JP2007109632A5 - - Google Patents

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Publication number
JP2007109632A5
JP2007109632A5 JP2006210142A JP2006210142A JP2007109632A5 JP 2007109632 A5 JP2007109632 A5 JP 2007109632A5 JP 2006210142 A JP2006210142 A JP 2006210142A JP 2006210142 A JP2006210142 A JP 2006210142A JP 2007109632 A5 JP2007109632 A5 JP 2007109632A5
Authority
JP
Japan
Prior art keywords
nanotubes
conductive
opening
top surface
insulating layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2006210142A
Other languages
English (en)
Japanese (ja)
Other versions
JP2007109632A (ja
JP4953722B2 (ja
Filing date
Publication date
Priority claimed from US11/161,181 external-priority patent/US7629192B2/en
Application filed filed Critical
Publication of JP2007109632A publication Critical patent/JP2007109632A/ja
Publication of JP2007109632A5 publication Critical patent/JP2007109632A5/ja
Application granted granted Critical
Publication of JP4953722B2 publication Critical patent/JP4953722B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2006210142A 2005-10-13 2006-08-01 受動電気検査可能な、加速度および電圧測定装置 Expired - Fee Related JP4953722B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/161,181 US7629192B2 (en) 2005-10-13 2005-10-13 Passive electrically testable acceleration and voltage measurement devices
US11/161181 2005-10-13

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2012016866A Division JP5623440B2 (ja) 2005-10-13 2012-01-30 加速度および電圧測定装置、並びに加速度および電圧測定を製造する方法

Publications (3)

Publication Number Publication Date
JP2007109632A JP2007109632A (ja) 2007-04-26
JP2007109632A5 true JP2007109632A5 (enExample) 2008-12-04
JP4953722B2 JP4953722B2 (ja) 2012-06-13

Family

ID=37947379

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2006210142A Expired - Fee Related JP4953722B2 (ja) 2005-10-13 2006-08-01 受動電気検査可能な、加速度および電圧測定装置
JP2012016866A Expired - Fee Related JP5623440B2 (ja) 2005-10-13 2012-01-30 加速度および電圧測定装置、並びに加速度および電圧測定を製造する方法

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2012016866A Expired - Fee Related JP5623440B2 (ja) 2005-10-13 2012-01-30 加速度および電圧測定装置、並びに加速度および電圧測定を製造する方法

Country Status (4)

Country Link
US (2) US7629192B2 (enExample)
JP (2) JP4953722B2 (enExample)
CN (1) CN100485951C (enExample)
TW (1) TW200729517A (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010199429A (ja) * 2009-02-26 2010-09-09 Fujifilm Corp プラズマエッチング方法及びプラズマエッチング装置並びに液体吐出ヘッドの製造方法
US8350360B1 (en) 2009-08-28 2013-01-08 Lockheed Martin Corporation Four-terminal carbon nanotube capacitors
US8405189B1 (en) * 2010-02-08 2013-03-26 Lockheed Martin Corporation Carbon nanotube (CNT) capacitors and devices integrated with CNT capacitors
FI20116082L (fi) * 2011-11-03 2013-05-04 Marko Pudas Anturi
JP6294083B2 (ja) * 2014-01-09 2018-03-14 セイコーインスツル株式会社 電子機器

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JPH05101740A (ja) * 1991-10-03 1993-04-23 Polytec Design:Kk マツト型スイツチ
JP3448856B2 (ja) * 1993-12-28 2003-09-22 マツダ株式会社 ロボットハンドの制御装置
US6445006B1 (en) * 1995-12-20 2002-09-03 Advanced Technology Materials, Inc. Microelectronic and microelectromechanical devices comprising carbon nanotube components, and methods of making same
JP3543470B2 (ja) * 1996-02-08 2004-07-14 日産自動車株式会社 マイクロマシンの梁構造及びその製造方法
EP0881651A1 (en) * 1997-05-30 1998-12-02 Hyundai Motor Company Threshold microswitch and a manufacturing method thereof
US6130464A (en) * 1997-09-08 2000-10-10 Roxburgh Ltd. Latching microaccelerometer
US6058778A (en) * 1997-10-24 2000-05-09 Stmicroelectronics, Inc. Integrated sensor having plurality of released beams for sensing acceleration
JP3421574B2 (ja) * 1998-05-21 2003-06-30 株式会社東芝 半導体装置
WO1999063559A1 (en) * 1998-06-04 1999-12-09 Cavendish Kinetics Limited Micro-mechanical elements
JP2000155126A (ja) * 1998-11-19 2000-06-06 Toyota Central Res & Dev Lab Inc 加速度センサ
JP2001091441A (ja) * 1999-07-16 2001-04-06 Japan Science & Technology Corp ナノメートルオーダの機械振動子、その製造方法及びそれを用いた測定装置
JP2001208766A (ja) * 2000-01-28 2001-08-03 Toyota Central Res & Dev Lab Inc 加速度検出装置
JP2001337108A (ja) * 2000-05-29 2001-12-07 Tokai Rika Co Ltd 加速度スイッチ
JP3907431B2 (ja) * 2001-06-21 2007-04-18 株式会社デンソー 感圧センサ用抵抗体およびそれを用いた感圧センサ
US6835591B2 (en) * 2001-07-25 2004-12-28 Nantero, Inc. Methods of nanotube films and articles
US7259410B2 (en) * 2001-07-25 2007-08-21 Nantero, Inc. Devices having horizontally-disposed nanofabric articles and methods of making the same
JP4628612B2 (ja) * 2001-09-10 2011-02-09 株式会社ワコー 可変抵抗要素を用いた力検出装置
JP4231228B2 (ja) * 2002-01-21 2009-02-25 株式会社リコー マイクロマシーン
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US7429495B2 (en) * 2002-08-07 2008-09-30 Chang-Feng Wan System and method of fabricating micro cavities
US6912902B2 (en) * 2003-03-26 2005-07-05 Honeywell International Inc. Bending beam accelerometer with differential capacitive pickoff
US7199498B2 (en) * 2003-06-02 2007-04-03 Ambient Systems, Inc. Electrical assemblies using molecular-scale electrically conductive and mechanically flexible beams and methods for application of same
US6982903B2 (en) * 2003-06-09 2006-01-03 Nantero, Inc. Field effect devices having a source controlled via a nanotube switching element
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JP4593239B2 (ja) * 2003-11-19 2010-12-08 パナソニック株式会社 電気機械フィルタ
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