JP4953722B2 - 受動電気検査可能な、加速度および電圧測定装置 - Google Patents
受動電気検査可能な、加速度および電圧測定装置 Download PDFInfo
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- JP4953722B2 JP4953722B2 JP2006210142A JP2006210142A JP4953722B2 JP 4953722 B2 JP4953722 B2 JP 4953722B2 JP 2006210142 A JP2006210142 A JP 2006210142A JP 2006210142 A JP2006210142 A JP 2006210142A JP 4953722 B2 JP4953722 B2 JP 4953722B2
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- 239000002071 nanotube Substances 0.000 claims description 49
- 238000000034 method Methods 0.000 claims description 25
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- 239000002041 carbon nanotube Substances 0.000 description 91
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 81
- 229910021393 carbon nanotube Inorganic materials 0.000 description 72
- 238000004519 manufacturing process Methods 0.000 description 23
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- 229920002120 photoresistant polymer Polymers 0.000 description 20
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- 238000005530 etching Methods 0.000 description 9
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- 229910003472 fullerene Inorganic materials 0.000 description 7
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- 239000002048 multi walled nanotube Substances 0.000 description 6
- 239000002109 single walled nanotube Substances 0.000 description 6
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 4
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- 229930195733 hydrocarbon Natural products 0.000 description 3
- 150000002430 hydrocarbons Chemical class 0.000 description 3
- ATUOYWHBWRKTHZ-UHFFFAOYSA-N Propane Chemical compound CCC ATUOYWHBWRKTHZ-UHFFFAOYSA-N 0.000 description 2
- 229910017052 cobalt Inorganic materials 0.000 description 2
- 239000010941 cobalt Substances 0.000 description 2
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 239000006185 dispersion Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
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- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 229910001339 C alloy Inorganic materials 0.000 description 1
- 239000004215 Carbon black (E152) Substances 0.000 description 1
- OTMSDBZUPAUEDD-UHFFFAOYSA-N Ethane Chemical compound CC OTMSDBZUPAUEDD-UHFFFAOYSA-N 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 150000001336 alkenes Chemical class 0.000 description 1
- 150000004945 aromatic hydrocarbons Chemical class 0.000 description 1
- 239000001273 butane Substances 0.000 description 1
- 125000004432 carbon atom Chemical group C* 0.000 description 1
- -1 carbon fullerenes Chemical class 0.000 description 1
- 125000004122 cyclic group Chemical group 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
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- 229910052737 gold Inorganic materials 0.000 description 1
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- IJDNQMDRQITEOD-UHFFFAOYSA-N n-butane Chemical compound CCCC IJDNQMDRQITEOD-UHFFFAOYSA-N 0.000 description 1
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Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/0802—Details
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y15/00—Nanotechnology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/04—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses for indicating maximum value
- G01P15/06—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses for indicating maximum value using members subjected to a permanent deformation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/0891—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values with indication of predetermined acceleration values
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/135—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by making use of contacts which are actuated by a movable inertial mass
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H1/00—Contacts
- H01H1/0094—Switches making use of nanoelectromechanical systems [NEMS]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H35/00—Switches operated by change of a physical condition
- H01H35/14—Switches operated by change of acceleration, e.g. by shock or vibration, inertia switch
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Nanotechnology (AREA)
- Molecular Biology (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Health & Medical Sciences (AREA)
