JP2011040385A5 - - Google Patents

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Publication number
JP2011040385A5
JP2011040385A5 JP2010178239A JP2010178239A JP2011040385A5 JP 2011040385 A5 JP2011040385 A5 JP 2011040385A5 JP 2010178239 A JP2010178239 A JP 2010178239A JP 2010178239 A JP2010178239 A JP 2010178239A JP 2011040385 A5 JP2011040385 A5 JP 2011040385A5
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JP
Japan
Prior art keywords
contact
conductor element
contact position
conductor
disposed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2010178239A
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English (en)
Japanese (ja)
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JP2011040385A (ja
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Publication date
Priority claimed from US12/541,321 external-priority patent/US7928333B2/en
Application filed filed Critical
Publication of JP2011040385A publication Critical patent/JP2011040385A/ja
Publication of JP2011040385A5 publication Critical patent/JP2011040385A5/ja
Pending legal-status Critical Current

Links

JP2010178239A 2009-08-14 2010-08-09 スイッチ構造 Pending JP2011040385A (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US12/541,321 US7928333B2 (en) 2009-08-14 2009-08-14 Switch structures

Publications (2)

Publication Number Publication Date
JP2011040385A JP2011040385A (ja) 2011-02-24
JP2011040385A5 true JP2011040385A5 (enExample) 2013-09-12

Family

ID=43034285

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010178239A Pending JP2011040385A (ja) 2009-08-14 2010-08-09 スイッチ構造

Country Status (5)

Country Link
US (1) US7928333B2 (enExample)
EP (1) EP2315227A1 (enExample)
JP (1) JP2011040385A (enExample)
KR (1) KR101766482B1 (enExample)
CN (1) CN102176391B (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8779886B2 (en) * 2009-11-30 2014-07-15 General Electric Company Switch structures
US9829550B2 (en) 2012-12-27 2017-11-28 General Electric Company Multi-nuclear receiving coils for magnetic resonance imaging (MRI)
JP2016519831A (ja) * 2013-03-14 2016-07-07 インテル・コーポレーション ナノワイヤベースのメカニカルスイッチングデバイス
CN103943420B (zh) * 2014-04-15 2017-06-23 清华大学 Mems继电器、悬臂梁开关及其形成方法
CN104064407B (zh) * 2014-06-12 2016-04-20 清华大学 微机电系统开关
FR3027448B1 (fr) * 2014-10-21 2016-10-28 Airmems Commutateur microelectromecanique robuste
US9362608B1 (en) 2014-12-03 2016-06-07 General Electric Company Multichannel relay assembly with in line MEMS switches
GB2564434B (en) 2017-07-10 2020-08-26 Ge Aviat Systems Ltd Power distribution switch for a power distribution system

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4264798A (en) 1976-01-12 1981-04-28 Graf Ronald E Electrostatic switch
JP2713801B2 (ja) * 1990-06-26 1998-02-16 松下電工株式会社 静電リレーおよびその製造方法
JPH052972A (ja) * 1991-06-21 1993-01-08 Matsushita Electric Works Ltd 静電リレー
US5258591A (en) * 1991-10-18 1993-11-02 Westinghouse Electric Corp. Low inductance cantilever switch
CN2303373Y (zh) * 1997-08-08 1999-01-06 北京东方电子集团股份有限公司 一种真空开关管
US5929411A (en) * 1997-10-22 1999-07-27 Eaton Corporation Vapor shield for vacuum interrupters
US6441405B1 (en) 1998-06-04 2002-08-27 Cavendish Kinetics Limited Micro-mechanical elements
JP2000173375A (ja) * 1998-12-07 2000-06-23 Omron Corp マイクロリレー用接点構造
CA2323189A1 (en) * 1999-10-15 2001-04-15 Cristian A. Bolle Dual motion electrostatic actuator design for mems micro-relay
US6731492B2 (en) * 2001-09-07 2004-05-04 Mcnc Research And Development Institute Overdrive structures for flexible electrostatic switch
JP2003242850A (ja) 2002-02-20 2003-08-29 Omron Corp 電気開閉器用接点およびその製造方法並びに電気開閉器
JP4212046B2 (ja) * 2003-03-20 2009-01-21 株式会社リコー 指向性可変アンテナおよび該アンテナを用いた電子機器、ならびに該アンテナを用いたアンテナ指向性制御方法
JP4643316B2 (ja) * 2005-03-11 2011-03-02 株式会社東芝 マイクロマシンスイッチ及びその駆動方法
US8628055B2 (en) * 2005-07-27 2014-01-14 The Board Of Trustees Of The University Of Illinois Bi-direction rapid action electrostatically actuated microvalve
US7471439B2 (en) * 2005-11-23 2008-12-30 Miradia, Inc. Process of forming a micromechanical system containing an anti-stiction gas-phase lubricant
KR100734884B1 (ko) 2006-07-11 2007-07-03 한국전자통신연구원 Ｉｅｅｅ ８０２．１６／와이브로 망상의 네이버 탐색프로토콜 메시지 전송 방법
US20080190748A1 (en) * 2007-02-13 2008-08-14 Stephen Daley Arthur Power overlay structure for mems devices and method for making power overlay structure for mems devices
JP2009009884A (ja) * 2007-06-29 2009-01-15 Mitsubishi Electric Corp Ｍｅｍｓスイッチ及びその製造方法
CN101086933A (zh) * 2007-07-17 2007-12-12 北京京东方真空电器有限责任公司 真空开关管触头和真空开关管
US20100096678A1 (en) * 2008-10-20 2010-04-22 University Of Dayton Nanostructured barium strontium titanate (bst) thin-film varactors on sapphire
US8054147B2 (en) * 2009-04-01 2011-11-08 General Electric Company High voltage switch and method of making

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