EP0784754B1 - Mikromechanischer aktor - Google Patents
Mikromechanischer aktor Download PDFInfo
- Publication number
- EP0784754B1 EP0784754B1 EP95934081A EP95934081A EP0784754B1 EP 0784754 B1 EP0784754 B1 EP 0784754B1 EP 95934081 A EP95934081 A EP 95934081A EP 95934081 A EP95934081 A EP 95934081A EP 0784754 B1 EP0784754 B1 EP 0784754B1
- Authority
- EP
- European Patent Office
- Prior art keywords
- piston
- actuator
- duct
- housing
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000000034 method Methods 0.000 claims description 8
- 239000000758 substrate Substances 0.000 claims description 8
- 239000012530 fluid Substances 0.000 claims description 4
- 238000000926 separation method Methods 0.000 claims 2
- 238000005530 etching Methods 0.000 claims 1
- 238000000465 moulding Methods 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 3
- 238000005461 lubrication Methods 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 230000005469 synchrotron radiation Effects 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 238000005553 drilling Methods 0.000 description 1
- 238000005323 electroforming Methods 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000006116 polymerization reaction Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229920002545 silicone oil Polymers 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B15/00—Fluid-actuated devices for displacing a member from one position to another; Gearing associated therewith
- F15B15/08—Characterised by the construction of the motor unit
- F15B15/14—Characterised by the construction of the motor unit of the straight-cylinder type
- F15B15/1423—Component parts; Constructional details
- F15B15/1428—Cylinders
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B15/00—Fluid-actuated devices for displacing a member from one position to another; Gearing associated therewith
- F15B15/08—Characterised by the construction of the motor unit
- F15B15/14—Characterised by the construction of the motor unit of the straight-cylinder type
- F15B15/1423—Component parts; Constructional details
- F15B15/1447—Pistons; Piston to piston rod assemblies
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15C—FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING OR CONTROL PURPOSES
- F15C5/00—Manufacture of fluid circuit elements; Manufacture of assemblages of such elements integrated circuits
Definitions
- the present invention relates to a micromechanical actuator to generate forces of the order of a few mN to in the range of about 100 mN with dimensions in the range of some 100 ⁇ m, with the features in the preamble of the claim.
- Micromechanical actuators are used for a wide variety of purposes used, the currently achievable forces are still very low are. The known actuators can therefore only for purposes can be used in which small forces below the mN range suffice. Such an actuator is such.
- the actuator has a piston with piston rod in a housing larger dimensions is moved by a vapor bubble. The The piston is sealed in the housing by the surface tension the vapor bubble wall. The piston itself is through two leaf springs on the side of the piston rod and held. Because the actuator uses traditional silicon technology is produced, it has no structures high aspect ratio. This inevitably leads to minor Cylinder dimensions and therefore also due to geometry the limitations of the surface tension of the vapor bubble only at low achievable forces.
- the present invention proposes to achieve this object the features set out in the characterizing part of the claims 1 and 2 are listed. Particularly advantageous is an actuator according to the invention, which is produced according to claim 3 is.
- the actuator shown represents a movable microstructure represented by a combination of the LIGA process (X-ray depth lithography with electroforming and plastic impression) is produced using a sacrificial layer technique.
- This manufacturing method enables microstructures with structural heights up to several 100 ⁇ m with lateral dimensions of a few ⁇ m to manufacture. Through the additional application of sacrificial layer technology you are able to manufacture free moving parts. The principle of manufacture will be described later.
- the actuator essentially consists of a flat housing 1, which sits on a substrate plate 2 and firmly connected to it is.
- a channel 3 is present in the housing 1, in which an axially longitudinally movable piston 4 reciprocates is on one side a guide rod 11 and on its other side a piston rod 12 is attached, respectively seen in the stroke direction.
- Channel 3 opens out with one End in a pressure chamber 5, which has a bore 6 with a is pressurized fluid, which is thereby by this side exerts a force on the piston 4.
- This also serves to discharge the fluid.
- a bearing block 7 and 8 together with the housing 1 also attached to the substrate plate 2.
- the bearing blocks 7 and 8 have slots 9 and 10, wherein in the slot 9 the guide rod 11 and in the slot 10 the Piston rod 12 slides.
- the piston 4 by means of Bearing blocks 7 and 8 guided in the lifting or working direction.
- the bearing blocks in their geometry (width, bearing clearance) designed so that the piston cannot tilt.
- the piston itself has a lateral extension of approximately 400 x 450 ⁇ m.
- the gap width between piston 4 and channel 3 is about 2 ⁇ m.
- the piston 4 and the rods 11 and 12 in Channel 3 and in the slots 9 and 10 are z. B. with Fluid lubricated silicone oil.
- the piston rod 12 projecting from the bearing block 8 transmits the force generated by the piston 4 to the outside more elements shown.
- One application is e.g. the Apply a bending force to a rod.
- the one in the figures shown embodiment of the actuator is after manufacture open upwards using the LIGA process.
- the starting point is a radiation-sensitive one up to several 100 ⁇ m thick Plastic layer.
- This so-called resist is by direct polymerization on a substrate with a sacrificial layer and electroplating start layer applied.
