DE69122022T2 - Elektrostatischer betätiger - Google Patents

Elektrostatischer betätiger

Info

Publication number
DE69122022T2
DE69122022T2 DE69122022T DE69122022T DE69122022T2 DE 69122022 T2 DE69122022 T2 DE 69122022T2 DE 69122022 T DE69122022 T DE 69122022T DE 69122022 T DE69122022 T DE 69122022T DE 69122022 T2 DE69122022 T2 DE 69122022T2
Authority
DE
Germany
Prior art keywords
electrostatic actuator
electrostatic
actuator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69122022T
Other languages
English (en)
Other versions
DE69122022D1 (de
Inventor
Toshiro Higuchi
Saku Egawa
Masao Hiyane
Katsuhide Natori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Publication of DE69122022D1 publication Critical patent/DE69122022D1/de
Application granted granted Critical
Publication of DE69122022T2 publication Critical patent/DE69122022T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B03—SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES OR JIGS; MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03C—MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03C7/00—Separating solids from solids by electrostatic effect
    • B03C7/02—Separators
    • B03C7/04—Separators with material carriers in the form of trays, troughs, or tables
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B03—SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES OR JIGS; MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03C—MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03C7/00—Separating solids from solids by electrostatic effect
    • B03C7/02—Separators
    • B03C7/023—Non-uniform field separators
    • B03C7/026—Non-uniform field separators using travelling or oscillating electric fields
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H02N1/002—Electrostatic motors
    • H02N1/004—Electrostatic motors in which a body is moved along a path due to interaction with an electric field travelling along the path
DE69122022T 1990-04-16 1991-04-16 Elektrostatischer betätiger Expired - Fee Related DE69122022T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP9969490 1990-04-16
PCT/JP1991/000497 WO1991016757A1 (en) 1990-04-16 1991-04-16 Electrostatic actuator

Publications (2)

Publication Number Publication Date
DE69122022D1 DE69122022D1 (de) 1996-10-17
DE69122022T2 true DE69122022T2 (de) 1997-02-06

Family

ID=14254156

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69122022T Expired - Fee Related DE69122022T2 (de) 1990-04-16 1991-04-16 Elektrostatischer betätiger

Country Status (4)

Country Link
US (2) US5378954A (de)
EP (1) EP0482205B1 (de)
DE (1) DE69122022T2 (de)
WO (1) WO1991016757A1 (de)

Families Citing this family (64)

