EP0784754B1 - Actionneur micromecanique - Google Patents

Actionneur micromecanique Download PDF

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Publication number
EP0784754B1
EP0784754B1 EP95934081A EP95934081A EP0784754B1 EP 0784754 B1 EP0784754 B1 EP 0784754B1 EP 95934081 A EP95934081 A EP 95934081A EP 95934081 A EP95934081 A EP 95934081A EP 0784754 B1 EP0784754 B1 EP 0784754B1
Authority
EP
European Patent Office
Prior art keywords
piston
actuator
duct
housing
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP95934081A
Other languages
German (de)
English (en)
Other versions
EP0784754A1 (fr
Inventor
Klaus Feit
Mathias Heckele
Patrick Ruther
Klaus Weindel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Forschungszentrum Karlsruhe GmbH
Original Assignee
Forschungszentrum Karlsruhe GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Forschungszentrum Karlsruhe GmbH filed Critical Forschungszentrum Karlsruhe GmbH
Publication of EP0784754A1 publication Critical patent/EP0784754A1/fr
Application granted granted Critical
Publication of EP0784754B1 publication Critical patent/EP0784754B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B15/00—Fluid-actuated devices for displacing a member from one position to another; Gearing associated therewith
    • F15B15/08—Characterised by the construction of the motor unit
    • F15B15/14—Characterised by the construction of the motor unit of the straight-cylinder type
    • F15B15/1423—Component parts; Constructional details
    • F15B15/1428—Cylinders
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B15/00—Fluid-actuated devices for displacing a member from one position to another; Gearing associated therewith
    • F15B15/08—Characterised by the construction of the motor unit
    • F15B15/14—Characterised by the construction of the motor unit of the straight-cylinder type
    • F15B15/1423—Component parts; Constructional details
    • F15B15/1447—Pistons; Piston to piston rod assemblies
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15C—FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING OR CONTROL PURPOSES
    • F15C5/00—Manufacture of fluid circuit elements; Manufacture of assemblages of such elements integrated circuits

Definitions

  • the present invention relates to a micromechanical actuator to generate forces of the order of a few mN to in the range of about 100 mN with dimensions in the range of some 100 ⁇ m, with the features in the preamble of the claim.
  • Micromechanical actuators are used for a wide variety of purposes used, the currently achievable forces are still very low are. The known actuators can therefore only for purposes can be used in which small forces below the mN range suffice. Such an actuator is such.
  • the actuator has a piston with piston rod in a housing larger dimensions is moved by a vapor bubble. The The piston is sealed in the housing by the surface tension the vapor bubble wall. The piston itself is through two leaf springs on the side of the piston rod and held. Because the actuator uses traditional silicon technology is produced, it has no structures high aspect ratio. This inevitably leads to minor Cylinder dimensions and therefore also due to geometry the limitations of the surface tension of the vapor bubble only at low achievable forces.
  • the present invention proposes to achieve this object the features set out in the characterizing part of the claims 1 and 2 are listed. Particularly advantageous is an actuator according to the invention, which is produced according to claim 3 is.
  • the actuator shown represents a movable microstructure represented by a combination of the LIGA process (X-ray depth lithography with electroforming and plastic impression) is produced using a sacrificial layer technique.
  • This manufacturing method enables microstructures with structural heights up to several 100 ⁇ m with lateral dimensions of a few ⁇ m to manufacture. Through the additional application of sacrificial layer technology you are able to manufacture free moving parts. The principle of manufacture will be described later.
  • the actuator essentially consists of a flat housing 1, which sits on a substrate plate 2 and firmly connected to it is.
  • a channel 3 is present in the housing 1, in which an axially longitudinally movable piston 4 reciprocates is on one side a guide rod 11 and on its other side a piston rod 12 is attached, respectively seen in the stroke direction.
  • Channel 3 opens out with one End in a pressure chamber 5, which has a bore 6 with a is pressurized fluid, which is thereby by this side exerts a force on the piston 4.
  • This also serves to discharge the fluid.
  • a bearing block 7 and 8 together with the housing 1 also attached to the substrate plate 2.
  • the bearing blocks 7 and 8 have slots 9 and 10, wherein in the slot 9 the guide rod 11 and in the slot 10 the Piston rod 12 slides.
  • the piston 4 by means of Bearing blocks 7 and 8 guided in the lifting or working direction.
  • the bearing blocks in their geometry (width, bearing clearance) designed so that the piston cannot tilt.
  • the piston itself has a lateral extension of approximately 400 x 450 ⁇ m.
  • the gap width between piston 4 and channel 3 is about 2 ⁇ m.
  • the piston 4 and the rods 11 and 12 in Channel 3 and in the slots 9 and 10 are z. B. with Fluid lubricated silicone oil.
  • the piston rod 12 projecting from the bearing block 8 transmits the force generated by the piston 4 to the outside more elements shown.
  • One application is e.g. the Apply a bending force to a rod.
  • the one in the figures shown embodiment of the actuator is after manufacture open upwards using the LIGA process.
  • the starting point is a radiation-sensitive one up to several 100 ⁇ m thick Plastic layer.
  • This so-called resist is by direct polymerization on a substrate with a sacrificial layer and electroplating start layer applied.
  • the 3 - 7 ⁇ m thick sacrificial layer made of Ti was pre-structured, so that at the subsequent, adjusted x-ray radiation later moving parts of the microstructure, in the above described Actuator the piston 4 with the rods 11 and 12, on the sacrificial layer come to rest.
  • the immovable areas which are anchored to the substrate like the actuator housing 1 and the bearing blocks 11 and 12, there is no sacrificial layer.
  • the resist is structured by adjusted synchrotron radiation, the mask used here opposite the sacrificial layer is aligned.
  • the synchrotron radiation has the advantage that at a small wavelength (0.2 to 0.5 nm) has a high energy density and great parallelism. This makes it possible to cover the entire resist thickness to achieve high-precision imaging of the X-ray mask.
  • the Accuracy is in the submicron range over the entire structure height. With lateral dimensions of the structures in the micrometer range one reaches an aspect ratio (i.e. the ratio from structure height to minimal lateral expansion) from up to loo.
  • the chemical composition changes as a result of the irradiation of the resist so that during subsequent development the irradiated areas are detached and you get a negative the desired structure.
  • the gaps created in this way are galvanically filled with a metal. Again Irradiate without a mask to remove the unexposed Resists give the desired microstructure. Eventually the Ti layer is selectively etched away from the other materials, so that the part of the Structure, here the piston 4, is freely movable.
  • the microstructures polished to achieve a smooth surface that is suitable for tight closing of the end plate is necessary.

