DE69833154D1 - Mikrovorrichtung - Google Patents
MikrovorrichtungInfo
- Publication number
- DE69833154D1 DE69833154D1 DE69833154T DE69833154T DE69833154D1 DE 69833154 D1 DE69833154 D1 DE 69833154D1 DE 69833154 T DE69833154 T DE 69833154T DE 69833154 T DE69833154 T DE 69833154T DE 69833154 D1 DE69833154 D1 DE 69833154D1
- Authority
- DE
- Germany
- Prior art keywords
- microdevice
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1629—Manufacturing processes etching wet etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14201—Structure of print heads with piezoelectric elements
- B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1607—Production of print heads with piezoelectric elements
- B41J2/161—Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1628—Manufacturing processes etching dry etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1631—Manufacturing processes photolithography
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1632—Manufacturing processes machining
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1632—Manufacturing processes machining
- B41J2/1634—Manufacturing processes machining laser machining
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1635—Manufacturing processes dividing the wafer into individual chips
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2002/14387—Front shooter
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
- Micromachines (AREA)
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP25221397 | 1997-09-17 | ||
JP25221397 | 1997-09-17 | ||
JP30743697 | 1997-11-10 | ||
JP30743697 | 1997-11-10 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69833154D1 true DE69833154D1 (de) | 2006-04-06 |
DE69833154T2 DE69833154T2 (de) | 2006-08-24 |
Family
ID=26540601
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69833154T Expired - Lifetime DE69833154T2 (de) | 1997-09-17 | 1998-09-17 | Mikrovorrichtung |
Country Status (3)
Country | Link |
---|---|
US (2) | US6209994B1 (de) |
EP (1) | EP0903234B1 (de) |
DE (1) | DE69833154T2 (de) |
Families Citing this family (25)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6209994B1 (en) * | 1997-09-17 | 2001-04-03 | Seiko Epson Corporation | Micro device, ink-jet printing head, method of manufacturing them and ink-jet recording device |
EP1199171A3 (de) * | 2000-10-16 | 2003-04-09 | Seiko Epson Corporation | Tintenstrahlaufzeichnungskopf und Tintenstrahlaufzeichnungsapparat |
JP3491688B2 (ja) | 2000-10-16 | 2004-01-26 | セイコーエプソン株式会社 | インクジェット式記録ヘッド |
JP2002331663A (ja) * | 2001-03-08 | 2002-11-19 | Seiko Epson Corp | インクジェット式記録ヘッド及びインクジェット式記録装置 |
JP4304881B2 (ja) * | 2001-05-18 | 2009-07-29 | リコープリンティングシステムズ株式会社 | インクジェットプリントヘッド |
TW506908B (en) * | 2001-09-06 | 2002-10-21 | Nanodynamics Inc | Piezoelectric ink jet print head and the manufacturing process thereof |
US7149012B2 (en) * | 2001-11-09 | 2006-12-12 | Po-Hua Fang | Image scanner |
CN100398322C (zh) * | 2001-12-11 | 2008-07-02 | 株式会社理光 | 液滴排放头及其制造方法 |
US7381341B2 (en) * | 2002-07-04 | 2008-06-03 | Seiko Epson Corporation | Method of manufacturing liquid jet head |
US20040134881A1 (en) * | 2002-07-04 | 2004-07-15 | Seiko Epson Corporation | Method of manufacturing liquid jet head |
US6924584B2 (en) * | 2002-12-13 | 2005-08-02 | Palo Alto Research Center Inc. | Piezoelectric transducers utilizing sub-diaphragms |
