ES2189463T3 - Elemento micromecanico. - Google Patents

Elemento micromecanico.

Info

Publication number
ES2189463T3
ES2189463T3 ES99939790T ES99939790T ES2189463T3 ES 2189463 T3 ES2189463 T3 ES 2189463T3 ES 99939790 T ES99939790 T ES 99939790T ES 99939790 T ES99939790 T ES 99939790T ES 2189463 T3 ES2189463 T3 ES 2189463T3
Authority
ES
Spain
Prior art keywords
micromechanical element
switching element
switching
micro
move
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES99939790T
Other languages
English (en)
Inventor
Charles Smith
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Cavendish Kinetics Ltd
Original Assignee
Cavendish Kinetics Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Cavendish Kinetics Ltd filed Critical Cavendish Kinetics Ltd
Application granted granted Critical
Publication of ES2189463T3 publication Critical patent/ES2189463T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C23/00—Digital stores characterised by movement of mechanical parts to effect storage, e.g. using balls; Storage elements therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/12—Contacts characterised by the manner in which co-operating contacts engage
    • H01H1/14—Contacts characterised by the manner in which co-operating contacts engage by abutting
    • H01H1/20—Bridging contacts
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H01H2001/0042—Bistable switches, i.e. having two stable positions requiring only actuating energy for switching between them, e.g. with snap membrane or by permanent magnet
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H50/00—Details of electromagnetic relays
    • H01H50/005—Details of electromagnetic relays using micromechanics
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Micromachines (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)

Abstract

Un método de fabricar un elemento micromecánico, incluyendo el método los pasos de: disponer un electrodo metálico (2a) sobre un sustrato; disponer una capa temporal (10) sobre el electrodo (2a); formar un elemento conmutador (6) sobre la capa temporal (10); y caracterizado por el paso de: quitar la capa temporal de tal manera que el elemento (6) sea discreto y móvil libre de limitaciones mecánicas por fuerzas aplicadas por el electrodo (2a).
ES99939790T 1998-06-04 1999-06-01 Elemento micromecanico. Expired - Lifetime ES2189463T3 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP98304445 1998-06-04

Publications (1)

Publication Number Publication Date
ES2189463T3 true ES2189463T3 (es) 2003-07-01

Family

ID=8234858

Family Applications (1)

Application Number Title Priority Date Filing Date
ES99939790T Expired - Lifetime ES2189463T3 (es) 1998-06-04 1999-06-01 Elemento micromecanico.

Country Status (9)

Country Link
US (1) US6441405B1 (es)
EP (1) EP1082740B1 (es)
JP (2) JP4966448B2 (es)
AT (1) ATE227882T1 (es)
AU (1) AU4275699A (es)
DE (1) DE69903943T2 (es)
ES (1) ES2189463T3 (es)
PT (1) PT1082740E (es)
WO (1) WO1999063559A1 (es)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6377383B1 (en) * 1997-09-04 2002-04-23 The University Of British Columbia Optical switching by controllable frustration of total internal reflection
US6587021B1 (en) * 2000-11-09 2003-07-01 Raytheon Company Micro-relay contact structure for RF applications
DE10056656C2 (de) * 2000-11-15 2003-01-09 Little Things Factory Gmbh Mikroschalter mit verstärkter Kontaktkraft
JP4487460B2 (ja) * 2001-09-05 2010-06-23 ソニー株式会社 薄膜光学装置
KR100421222B1 (ko) * 2001-11-24 2004-03-02 삼성전자주식회사 저전압 구동의 마이크로 스위칭 소자
GB0413341D0 (en) * 2004-06-15 2004-07-21 Cavendish Kinetics B V Arrangement and method for controlling a micromechanical element
KR100619110B1 (ko) 2004-10-21 2006-09-04 한국전자통신연구원 미세전자기계적 스위치 및 그 제조 방법
US7629192B2 (en) * 2005-10-13 2009-12-08 International Business Machines Corporation Passive electrically testable acceleration and voltage measurement devices
US7701754B1 (en) 2006-09-05 2010-04-20 National Semiconductor Corporation Multi-state electromechanical memory cell
US8704314B2 (en) * 2007-12-06 2014-04-22 Massachusetts Institute Of Technology Mechanical memory transistor
US8289674B2 (en) 2009-03-17 2012-10-16 Cavendish Kinetics, Ltd. Moving a free-standing structure between high and low adhesion states
US7928333B2 (en) * 2009-08-14 2011-04-19 General Electric Company Switch structures
WO2011028504A2 (en) 2009-08-24 2011-03-10 Cavendish Kinetics, Inc. Fabrication of a floating rocker mems device for light modulation
US20160091708A1 (en) * 2014-09-30 2016-03-31 Sharp Kabushiki Kaisha Reflective display device
US10481866B2 (en) * 2015-12-31 2019-11-19 Cbn Nano Technologies Inc. Mechanical computing systems
US10949166B2 (en) * 2015-12-31 2021-03-16 Cbn Nano Technologies Inc. Mechanical computing systems
IT201600078454A1 (it) * 2016-07-26 2018-01-26 St Microelectronics Srl Dispositivo microelettromeccanico, utilizzabile come modulo di memoria non volatile o rele', e memoria includente una pluralita' di dispositivi microelettromeccanici
US10678293B2 (en) * 2018-11-02 2020-06-09 Lawrence Livermore National Security, Llc Systems for mechanical logic based on additively manufacturable micro-mechanical logic gates
US20240231064A9 (en) * 2021-03-25 2024-07-11 Hitachi High-Tech Corporation Optical filtering device, method of controlling optical filtering device, and mems shutter

