DE69814956D1 - Elektrostatischer Betätiger - Google Patents

Elektrostatischer Betätiger

Info

Publication number
DE69814956D1
DE69814956D1 DE69814956T DE69814956T DE69814956D1 DE 69814956 D1 DE69814956 D1 DE 69814956D1 DE 69814956 T DE69814956 T DE 69814956T DE 69814956 T DE69814956 T DE 69814956T DE 69814956 D1 DE69814956 D1 DE 69814956D1
Authority
DE
Germany
Prior art keywords
electrostatic actuator
electrostatic
actuator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69814956T
Other languages
English (en)
Other versions
DE69814956T2 (de
Inventor
Storrs Hoen
Carl Taussig
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Agilent Technologies Inc
Original Assignee
Agilent Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agilent Technologies Inc filed Critical Agilent Technologies Inc
Application granted granted Critical
Publication of DE69814956D1 publication Critical patent/DE69814956D1/de
Publication of DE69814956T2 publication Critical patent/DE69814956T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H02N1/002—Electrostatic motors
    • H02N1/004—Electrostatic motors in which a body is moved along a path due to interaction with an electric field travelling along the path
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N13/00—Clutches or holding devices using electrostatic attraction, e.g. using Johnson-Rahbek effect
DE69814956T 1997-03-14 1998-03-12 Elektrostatischer Betätiger Expired - Lifetime DE69814956T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/818,209 US5986381A (en) 1997-03-14 1997-03-14 Electrostatic actuator with spatially alternating voltage patterns
US818209 1997-03-14

Publications (2)

Publication Number Publication Date
DE69814956D1 true DE69814956D1 (de) 2003-07-03
DE69814956T2 DE69814956T2 (de) 2004-05-13

Family

ID=25224960

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69814956T Expired - Lifetime DE69814956T2 (de) 1997-03-14 1998-03-12 Elektrostatischer Betätiger

Country Status (4)

Country Link
US (2) US5986381A (de)
EP (1) EP0865151B1 (de)
JP (1) JP3272661B2 (de)
DE (1) DE69814956T2 (de)