- the 3 - 7 ⁇ m thick sacrificial layer made of Ti was pre-structured, so that at the subsequent, adjusted x-ray radiation later moving parts of the microstructure, in the above described Actuator the piston 4 with the rods 11 and 12, on the sacrificial layer come to rest.
- the immovable areas which are anchored to the substrate like the actuator housing 1 and the bearing blocks 11 and 12, there is no sacrificial layer.
- the resist is structured by adjusted synchrotron radiation, the mask used here opposite the sacrificial layer is aligned.
- the synchrotron radiation has the advantage that at a small wavelength (0.2 to 0.5 nm) has a high energy density and great parallelism. This makes it possible to cover the entire resist thickness to achieve high-precision imaging of the X-ray mask.
- the Accuracy is in the submicron range over the entire structure height. With lateral dimensions of the structures in the micrometer range one reaches an aspect ratio (i.e. the ratio from structure height to minimal lateral expansion) from up to loo.
- the chemical composition changes as a result of the irradiation of the resist so that during subsequent development the irradiated areas are detached and you get a negative the desired structure.
- the gaps created in this way are galvanically filled with a metal. Again Irradiate without a mask to remove the unexposed Resists give the desired microstructure. Eventually the Ti layer is selectively etched away from the other materials, so that the part of the Structure, here the piston 4, is freely movable.
- the microstructures polished to achieve a smooth surface that is suitable for tight closing of the end plate is necessary.
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Mechanical Engineering (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Theoretical Computer Science (AREA)
- Micromachines (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Description
- 1
- Aktorgehäuse
- 2
- Substratplatte
- 3
- Kanal
- 4
- Kolben
- 5
- Druckkammer
- 6
- Bohrung
- 7
- Lagerblock
- 8
- Lagerblock
- 9
- Schlitz
- 10
- Schlitz
- 11
- Führungsstange
- 12
- Kolbenstange
- 13
- Nut
Claims (3)
- Mikromechanischer Aktor zur Erzeugung von Kräften der Größenordnung einiger mN bis in den Bereich von etwa 100 mN mit Abmessungen im Bereich einiger 100 µm, mit den folgenden Merkmalen:a) einem in einem Kanal beweglichen Kolben, der von der einen Seite her aus einer Druckkammer durch ein druckführendes Medium beaufschlagt wird und derb) an der anderen Seite eine Kolbenstange zur Abnahme der erzeugten Kraft aufweist, wobeic) der Kolben mittels Führungselementen in Hubrichtung längsbeweglich geführt ist,d) der Aktor weist ein flaches Gehäuse (1) auf, welches fest auf einer Substratplatte (2) sitzt und in dem ein Kanal (3) verläuft, in welchem ein axial längsbeweglicher Kolben (4) hin- und herbewegbar ist,e) der Kanal (3) mündet mit seinem einen Ende in einer Druckkammer (5), die über eine Bohrung (6) mit einem druckführenden Fluid beaufschlagt wird,f) an der einen Seite des Kolbens (4) ist eine Führungsstange (11) und an seiner anderen Seite eine Kolbenstange (12) befestigt,g) vor und hinter dem Kolben (4) ist, von der Druckseite aus gesehen, jeweils ein Lagerblock (7 und 8) zusammen mit dem Gehäuse (1) ebenfalls auf der Platte (2) befestigt,h) die Lagerblöcke (7 und 8) weisen Schlitze (9 und 10) zur Führung des Kolbens (4) auf, wobei in dem Schlitz (9) die Führungsstange (11) und in dem Schlitz (10) die Kolbenstange (12) gleitet,i) das Gehäuse (1) ist nach oben durch eine Deckplatte verschlossen.
- Aktor nach Anspruch 1, dadurch gekennzeichnet, daß der Kolben (4) sowie die Stangen (11 und 12) im Kanal (3) und in den Schlitzen (9 und 10) fluidisch geschmiert werden.
- Aktor nach Anspruch 1 oder 2, dadurch gekennzeichnet, daß das Gehäuse (1), die Lagerblöcke (7 und 8) und der Kolben (4) d. h. die gesamte Struktur des Aktors gemeinsam in den selben Arbeitsgängen auf röntgenlithographischem, röntgentiefenlithographisch-galvanoplastischem oder auf hiervon abgeleiteten abformtechnischem bzw. abformtechnisch-galvanoplastischem Wege auf dem Substrat der Grundplatte hergestellt werden, wobei die mechanische Trennung der beweglichen Teile dadurch erfolgt, daß in den entsprechenden Bereichen des Substrats zunächst lokal eine Trennschicht aufgebracht wird, die zum Schluß ätztechnisch wieder entfernt wird.