* Cited by examiner, † Cited by third party
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WO1991016757A1 (en) * 1990-04-16 1991-10-31 Fujitsu Limited Electrostatic actuator
JP3159729B2 (ja) * 1991-05-27 2001-04-23 俊郎 樋口 静電気アクチュエータ及びその制御方法
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US5839306A (en) * 1993-05-12 1998-11-24 Nunuparov; Martyn Sergeevich Electronic lock "chiplock"
JP2721638B2 (ja) * 1993-11-25 1998-03-04 富士通株式会社 静電気アクチュエータ
US5631514A (en) * 1994-06-09 1997-05-20 The United States Of America As Represented By The United States Department Of Energy Microfabricated microengine for use as a mechanical drive and power source in the microdomain and fabrication process
JPH08266071A (ja) * 1995-03-23 1996-10-11 Toshiro Higuchi 多軸駆動装置
US5869916A (en) * 1995-05-26 1999-02-09 Asmo Co., Ltd. Electrostatic actuator with different electrode spacing
US5770913A (en) * 1995-10-23 1998-06-23 Omnific International, Ltd. Actuators, motors and wheelless autonomous robots using vibratory transducer drivers
IT1288761B1 (it) * 1996-10-17 1998-09-24 Fiat Ricerche Motore elettrostatico lineare a passo
US5986381A (en) * 1997-03-14 1999-11-16 Hewlett-Packard Company Electrostatic actuator with spatially alternating voltage patterns
US6768610B1 (en) 1997-08-27 2004-07-27 Seagate Technology Llc Microactuator servo system in a disc drive
EP0913921B1 (de) 1997-10-29 2006-05-03 STMicroelectronics S.r.l. Verfahren zur Herstellung einer Halbleiter Microantrieb, insbesondere für Lese-Schreibekopf einem Festplattengerät, und so hergestellter Microantrieb
US6282066B1 (en) 1998-03-20 2001-08-28 Seagate Technology Llc Microactuator suspension with multiple narrow beams
DE69826242D1 (de) 1998-05-05 2004-10-21 St Microelectronics Srl Herstellungsverfahren für eine Festplatten-Lese/Schreibeinheit, mit mikrometrischer Betätigung
EP0975085B1 (de) * 1998-07-22 2005-02-09 STMicroelectronics S.r.l. Integrierte Anordnung mit einer Vorrichtung für den elektrostatischen Transport von dielektrischen Teilchen, die in einer Vorrichtung zum Betätigen von Festplatten erzeugt werden, und elektrostatisches Transportverfahren
EP0977180B1 (de) 1998-07-30 2005-02-09 STMicroelectronics S.r.l. Verfahren zur Herstellung eines Aktuators für eine Festplattenvorrichtung, mit einem Lese-/Schreibkopf, einem Microaktuator und einer Aufhängung und die so erhaltene Aktuatorvorrichtung
EP0977349B1 (de) 1998-07-30 2005-07-06 STMicroelectronics S.r.l. Fernbedienbarer integrierter Microantrieb, insbesondere für einen Lese/Schreibköpf einer Festplattenanlage
DE69831237D1 (de) 1998-09-30 2005-09-22 St Microelectronics Srl Integrierter Hochleistungs-Microantrieb insbesondere für einen Lese/Schreib-Kopf in Festplattenlaufwerken
US6215222B1 (en) 1999-03-30 2001-04-10 Agilent Technologies, Inc. Optical cross-connect switch using electrostatic surface actuators
US6621191B1 (en) * 1999-05-13 2003-09-16 Matsushita Electric Industrial Co., Inc. Structure containing organic molecular layer and use thereof
US20020009256A1 (en) * 1999-07-20 2002-01-24 Memlink Ltd. Variable optical attenuator and beam splitter
KR100464312B1 (ko) * 1999-10-21 2004-12-31 삼성전자주식회사 최적 형상의 판 전극을 갖는 회전 구동 마이크로액츄에이터
US6603562B1 (en) * 1999-10-29 2003-08-05 Yokogawa Electric Corporation Two-dimensional positioning apparatus and method for measuring laser light from the apparatus
US6362946B1 (en) 1999-11-02 2002-03-26 Varian Semiconductor Equipment Associates, Inc. Electrostatic wafer clamp having electrostatic seal for retaining gas
US6538873B1 (en) * 1999-11-02 2003-03-25 Varian Semiconductor Equipment Associates, Inc. Active electrostatic seal and electrostatic vacuum pump
US6253001B1 (en) 2000-01-20 2001-06-26 Agilent Technologies, Inc. Optical switches using dual axis micromirrors
US6525864B1 (en) 2000-07-20 2003-02-25 Nayna Networks, Inc. Integrated mirror array and circuit device
US6541892B2 (en) 2001-01-16 2003-04-01 Agilent Technologies, Inc. Actuator with a flexure arrangement to accommodate a long range of motion
US6771851B1 (en) 2001-06-19 2004-08-03 Nayna Networks Fast switching method for a micro-mirror device for optical switching applications
US7334443B2 (en) * 2002-02-22 2008-02-26 Master Lock Company Llc Radio frequency electronic lock
US6966882B2 (en) 2002-11-25 2005-11-22 Tibion Corporation Active muscle assistance device and method
US7239065B2 (en) * 2003-07-08 2007-07-03 Tibion Corporation Electrostatic actuator with fault tolerant electrode structure
JP4464638B2 (ja) * 2003-08-20 2010-05-19 オリンパス株式会社 静電アクチュエータ
US7265476B1 (en) * 2003-10-31 2007-09-04 United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration MEMS micro-translation device with improved linear travel capability
JP4015119B2 (ja) * 2004-01-23 2007-11-28 ファナック株式会社 静電モータ
JP4027327B2 (ja) 2004-01-23 2007-12-26 ファナック株式会社 静電モータ
JP3886494B2 (ja) * 2004-01-23 2007-02-28 ファナック株式会社 固定子用及び移動子用のフィルム型電極及び静電モータ
US7623142B2 (en) * 2004-09-14 2009-11-24 Hewlett-Packard Development Company, L.P. Flexure
CN101080866A (zh) * 2004-12-16 2007-11-28 皇家飞利浦电子股份有限公司 用于移动物体的静电装置
JP4558524B2 (ja) * 2005-01-27 2010-10-06 住友重機械工業株式会社 リニアモータ及びその製造方法及びこのリニアモータを用いたステージ装置
JP4008453B2 (ja) * 2005-04-13 2007-11-14 ファナック株式会社 静電モータ用電極の製造方法、静電モータ用電極及び静電モータ
JP4621577B2 (ja) * 2005-10-27 2011-01-26 アルプス電気株式会社 静電アクチュエータ及びその駆動方法
US7811189B2 (en) * 2005-12-30 2010-10-12 Tibion Corporation Deflector assembly
JP5216590B2 (ja) 2006-08-31 2013-06-19 三洋電機株式会社 静電動作装置
US7902490B2 (en) * 2007-01-30 2011-03-08 Xtreme Energetics, Inc. Solid-state sun tracker
US8353854B2 (en) * 2007-02-14 2013-01-15 Tibion Corporation Method and devices for moving a body joint
US20100011768A1 (en) * 2007-06-03 2010-01-21 James Scott Hacsi Pyrodielectrophoretic Heat Engine And Method Of Energy Conversion
US7924495B1 (en) 2007-06-04 2011-04-12 Xtreme Energetics, Inc. Active-matrix sun tracker
JP5033561B2 (ja) * 2007-09-26 2012-09-26 三洋電機株式会社 静電発電装置
WO2009099671A2 (en) * 2008-02-08 2009-08-13 Tibion Corporation Multi-fit orthotic and mobility assistance apparatus
US20090236932A1 (en) * 2008-03-24 2009-09-24 Sanyo Electric Co., Ltd. Electrostatic acting device
US20090306548A1 (en) * 2008-06-05 2009-12-10 Bhugra Kern S Therapeutic method and device for rehabilitation
US8274244B2 (en) * 2008-08-14 2012-09-25 Tibion Corporation Actuator system and method for extending a joint
US8058823B2 (en) * 2008-08-14 2011-11-15 Tibion Corporation Actuator system with a multi-motor assembly for extending and flexing a joint
JP5277834B2 (ja) * 2008-09-24 2013-08-28 大日本印刷株式会社 静電アクチュエータ
US8639455B2 (en) 2009-02-09 2014-01-28 Alterg, Inc. Foot pad device and method of obtaining weight data
US20100204620A1 (en) * 2009-02-09 2010-08-12 Smith Jonathan A Therapy and mobility assistance system
US9358590B2 (en) 2011-03-23 2016-06-07 Sri International Electroadhesive surface cleaner
JP5916950B2 (ja) * 2012-06-11 2016-05-11 エスアールアイ インターナショナルＳＲＩ Ｉｎｔｅｒｎａｔｉｏｎａｌ 電気吸着表面クリーナ
US9889058B2 (en) 2013-03-15 2018-02-13 Alterg, Inc. Orthotic device drive system and method
US9748867B2 (en) * 2015-08-03 2017-08-29 General Electric Company Control system for linear switched capacitive devices
WO2019236595A1 (en) * 2018-06-08 2019-12-12 President And Fellows Of Harvard College Mesoscale electrostatic film actuator
US11101746B2 (en) * 2018-12-13 2021-08-24 Beijing Voyager Technology Co., Ltd. Bipolar staggered comb drive for bidirectional MEMS actuation