Families Citing this family (99)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH687241A5 (de) * 1993-05-07 1996-10-31 Walter Suter Vorrichtung zum Schneiden von Endlos-Papier sowie ein Verfahren zu ihrem Betrieb.
US6351054B1 (en) * 1997-10-09 2002-02-26 Honeywell International Inc. Compounded AC driving signal for increased reliability and lifetime in touch-mode electrostatic actuators
US6181050B1 (en) * 1997-10-27 2001-01-30 Hewlett Packard Company Electrostatic micromotor with large in-plane force and no out-of-plane force
ATE237883T1 (de) * 1998-11-06 2003-05-15 Honeywell Inc Ansteuerungsverfahren für elektrostatische betätiger
US6215222B1 (en) * 1999-03-30 2001-04-10 Agilent Technologies, Inc. Optical cross-connect switch using electrostatic surface actuators
US6621191B1 (en) * 1999-05-13 2003-09-16 Matsushita Electric Industrial Co., Inc. Structure containing organic molecular layer and use thereof
US6359757B1 (en) * 1999-06-02 2002-03-19 Maxtor Corporation Electrostatic actuator
US20020009256A1 (en) * 1999-07-20 2002-01-24 Memlink Ltd. Variable optical attenuator and beam splitter
US6140737A (en) * 1999-10-08 2000-10-31 Lucent Technologies Inc. Apparatus and method for charge neutral micro-machine control
US6903486B2 (en) * 1999-11-29 2005-06-07 Iolon, Inc. Balanced microdevice
JP2001250854A (ja) * 1999-12-28 2001-09-14 Nikon Corp 搬送方法及び搬送装置、位置決め方法及び位置決め装置、基板保持方法及び基板保持装置、露光方法及び露光装置、デバイスの製造方法及びデバイス
US6253001B1 (en) * 2000-01-20 2001-06-26 Agilent Technologies, Inc. Optical switches using dual axis micromirrors
KR100474835B1 (ko) * 2000-07-18 2005-03-08 삼성전자주식회사 다축 구동을 위한 싱글스테이지 마이크로구동기
US6525864B1 (en) 2000-07-20 2003-02-25 Nayna Networks, Inc. Integrated mirror array and circuit device
US6522802B2 (en) 2000-12-11 2003-02-18 Agilent Technologies, Inc. Optical switch using support structures with both fixed mirrors and pivotable mirrors
US6541892B2 (en) * 2001-01-16 2003-04-01 Agilent Technologies, Inc. Actuator with a flexure arrangement to accommodate a long range of motion
US6583524B2 (en) 2001-03-07 2003-06-24 Hewlett-Packard Company Micro-mover with balanced dynamics
US6590850B2 (en) 2001-03-07 2003-07-08 Hewlett-Packard Development Company, L.P. Packaging for storage devices using electron emissions
US7082095B2 (en) * 2001-05-25 2006-07-25 Hewlett-Packard Development Company, L.P. System and method for storing data
US6771851B1 (en) 2001-06-19 2004-08-03 Nayna Networks Fast switching method for a micro-mirror device for optical switching applications
US6928042B2 (en) 2001-07-06 2005-08-09 Hewlett-Packard Development Company, L.P. Data storage device including nanotube electron sources
US6555480B2 (en) 2001-07-31 2003-04-29 Hewlett-Packard Development Company, L.P. Substrate with fluidic channel and method of manufacturing
US6640023B2 (en) 2001-09-27 2003-10-28 Memx, Inc. Single chip optical cross connect
US6794793B2 (en) * 2001-09-27 2004-09-21 Memx, Inc. Microelectromechnical system for tilting a platform
US6621681B2 (en) 2001-12-05 2003-09-16 Memx, Inc. Low voltage control of MEM actuators
US6944365B2 (en) * 2002-01-03 2005-09-13 Memx, Inc. Off axis optical signal redirection architectures
US6747863B2 (en) * 2002-01-11 2004-06-08 Hewlett-Packard Development Company, L.P. Electrostatic drive
US6894420B2 (en) * 2002-03-14 2005-05-17 Memx, Inc. Non-linear actuator suspension for microelectromechanical systems
US20040207893A1 (en) * 2002-03-14 2004-10-21 Miller Samuel Lee Channel processing unit for WDM network
US6554403B1 (en) 2002-04-30 2003-04-29 Hewlett-Packard Development Company, L.P. Substrate for fluid ejection device
US6981759B2 (en) 2002-04-30 2006-01-03 Hewlett-Packard Development Company, Lp. Substrate and method forming substrate for fluid ejection device
US7019876B2 (en) * 2002-07-29 2006-03-28 Hewlett-Packard Development Company, L.P. Micro-mirror with rotor structure
