FI955157A - Mikrogyrometri - Google Patents

Mikrogyrometri Download PDF

Info

Publication number
FI955157A
FI955157A FI955157A FI955157A FI955157A FI 955157 A FI955157 A FI 955157A FI 955157 A FI955157 A FI 955157A FI 955157 A FI955157 A FI 955157A FI 955157 A FI955157 A FI 955157A
Authority
FI
Finland
Prior art keywords
meter
micro gyro
gyro
micro
Prior art date
Application number
FI955157A
Other languages
English (en)
Swedish (sv)
Other versions
FI955157A0 (fi
Inventor
Henri Fima
Sylvie Pedraza Ramos
Original Assignee
Sextant Avionique
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sextant Avionique filed Critical Sextant Avionique
Publication of FI955157A0 publication Critical patent/FI955157A0/fi
Publication of FI955157A publication Critical patent/FI955157A/fi

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5733—Structural details or topology
    • G01C19/5755—Structural details or topology the devices having a single sensing mass

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
FI955157A 1994-10-28 1995-10-27 Mikrogyrometri FI955157A (fi)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9413146A FR2726361B1 (fr) 1994-10-28 1994-10-28 Microgyrometre

Publications (2)

Publication Number Publication Date
FI955157A0 FI955157A0 (fi) 1995-10-27
FI955157A true FI955157A (fi) 1996-04-29

Family

ID=9468472

Family Applications (1)

Application Number Title Priority Date Filing Date
FI955157A FI955157A (fi) 1994-10-28 1995-10-27 Mikrogyrometri

Country Status (5)

Country Link
US (1) US5610334A (fi)
EP (1) EP0709653B1 (fi)
DE (1) DE69522165T2 (fi)
FI (1) FI955157A (fi)
FR (1) FR2726361B1 (fi)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19530007C2 (de) * 1995-08-16 1998-11-26 Bosch Gmbh Robert Drehratensensor
JP3090024B2 (ja) * 1996-01-22 2000-09-18 株式会社村田製作所 角速度センサ
JP3039364B2 (ja) * 1996-03-11 2000-05-08 株式会社村田製作所 角速度センサ
JPH09318649A (ja) * 1996-05-30 1997-12-12 Texas Instr Japan Ltd 複合センサ
US6250156B1 (en) 1996-05-31 2001-06-26 The Regents Of The University Of California Dual-mass micromachined vibratory rate gyroscope
US5992233A (en) * 1996-05-31 1999-11-30 The Regents Of The University Of California Micromachined Z-axis vibratory rate gyroscope
JP3603501B2 (ja) * 1996-09-25 2004-12-22 株式会社村田製作所 角速度検出装置
KR100393183B1 (ko) * 1996-10-31 2003-10-17 삼성전자주식회사 마이크로액츄에이터의상보형정전구동장치
JP3702607B2 (ja) * 1997-02-28 2005-10-05 株式会社村田製作所 角速度検出素子
JP3931405B2 (ja) * 1997-04-10 2007-06-13 日産自動車株式会社 角速度センサ
US6122961A (en) * 1997-09-02 2000-09-26 Analog Devices, Inc. Micromachined gyros
US6233530B1 (en) * 1997-09-15 2001-05-15 Entela, Inc. Control system for a failure mode testing system
US6035715A (en) * 1997-09-15 2000-03-14 Entela, Inc, Method and apparatus for optimizing the design of a product
FR2770899B1 (fr) * 1997-11-07 1999-12-10 Commissariat Energie Atomique Microgyrometre vibrant
FR2772469B1 (fr) * 1997-12-15 2000-01-07 Commissariat Energie Atomique Gyroscope vibrant
JP3666335B2 (ja) * 2000-01-14 2005-06-29 株式会社村田製作所 角速度センサ
US6453743B1 (en) 2000-03-10 2002-09-24 Melexis Compensated integrated micro-machined yaw rate sensor
WO2001067041A2 (en) * 2000-03-10 2001-09-13 Melexis Nv Compensated integrated circuit gyro sensor
EP1443018A1 (en) * 2003-01-15 2004-08-04 STMicroelectronics S.r.l. Rotational micro-electromechanical (mems) structure with parallel electrodes
JP4161950B2 (ja) * 2004-02-27 2008-10-08 セイコーエプソン株式会社 マイクロメカニカル静電アクチュエータ
WO2011162239A1 (ja) * 2010-06-21 2011-12-29 大日本印刷株式会社 力学量センサ
US11781867B2 (en) * 2020-12-03 2023-10-10 Murata Manufacturing Co., Ltd. Piezoelectric frequency-modulated gyroscope

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4022464C2 (de) * 1990-07-14 2000-12-28 Bosch Gmbh Robert Beschleunigungssensor
FR2667157B1 (fr) * 1990-09-25 1994-06-10 Sextant Avionique Micro-accelerometre a resonateurs et procede de fabrication.
US5377544A (en) * 1991-12-19 1995-01-03 Motorola, Inc. Rotational vibration gyroscope
US5349855A (en) * 1992-04-07 1994-09-27 The Charles Stark Draper Laboratory, Inc. Comb drive micromechanical tuning fork gyro
US5359863A (en) * 1993-06-29 1994-11-01 Conair Corporation Refrigerant conservation system

Also Published As

Publication number Publication date
FR2726361A1 (fr) 1996-05-03
FI955157A0 (fi) 1995-10-27
EP0709653A1 (fr) 1996-05-01
US5610334A (en) 1997-03-11
FR2726361B1 (fr) 1997-01-17
DE69522165D1 (de) 2001-09-20
DE69522165T2 (de) 2002-05-02
EP0709653B1 (fr) 2001-08-16

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