- Health & Medical Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Switches Operated By Changes In Physical Conditions (AREA)
- Micromachines (AREA)
- Contacts (AREA)
- Measurement Of Current Or Voltage (AREA)
- Switches That Are Operated By Magnetic Or Electric Fields (AREA)
- Carbon And Carbon Compounds (AREA)
- Measuring Instrument Details And Bridges, And Automatic Balancing Devices (AREA)
Description
Claims (5)
- 第一の絶縁層の上面上の導電性プレートと、
前記導電性プレートの上面上の第二の絶縁層であり、前記導電性プレートの上面は、前記第二の絶縁層の開口内で露出する、第二の絶縁層と、
導電性ナノチューブの複数セットであり、前記導電性ナノチューブの遠位第一および第二の端部領域が前記第二の絶縁層に接し、前記導電性ナノチューブの中央領域は、前記開口を掛けわたされ、前記複数の導電性ナノチューブの相違するセット中のナノチューブは、互いに電気的に接触せず、かつ前記導電性ナノチューブが湾曲することで前記導電性プレートに電気的に接触する導電性ナノチューブの複数セットと、
導電性の複数のコンタクトであり、前記複数のコンタクトのそれぞれは、前記複数のナノチューブの相違するセットのナノチューブの第一の端部領域と電気的に接触する、導電性の複数のコンタクトとを有する装置。 - さらに、前記導電性ナノチューブの前記複数セットの複数の中間領域に取り付けられた慣性重量を含む、請求項1の装置。
- 前記ナノチューブの長手方向軸と平行な方向の前記開口の幅は、前記導電性ナノチューブの前記複数のセットの下でそれぞれ異なり、または、
前記導電性プレートの上面に垂直な方向の前記開口の深さは、前記導電性ナノチューブの前記複数のセットの下でそれぞれ異なり、または、
前記導電性ナノチューブの長手方向軸に平行な方向の前記開口の幅と前記導電性プレートの上面と垂直な方向の前記開口の深さの両方は、前記導電性ナノチューブの前記複数のセットのそれぞれの下で異なる、請求項1の装置。 - 前記導電性プレートの前記上面に物理的に接触する前記導電性ナノチューブの前記複数セットの1つまたは複数のうちのいずれかが、加速力の除去後にファンデルワールス力によって、前記導電性プレートの前記上面に取り付けられたままとなるように、前記開口上に掛けわたされた前記導電性ナノチューブの領域は、前記導電性プレートの前記上面に垂直な方向に印加されたベクトル成分を有する加速力によって偏向可能である、請求項1の装置。
- 第一の絶縁層の上面に導電性プレートを形成するステップと、
前記導電性プレートの上面に第二の絶縁層を形成するステップと、
前記第二の絶縁層に開口を形成し、前記導電性プレートの上面を開口に露出するステップと、
導電性ナノチューブの複数のセットであり、前記導電性ナノチューブの遠位第1および第二の端部領域は、前記第二の絶縁層に接し、前記導電性ナノチューブの中央領域は、前記開口を掛けわたされ、前記1つまたは複数のナノチューブの相違するセット中のナノチューブは、互いに電気的に接触せず、かつ前記導電性ナノチューブが湾曲することで前記導電性プレートに電気的に接触する前記導電性ナノチューブの複数のセットを形成するステップと、
複数の導電性コンタクトを形成するステップであり、前記複数のそれぞれのコンタクトは、前記導電性ナノチューブの相違するセットのナノチューブの第一の端部領域と電気的に接触するように形成するステップとを含む方法。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/161,181 US7629192B2 (en) | 2005-10-13 | 2005-10-13 | Passive electrically testable acceleration and voltage measurement devices |
US11/161181 | 2005-10-13 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2012016866A Division JP5623440B2 (ja) | 2005-10-13 | 2012-01-30 | 加速度および電圧測定装置、並びに加速度および電圧測定を製造する方法 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2007109632A JP2007109632A (ja) | 2007-04-26 |
JP2007109632A5 JP2007109632A5 (ja) | 2008-12-04 |
JP4953722B2 true JP4953722B2 (ja) | 2012-06-13 |
Family
ID=37947379
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
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JP2006210142A Expired - Fee Related JP4953722B2 (ja) | 2005-10-13 | 2006-08-01 | 受動電気検査可能な、加速度および電圧測定装置 |
JP2012016866A Expired - Fee Related JP5623440B2 (ja) | 2005-10-13 | 2012-01-30 | 加速度および電圧測定装置、並びに加速度および電圧測定を製造する方法 |
Family Applications After (1)
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JP2012016866A Expired - Fee Related JP5623440B2 (ja) | 2005-10-13 | 2012-01-30 | 加速度および電圧測定装置、並びに加速度および電圧測定を製造する方法 |
Country Status (4)
Country | Link |
---|---|
US (2) | US7629192B2 (ja) |
JP (2) | JP4953722B2 (ja) |
CN (1) | CN100485951C (ja) |
TW (1) | TW200729517A (ja) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010199429A (ja) * | 2009-02-26 | 2010-09-09 | Fujifilm Corp | プラズマエッチング方法及びプラズマエッチング装置並びに液体吐出ヘッドの製造方法 |
US8350360B1 (en) | 2009-08-28 | 2013-01-08 | Lockheed Martin Corporation | Four-terminal carbon nanotube capacitors |
US8405189B1 (en) * | 2010-02-08 | 2013-03-26 | Lockheed Martin Corporation | Carbon nanotube (CNT) capacitors and devices integrated with CNT capacitors |
FI20116082L (fi) | 2011-11-03 | 2013-05-04 | Marko Pudas | Anturi |
JP6294083B2 (ja) * | 2014-01-09 | 2018-03-14 | セイコーインスツル株式会社 | 電子機器 |
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-
2005
- 2005-10-13 US US11/161,181 patent/US7629192B2/en not_active Expired - Fee Related
-
2006
- 2006-07-25 CN CNB2006101077608A patent/CN100485951C/zh not_active Expired - Fee Related
- 2006-08-01 JP JP2006210142A patent/JP4953722B2/ja not_active Expired - Fee Related
- 2006-10-02 TW TW095136513A patent/TW200729517A/zh unknown
-
2008
- 2008-07-02 US US12/166,623 patent/US7898045B2/en not_active Expired - Fee Related
-
2012
- 2012-01-30 JP JP2012016866A patent/JP5623440B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
TW200729517A (en) | 2007-08-01 |
JP5623440B2 (ja) | 2014-11-12 |
US7898045B2 (en) | 2011-03-01 |
CN1949528A (zh) | 2007-04-18 |
JP2012145582A (ja) | 2012-08-02 |
US7629192B2 (en) | 2009-12-08 |
CN100485951C (zh) | 2009-05-06 |
US20070085156A1 (en) | 2007-04-19 |
US20080258246A1 (en) | 2008-10-23 |
JP2007109632A (ja) | 2007-04-26 |
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