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Theoretical Computer Science (AREA)
  • Micromachines (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

Claims (3)

  1. Actionneur micromécanique servant à produire des forces de l'ordre de grandeur de quelques mN jusqu'à la zone d'environ 100 mN, avec des dimensions de l'ordre de quelques centaines de µm, avec les caractéristiques suivantes :
    a) un piston mobile dans un canal, qui est alimenté par un côté à partir d'une chambre de pression avec un fluide sous pression et qui
    b) présente sur l'autre côté une tige de piston servant à enlever la force produite,
    c) le piston étant guidé au moyen d'éléments de guidage en se déplaçant longitudinalement dans le sens de la course,
    caractérisé par des autres caractéristiques :
    d) l'actionneur présente un boítier plat (1), qui repose de façon solidaire sur une plaque de substrat (2), et dans laquelle s'étend un canal (3), dans lequel peut aller et venir un piston mobile axialement dans le sens longitudinal (4),
    e) le canal (3) débouche par l'une de ses extrémités dans une chambre de pression (5), qui est alimentée via un alésage (6) par un fluide sous pression,
    f) sur l'un des côtés du piston (4) est fixée une tige de guidage (11) et à son autre extrémité une tige de piston (12),
    g) devant et derrière le piston (4), vu du côté sous pression, on a fixé un bloc de palier (7 et 8) en même temps que le boítier (1) également sur la plaque (2),
    h) les blocs de palier (7 et 8) présentent des fentes (9 et 10) servant à guider le piston (4), la tige de guidage (11) glissant dans la fente (9) et la tige de piston (12) glissant dans la fente (10),
    i) le boítier (1) est fermé vers le haut par un couvercle.
  2. Actionneur selon la revendication 1,
    caractérisé en ce que
    le piston (4) ainsi que les tiges (11 et 12) sont lubrifiées de façon fluide dans le canal (3) et dans les fentes (9 et 10).
  3. Actionneur selon la revendication 1 ou 2,
    caractérisé en ce que
    le boítier (1) les blocs de paliers (7 et 8) et le piston (4), c'est à dire la structure tout entière de l'actionneur sont fabriqués lors des mêmes séquence de travail sur le substrat de la plaque de base par voie lithographique aux rayons X, lithographique aux rayons X et galvanoplastique, ou par voie dérivée basée en déformation technique ou par une voie galvanoplastique basée en déformation technique, la séparation mécanique des pièces en mouvement ayant lieu grâce au fait que dans les zones correspondantes du substrat on met d'abord localement une couche de séparation, qui est enlevée pour finir par une technique de décapage.
EP95934081A 1994-10-08 1995-09-20 Actionneur micromecanique Expired - Lifetime EP0784754B1 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE4436008A DE4436008C1 (de) 1994-10-08 1994-10-08 Mikromechanischer Aktor
DE4436008 1994-10-08
PCT/EP1995/003707 WO1996011342A1 (fr) 1994-10-08 1995-09-20 Actionneur micromecanique