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE4436008 | 1994-10-08 | ||
DE4436008A DE4436008C1 (de) | 1994-10-08 | 1994-10-08 | Mikromechanischer Aktor |
PCT/EP1995/003707 WO1996011342A1 (de) | 1994-10-08 | 1995-09-20 | Mikromechanischer aktor |
Publications (2)
Publication Number | Publication Date |
---|---|
EP0784754A1 EP0784754A1 (de) | 1997-07-23 |
EP0784754B1 true EP0784754B1 (de) | 1998-04-22 |
Family
ID=6530283
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP95934081A Expired - Lifetime EP0784754B1 (de) | 1994-10-08 | 1995-09-20 | Mikromechanischer aktor |
Country Status (4)
Country | Link |
---|---|
US (1) | US6055899A (de) |
EP (1) | EP0784754B1 (de) |
DE (2) | DE4436008C1 (de) |
WO (1) | WO1996011342A1 (de) |
Families Citing this family (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
AU2001265160A1 (en) * | 2000-06-02 | 2001-12-17 | The Regents Of The University Of California | Controlling physical motion with electrolytically formed bubbles |
US6595006B2 (en) | 2001-02-13 | 2003-07-22 | Technology Applications, Inc. | Miniature reciprocating heat pumps and engines |
US7785098B1 (en) | 2001-06-05 | 2010-08-31 | Mikro Systems, Inc. | Systems for large area micro mechanical systems |
EP1404501B1 (de) | 2001-06-05 | 2012-08-01 | Mikro Systems Inc. | Verfahren und guss-system zur herstellung dreidimensionaler vorrichtungen |
US7141812B2 (en) * | 2002-06-05 | 2006-11-28 | Mikro Systems, Inc. | Devices, methods, and systems involving castings |
US6490960B1 (en) * | 2001-07-11 | 2002-12-10 | Xerox Corporation | Muscle-emulating PC board actuator |
US7277476B2 (en) * | 2003-04-01 | 2007-10-02 | Nokia Siemens Network Oy | Determining the correlation between received samples and available replica samples |
US7012264B2 (en) * | 2004-06-04 | 2006-03-14 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
EP2559533B1 (de) | 2008-09-26 | 2020-04-15 | United Technologies Corporation | Gussteil |
US8479375B2 (en) | 2010-01-13 | 2013-07-09 | The Aerospace Corporation | Method of making an embedded electromagnetic device |
US9146377B2 (en) * | 2010-01-13 | 2015-09-29 | The Aerospace Corporation | Photostructured optical devices and methods for making same |
US20110167941A1 (en) * | 2010-01-13 | 2011-07-14 | The Aerospace Corporation | Photostructured Mechanical Devices and Methods for Making Same |
US8410660B2 (en) | 2010-01-13 | 2013-04-02 | The Aerospace Corporation | Acoustic devices embedded in photostructurable ceramics |
US8940241B2 (en) * | 2010-01-13 | 2015-01-27 | The Aerospace Corporation | Photostructured chemical devices and methods for making same |
US8813824B2 (en) | 2011-12-06 | 2014-08-26 | Mikro Systems, Inc. | Systems, devices, and/or methods for producing holes |
CN103673794B (zh) * | 2013-10-09 | 2015-07-29 | 北京理工大学 | 一种火工驱动活塞式微作动器 |
CN105564649B (zh) * | 2016-01-28 | 2017-11-21 | 兰州空间技术物理研究所 | 一种适用于月球表面环境条件的火工作动器 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3611880A (en) * | 1969-05-19 | 1971-10-12 | Res Engineering Co | Operator and method of lubrication thereof |
DE3814150A1 (de) * | 1988-04-27 | 1989-11-09 | Draegerwerk Ag | Ventilanordnung aus mikrostrukturierten komponenten |
JPH01315839A (ja) * | 1988-06-15 | 1989-12-20 | Nec Corp | パッチ施工状況出力方式 |
JP2972246B2 (ja) * | 1989-12-04 | 1999-11-08 | 日本電気株式会社 | 微小生体内可動機械 |
JP2536233B2 (ja) * | 1990-05-01 | 1996-09-18 | トヨタ自動車株式会社 | 前後輪操舵車の後輪操舵制御装置 |
JP3000653B2 (ja) * | 1990-10-17 | 2000-01-17 | 日産自動車株式会社 | ワーク・クランプ装置 |
JPH05272457A (ja) * | 1992-01-30 | 1993-10-19 | Terumo Corp | マイクロポンプおよびその製造方法 |
JPH05202910A (ja) * | 1992-01-30 | 1993-08-10 | Terumo Corp | 流体駆動型アクチュエータ |
JPH05346105A (ja) * | 1992-06-11 | 1993-12-27 | Aisin Seiki Co Ltd | マイクロアクチュエータ |
-
1994
- 1994-10-08 DE DE4436008A patent/DE4436008C1/de not_active Expired - Fee Related
-
1995
- 1995-09-20 EP EP95934081A patent/EP0784754B1/de not_active Expired - Lifetime
- 1995-09-20 DE DE59502013T patent/DE59502013D1/de not_active Expired - Fee Related
- 1995-09-20 WO PCT/EP1995/003707 patent/WO1996011342A1/de active IP Right Grant
-
1997
- 1997-04-07 US US08/835,351 patent/US6055899A/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
WO1996011342A1 (de) | 1996-04-18 |
EP0784754A1 (de) | 1997-07-23 |
US6055899A (en) | 2000-05-02 |
DE59502013D1 (de) | 1998-05-28 |
DE4436008C1 (de) | 1995-10-05 |
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