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FR2376548A1 (fr) * 1977-01-04 1978-07-28 Thomson Csf Dispositif bistable electrostatique
JPH01130431A (ja) * 1987-11-13 1989-05-23 Fujitsu Ltd 電気接点
JPH02230619A (ja) * 1989-03-03 1990-09-13 Fujitsu Ltd リードスイッチの製造方法
GB8921722D0 (en) * 1989-09-26 1989-11-08 British Telecomm Micromechanical switch
JPH03128994A (ja) * 1989-10-16 1991-05-31 Nippon Kouyu:Kk 電気スイッチの摺動接点用グリース
JPH04272481A (ja) * 1990-12-25 1992-09-29 Satoshi Kawada マイクロマシーンの操作方法及び光駆動マイクロマシーン
JPH04322017A (ja) * 1991-04-22 1992-11-12 Furukawa Electric Co Ltd:The 接点材料
DE4126107C2 (de) * 1991-08-07 1993-12-16 Bosch Gmbh Robert Beschleunigungssensor und Verfahren zur Herstellung
KR950010659B1 (ko) * 1992-11-10 1995-09-21 재단법인한국전자통신연구소 마이크로 광개폐 장치 및 그 제조방법
KR960001941B1 (ko) * 1992-11-10 1996-02-08 재단법인한국전자통신연구소 평면 디스플레이 장치
DE4316856A1 (de) * 1993-05-19 1994-11-24 Siemens Ag Mikromechanisches Bauteil und Verfahren zu seiner Herstellung
US5559358A (en) * 1993-05-25 1996-09-24 Honeywell Inc. Opto-electro-mechanical device or filter, process for making, and sensors made therefrom
US5619061A (en) 1993-07-27 1997-04-08 Texas Instruments Incorporated Micromechanical microwave switching
US5526172A (en) * 1993-07-27 1996-06-11 Texas Instruments Incorporated Microminiature, monolithic, variable electrical signal processor and apparatus including same
JP3391141B2 (ja) * 1994-03-24 2003-03-31 住友電気工業株式会社 微小機械部品及びその製造方法
JP3095642B2 (ja) * 1994-11-11 2000-10-10 株式会社東芝 静電アクチュエータおよびその駆動方法
JP3196805B2 (ja) * 1995-02-14 2001-08-06 日本電信電話株式会社 表示装置および携帯型電子装置
US5578976A (en) * 1995-06-22 1996-11-26 Rockwell International Corporation Micro electromechanical RF switch
US5847631A (en) * 1995-10-10 1998-12-08 Georgia Tech Research Corporation Magnetic relay system and method capable of microfabrication production
US6168395B1 (en) * 1996-02-10 2001-01-02 Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.V. Bistable microactuator with coupled membranes
JP3834862B2 (ja) * 1996-03-07 2006-10-18 住友電気工業株式会社 機械式電気スイッチ素子
US5867297A (en) * 1997-02-07 1999-02-02 The Regents Of The University Of California Apparatus and method for optical scanning with an oscillatory microelectromechanical system
JP3944990B2 (ja) * 1998-02-02 2007-07-18 株式会社デンソー マイクロメカニカルスイッチの製造方法

Also Published As

Publication number Publication date
JP2010188517A (ja) 2010-09-02
ATE227882T1 (de) 2002-11-15
DE69903943T2 (de) 2003-03-27
AU4275699A (en) 1999-12-20
EP1082740B1 (en) 2002-11-13
JP2002517320A (ja) 2002-06-18
JP4966448B2 (ja) 2012-07-04
WO1999063559A1 (en) 1999-12-09
EP1082740A1 (en) 2001-03-14
US6441405B1 (en) 2002-08-27
PT1082740E (pt) 2003-04-30
DE69903943D1 (de) 2002-12-19
JP5475487B2 (ja) 2014-04-16

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