US6700173B1 (en) 2002-08-20 2004-03-02 Memx, Inc. Electrically isolated support for overlying MEM structure
JP4511544B2 (ja) * 2003-06-11 2010-07-28 アジレント・テクノロジーズ・インク 走査型プローブ顕微鏡
US6910758B2 (en) 2003-07-15 2005-06-28 Hewlett-Packard Development Company, L.P. Substrate and method of forming substrate for fluid ejection device
US6930368B2 (en) * 2003-07-31 2005-08-16 Hewlett-Packard Development Company, L.P. MEMS having a three-wafer structure
US7079726B2 (en) * 2003-08-07 2006-07-18 Schroeder Dale W Microelectromechanical optical switch using bendable fibers to direct light signals
US20050031255A1 (en) * 2003-08-07 2005-02-10 Schroeder Dale W. Method and system for maintaining active alignment in an optical switch using dedicated representative directing elements
US7050670B2 (en) * 2003-08-07 2006-05-23 Avago Technologies Method and system for aligning and maintaining alignment of an optical switch using sensors
US20050062361A1 (en) * 2003-09-22 2005-03-24 Harley Jonah A. Stepping electrostatic comb drive actuator
US7265476B1 (en) * 2003-10-31 2007-09-04 United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration MEMS micro-translation device with improved linear travel capability
US7542188B2 (en) * 2004-01-20 2009-06-02 National University Of Singapore Optical scanning using vibratory diffraction gratings
US7663289B1 (en) * 2004-02-18 2010-02-16 Siimpel Corporation Centipede actuator motion stage
JP4761810B2 (ja) * 2004-04-26 2011-08-31 パナソニック株式会社 マイクロアクチュエータ
JP4368739B2 (ja) * 2004-05-21 2009-11-18 アルプス電気株式会社 静電吸引駆動装置
US7211924B2 (en) * 2004-05-21 2007-05-01 Alps Electric Co., Ltd. Electrostatic attraction driving apparatus
US20060057585A1 (en) * 2004-09-10 2006-03-16 Mcallister William H Nanostepper/sensor systems and methods of use thereof
US7623142B2 (en) * 2004-09-14 2009-11-24 Hewlett-Packard Development Company, L.P. Flexure
JP2006149140A (ja) * 2004-11-24 2006-06-08 Alps Electric Co Ltd 静電吸引駆動装置
US7208857B2 (en) * 2004-12-16 2007-04-24 Hewlett-Packard Development Company, L.P. Drive calibration method and system
US7521784B2 (en) * 2004-12-17 2009-04-21 Hewlett-Packard Development Company, L.P. System for coupling wire to semiconductor region
US7503989B2 (en) * 2004-12-17 2009-03-17 Hewlett-Packard Development Company, L.P. Methods and systems for aligning and coupling devices
US7391090B2 (en) * 2004-12-17 2008-06-24 Hewlett-Packard Development Company, L.P. Systems and methods for electrically coupling wires and conductors
US7429864B2 (en) * 2004-12-17 2008-09-30 Hewlett-Packard Development Company, L.P. Systems and methods for rectifying and detecting signals
US7468572B2 (en) * 2005-03-28 2008-12-23 Maurice Thomas Versatile digitally controlled micro-mechanical actuator
US20070066494A1 (en) * 2005-09-19 2007-03-22 Davide Iannuzzi Ultra-low friction configuration
JP4621577B2 (ja) * 2005-10-27 2011-01-26 アルプス電気株式会社 静電アクチュエータ及びその駆動方法
JP4616156B2 (ja) * 2005-11-18 2011-01-19 アルプス電気株式会社 静電アクチュエータ
EP1793208B1 (de) * 2005-11-30 2009-02-11 ETA SA Manufacture Horlogère Suisse Geregeltes Steuersystem mit niedriger Leistung für elektrostatischen Betätiger
JP4822877B2 (ja) * 2006-03-01 2011-11-24 東京計器株式会社 静電浮上型ジャイロ装置
JP4945204B2 (ja) 2006-09-08 2012-06-06 株式会社東芝 アクチュエータ
US7903532B2 (en) * 2006-10-11 2011-03-08 Seagate Technology Llc Elevated electrodes for probe position sensing
US7983138B2 (en) * 2006-10-11 2011-07-19 Seagate Technology Llc Surface spacing using rigid spacers
US7902490B2 (en) * 2007-01-30 2011-03-08 Xtreme Energetics, Inc. Solid-state sun tracker
WO2008133906A1 (en) * 2007-04-25 2008-11-06 International Rectifier Corporation Harmonic processor
US7924495B1 (en) 2007-06-04 2011-04-12 Xtreme Energetics, Inc. Active-matrix sun tracker
US20090001846A1 (en) * 2007-06-27 2009-01-01 Seagate Technology Llc Electrostatic Surface Drive With Multiple Operating Voltages
