CN100485951C - 可电测加速度和电压的无源测量器件及其制造方法 - Google Patents

可电测加速度和电压的无源测量器件及其制造方法 Download PDF

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Publication number
CN100485951C
CN100485951C CNB2006101077608A CN200610107760A CN100485951C CN 100485951 C CN100485951 C CN 100485951C CN B2006101077608 A CNB2006101077608 A CN B2006101077608A CN 200610107760 A CN200610107760 A CN 200610107760A CN 100485951 C CN100485951 C CN 100485951C
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CN
China
Prior art keywords
nanotubes
top surface
conductive
conductive plate
insulating layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CNB2006101077608A
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English (en)
Chinese (zh)
Other versions
CN1949528A (zh
Inventor
D·V·霍拉克
C·W·柯布格尔三世
古川俊治
S·J·霍尔梅斯
M·C·哈基
L·M·P·帕斯特尔
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Core Usa Second LLC
GlobalFoundries Inc
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International Business Machines Corp
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Publication date
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Publication of CN1949528A publication Critical patent/CN1949528A/zh
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Publication of CN100485951C publication Critical patent/CN100485951C/zh
Expired - Fee Related legal-status Critical Current
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y15/00—Nanotechnology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/04—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses for indicating maximum value
    • G01P15/06—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses for indicating maximum value using members subjected to a permanent deformation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0891—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values with indication of predetermined acceleration values
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/135—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by making use of contacts which are actuated by a movable inertial mass
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0094—Switches making use of nanoelectromechanical systems [NEMS]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H35/00—Switches operated by change of a physical condition
    • H01H35/14—Switches operated by change of acceleration, e.g. by shock or vibration, inertia switch

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Nanotechnology (AREA)
  • Molecular Biology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Switches Operated By Changes In Physical Conditions (AREA)
  • Micromachines (AREA)
  • Contacts (AREA)
  • Measurement Of Current Or Voltage (AREA)
  • Carbon And Carbon Compounds (AREA)
  • Measuring Instrument Details And Bridges, And Automatic Balancing Devices (AREA)
  • Switches That Are Operated By Magnetic Or Electric Fields (AREA)
CNB2006101077608A 2005-10-13 2006-07-25 可电测加速度和电压的无源测量器件及其制造方法 Expired - Fee Related CN100485951C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/161,181 US7629192B2 (en) 2005-10-13 2005-10-13 Passive electrically testable acceleration and voltage measurement devices
US11/161,181 2005-10-13

Publications (2)

Publication Number Publication Date
CN1949528A CN1949528A (zh) 2007-04-18
CN100485951C true CN100485951C (zh) 2009-05-06

Family

ID=37947379

Family Applications (1)

Application Number Title Priority Date Filing Date
CNB2006101077608A Expired - Fee Related CN100485951C (zh) 2005-10-13 2006-07-25 可电测加速度和电压的无源测量器件及其制造方法

Country Status (4)

Country Link
US (2) US7629192B2 (enExample)
JP (2) JP4953722B2 (enExample)
CN (1) CN100485951C (enExample)
TW (1) TW200729517A (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010199429A (ja) * 2009-02-26 2010-09-09 Fujifilm Corp プラズマエッチング方法及びプラズマエッチング装置並びに液体吐出ヘッドの製造方法
US8350360B1 (en) 2009-08-28 2013-01-08 Lockheed Martin Corporation Four-terminal carbon nanotube capacitors
US8405189B1 (en) * 2010-02-08 2013-03-26 Lockheed Martin Corporation Carbon nanotube (CNT) capacitors and devices integrated with CNT capacitors
FI20116082L (fi) * 2011-11-03 2013-05-04 Marko Pudas Anturi
JP6294083B2 (ja) * 2014-01-09 2018-03-14 セイコーインスツル株式会社 電子機器

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JPH05101740A (ja) * 1991-10-03 1993-04-23 Polytec Design:Kk マツト型スイツチ
JP3448856B2 (ja) * 1993-12-28 2003-09-22 マツダ株式会社 ロボットハンドの制御装置
US6445006B1 (en) * 1995-12-20 2002-09-03 Advanced Technology Materials, Inc. Microelectronic and microelectromechanical devices comprising carbon nanotube components, and methods of making same
JP3543470B2 (ja) * 1996-02-08 2004-07-14 日産自動車株式会社 マイクロマシンの梁構造及びその製造方法
EP0881651A1 (en) * 1997-05-30 1998-12-02 Hyundai Motor Company Threshold microswitch and a manufacturing method thereof
US6130464A (en) * 1997-09-08 2000-10-10 Roxburgh Ltd. Latching microaccelerometer
US6058778A (en) * 1997-10-24 2000-05-09 Stmicroelectronics, Inc. Integrated sensor having plurality of released beams for sensing acceleration
JP3421574B2 (ja) * 1998-05-21 2003-06-30 株式会社東芝 半導体装置
WO1999063559A1 (en) * 1998-06-04 1999-12-09 Cavendish Kinetics Limited Micro-mechanical elements
JP2000155126A (ja) * 1998-11-19 2000-06-06 Toyota Central Res & Dev Lab Inc 加速度センサ
JP2001091441A (ja) * 1999-07-16 2001-04-06 Japan Science & Technology Corp ナノメートルオーダの機械振動子、その製造方法及びそれを用いた測定装置
JP2001208766A (ja) * 2000-01-28 2001-08-03 Toyota Central Res & Dev Lab Inc 加速度検出装置
JP2001337108A (ja) * 2000-05-29 2001-12-07 Tokai Rika Co Ltd 加速度スイッチ
JP3907431B2 (ja) * 2001-06-21 2007-04-18 株式会社デンソー 感圧センサ用抵抗体およびそれを用いた感圧センサ
US6835591B2 (en) * 2001-07-25 2004-12-28 Nantero, Inc. Methods of nanotube films and articles
US7259410B2 (en) * 2001-07-25 2007-08-21 Nantero, Inc. Devices having horizontally-disposed nanofabric articles and methods of making the same
JP4628612B2 (ja) * 2001-09-10 2011-02-09 株式会社ワコー 可変抵抗要素を用いた力検出装置
JP4231228B2 (ja) * 2002-01-21 2009-02-25 株式会社リコー マイクロマシーン
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Also Published As

Publication number Publication date
US20080258246A1 (en) 2008-10-23
US20070085156A1 (en) 2007-04-19
US7629192B2 (en) 2009-12-08
JP2007109632A (ja) 2007-04-26
JP5623440B2 (ja) 2014-11-12
JP2012145582A (ja) 2012-08-02
CN1949528A (zh) 2007-04-18
TW200729517A (en) 2007-08-01
US7898045B2 (en) 2011-03-01
JP4953722B2 (ja) 2012-06-13

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Patentee after: Core USA second LLC

Address before: American New York

Patentee before: International Business Machines Corp.

Effective date of registration: 20171109

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