AU2001239397A1 - Compensated integrated micro-machined yaw rate sensor with quadrature switching - Google Patents

Compensated integrated micro-machined yaw rate sensor with quadrature switching

Info

Publication number
AU2001239397A1
AU2001239397A1 AU2001239397A AU3939701A AU2001239397A1 AU 2001239397 A1 AU2001239397 A1 AU 2001239397A1 AU 2001239397 A AU2001239397 A AU 2001239397A AU 3939701 A AU3939701 A AU 3939701A AU 2001239397 A1 AU2001239397 A1 AU 2001239397A1
Authority
AU
Australia
Prior art keywords
machined
yaw rate
rate sensor
integrated micro
quadrature switching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001239397A
Inventor
William R. Betts
Roger Diels
Francois-Xavier Musalem
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Melexis NV
Original Assignee
Melexis NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US09/523,319 external-priority patent/US6453743B1/en
Priority claimed from US09/522,667 external-priority patent/US6439050B1/en
Application filed by Melexis NV filed Critical Melexis NV
Publication of AU2001239397A1 publication Critical patent/AU2001239397A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/084—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass the mass being suspended at more than one of its sides, e.g. membrane-type suspension, so as to permit multi-axis movement of the mass
AU2001239397A 2000-03-10 2001-03-12 Compensated integrated micro-machined yaw rate sensor with quadrature switching Abandoned AU2001239397A1 (en)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US09/523,319 US6453743B1 (en) 2000-03-10 2000-03-10 Compensated integrated micro-machined yaw rate sensor
US09/522,667 US6439050B1 (en) 2000-03-10 2000-03-10 Compensated integrated micro-machined yaw rate sensor with quadrature switching
US09522667 2000-03-10
US09523319 2000-03-10
PCT/GB2001/001074 WO2001067041A2 (en) 2000-03-10 2001-03-12 Compensated integrated circuit gyro sensor

Publications (1)

Publication Number Publication Date
AU2001239397A1 true AU2001239397A1 (en) 2001-09-17

Family

ID=27060897

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001239397A Abandoned AU2001239397A1 (en) 2000-03-10 2001-03-12 Compensated integrated micro-machined yaw rate sensor with quadrature switching

Country Status (2)

Country Link
AU (1) AU2001239397A1 (en)
WO (1) WO2001067041A2 (en)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5203208A (en) * 1991-04-29 1993-04-20 The Charles Stark Draper Laboratory Symmetrical micromechanical gyroscope
FR2726361B1 (en) * 1994-10-28 1997-01-17 Sextant Avionique MICROGYROMETER
US5992233A (en) * 1996-05-31 1999-11-30 The Regents Of The University Of California Micromachined Z-axis vibratory rate gyroscope
FR2772469B1 (en) * 1997-12-15 2000-01-07 Commissariat Energie Atomique VIBRATING GYROSCOPE

Also Published As

Publication number Publication date
WO2001067041A2 (en) 2001-09-13
WO2001067041A3 (en) 2001-12-20

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