US20090032705A1 (en) * 2007-07-31 2009-02-05 Schroeder Dale W Fast Tip Scanning For Scanning Probe Microscope
US7832948B1 (en) 2007-09-13 2010-11-16 Tessera MEMS Technologies, Inc. Impulse actuated MEMS devices
US8136389B2 (en) 2007-10-31 2012-03-20 Agilent Technologies, Inc. Probe tip assembly for scanning probe microscopes
US7440155B1 (en) 2007-12-13 2008-10-21 International Business Machines Corporation Mass-balanced actuating mechanism for a micro scanning device
US7913376B2 (en) * 2007-12-13 2011-03-29 International Business Machines Corporation Method of forming an actuating mechanism for a probe storage system
US20090155727A1 (en) * 2007-12-13 2009-06-18 International Business Machines Corporation Method of forming a flat media table for probe storage device
US7864653B2 (en) * 2007-12-13 2011-01-04 International Business Machines Corporation Probe storage device
US7792010B2 (en) * 2007-12-13 2010-09-07 International Business Machines Corporation Scanning system for a probe storage device
US8000214B2 (en) * 2007-12-13 2011-08-16 International Business Machines Corporation Hermetic seal for a scanner assembly of a probe storage device
US7876663B2 (en) * 2007-12-13 2011-01-25 International Business Machines Corporation Scanning system for a probe storage device
US7965615B2 (en) * 2007-12-13 2011-06-21 International Business Machines Corporation Probe storage device scanner chip having a multi-layer media support table
ITTO20080604A1 (it) * 2008-07-31 2010-02-01 St Microelectronics Srl Micromotore elettrostatico con statore e rotore a contatto, in particolare per sistemi di memorizzazione probe storage
US8049579B2 (en) * 2008-10-30 2011-11-01 Hewlett-Packard Development Company, L.P. Resonator having a stator coupled to three stator voltages
DE102008043836A1 (de) * 2008-11-19 2010-05-20 Robert Bosch Gmbh Verfahren zum Betreiben eines elektrostatischen Antriebs und elektrostatische Antriebe
JP5556359B2 (ja) * 2010-05-19 2014-07-23 大日本印刷株式会社 ４線式静電アクチュエータおよび固定子
US20120014642A1 (en) * 2010-07-14 2012-01-19 Hanneman Jr Raymond J Transparent Optical Switch
US8291510B2 (en) 2010-09-27 2012-10-16 Agilent Technologies, Inc. Tandem piezoelectric actuator and single drive circuit for atomic force microscopy
US9171964B2 (en) 2010-11-23 2015-10-27 Honeywell International Inc. Systems and methods for a three-layer chip-scale MEMS device
US9493344B2 (en) 2010-11-23 2016-11-15 Honeywell International Inc. MEMS vertical comb structure with linear drive/pickoff
US8776601B2 (en) 2010-11-23 2014-07-15 Honeywell International Inc. MEMS sensor using multi-layer movable combs
US8748206B2 (en) 2010-11-23 2014-06-10 Honeywell International Inc. Systems and methods for a four-layer chip-scale MEMS device
US9229027B2 (en) 2011-02-25 2016-01-05 Keysight Technologies, Inc. Atomic force microscopy controller and method
US9689891B2 (en) 2011-05-27 2017-06-27 Keysight Technologies, Inc. Automatic gain tuning in atomic force microscopy
US8370961B1 (en) 2011-09-30 2013-02-05 Agilent Technologies, Inc. Providing a topographic signal of sample using atomic force microscope
US8595859B1 (en) 2011-09-30 2013-11-26 Agilent Technologies, Inc. Controlling atomic force microscope using optical imaging
US9678103B2 (en) 2011-10-28 2017-06-13 Keysight Technologies, Inc. Automatic tuning of atomic force microscope
US8769710B2 (en) 2012-11-13 2014-07-01 Agilent Technologies, Inc. Atomic force microscope system using selective active damping
US10054611B2 (en) 2012-11-27 2018-08-21 Keysight Technologies, Inc. Method of controlling frequency modulated-atomic force microscope
CN107431476B (zh) 2015-04-27 2020-06-12 株式会社村田制作所 谐振子以及谐振装置
WO2016174789A1 (ja) 2015-04-27 2016-11-03 株式会社村田製作所 共振子及び共振装置
JP6551706B2 (ja) 2015-04-28 2019-07-31 株式会社村田製作所 共振子及び共振装置
US10812046B2 (en) * 2018-02-07 2020-10-20 Murata Manufacturing Co., Ltd. Micromechanical resonator having reduced size

