DE59502013D1 - Mikromechanischer aktor - Google Patents

Mikromechanischer aktor

Info

Publication number
DE59502013D1
DE59502013D1 DE59502013T DE59502013T DE59502013D1 DE 59502013 D1 DE59502013 D1 DE 59502013D1 DE 59502013 T DE59502013 T DE 59502013T DE 59502013 T DE59502013 T DE 59502013T DE 59502013 D1 DE59502013 D1 DE 59502013D1
Authority
DE
Germany
Prior art keywords
micromechanical actuator
micromechanical
actuator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE59502013T
Other languages
English (en)
Inventor
Klaus Feit
Mathias Heckele
Patrick Ruther
Klaus Weindel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Forschungszentrum Karlsruhe GmbH
Original Assignee
Forschungszentrum Karlsruhe GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Forschungszentrum Karlsruhe GmbH filed Critical Forschungszentrum Karlsruhe GmbH
Application granted granted Critical
Publication of DE59502013D1 publication Critical patent/DE59502013D1/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B15/00—Fluid-actuated devices for displacing a member from one position to another; Gearing associated therewith
    • F15B15/08—Characterised by the construction of the motor unit
    • F15B15/14—Characterised by the construction of the motor unit of the straight-cylinder type
    • F15B15/1423—Component parts; Constructional details
    • F15B15/1428—Cylinders
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B15/00—Fluid-actuated devices for displacing a member from one position to another; Gearing associated therewith
    • F15B15/08—Characterised by the construction of the motor unit
    • F15B15/14—Characterised by the construction of the motor unit of the straight-cylinder type
    • F15B15/1423—Component parts; Constructional details
    • F15B15/1447—Pistons; Piston to piston rod assemblies
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15C—FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING OR CONTROL PURPOSES
    • F15C5/00—Manufacture of fluid circuit elements; Manufacture of assemblages of such elements integrated circuits

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Theoretical Computer Science (AREA)
  • Micromachines (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
DE59502013T 1994-10-08 1995-09-20 Mikromechanischer aktor Expired - Fee Related DE59502013D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE4436008A DE4436008C1 (de) 1994-10-08 1994-10-08 Mikromechanischer Aktor
PCT/EP1995/003707 WO1996011342A1 (de) 1994-10-08 1995-09-20 Mikromechanischer aktor

Publications (1)

Publication Number Publication Date
DE59502013D1 true DE59502013D1 (de) 1998-05-28

Family

ID=6530283

Family Applications (2)

Application Number Title Priority Date Filing Date
DE4436008A Expired - Fee Related DE4436008C1 (de) 1994-10-08 1994-10-08 Mikromechanischer Aktor
DE59502013T Expired - Fee Related DE59502013D1 (de) 1994-10-08 1995-09-20 Mikromechanischer aktor

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE4436008A Expired - Fee Related DE4436008C1 (de) 1994-10-08 1994-10-08 Mikromechanischer Aktor

Country Status (4)

Country Link
US (1) US6055899A (de)
EP (1) EP0784754B1 (de)
DE (2) DE4436008C1 (de)
WO (1) WO1996011342A1 (de)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU2001265160A1 (en) * 2000-06-02 2001-12-17 The Regents Of The University Of California Controlling physical motion with electrolytically formed bubbles
AU2002306479A1 (en) 2001-02-13 2002-10-15 Technology Applications, Inc. Miniature reciprocating heat pumps and engines
US7141812B2 (en) * 2002-06-05 2006-11-28 Mikro Systems, Inc. Devices, methods, and systems involving castings
US7785098B1 (en) 2001-06-05 2010-08-31 Mikro Systems, Inc. Systems for large area micro mechanical systems
WO2002098624A1 (en) * 2001-06-05 2002-12-12 Mikro Systems Inc. Methods for manufacturing three-dimensional devices and devices created thereby
US6490960B1 (en) * 2001-07-11 2002-12-10 Xerox Corporation Muscle-emulating PC board actuator
US7277476B2 (en) * 2003-04-01 2007-10-02 Nokia Siemens Network Oy Determining the correlation between received samples and available replica samples
US7012264B2 (en) * 2004-06-04 2006-03-14 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
EP2362822A2 (de) 2008-09-26 2011-09-07 Mikro Systems Inc. Systeme, vorrichtungen und/oder verfahren zur herstellung von gussteilen
US8410660B2 (en) 2010-01-13 2013-04-02 The Aerospace Corporation Acoustic devices embedded in photostructurable ceramics
US20110167941A1 (en) * 2010-01-13 2011-07-14 The Aerospace Corporation Photostructured Mechanical Devices and Methods for Making Same
US8479375B2 (en) 2010-01-13 2013-07-09 The Aerospace Corporation Method of making an embedded electromagnetic device
US8940241B2 (en) 2010-01-13 2015-01-27 The Aerospace Corporation Photostructured chemical devices and methods for making same
US9146377B2 (en) * 2010-01-13 2015-09-29 The Aerospace Corporation Photostructured optical devices and methods for making same
US8813824B2 (en) 2011-12-06 2014-08-26 Mikro Systems, Inc. Systems, devices, and/or methods for producing holes
CN103673794B (zh) * 2013-10-09 2015-07-29 北京理工大学 一种火工驱动活塞式微作动器
CN105564649B (zh) * 2016-01-28 2017-11-21 兰州空间技术物理研究所 一种适用于月球表面环境条件的火工作动器

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3611880A (en) * 1969-05-19 1971-10-12 Res Engineering Co Operator and method of lubrication thereof
DE3814150A1 (de) * 1988-04-27 1989-11-09 Draegerwerk Ag Ventilanordnung aus mikrostrukturierten komponenten
JPH01315839A (ja) * 1988-06-15 1989-12-20 Nec Corp パッチ施工状況出力方式
JP2972246B2 (ja) * 1989-12-04 1999-11-08 日本電気株式会社 微小生体内可動機械
JP2536233B2 (ja) * 1990-05-01 1996-09-18 トヨタ自動車株式会社 前後輪操舵車の後輪操舵制御装置
JP3000653B2 (ja) * 1990-10-17 2000-01-17 日産自動車株式会社 ワーク・クランプ装置
JPH05272457A (ja) * 1992-01-30 1993-10-19 Terumo Corp マイクロポンプおよびその製造方法
JPH05202910A (ja) * 1992-01-30 1993-08-10 Terumo Corp 流体駆動型アクチュエータ
JPH05346105A (ja) * 1992-06-11 1993-12-27 Aisin Seiki Co Ltd マイクロアクチュエータ

Also Published As

Publication number Publication date
EP0784754A1 (de) 1997-07-23
DE4436008C1 (de) 1995-10-05
US6055899A (en) 2000-05-02
WO1996011342A1 (de) 1996-04-18
EP0784754B1 (de) 1998-04-22

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee