JP2012093194A5 - - Google Patents
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- Publication number
- JP2012093194A5 JP2012093194A5 JP2010240069A JP2010240069A JP2012093194A5 JP 2012093194 A5 JP2012093194 A5 JP 2012093194A5 JP 2010240069 A JP2010240069 A JP 2010240069A JP 2010240069 A JP2010240069 A JP 2010240069A JP 2012093194 A5 JP2012093194 A5 JP 2012093194A5
- Authority
- JP
- Japan
- Prior art keywords
- pressure control
- control plate
- wiring board
- needle pressure
- tip portion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000523 sample Substances 0.000 claims description 8
- 230000005489 elastic deformation Effects 0.000 claims description 2
- 239000013013 elastic material Substances 0.000 claims description 2
- 230000000903 blocking effect Effects 0.000 claims 1
- 239000000758 substrate Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010240069A JP5685413B2 (ja) | 2010-10-26 | 2010-10-26 | プローブカード |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010240069A JP5685413B2 (ja) | 2010-10-26 | 2010-10-26 | プローブカード |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2012093194A JP2012093194A (ja) | 2012-05-17 |
| JP2012093194A5 true JP2012093194A5 (enExample) | 2013-10-17 |
| JP5685413B2 JP5685413B2 (ja) | 2015-03-18 |
Family
ID=46386685
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2010240069A Expired - Fee Related JP5685413B2 (ja) | 2010-10-26 | 2010-10-26 | プローブカード |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5685413B2 (enExample) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6110117B2 (ja) * | 2012-11-29 | 2017-04-05 | 株式会社日本マイクロニクス | プローブ組立体及びプローブ基板 |
| JP6889672B2 (ja) | 2018-02-19 | 2021-06-18 | 日本特殊陶業株式会社 | 検査装置用配線基板 |
| KR102339327B1 (ko) * | 2019-10-28 | 2021-12-15 | 주식회사 나노엑스 | 전기 소자 검사 장치용 프로브 헤드의 제조 방법 |
| KR102271347B1 (ko) * | 2019-10-28 | 2021-06-30 | 주식회사 나노엑스 | 전기 소자 검사 장치용 프로브 헤드 |
| KR102261798B1 (ko) * | 2020-04-03 | 2021-06-07 | (주)화이컴 | 프로브 카드 제조용 지그, 이를 포함하는 프로브 정렬 시스템 및 이를 이용하여 제조된 프로브 카드 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4486248B2 (ja) * | 1999-12-28 | 2010-06-23 | 株式会社日本マイクロニクス | プローブカード及びその製造方法 |
| JP4480258B2 (ja) * | 2000-03-29 | 2010-06-16 | 株式会社日本マイクロニクス | 半導体デバイス検査装置における電気的接触装置 |
| JP3587301B2 (ja) * | 2001-06-20 | 2004-11-10 | 株式会社エンプラス | 電気部品用ソケット |
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2010
- 2010-10-26 JP JP2010240069A patent/JP5685413B2/ja not_active Expired - Fee Related