JP2005104038A (ja) * | 2003-09-30 | 2005-04-21 | Fuji Photo Film Co Ltd | 吐出ヘッド及び液吐出装置 |
US7634855B2 (en) * | 2004-08-06 | 2009-12-22 | Canon Kabushiki Kaisha | Method for producing ink jet recording head |
JP2006231909A (ja) * | 2005-01-26 | 2006-09-07 | Seiko Epson Corp | 液体噴射ヘッド及び液体噴射装置 |
JP4929598B2 (ja) * | 2005-02-07 | 2012-05-09 | 富士ゼロックス株式会社 | 液滴吐出ヘッド、及び、液滴吐出装置 |
US7448733B2 (en) * | 2005-03-08 | 2008-11-11 | Fuji Xerox Co., Ltd. | Liquid droplet ejecting head and liquid droplet ejecting device |
US7549733B2 (en) * | 2005-04-07 | 2009-06-23 | Xerox Corporation | Diaphragm plate with partially-etched port |
TWI258392B (en) * | 2005-11-30 | 2006-07-21 | Benq Corp | Droplet generators |
EP1997637B1 (de) * | 2007-05-30 | 2012-09-12 | Océ-Technologies B.V. | Verfahren zur Herstellung einer piezoelektrischen Tintenstrahlvorrichtung |
JP5213650B2 (ja) * | 2007-11-12 | 2013-06-19 | 京セラ株式会社 | インクジェットヘッド構造体、およびインクジェット記録装置 |
US8550601B2 (en) | 2011-03-23 | 2013-10-08 | Xerox Corporation | Use of photoresist material as an interstitial fill for PZT printhead fabrication |
US8757782B2 (en) | 2011-11-21 | 2014-06-24 | Seiko Epson Corporation | Liquid ejecting head and liquid ejecting apparatus |
JP5991061B2 (ja) * | 2012-07-30 | 2016-09-14 | セイコーエプソン株式会社 | 液体噴射ヘッド、および、液体噴射装置 |
EP2974867B1 (de) * | 2013-03-15 | 2023-12-06 | Konica Minolta, Inc. | Tintenstrahlkopf, verfahren zur herstellung davon und tintenstrahldrucker |
JP6842446B2 (ja) * | 2018-09-12 | 2021-03-17 | 株式会社東芝 | ノズルヘッド、および液滴塗布装置 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5265315A (en) | 1990-11-20 | 1993-11-30 | Spectra, Inc. | Method of making a thin-film transducer ink jet head |
JPH0516373A (ja) * | 1991-07-17 | 1993-01-26 | Fujitsu Ltd | インクジエツトヘツドの製造方法 |
JPH05286131A (ja) | 1992-04-15 | 1993-11-02 | Rohm Co Ltd | インクジェットプリントヘッドの製造方法及びインクジェットプリントヘッド |
US5366454A (en) | 1993-03-17 | 1994-11-22 | La Corporation De L'ecole Polytechnique | Implantable medication dispensing device |
JP3244946B2 (ja) * | 1994-06-22 | 2002-01-07 | 株式会社リコー | インクジェットヘッド |
US5632841A (en) | 1995-04-04 | 1997-05-27 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Thin layer composite unimorph ferroelectric driver and sensor |
EP0810676B1 (de) * | 1996-05-27 | 2002-08-28 | Ngk Insulators, Ltd. | Piezoelektrisches Element des Dünnschichttyps |
US5852237A (en) | 1997-05-28 | 1998-12-22 | Lockheed Martin Corporation | Apparatus and method for measuring the side slip of a low observable aircraft |
US6209994B1 (en) * | 1997-09-17 | 2001-04-03 | Seiko Epson Corporation | Micro device, ink-jet printing head, method of manufacturing them and ink-jet recording device |
-
1998
- 1998-09-15 US US09/153,034 patent/US6209994B1/en not_active Expired - Lifetime
- 1998-09-17 EP EP98117646A patent/EP0903234B1/de not_active Expired - Lifetime
- 1998-09-17 DE DE69833154T patent/DE69833154T2/de not_active Expired - Lifetime
-
2001
- 2001-01-23 US US09/766,842 patent/US6382781B2/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP0903234A3 (de) | 2000-07-05 |
EP0903234A2 (de) | 1999-03-24 |
EP0903234B1 (de) | 2006-01-11 |
US6382781B2 (en) | 2002-05-07 |
US6209994B1 (en) | 2001-04-03 |
DE69833154T2 (de) | 2006-08-24 |
US20010010529A1 (en) | 2001-08-02 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |