオード。
- 前記第1半導体層はn型クラッド層を備え、前記第2半導体層はp型クラッド層を備え、前記p型クラッド層はリッジ構造に形成されたことを特徴とする請求項10に記載の半導体レーザダイオード。
- 前記第1半導体層はn型光ガイド層をさらに備え、前記第2半導体層はp型光ガイド層をさらに備えることを特徴とする請求項10に記載の半導体レーザダイオード。
- 前記第1半導体層、活性層、及び第2半導体層は、GaN系物質から形成されたことを特徴とする請求項10に記載の半導体レーザダイオード。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020060016865A KR101274206B1 (ko) | 2006-02-21 | 2006-02-21 | 리지 구조를 가지는 반도체 레이저 다이오드 |
KR10-2006-0016865 | 2006-02-21 |
Publications (2)
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JP2007227912A true JP2007227912A (ja) | 2007-09-06 |
JP5210526B2 JP5210526B2 (ja) | 2013-06-12 |
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Application Number | Title | Priority Date | Filing Date |
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JP2007025821A Expired - Fee Related JP5210526B2 (ja) | 2006-02-21 | 2007-02-05 | リッジ構造を有する半導体レーザダイオード |
Country Status (4)
Country | Link |
---|---|
US (1) | US7693200B2 (ja) |
JP (1) | JP5210526B2 (ja) |
KR (1) | KR101274206B1 (ja) |
CN (1) | CN101026288B (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2014036165A (ja) * | 2012-08-09 | 2014-02-24 | Shinko Electric Ind Co Ltd | 半導体装置 |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4660400B2 (ja) * | 2006-03-14 | 2011-03-30 | シャープ株式会社 | 窒化物半導体レーザ素子の製造方法 |
US9343870B2 (en) * | 2014-09-30 | 2016-05-17 | Applied Optoelectronics, Inc. | Semiconductor laser diode with integrated heating region |
JP2021170637A (ja) * | 2020-04-14 | 2021-10-28 | 旭化成株式会社 | 紫外レーザダイオードの製造方法および紫外レーザダイオード |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
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JPH0927636A (ja) * | 1995-07-12 | 1997-01-28 | Toshiba Corp | 化合物半導体装置及び化合物半導体発光装置 |
JP2002124702A (ja) * | 2000-10-18 | 2002-04-26 | Sharp Corp | 窒化ガリウム系半導体発光素子 |
JP2002232076A (ja) * | 2001-01-31 | 2002-08-16 | Nichia Chem Ind Ltd | 窒化ガリウム系化合物半導体レーザ |
JP2002246679A (ja) * | 2001-02-14 | 2002-08-30 | Sony Corp | 半導体レーザ素子およびその製造方法 |
JP2003101148A (ja) * | 1998-09-17 | 2003-04-04 | Matsushita Electric Ind Co Ltd | 窒化物半導体素子の製造方法 |
JP2003115608A (ja) * | 2002-07-26 | 2003-04-18 | Matsushita Electric Ind Co Ltd | 窒化物半導体素子の製造方法 |
JP2003234502A (ja) * | 2002-02-07 | 2003-08-22 | Sanyo Electric Co Ltd | 半導体の形成方法および半導体素子 |
JP2004228122A (ja) * | 2003-01-20 | 2004-08-12 | Sony Corp | 発光素子及びその作製方法 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
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JPH0548210A (ja) * | 1991-08-09 | 1993-02-26 | Mitsubishi Electric Corp | 半導体レーザ装置 |
KR100259490B1 (ko) * | 1995-04-28 | 2000-06-15 | 윤종용 | 광검출기 일체형 표면광 레이저와 이를 채용한 광픽업 장치 |
KR0155513B1 (ko) * | 1995-11-21 | 1998-12-01 | 양승택 | 고출력 레이저 다이오드 |
WO1998039827A1 (fr) * | 1997-03-07 | 1998-09-11 | Sharp Kabushiki Kaisha | Element electroluminescent semi-conducteur a base de nitrure de gallium muni d'une zone active presentant une structure de multiplexage a puits quantique et un dispostif semi-conducteur a sources de lumiere utilisant le laser |
JP3813472B2 (ja) * | 2000-07-10 | 2006-08-23 | 三洋電機株式会社 | 窒化物系半導体発光素子 |
KR100397609B1 (ko) * | 2001-02-16 | 2003-09-13 | 삼성전기주식회사 | 캐리어 유입 경로의 폭을 임의로 제어할 수 있는 반도체레이저 다이오드 |
JP2003243773A (ja) * | 2003-03-04 | 2003-08-29 | Sony Corp | 半導体発光素子の製造方法および半導体発光素子 |
-
2006
- 2006-02-21 KR KR1020060016865A patent/KR101274206B1/ko active IP Right Grant
- 2006-12-04 CN CN2006101637811A patent/CN101026288B/zh not_active Expired - Fee Related
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2007
- 2007-01-25 US US11/657,672 patent/US7693200B2/en not_active Expired - Fee Related
- 2007-02-05 JP JP2007025821A patent/JP5210526B2/ja not_active Expired - Fee Related
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
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JPH0927636A (ja) * | 1995-07-12 | 1997-01-28 | Toshiba Corp | 化合物半導体装置及び化合物半導体発光装置 |
JP2003101148A (ja) * | 1998-09-17 | 2003-04-04 | Matsushita Electric Ind Co Ltd | 窒化物半導体素子の製造方法 |
JP2002124702A (ja) * | 2000-10-18 | 2002-04-26 | Sharp Corp | 窒化ガリウム系半導体発光素子 |
JP2002232076A (ja) * | 2001-01-31 | 2002-08-16 | Nichia Chem Ind Ltd | 窒化ガリウム系化合物半導体レーザ |
JP2002246679A (ja) * | 2001-02-14 | 2002-08-30 | Sony Corp | 半導体レーザ素子およびその製造方法 |
JP2003234502A (ja) * | 2002-02-07 | 2003-08-22 | Sanyo Electric Co Ltd | 半導体の形成方法および半導体素子 |
JP2003115608A (ja) * | 2002-07-26 | 2003-04-18 | Matsushita Electric Ind Co Ltd | 窒化物半導体素子の製造方法 |
JP2004228122A (ja) * | 2003-01-20 | 2004-08-12 | Sony Corp | 発光素子及びその作製方法 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2014036165A (ja) * | 2012-08-09 | 2014-02-24 | Shinko Electric Ind Co Ltd | 半導体装置 |
Also Published As
Publication number | Publication date |
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US7693200B2 (en) | 2010-04-06 |
KR20070084725A (ko) | 2007-08-27 |
KR101274206B1 (ko) | 2013-06-14 |
US20070195851A1 (en) | 2007-08-23 |
CN101026288B (zh) | 2012-08-22 |
CN101026288A (zh) | 2007-08-29 |
JP5210526B2 (ja) | 2013-06-12 |
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