DE69506050D1 - Mikro-Greifer - Google Patents
Mikro-GreiferInfo
- Publication number
- DE69506050D1 DE69506050D1 DE69506050T DE69506050T DE69506050D1 DE 69506050 D1 DE69506050 D1 DE 69506050D1 DE 69506050 T DE69506050 T DE 69506050T DE 69506050 T DE69506050 T DE 69506050T DE 69506050 D1 DE69506050 D1 DE 69506050D1
- Authority
- DE
- Germany
- Prior art keywords
- micro gripper
- gripper
- micro
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C99/00—Subject matter not provided for in other groups of this subclass
- B81C99/0005—Apparatus specially adapted for the manufacture or treatment of microstructural devices or systems, or methods for manufacturing the same
- B81C99/002—Apparatus for assembling MEMS, e.g. micromanipulators
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J15/00—Gripping heads and other end effectors
- B25J15/02—Gripping heads and other end effectors servo-actuated
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J7/00—Micromanipulators
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
- B25J9/12—Programme-controlled manipulators characterised by positioning means for manipulator elements electric
Landscapes
- Engineering & Computer Science (AREA)
- Robotics (AREA)
- Mechanical Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Micromachines (AREA)
- Manipulator (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6190625A JPH0852673A (ja) | 1994-08-12 | 1994-08-12 | 探針付き超小型グリッパー |
JP28014394 | 1994-11-15 | ||
JP7021207A JPH08192382A (ja) | 1995-01-13 | 1995-01-13 | マイクログリッパー |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69506050D1 true DE69506050D1 (de) | 1998-12-24 |
DE69506050T2 DE69506050T2 (de) | 1999-05-20 |
Family
ID=27283335
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69506050T Expired - Fee Related DE69506050T2 (de) | 1994-08-12 | 1995-03-09 | Mikro-Greifer |
Country Status (2)
Country | Link |
---|---|
EP (1) | EP0696497B1 (de) |
DE (1) | DE69506050T2 (de) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19737009B4 (de) * | 1997-08-26 | 2007-01-11 | INSTITUT FüR MIKROTECHNIK MAINZ GMBH | Mikrogreifer und Verfahren für die Getriebemontage |
WO2002016089A2 (en) * | 2000-08-25 | 2002-02-28 | Danmarks Tekniske Universitet | Fabrication and application of nano-manipulators with induced growth |
KR100804031B1 (ko) * | 2001-11-29 | 2008-02-18 | 가부시키가이샤 테크노 네트워크 시코쿠 | 나노 그리퍼 및 그 제조방법 |
CA2551191C (en) * | 2006-06-23 | 2016-04-05 | Keekyoung Kim | Electrothermally-driven mems microgrippers with integrated dual-axis capacitive force sensors |
CN101837945A (zh) * | 2010-03-22 | 2010-09-22 | 大连理工大学 | 电热微夹钳封装装置 |
CN108927483B (zh) * | 2018-07-26 | 2023-11-03 | 江苏四达重工有限公司 | 用于铆银点机的银点夹取装置 |
CN114012632B (zh) * | 2021-12-13 | 2023-05-19 | 昆山昆博智能感知产业技术研究院有限公司 | 一种平面微型线圈电磁微夹持器 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4610475A (en) * | 1984-09-06 | 1986-09-09 | Microflex Technology, Inc. | Piezoelectric polymer micromanipulator |
US4715637A (en) * | 1985-04-17 | 1987-12-29 | Hitachi, Ltd. | Grip device for sheet-like objects |
DE3814617A1 (de) * | 1988-04-29 | 1989-11-09 | Fraunhofer Ges Forschung | Greifvorrichtung |
US5332275A (en) * | 1991-11-27 | 1994-07-26 | Microscience Group, Inc. | Microgripper |
JP3109220B2 (ja) * | 1992-03-09 | 2000-11-13 | 株式会社ニコン | マイクログリッパー |
JPH0732276A (ja) * | 1993-07-19 | 1995-02-03 | Nikon Corp | 超小型グリッパー及び超小型グリッパー駆動装置 |
-
1995
- 1995-03-09 EP EP19950103418 patent/EP0696497B1/de not_active Expired - Lifetime
- 1995-03-09 DE DE69506050T patent/DE69506050T2/de not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
EP0696497B1 (de) | 1998-11-18 |
DE69506050T2 (de) | 1999-05-20 |
EP0696497A1 (de) | 1996-02-14 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |