JP4953722B2 - 受動電気検査可能な、加速度および電圧測定装置 - Google Patents
受動電気検査可能な、加速度および電圧測定装置 Download PDFInfo
- Publication number
- JP4953722B2 JP4953722B2 JP2006210142A JP2006210142A JP4953722B2 JP 4953722 B2 JP4953722 B2 JP 4953722B2 JP 2006210142 A JP2006210142 A JP 2006210142A JP 2006210142 A JP2006210142 A JP 2006210142A JP 4953722 B2 JP4953722 B2 JP 4953722B2
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- Prior art keywords
- conductive
- nanotubes
- opening
- insulating layer
- acceleration
- Prior art date
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/0802—Details
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y15/00—Nanotechnology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/04—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses for indicating maximum value
- G01P15/06—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses for indicating maximum value using members subjected to a permanent deformation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/0891—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values with indication of predetermined acceleration values
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/135—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by making use of contacts which are actuated by a movable inertial mass
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H1/00—Contacts
- H01H1/0094—Switches making use of nanoelectromechanical systems [NEMS]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H35/00—Switches operated by change of a physical condition
- H01H35/14—Switches operated by change of acceleration, e.g. by shock or vibration, inertia switch
Description
Claims (5)
- 第一の絶縁層の上面上の導電性プレートと、
前記導電性プレートの上面上の第二の絶縁層であり、前記導電性プレートの上面は、前記第二の絶縁層の開口内で露出する、第二の絶縁層と、
導電性ナノチューブの複数セットであり、前記導電性ナノチューブの遠位第一および第二の端部領域が前記第二の絶縁層に接し、前記導電性ナノチューブの中央領域は、前記開口を掛けわたされ、前記複数の導電性ナノチューブの相違するセット中のナノチューブは、互いに電気的に接触せず、かつ前記導電性ナノチューブが湾曲することで前記導電性プレートに電気的に接触する導電性ナノチューブの複数セットと、
導電性の複数のコンタクトであり、前記複数のコンタクトのそれぞれは、前記複数のナノチューブの相違するセットのナノチューブの第一の端部領域と電気的に接触する、導電性の複数のコンタクトとを有する装置。 - さらに、前記導電性ナノチューブの前記複数セットの複数の中間領域に取り付けられた慣性重量を含む、請求項1の装置。
- 前記ナノチューブの長手方向軸と平行な方向の前記開口の幅は、前記導電性ナノチューブの前記複数のセットの下でそれぞれ異なり、または、
前記導電性プレートの上面に垂直な方向の前記開口の深さは、前記導電性ナノチューブの前記複数のセットの下でそれぞれ異なり、または、
前記導電性ナノチューブの長手方向軸に平行な方向の前記開口の幅と前記導電性プレートの上面と垂直な方向の前記開口の深さの両方は、前記導電性ナノチューブの前記複数のセットのそれぞれの下で異なる、請求項1の装置。 - 前記導電性プレートの前記上面に物理的に接触する前記導電性ナノチューブの前記複数セットの1つまたは複数のうちのいずれかが、加速力の除去後にファンデルワールス力によって、前記導電性プレートの前記上面に取り付けられたままとなるように、前記開口上に掛けわたされた前記導電性ナノチューブの領域は、前記導電性プレートの前記上面に垂直な方向に印加されたベクトル成分を有する加速力によって偏向可能である、請求項1の装置。
- 第一の絶縁層の上面に導電性プレートを形成するステップと、
前記導電性プレートの上面に第二の絶縁層を形成するステップと、
前記第二の絶縁層に開口を形成し、前記導電性プレートの上面を開口に露出するステップと、
導電性ナノチューブの複数のセットであり、前記導電性ナノチューブの遠位第1および第二の端部領域は、前記第二の絶縁層に接し、前記導電性ナノチューブの中央領域は、前記開口を掛けわたされ、前記1つまたは複数のナノチューブの相違するセット中のナノチューブは、互いに電気的に接触せず、かつ前記導電性ナノチューブが湾曲することで前記導電性プレートに電気的に接触する前記導電性ナノチューブの複数のセットを形成するステップと、
複数の導電性コンタクトを形成するステップであり、前記複数のそれぞれのコンタクトは、前記導電性ナノチューブの相違するセットのナノチューブの第一の端部領域と電気的に接触するように形成するステップとを含む方法。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/161,181 US7629192B2 (en) | 2005-10-13 | 2005-10-13 | Passive electrically testable acceleration and voltage measurement devices |
US11/161181 | 2005-10-13 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2012016866A Division JP5623440B2 (ja) | 2005-10-13 | 2012-01-30 | 加速度および電圧測定装置、並びに加速度および電圧測定を製造する方法 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2007109632A JP2007109632A (ja) | 2007-04-26 |
JP2007109632A5 JP2007109632A5 (ja) | 2008-12-04 |
JP4953722B2 true JP4953722B2 (ja) | 2012-06-13 |
Family
ID=37947379
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
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JP2006210142A Expired - Fee Related JP4953722B2 (ja) | 2005-10-13 | 2006-08-01 | 受動電気検査可能な、加速度および電圧測定装置 |
JP2012016866A Expired - Fee Related JP5623440B2 (ja) | 2005-10-13 | 2012-01-30 | 加速度および電圧測定装置、並びに加速度および電圧測定を製造する方法 |
Family Applications After (1)
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JP2012016866A Expired - Fee Related JP5623440B2 (ja) | 2005-10-13 | 2012-01-30 | 加速度および電圧測定装置、並びに加速度および電圧測定を製造する方法 |
Country Status (4)
Country | Link |
---|---|
US (2) | US7629192B2 (ja) |
JP (2) | JP4953722B2 (ja) |
CN (1) | CN100485951C (ja) |
TW (1) | TW200729517A (ja) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2010199429A (ja) * | 2009-02-26 | 2010-09-09 | Fujifilm Corp | プラズマエッチング方法及びプラズマエッチング装置並びに液体吐出ヘッドの製造方法 |
US8350360B1 (en) | 2009-08-28 | 2013-01-08 | Lockheed Martin Corporation | Four-terminal carbon nanotube capacitors |
US8405189B1 (en) * | 2010-02-08 | 2013-03-26 | Lockheed Martin Corporation | Carbon nanotube (CNT) capacitors and devices integrated with CNT capacitors |
FI20116082L (fi) * | 2011-11-03 | 2013-05-04 | Marko Pudas | Anturi |
JP6294083B2 (ja) * | 2014-01-09 | 2018-03-14 | セイコーインスツル株式会社 | 電子機器 |
Family Cites Families (31)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3656352A (en) | 1970-12-02 | 1972-04-18 | Nasa | Impact monitoring apparatus |
US4100807A (en) | 1977-06-10 | 1978-07-18 | Engdahl Paul D | Peak-recording accelerometer |
JPH05101740A (ja) * | 1991-10-03 | 1993-04-23 | Polytec Design:Kk | マツト型スイツチ |
JP3448856B2 (ja) * | 1993-12-28 | 2003-09-22 | マツダ株式会社 | ロボットハンドの制御装置 |
US6445006B1 (en) | 1995-12-20 | 2002-09-03 | Advanced Technology Materials, Inc. | Microelectronic and microelectromechanical devices comprising carbon nanotube components, and methods of making same |
JP3543470B2 (ja) * | 1996-02-08 | 2004-07-14 | 日産自動車株式会社 | マイクロマシンの梁構造及びその製造方法 |
EP0881651A1 (en) * | 1997-05-30 | 1998-12-02 | Hyundai Motor Company | Threshold microswitch and a manufacturing method thereof |
US6130464A (en) | 1997-09-08 | 2000-10-10 | Roxburgh Ltd. | Latching microaccelerometer |
US6058778A (en) | 1997-10-24 | 2000-05-09 | Stmicroelectronics, Inc. | Integrated sensor having plurality of released beams for sensing acceleration |
JP3421574B2 (ja) * | 1998-05-21 | 2003-06-30 | 株式会社東芝 | 半導体装置 |
DE69903943T2 (de) * | 1998-06-04 | 2003-03-27 | Cavendish Kinetics Ltd | Mikro-mechanischer elementen |
JP2000155126A (ja) * | 1998-11-19 | 2000-06-06 | Toyota Central Res & Dev Lab Inc | 加速度センサ |