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4754185A (en) * 1986-10-16 1988-06-28 American Telephone And Telegraph Company, At&T Bell Laboratories Micro-electrostatic motor
JP2839526B2 (ja) * 1989-02-10 1998-12-16 株式会社日立製作所 静電形アクチュエータ
DE69122022T2 (de) * 1990-04-16 1997-02-06 Fujitsu Ltd Elektrostatischer betätiger
JP3159729B2 (ja) * 1991-05-27 2001-04-23 俊郎 樋口 静電気アクチュエータ及びその制御方法
JPH04368479A (ja) * 1991-06-17 1992-12-21 Ricoh Co Ltd 静電アクチュエータ
JPH05122948A (ja) * 1991-10-25 1993-05-18 Yaskawa Electric Corp 静電モータ
JPH0746863A (ja) * 1993-08-03 1995-02-14 Mitsubishi Electric Corp 静電アクチュエータ
JP2721638B2 (ja) * 1993-11-25 1998-03-04 富士通株式会社 静電気アクチュエータ
US5869916A (en) * 1995-05-26 1999-02-09 Asmo Co., Ltd. Electrostatic actuator with different electrode spacing

Also Published As

Publication number Publication date
EP0865151B1 (de) 2003-05-28
EP0865151A2 (de) 1998-09-16
JP3272661B2 (ja) 2002-04-08
DE69814956T2 (de) 2004-05-13
US5986381A (en) 1999-11-16
JPH10262381A (ja) 1998-09-29
EP0865151A3 (de) 1999-07-14
US6657359B1 (en) 2003-12-02

Similar Documents

Publication Publication Date Title
DE69814956D1 (de) Elektrostatischer Betätiger
DE69824364D1 (de) Elektrostatischer Betätiger
DE69816747D1 (de) Betätigungsglied
ATE311656T1 (de) Elektromagnetischer betätiger
DE69913354D1 (de) Elektrostatische sprühvorrichtung
DE19681732T1 (de) Stellglied
DE69835069D1 (de) Elektropneumatischer Stellantrieb
DE29713409U1 (de) Betätigungsvorrichtung
DE69828430D1 (de) Elektrostatisches mikrorelais
DE69819832D1 (de) Piezoelektrischer Aktuator
DE59502013D1 (de) Mikromechanischer aktor
DE59814139D1 (de) Elektromotorischer verstellantrieb
DE59801457D1 (de) Beidseitig wirkender antrieb
DE69623148T2 (de) Betätiger
DE69821716D1 (de) Stellantrieb
FR2761833B1 (fr) Actionneur rectiligne
DE69605482D1 (de) Betätigungsvorrichtung
DE59801911D1 (de) Stellantrieb
DE29708857U1 (de) Stell- oder Betätigungsvorrichtung
DE59806749D1 (de) Elektromagnetische stelleinrichtung
DE29516875U1 (de) Betätigungselement
ID18566A (id) Pergabungan elektrostatis
DE69817231D1 (de) Elektromagnetische Betätigungsvorrichtungen
DE29514786U1 (de) Stellantrieb
DE29502702U1 (de) Betätigungsvorrichtung

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: AGILENT TECHNOLOGIES, INC. (N.D.GES.D. STAATES, US