WO2001067041A3 - Compensated integrated circuit gyro sensor - Google Patents

Compensated integrated circuit gyro sensor Download PDF

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Publication number
WO2001067041A3
WO2001067041A3 PCT/GB2001/001074 GB0101074W WO0167041A3 WO 2001067041 A3 WO2001067041 A3 WO 2001067041A3 GB 0101074 W GB0101074 W GB 0101074W WO 0167041 A3 WO0167041 A3 WO 0167041A3
Authority
WO
WIPO (PCT)
Prior art keywords
integrated circuit
machined
elements
gyro sensor
electronic circuitry
Prior art date
Application number
PCT/GB2001/001074
Other languages
French (fr)
Other versions
WO2001067041A2 (en
Inventor
Francois-Xavier Musalem
William R Betts
Roger Diels
Original Assignee
Melexis Nv
Musalem Francois Xavier
William R Betts
Roger Diels
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US09/522,667 external-priority patent/US6439050B1/en
Priority claimed from US09/523,319 external-priority patent/US6453743B1/en
Application filed by Melexis Nv, Musalem Francois Xavier, William R Betts, Roger Diels filed Critical Melexis Nv
Priority to AU2001239397A priority Critical patent/AU2001239397A1/en
Publication of WO2001067041A2 publication Critical patent/WO2001067041A2/en
Publication of WO2001067041A3 publication Critical patent/WO2001067041A3/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/084—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass the mass being suspended at more than one of its sides, e.g. membrane-type suspension, so as to permit multi-axis movement of the mass

Abstract

An integrated circuit combines micro-machined elements, piezoelectric elements and signal processing components as part of a compensated oscillating gyroscopic sensor for angular motion detection. An oscillating mass is supported on a number of flexible beams micro-machined into an integrated circuit device, such as a silicon CMOS device. Several Piezo-electric elements, deposited on the beams, are provided to excite the mass and to measure the accelerations. Integrated in the device are electronic circuitry that initiates and maintains the oscillation and electronic circuitry that detects and measures the subsequent motion. Additional circuitry is also provided to eliminate the effects of quadrature oscillation and to determine the Coriolis acceleration and thus the magnitude of the external perturbing velocity.
PCT/GB2001/001074 2000-03-10 2001-03-12 Compensated integrated circuit gyro sensor WO2001067041A2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU2001239397A AU2001239397A1 (en) 2000-03-10 2001-03-12 Compensated integrated micro-machined yaw rate sensor with quadrature switching

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US09/523,319 2000-03-10
US09/522,667 US6439050B1 (en) 2000-03-10 2000-03-10 Compensated integrated micro-machined yaw rate sensor with quadrature switching
US09/523,319 US6453743B1 (en) 2000-03-10 2000-03-10 Compensated integrated micro-machined yaw rate sensor
US09/522,667 2000-03-10

Publications (2)

Publication Number Publication Date
WO2001067041A2 WO2001067041A2 (en) 2001-09-13
WO2001067041A3 true WO2001067041A3 (en) 2001-12-20

Family

ID=27060897

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/GB2001/001074 WO2001067041A2 (en) 2000-03-10 2001-03-12 Compensated integrated circuit gyro sensor

Country Status (2)

Country Link
AU (1) AU2001239397A1 (en)
WO (1) WO2001067041A2 (en)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5203208A (en) * 1991-04-29 1993-04-20 The Charles Stark Draper Laboratory Symmetrical micromechanical gyroscope
US5610334A (en) * 1994-10-28 1997-03-11 Sextant Avionique Microgyrometer
FR2772469A1 (en) * 1997-12-15 1999-06-18 Commissariat Energie Atomique VIBRATING GYROSCOPE
US5992233A (en) * 1996-05-31 1999-11-30 The Regents Of The University Of California Micromachined Z-axis vibratory rate gyroscope

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5203208A (en) * 1991-04-29 1993-04-20 The Charles Stark Draper Laboratory Symmetrical micromechanical gyroscope
US5610334A (en) * 1994-10-28 1997-03-11 Sextant Avionique Microgyrometer
US5992233A (en) * 1996-05-31 1999-11-30 The Regents Of The University Of California Micromachined Z-axis vibratory rate gyroscope
FR2772469A1 (en) * 1997-12-15 1999-06-18 Commissariat Energie Atomique VIBRATING GYROSCOPE

Also Published As

Publication number Publication date
AU2001239397A1 (en) 2001-09-17
WO2001067041A2 (en) 2001-09-13

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