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US2058732A (en) * 1934-12-04 1936-10-27 James T Barkelew Terminal voltage regulation for electrostatic generators
JPS322256B1 (de) * 1951-03-13 1957-04-12
JPS285260B1 (de) * 1952-11-21 1953-10-14
US3469118A (en) * 1966-06-15 1969-09-23 Nat Electrostatics Corp High voltage electrostatic generator
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US3729925A (en) * 1969-06-03 1973-05-01 Gen Time Corp Drive arrangement for timekeeping system
US3889138A (en) * 1971-10-28 1975-06-10 Atomic Energy Authority Uk Electrostatic generator
US4095155A (en) * 1975-03-13 1978-06-13 Rca Corporation Direction reversing direct current motors and their control
US4230978A (en) * 1978-02-24 1980-10-28 Compugraphic Corporation Impulse drive system
SU694962A1 (ru) * 1978-06-21 1979-10-30 Куйбышевский Авиационный Институт Им.Академика С.П.Королева Электростатический двигатель
JPS5662077A (en) * 1979-10-22 1981-05-27 Niles Parts Co Ltd Electric turning device
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JPS6387181A (ja) * 1986-09-27 1988-04-18 Kanichiro Sugano 静電４相電界回転装置
US4754185A (en) * 1986-10-16 1988-06-28 American Telephone And Telegraph Company, At&T Bell Laboratories Micro-electrostatic motor
JPS63136980A (ja) * 1986-11-28 1988-06-09 Canon Inc 静電アクチユエ−タ
JPS63136979A (ja) * 1986-11-28 1988-06-09 Canon Inc 静電アクチユエ−タ
JPS63136982A (ja) * 1986-11-28 1988-06-09 Canon Inc 静電アクチユエ−タ
US4922164A (en) * 1988-10-03 1990-05-01 Sarcos Group Eccentric motion motor
JPH0691754B2 (ja) * 1989-04-24 1994-11-14 新技術事業団 フィルムを利用した接触型静電アクチュエータ
US5239222A (en) * 1989-04-24 1993-08-24 Fujitsu Limited Electrostatic actuator using films
CH680322A5 (de) * 1990-02-09 1992-07-31 Asulab Sa
WO1991012650A1 (fr) * 1990-02-09 1991-08-22 Asulab S.A. Micromoteur electrostatique a champ radial realise par microfabrication photolithographique et procede de realisation d'un tel micromoteur
WO1991016757A1 (en) * 1990-04-16 1991-10-31 Fujitsu Limited Electrostatic actuator
US5187399A (en) * 1991-12-19 1993-02-16 The Trustees Of Princeton University Levitated micromotor
JPH0678566A (ja) * 1992-08-25 1994-03-18 Kanagawa Kagaku Gijutsu Akad 静電アクチュエータ

Also Published As

Publication number Publication date
EP0482205A4 (en) 1992-10-21
EP0482205A1 (de) 1992-04-29
US5378954A (en) 1995-01-03
DE69122022D1 (de) 1996-10-17
US5585683A (en) 1996-12-17
WO1991016757A1 (en) 1991-10-31
EP0482205B1 (de) 1996-09-11

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8328 Change in the person/name/address of the agent

Representative=s name: SEEGER SEEGER LINDNER PARTNERSCHAFT PATENTANWAELTE

8339 Ceased/non-payment of the annual fee