Publications (2)

Publication Number Publication Date
EP0784754A1 EP0784754A1 (fr) 1997-07-23
EP0784754B1 true EP0784754B1 (fr) 1998-04-22

Family

ID=6530283

Family Applications (1)

Application Number Title Priority Date Filing Date
EP95934081A Expired - Lifetime EP0784754B1 (fr) 1994-10-08 1995-09-20 Actionneur micromecanique

Country Status (4)

Country Link
US (1) US6055899A (fr)
EP (1) EP0784754B1 (fr)
DE (2) DE4436008C1 (fr)
WO (1) WO1996011342A1 (fr)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001094823A1 (fr) * 2000-06-02 2001-12-13 The Regents Of The University Of California Commande de mouvement physique avec des bulles formees par voie electrolytique
US6595006B2 (en) 2001-02-13 2003-07-22 Technology Applications, Inc. Miniature reciprocating heat pumps and engines
US7141812B2 (en) * 2002-06-05 2006-11-28 Mikro Systems, Inc. Devices, methods, and systems involving castings
US7785098B1 (en) 2001-06-05 2010-08-31 Mikro Systems, Inc. Systems for large area micro mechanical systems
CA2702143C (fr) 2001-06-05 2014-02-18 Mikro Systems, Inc. Procedes de fabrication de dispositifs tridimensionnels, et dispositifs crees par ces procedes
US6490960B1 (en) * 2001-07-11 2002-12-10 Xerox Corporation Muscle-emulating PC board actuator
US7277476B2 (en) * 2003-04-01 2007-10-02 Nokia Siemens Network Oy Determining the correlation between received samples and available replica samples
US7012264B2 (en) * 2004-06-04 2006-03-14 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
EP2559533B1 (fr) 2008-09-26 2020-04-15 United Technologies Corporation Pièce coulée
US8940241B2 (en) 2010-01-13 2015-01-27 The Aerospace Corporation Photostructured chemical devices and methods for making same
US9146377B2 (en) * 2010-01-13 2015-09-29 The Aerospace Corporation Photostructured optical devices and methods for making same
US20110167941A1 (en) * 2010-01-13 2011-07-14 The Aerospace Corporation Photostructured Mechanical Devices and Methods for Making Same
US8479375B2 (en) 2010-01-13 2013-07-09 The Aerospace Corporation Method of making an embedded electromagnetic device
US8410660B2 (en) 2010-01-13 2013-04-02 The Aerospace Corporation Acoustic devices embedded in photostructurable ceramics
US8813824B2 (en) 2011-12-06 2014-08-26 Mikro Systems, Inc. Systems, devices, and/or methods for producing holes
CN103673794B (zh) * 2013-10-09 2015-07-29 北京理工大学 一种火工驱动活塞式微作动器
CN105564649B (zh) * 2016-01-28 2017-11-21 兰州空间技术物理研究所 一种适用于月球表面环境条件的火工作动器

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3611880A (en) * 1969-05-19 1971-10-12 Res Engineering Co Operator and method of lubrication thereof
DE3814150A1 (de) * 1988-04-27 1989-11-09 Draegerwerk Ag Ventilanordnung aus mikrostrukturierten komponenten
JPH01315839A (ja) * 1988-06-15 1989-12-20 Nec Corp パッチ施工状況出力方式
JP2972246B2 (ja) * 1989-12-04 1999-11-08 日本電気株式会社 微小生体内可動機械
JP2536233B2 (ja) * 1990-05-01 1996-09-18 トヨタ自動車株式会社 前後輪操舵車の後輪操舵制御装置
JP3000653B2 (ja) * 1990-10-17 2000-01-17 日産自動車株式会社 ワーク・クランプ装置
JPH05202910A (ja) * 1992-01-30 1993-08-10 Terumo Corp 流体駆動型アクチュエータ
JPH05272457A (ja) * 1992-01-30 1993-10-19 Terumo Corp マイクロポンプおよびその製造方法
JPH05346105A (ja) * 1992-06-11 1993-12-27 Aisin Seiki Co Ltd マイクロアクチュエータ

Also Published As

Publication number Publication date
EP0784754A1 (fr) 1997-07-23
DE4436008C1 (de) 1995-10-05
WO1996011342A1 (fr) 1996-04-18
US6055899A (en) 2000-05-02
DE59502013D1 (de) 1998-05-28

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