JP2001091441A (ja) * | 1999-07-16 | 2001-04-06 | Japan Science & Technology Corp | ナノメートルオーダの機械振動子、その製造方法及びそれを用いた測定装置 |
JP2001208766A (ja) * | 2000-01-28 | 2001-08-03 | Toyota Central Res & Dev Lab Inc | 加速度検出装置 |
JP2001337108A (ja) * | 2000-05-29 | 2001-12-07 | Tokai Rika Co Ltd | 加速度スイッチ |
JP3907431B2 (ja) * | 2001-06-21 | 2007-04-18 | 株式会社デンソー | 感圧センサ用抵抗体およびそれを用いた感圧センサ |
US6835591B2 (en) * | 2001-07-25 | 2004-12-28 | Nantero, Inc. | Methods of nanotube films and articles |
US7259410B2 (en) * | 2001-07-25 | 2007-08-21 | Nantero, Inc. | Devices having horizontally-disposed nanofabric articles and methods of making the same |
JP4628612B2 (ja) * | 2001-09-10 | 2011-02-09 | 株式会社ワコー | 可変抵抗要素を用いた力検出装置 |
JP4231228B2 (ja) * | 2002-01-21 | 2009-02-25 | 株式会社リコー | マイクロマシーン |
SE0200868D0 (sv) * | 2002-03-20 | 2002-03-20 | Chalmers Technology Licensing | Theoretical model för a nanorelay and same relay |
DE10220194A1 (de) * | 2002-05-06 | 2003-11-27 | Infineon Technologies Ag | Kontaktierung von Nanoröhren |
US7429495B2 (en) * | 2002-08-07 | 2008-09-30 | Chang-Feng Wan | System and method of fabricating micro cavities |
US6912902B2 (en) | 2003-03-26 | 2005-07-05 | Honeywell International Inc. | Bending beam accelerometer with differential capacitive pickoff |
US7199498B2 (en) | 2003-06-02 | 2007-04-03 | Ambient Systems, Inc. | Electrical assemblies using molecular-scale electrically conductive and mechanically flexible beams and methods for application of same |
WO2005001899A2 (en) * | 2003-06-09 | 2005-01-06 | Nantero, Inc. | Non-volatile electromechanical field effect devices and circuits using same and methods of forming same |
US20050036905A1 (en) * | 2003-08-12 | 2005-02-17 | Matsushita Electric Works, Ltd. | Defect controlled nanotube sensor and method of production |
JP4593239B2 (ja) * | 2003-11-19 | 2010-12-08 | パナソニック株式会社 | 電気機械フィルタ |
JP2005249644A (ja) * | 2004-03-05 | 2005-09-15 | Matsushita Electric Ind Co Ltd | 圧力センサデバイスおよびそれを用いた回路およびシステム |
JP2005259475A (ja) * | 2004-03-10 | 2005-09-22 | Jst Mfg Co Ltd | 異方導電性シート |
JP2005276666A (ja) * | 2004-03-25 | 2005-10-06 | Mitsubishi Materials Corp | サージアブソーバ |
-
2005
- 2005-10-13 US US11/161,181 patent/US7629192B2/en not_active Expired - Fee Related
-
2006
- 2006-07-25 CN CNB2006101077608A patent/CN100485951C/zh not_active Expired - Fee Related
- 2006-08-01 JP JP2006210142A patent/JP4953722B2/ja not_active Expired - Fee Related
- 2006-10-02 TW TW095136513A patent/TW200729517A/zh unknown
-
2008
- 2008-07-02 US US12/166,623 patent/US7898045B2/en not_active Expired - Fee Related
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2012
- 2012-01-30 JP JP2012016866A patent/JP5623440B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
CN100485951C (zh) | 2009-05-06 |
JP5623440B2 (ja) | 2014-11-12 |
TW200729517A (en) | 2007-08-01 |
US20080258246A1 (en) | 2008-10-23 |
US7629192B2 (en) | 2009-12-08 |
US20070085156A1 (en) | 2007-04-19 |
US7898045B2 (en) | 2011-03-01 |
JP2012145582A (ja) | 2012-08-02 |
JP2007109632A (ja) | 2007-04-26 |
CN1949528A (zh) | 2007-04-18 |
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