JP4929598B2 - 液滴吐出ヘッド、及び、液滴吐出装置 - Google Patents
液滴吐出ヘッド、及び、液滴吐出装置 Download PDFInfo
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- JP4929598B2 JP4929598B2 JP2005030672A JP2005030672A JP4929598B2 JP 4929598 B2 JP4929598 B2 JP 4929598B2 JP 2005030672 A JP2005030672 A JP 2005030672A JP 2005030672 A JP2005030672 A JP 2005030672A JP 4929598 B2 JP4929598 B2 JP 4929598B2
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Description
前記液体プール室が、前記圧電素子基板と前記上部基板との間に構成されて、前記圧力室と対向する位置に配置され、前記上部基板を間に置いて前記圧電素子基板と反対側に構成され、前記液体プール室へ液体を供給する共通プール室を有し、前記上部基板に、前記共通プール室から前記液体プール室へ液体を供給するための貫通口が形成されていること、を特徴とする。
上記構成によれば、隔壁部材の一部で、液体供給路、及び上部基板と圧電素子基板との間の空洞が構成されるので、簡易に、圧力室へ液体供給を行なうことができると共に、振動板の変形が阻害されないための空洞を構成することができる。また、容易に、圧電素子を液体から隔離することができる。
インクジェット記録装置10は、図1に示すように、用紙を送り出す用紙供給部12と、用紙の姿勢を制御するレジ調整部14と、インク滴を吐出して用紙に画像形成する記録ヘッド部16と、記録ヘッド部16のメンテナンスを行なうメンテナンス部18とを備える記録部20と、記録部20で画像形成された用紙を排出する排出部22とから基本的に構成される。
金属配線74には、バンプ78が設けられている。バンプ78は、後述する圧電素子基板50の上部電極58と電気接続され、ガラス基板72に実装された後述の駆動IC77の厚みよりも厚くなるようにされている。このパンプ78により、駆動IC77と圧電素子54とが金属配線74を介して電気接続される。
次に、本発明の第2実施形態について説明する。なお、第1実施形態と同様の部分には同一の符号を付して図示し、詳細な説明は省略する。
そして次に、図25(B)で示すように、第2支持基板44の貫通孔44Aから接着剤剥離溶液(有機エタノールアミン溶液)を注入して樹脂接着剤46を選択的に溶解させることで、第2支持基板44を流路基板80から剥離処理する。
32 インクジェット記録ヘッド
34 インクジェット記録ヘッド
50 圧電素子基板
51 圧電素子基板
52 振動板
54 圧電素子
55 下部インクプール室
61 中空
68 リブ隔壁
69 リブ隔壁
70 第1上部基板
71 第2上部基板
73 貫通口
75 薄膜トランジスタ
80 流路基板
82 圧力室隔壁
84 ノズル
86 圧力室
90 インクプール部材
94 共通インクプール室
100 インクジェット記録装置
Claims (8)
- 液滴を吐出するノズル、及び、圧力室隔壁によって区画され前記ノズルと連通して液体が充填される圧力室、の形成された流路基板と、
前記圧力室の一部を構成する振動板、及び、この振動板を変位させる圧電素子、を含んで構成される圧電素子基板と、
前記圧電素子基板を間に置いて前記圧力室と反対側に構成され、前記圧力室へ供給する液体をプールする液体プール室と、
前記圧電素子基板を間に置いて前記圧力室と反対側に前記圧電素子基板と離間して対向するように設けられた上部基板と、
前記圧電素子基板と前記上部基板との間に配置され、前記流路基板を平面視したときの前記圧力室隔壁に対応する位置に沿って設けられ、前記圧電素子基板及び前記上部基板に当接される隔壁部材と、
を備え、
前記隔壁部材が、前記圧電素子基板を平面視して各々の前記圧電素子の外側を囲むように配置され、各々の前記圧電素子の外側を囲む位置で前記圧電素子基板及び前記上部基板に当接され、
前記液体プール室が、前記圧電素子基板と前記上部基板との間に構成されて、前記圧力室と対向する位置に配置され、
前記上部基板を間に置いて前記圧電素子基板と反対側に構成され、前記液体プール室へ液体を供給する共通プール室を有し、前記上部基板に、前記共通プール室から前記液体プール室へ液体を供給するための貫通口が形成されていること、
を特徴とする液滴吐出ヘッド。 - 前記隔壁部材は、前記圧電素子基板を平面視して各々の前記圧電素子間に配置される部分に離間部分が構成され、前記液体プール室の全領域が連通されるように配置されていること、
を特徴とする請求項1に記載の液滴吐出ヘッド。 - 前記貫通口が、複数の前記圧力室毎に1つ形成されていること、を特徴とする請求項1または請求項2に記載の液滴吐出ヘッド。
- 前記隔壁部材が、前記圧電素子基板を平面視して各々の前記圧電素子の外側を囲み個別室が構成されるように配置されていること、
を特徴とする請求項1に記載の液滴吐出ヘッド。 - 前記液体プール室が、前記上部基板を間に置いて前記圧電素子基板と反対側に構成され、
前記隔壁部材の一部で、前記液体プール室から前記圧力室へ液体を供給する液体供給路、及び、前記上部基板と前記圧電素子基板との間の空洞が構成されていること、
を特徴とする請求項1に記載の液滴吐出ヘッド。 - 前記空洞が、大気に連通していることを特徴とする請求項5に記載の液滴吐出ヘッド。
- 前記ノズルが、マトリクス状に配設されていることを特徴とする、請求項1〜至請求項5のいずれか1項に記載の液滴吐出ヘッド。
- 請求項1乃至請求項7のいずれか1項に記載の液滴吐出ヘッドを備えた液滴吐出装置。
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US11/221,318 US7448731B2 (en) | 2005-02-07 | 2005-09-07 | Liquid droplet ejecting head and liquid droplet ejecting device |
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US7527361B2 (en) * | 2005-07-27 | 2009-05-05 | Brother Kogyo Kabushiki Kaisha | Liquid transporting apparatus, actuator unit, and method of producing liquid transporting apparatus |
US8011765B2 (en) | 2007-02-14 | 2011-09-06 | Ricoh Company, Ltd. | Liquid feeding member for liquid ejection head, liquid ejection device, and image forming apparatus |
EP1997637B1 (en) * | 2007-05-30 | 2012-09-12 | Océ-Technologies B.V. | Method of manufacturing a piezoelectric ink jet device |
JP2009208243A (ja) * | 2008-02-29 | 2009-09-17 | Seiko Epson Corp | 圧電装置およびその製造方法、液体噴射ヘッド、並びに、プリンタ |
WO2010033774A2 (en) * | 2008-09-18 | 2010-03-25 | Fujifilm Dimatix, Inc. | Bonding on silicon substrate having a groove |
US20110250403A1 (en) * | 2008-09-18 | 2011-10-13 | Fujifilm Corporation | Bonding on silicon substrate |
JP5716431B2 (ja) * | 2011-02-04 | 2015-05-13 | 株式会社リコー | インクジェット記録ヘッド、インクカートリッジ、インクジェット記録装置、および、画像形成装置。 |
JP5754178B2 (ja) * | 2011-03-07 | 2015-07-29 | 株式会社リコー | インクジェットヘッド及びインクジェット記録装置 |
EP2716461B1 (en) * | 2011-05-31 | 2018-05-23 | Konica Minolta, Inc. | Ink-jet head and ink-jet drawing device including same |
JP5734144B2 (ja) * | 2011-09-13 | 2015-06-10 | 東芝テック株式会社 | インクジェットヘッド |
US8727508B2 (en) * | 2011-11-10 | 2014-05-20 | Xerox Corporation | Bonded silicon structure for high density print head |
GB2527476B (en) * | 2013-04-30 | 2020-11-25 | Hewlett Packard Development Co | Fluid ejection device with ink feedhole bridge |
JP6992266B2 (ja) * | 2017-03-23 | 2022-01-13 | セイコーエプソン株式会社 | 液体吐出ヘッド及び液体吐出装置 |
JP2019014183A (ja) * | 2017-07-10 | 2019-01-31 | セイコーエプソン株式会社 | 圧電デバイス、液体噴射ヘッド及び液体噴射装置 |
JP7056059B2 (ja) * | 2017-09-29 | 2022-04-19 | ブラザー工業株式会社 | 複合基板 |
JP6714881B2 (ja) * | 2018-09-27 | 2020-07-01 | セイコーエプソン株式会社 | 液体噴射ヘッドおよび液体噴射装置 |
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JPH02301445A (ja) | 1989-05-17 | 1990-12-13 | Seiko Epson Corp | 液体噴射ヘッド |
US5659346A (en) * | 1994-03-21 | 1997-08-19 | Spectra, Inc. | Simplified ink jet head |
US5757400A (en) * | 1996-02-01 | 1998-05-26 | Spectra, Inc. | High resolution matrix ink jet arrangement |
JPH09323414A (ja) | 1996-06-05 | 1997-12-16 | Brother Ind Ltd | インクジェット記録装置 |
US6209994B1 (en) * | 1997-09-17 | 2001-04-03 | Seiko Epson Corporation | Micro device, ink-jet printing head, method of manufacturing them and ink-jet recording device |
JP2000158645A (ja) * | 1998-11-25 | 2000-06-13 | Matsushita Electric Ind Co Ltd | インクジェットヘッド |
JP2001260351A (ja) * | 2000-03-21 | 2001-09-25 | Seiko Epson Corp | インクジェット式記録ヘッド及びインクジェット式記録装置 |
JP2001287362A (ja) * | 2000-04-10 | 2001-10-16 | Seiko Epson Corp | インクジェット式記録ヘッド及びインクジェット式記録装置 |
JP2003165212A (ja) * | 2001-11-30 | 2003-06-10 | Brother Ind Ltd | インクジェットヘッド |
US6808254B2 (en) * | 2000-11-30 | 2004-10-26 | Brother Kogyo Kabushiki Kaisha | Ink jet printer head |
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