DE69522165D1 - Mikrokreisel - Google Patents

Mikrokreisel

Info

Publication number
DE69522165D1
DE69522165D1 DE69522165T DE69522165T DE69522165D1 DE 69522165 D1 DE69522165 D1 DE 69522165D1 DE 69522165 T DE69522165 T DE 69522165T DE 69522165 T DE69522165 T DE 69522165T DE 69522165 D1 DE69522165 D1 DE 69522165D1
Authority
DE
Germany
Prior art keywords
micro gyroscope
gyroscope
micro
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69522165T
Other languages
English (en)
Other versions
DE69522165T2 (de
Inventor
Henri Fima
Ramos Sylvie Pedraza
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Thales Avionics SAS
Original Assignee
Thales Avionics SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Thales Avionics SAS filed Critical Thales Avionics SAS
Publication of DE69522165D1 publication Critical patent/DE69522165D1/de
Application granted granted Critical
Publication of DE69522165T2 publication Critical patent/DE69522165T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5733—Structural details or topology
    • G01C19/5755—Structural details or topology the devices having a single sensing mass

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
DE69522165T 1994-10-28 1995-10-24 Mikrokreisel Expired - Fee Related DE69522165T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9413146A FR2726361B1 (fr) 1994-10-28 1994-10-28 Microgyrometre

Publications (2)

Publication Number Publication Date
DE69522165D1 true DE69522165D1 (de) 2001-09-20
DE69522165T2 DE69522165T2 (de) 2002-05-02

Family

ID=9468472

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69522165T Expired - Fee Related DE69522165T2 (de) 1994-10-28 1995-10-24 Mikrokreisel

Country Status (5)

Country Link
US (1) US5610334A (de)
EP (1) EP0709653B1 (de)
DE (1) DE69522165T2 (de)
FI (1) FI955157A (de)
FR (1) FR2726361B1 (de)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19530007C2 (de) * 1995-08-16 1998-11-26 Bosch Gmbh Robert Drehratensensor
JP3090024B2 (ja) * 1996-01-22 2000-09-18 株式会社村田製作所 角速度センサ
JP3039364B2 (ja) * 1996-03-11 2000-05-08 株式会社村田製作所 角速度センサ
JPH09318649A (ja) * 1996-05-30 1997-12-12 Texas Instr Japan Ltd 複合センサ
US5992233A (en) * 1996-05-31 1999-11-30 The Regents Of The University Of California Micromachined Z-axis vibratory rate gyroscope
US6250156B1 (en) 1996-05-31 2001-06-26 The Regents Of The University Of California Dual-mass micromachined vibratory rate gyroscope
JP3603501B2 (ja) * 1996-09-25 2004-12-22 株式会社村田製作所 角速度検出装置
KR100393183B1 (ko) * 1996-10-31 2003-10-17 삼성전자주식회사 마이크로액츄에이터의상보형정전구동장치
JP3702607B2 (ja) * 1997-02-28 2005-10-05 株式会社村田製作所 角速度検出素子
JP3931405B2 (ja) * 1997-04-10 2007-06-13 日産自動車株式会社 角速度センサ
US6122961A (en) * 1997-09-02 2000-09-26 Analog Devices, Inc. Micromachined gyros
US6035715A (en) * 1997-09-15 2000-03-14 Entela, Inc, Method and apparatus for optimizing the design of a product
US6233530B1 (en) * 1997-09-15 2001-05-15 Entela, Inc. Control system for a failure mode testing system
FR2770899B1 (fr) * 1997-11-07 1999-12-10 Commissariat Energie Atomique Microgyrometre vibrant
FR2772469B1 (fr) * 1997-12-15 2000-01-07 Commissariat Energie Atomique Gyroscope vibrant
JP3666335B2 (ja) * 2000-01-14 2005-06-29 株式会社村田製作所 角速度センサ
AU2001239397A1 (en) * 2000-03-10 2001-09-17 Melexis Nv Compensated integrated micro-machined yaw rate sensor with quadrature switching
US6453743B1 (en) 2000-03-10 2002-09-24 Melexis Compensated integrated micro-machined yaw rate sensor
EP1443018A1 (de) * 2003-01-15 2004-08-04 STMicroelectronics S.r.l. Rotierbar mikroelektromechanische (MEMS) Struktur mit parallelen Elektroden
JP4161950B2 (ja) * 2004-02-27 2008-10-08 セイコーエプソン株式会社 マイクロメカニカル静電アクチュエータ
CN102959403B (zh) * 2010-06-21 2015-11-25 大日本印刷株式会社 力学量传感器

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4022464C2 (de) * 1990-07-14 2000-12-28 Bosch Gmbh Robert Beschleunigungssensor
FR2667157B1 (fr) * 1990-09-25 1994-06-10 Sextant Avionique Micro-accelerometre a resonateurs et procede de fabrication.
US5377544A (en) * 1991-12-19 1995-01-03 Motorola, Inc. Rotational vibration gyroscope
US5349855A (en) * 1992-04-07 1994-09-27 The Charles Stark Draper Laboratory, Inc. Comb drive micromechanical tuning fork gyro
US5359863A (en) * 1993-06-29 1994-11-01 Conair Corporation Refrigerant conservation system

Also Published As

Publication number Publication date
FI955157A0 (fi) 1995-10-27
FI955157A (fi) 1996-04-29
FR2726361B1 (fr) 1997-01-17
EP0709653B1 (de) 2001-08-16
US5610334A (en) 1997-03-11
FR2726361A1 (fr) 1996-05-03
EP0709653A1 (de) 1996-05-01
DE69522165T2 (de) 2002-05-02

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee