EP0784754B1 - Micromechanical actuator - Google Patents

Micromechanical actuator Download PDF

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Publication number
EP0784754B1
EP0784754B1 EP95934081A EP95934081A EP0784754B1 EP 0784754 B1 EP0784754 B1 EP 0784754B1 EP 95934081 A EP95934081 A EP 95934081A EP 95934081 A EP95934081 A EP 95934081A EP 0784754 B1 EP0784754 B1 EP 0784754B1
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EP
European Patent Office
Prior art keywords
piston
actuator
duct
housing
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP95934081A
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German (de)
French (fr)
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EP0784754A1 (en
Inventor
Klaus Feit
Mathias Heckele
Patrick Ruther
Klaus Weindel
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Forschungszentrum Karlsruhe GmbH
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Forschungszentrum Karlsruhe GmbH
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B15/00—Fluid-actuated devices for displacing a member from one position to another; Gearing associated therewith
    • F15B15/08—Characterised by the construction of the motor unit
    • F15B15/14—Characterised by the construction of the motor unit of the straight-cylinder type
    • F15B15/1423—Component parts; Constructional details
    • F15B15/1428—Cylinders
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B15/00—Fluid-actuated devices for displacing a member from one position to another; Gearing associated therewith
    • F15B15/08—Characterised by the construction of the motor unit
    • F15B15/14—Characterised by the construction of the motor unit of the straight-cylinder type
    • F15B15/1423—Component parts; Constructional details
    • F15B15/1447—Pistons; Piston to piston rod assemblies
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15C—FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING OR CONTROL PURPOSES
    • F15C5/00—Manufacture of fluid circuit elements; Manufacture of assemblages of such elements integrated circuits

Definitions

  • the present invention relates to a micromechanical actuator to generate forces of the order of a few mN to in the range of about 100 mN with dimensions in the range of some 100 ⁇ m, with the features in the preamble of the claim.
  • Micromechanical actuators are used for a wide variety of purposes used, the currently achievable forces are still very low are. The known actuators can therefore only for purposes can be used in which small forces below the mN range suffice. Such an actuator is such.
  • the actuator has a piston with piston rod in a housing larger dimensions is moved by a vapor bubble. The The piston is sealed in the housing by the surface tension the vapor bubble wall. The piston itself is through two leaf springs on the side of the piston rod and held. Because the actuator uses traditional silicon technology is produced, it has no structures high aspect ratio. This inevitably leads to minor Cylinder dimensions and therefore also due to geometry the limitations of the surface tension of the vapor bubble only at low achievable forces.
  • the present invention proposes to achieve this object the features set out in the characterizing part of the claims 1 and 2 are listed. Particularly advantageous is an actuator according to the invention, which is produced according to claim 3 is.
  • the actuator shown represents a movable microstructure represented by a combination of the LIGA process (X-ray depth lithography with electroforming and plastic impression) is produced using a sacrificial layer technique.
  • This manufacturing method enables microstructures with structural heights up to several 100 ⁇ m with lateral dimensions of a few ⁇ m to manufacture. Through the additional application of sacrificial layer technology you are able to manufacture free moving parts. The principle of manufacture will be described later.
  • the actuator essentially consists of a flat housing 1, which sits on a substrate plate 2 and firmly connected to it is.
  • a channel 3 is present in the housing 1, in which an axially longitudinally movable piston 4 reciprocates is on one side a guide rod 11 and on its other side a piston rod 12 is attached, respectively seen in the stroke direction.
  • Channel 3 opens out with one End in a pressure chamber 5, which has a bore 6 with a is pressurized fluid, which is thereby by this side exerts a force on the piston 4.
  • This also serves to discharge the fluid.
  • a bearing block 7 and 8 together with the housing 1 also attached to the substrate plate 2.
  • the bearing blocks 7 and 8 have slots 9 and 10, wherein in the slot 9 the guide rod 11 and in the slot 10 the Piston rod 12 slides.
  • the piston 4 by means of Bearing blocks 7 and 8 guided in the lifting or working direction.
  • the bearing blocks in their geometry (width, bearing clearance) designed so that the piston cannot tilt.
  • the piston itself has a lateral extension of approximately 400 x 450 ⁇ m.
  • the gap width between piston 4 and channel 3 is about 2 ⁇ m.
  • the piston 4 and the rods 11 and 12 in Channel 3 and in the slots 9 and 10 are z. B. with Fluid lubricated silicone oil.
  • the piston rod 12 projecting from the bearing block 8 transmits the force generated by the piston 4 to the outside more elements shown.
  • One application is e.g. the Apply a bending force to a rod.
  • the one in the figures shown embodiment of the actuator is after manufacture open upwards using the LIGA process.
  • the starting point is a radiation-sensitive one up to several 100 ⁇ m thick Plastic layer.
  • This so-called resist is by direct polymerization on a substrate with a sacrificial layer and electroplating start layer applied.
  • the 3 - 7 ⁇ m thick sacrificial layer made of Ti was pre-structured, so that at the subsequent, adjusted x-ray radiation later moving parts of the microstructure, in the above described Actuator the piston 4 with the rods 11 and 12, on the sacrificial layer come to rest.
  • the immovable areas which are anchored to the substrate like the actuator housing 1 and the bearing blocks 11 and 12, there is no sacrificial layer.
  • the resist is structured by adjusted synchrotron radiation, the mask used here opposite the sacrificial layer is aligned.
  • the synchrotron radiation has the advantage that at a small wavelength (0.2 to 0.5 nm) has a high energy density and great parallelism. This makes it possible to cover the entire resist thickness to achieve high-precision imaging of the X-ray mask.
  • the Accuracy is in the submicron range over the entire structure height. With lateral dimensions of the structures in the micrometer range one reaches an aspect ratio (i.e. the ratio from structure height to minimal lateral expansion) from up to loo.
  • the chemical composition changes as a result of the irradiation of the resist so that during subsequent development the irradiated areas are detached and you get a negative the desired structure.
  • the gaps created in this way are galvanically filled with a metal. Again Irradiate without a mask to remove the unexposed Resists give the desired microstructure. Eventually the Ti layer is selectively etched away from the other materials, so that the part of the Structure, here the piston 4, is freely movable.
  • the microstructures polished to achieve a smooth surface that is suitable for tight closing of the end plate is necessary.

Description

Die vorliegende Erfindung betrifft einen mikromechanischen Aktor zur Erzeugung von Kräften der Größenordnung einiger mN bis in den Bereich von etwa 100 mN mit Abmessungen im Bereich einiger 100 µm, mit den Merkmalen im Oberbegriff des Patentanspruches.The present invention relates to a micromechanical actuator to generate forces of the order of a few mN to in the range of about 100 mN with dimensions in the range of some 100 µm, with the features in the preamble of the claim.

Mikromechanische Aktoren werden zu den verschiedensten Zwecken eingesetzt, wobei die derzeit erzielbaren Kräfte noch sehr gering sind. Die bekannten Aktoren können daher nur für Zwecke verwendet werden, bei denen geringe Kräfte unterhalb des mN-Bereiches ausreichen. Ein derartiger Aktor ist z. B. aus: Sniegowski, J. J.: "A Micro Actuation Mechanism Based on Liquid Vapor Surface Tension", 7th Intern. Conf. on Solid-State Sensors and Actuators, Yokohama 1993, bekannt. Der Aktor besitzt einen Kolben mit Kolbenstange, der in einem Gehäuse größerer Abmessungen durch eine Dampfblase bewegt wird. Die Abdichtung des Kolbens im Gehäuse erfolgt durch die Oberflächenspannung der Dampfblasenwand. Der Kolben selbst wird durch zwei an der Kolbenstange seitlich angreifende Blattfedern geführt und gehalten. Da der Aktor in traditioneller Siliziumtechnologie hergestellt wird, weist er keine Strukturen mit hohem Aspektverhältnis auf. Dies führt zwangsläufig zu geringen Zylinderabmessungen und damit auch geometriebedingt neben den Einschränkungen durch die Oberflächenspannung der Dampfblase nur zu geringen erzielbaren Kräften.Micromechanical actuators are used for a wide variety of purposes used, the currently achievable forces are still very low are. The known actuators can therefore only for purposes can be used in which small forces below the mN range suffice. Such an actuator is such. B. from: Sniegowski, J.J .: "A Micro Actuation Mechanism Based on Liquid Vapor Surface Tension ", 7th Intern. Conf. On Solid-State Sensors and Actuators, Yokohama 1993. The actuator has a piston with piston rod in a housing larger dimensions is moved by a vapor bubble. The The piston is sealed in the housing by the surface tension the vapor bubble wall. The piston itself is through two leaf springs on the side of the piston rod and held. Because the actuator uses traditional silicon technology is produced, it has no structures high aspect ratio. This inevitably leads to minor Cylinder dimensions and therefore also due to geometry the limitations of the surface tension of the vapor bubble only at low achievable forces.

Ausgehend von diesem Stand der Technik hat daher die vorliegende Erfindung zur Aufgabe, einen mikromechanischen Aktor der eingangs beschriebenen Art anzugeben, mit welchem sich wesentlich höhere Kräfte als mit den bekannten erzielen lassen.Based on this prior art, the present Invention for the task of a micromechanical actuator Specify the type described above, which is essential higher forces can be achieved than with the known.

Zur Lösung dieser Aufgabe schlägt die vorliegende Erfindung die Merkmale vor, die im kennzeichnenden Teil der Patentansprüche 1 und 2 angeführt sind. Besonders vorteilhaft ist erfindungsgemäß ein Aktor, der gemäß Patentanspruch 3 hergestellt ist.The present invention proposes to achieve this object the features set out in the characterizing part of the claims 1 and 2 are listed. Particularly advantageous is an actuator according to the invention, which is produced according to claim 3 is.

Mit dem erfindungsgemäßen Aktor lassen sowohl große Kräfte bis in Bereiche um 100mN als auch große Stellwege realisieren. Besonders vorteilhaft ist dabei, daß fluidische Schmierung der bewegten Teile möglich ist.With the actuator according to the invention, both large forces up to in areas around 100mN as well as large travel ranges. Especially It is advantageous that fluidic lubrication of the moving parts is possible.

Weitere Einzelheiten der vorliegenden Erfindung werden im folgenden und anhand der Figuren 1 und 2 näher erläutert. Es zeigen:

  • die Fig.1 einen Schnitt durch den Aktor von oben gesehen und
  • die Fig.2 die rasterelektronenmikroskopische Originalaufnahme eines mit LIGA-Technik gefertigten Aktors schräg von oben bei abgenommener Deckplatte.
    • Further details of the present invention are explained in more detail below and with reference to FIGS. 1 and 2. Show it:
  • 1 shows a section through the actuator from above and
  • the Fig. 2 the scanning electron microscope original image of an actuator made with LIGA technology obliquely from above with the cover plate removed.

    • Der dargestellte Aktor stellt eine bewegliche Mikrostruktur dar, die durch eine Kombination des LIGA-Verfahrens (Röntgentiefenlithografie mit Galvanoformung und Kunststoffabformung) mit einer Opferschichttechnik hergestellt wird. Diese Herstellungsmethode ermöglicht es, Mikrostrukturen mit Strukturhöhen bis zu mehreren 100 µm bei lateralen Abmessungen von wenigen µm zu fertigen. Durch die zusätzliche Anwendung der Opferschichttechnik ist man in der Lage, freibewegliche Teile herzustellen. Das Prinzip der Herstellung wird späterfolgend beschrieben.The actuator shown represents a movable microstructure represented by a combination of the LIGA process (X-ray depth lithography with electroforming and plastic impression) is produced using a sacrificial layer technique. This manufacturing method enables microstructures with structural heights up to several 100 µm with lateral dimensions of a few µm to manufacture. Through the additional application of sacrificial layer technology you are able to manufacture free moving parts. The principle of manufacture will be described later.

    Der Aktor besteht im wesentlichen aus einem flachen Gehäuse 1, welches auf einer Substratplatte 2 sitzt und mit ihr fest verbunden ist. In dem Gehäuse 1 ist ein Kanal 3 vorhanden, in welchem ein axial längsbeweglicher Kolben 4 hin- und herbewegt wird, an dessen einer Seite eine Führungstange 11 und an seiner anderen Seite eine Kolbenstange 12 befestigt ist, jeweils in Hubrichtung gesehen. Der Kanal 3 mündet mit seinem einen Ende in einer Druckkammer 5, die über eine Bohrung 6 mit einem druckführenden Fluid beaufschlagt wird, welches dadurch von dieser Seite her eine Kraft auf den Kolben 4 ausübt. Diese Bohrung 6 dient neben der Zufuhr auch der Abfuhr des Fluides. Neben dem Kolben 4 bzw. vor und hinter ihm, von der Druckseite aus gesehen, ist jeweils ein Lagerblock 7 und 8 zusammen mit dem Gehäuse 1 ebenfalls auf der Substratplatte 2 befestigt. Die Lagerblöcke 7 und 8 weisen Schlitze 9 und 10 auf, wobei in dem Schlitz 9 die Führungsstange 11 und in dem Schlitz 10 die Kolbenstange 12 gleitet. Dadurch wird der Kolben 4 mittels der Lagerblöcke 7 und 8 in Hub- bzw. Arbeitsrichtung geführt. Dabei sind die Lagerblöcke in ihrer Geometrie (Breite, Lagerspiel) so ausgelegt, daß der Kolben nicht verkanten kann. Der Kolben selbst hat dabei eine laterale Ausdehnung von etwa 400 x 450 µm. Die Spaltbreite zwischen Kolben 4 und Kanal 3 beträgt etwa 2µm. Der Kolben 4 sowie die Stangen 11 und 12 im Kanal 3 und in den Schlitzen 9 und 10 werden dabei z. B. mit Silikonöl fluidisch geschmiert.The actuator essentially consists of a flat housing 1, which sits on a substrate plate 2 and firmly connected to it is. A channel 3 is present in the housing 1, in which an axially longitudinally movable piston 4 reciprocates is on one side a guide rod 11 and on its other side a piston rod 12 is attached, respectively seen in the stroke direction. Channel 3 opens out with one End in a pressure chamber 5, which has a bore 6 with a is pressurized fluid, which is thereby by this side exerts a force on the piston 4. This In addition to the supply, bore 6 also serves to discharge the fluid. Next to the piston 4 or in front of and behind it, from the pressure side seen from, is a bearing block 7 and 8 together with the housing 1 also attached to the substrate plate 2. The bearing blocks 7 and 8 have slots 9 and 10, wherein in the slot 9 the guide rod 11 and in the slot 10 the Piston rod 12 slides. As a result, the piston 4 by means of Bearing blocks 7 and 8 guided in the lifting or working direction. Here are the bearing blocks in their geometry (width, bearing clearance) designed so that the piston cannot tilt. Of the The piston itself has a lateral extension of approximately 400 x 450 µm. The gap width between piston 4 and channel 3 is about 2 µm. The piston 4 and the rods 11 and 12 in Channel 3 and in the slots 9 and 10 are z. B. with Fluid lubricated silicone oil.

    Die aus dem Lagerblock 8 herausragende Kolbenstange 12 überträgt die vom Kolben 4 erzeugte Kraft nach aussen auf nicht mehr dargestellte Elemente. Ein Anwendungszweck ist z.B. das Aufbringen einer Biegekraft auf einen Stab. Die in den Figuren dargestellte Ausführung des Aktors ist nach der Herstellung mittels des LIGA-Verfahrens nach oben offen. Um die Druckkammer 5 mit dem Kolben 4 sowie den gesamten Aktor nach oben abzuschließen und einen geschlossenen Druckraum zu erzielen, ist das Gehäuse 1 nach oben durch eine nicht dargestellte Deckplatte verschlossen. Diese wird auf dem Gehäuse fest verklebt, wobei die umlaufende Nut 13 ein Einlaufen des Klebers ins Innere des Aktors verhindert. Die Abdichtung des beweglichen Kolbens 4 gegenüber dem Gehäuse 1 und der Kanalwand sowie gegenüber der Deckplatte erfolgt durch fluidische Schmierung, wodurch auch die Reibung des Kolbens 4 im Kanal 3 verringert wird. The piston rod 12 projecting from the bearing block 8 transmits the force generated by the piston 4 to the outside more elements shown. One application is e.g. the Apply a bending force to a rod. The one in the figures shown embodiment of the actuator is after manufacture open upwards using the LIGA process. To the pressure chamber 5 complete with the piston 4 and the entire actuator upwards and to achieve a closed pressure chamber the housing 1 upwards through a cover plate, not shown locked. This is firmly glued to the housing, the circumferential groove 13 a running of the adhesive inside of the actuator prevented. Sealing the movable Piston 4 opposite the housing 1 and the channel wall and opposite the cover plate is made by fluidic lubrication, which also reduces the friction of the piston 4 in the channel 3 becomes.

    Im folgenden werden kurz die Fertigungsschritte des LIGA-Verfahrens für den Aktor, d. h. für eine bewegliche Mikrostruktur in einem Ausführungsbeispiel beschrieben:The following are briefly the manufacturing steps of the LIGA process for the actuator, d. H. for a mobile microstructure described in one embodiment:

    Ausgangspunkt ist eine bis zu mehreren 100 µm dicke strahlungsempfindliche Kunststoffschicht. Dieser sogenannte Resist wird durch direkte Polymerisation auf ein Substrat mit Opferschicht und Galvanikstartschicht aufgebracht. Die 3 - 7 µm dicke Opferschicht aus Ti wurde vorstrukturiert, so daß bei der anschließenden, justierten Röntgenbestrahlung die später beweglichen Teile der Mikrostruktur, bei dem oben beschriebenen Aktor der Kolben 4 mit den Stangen 11 und 12, auf der Opferschicht zu liegen kommen. Unter den unbeweglichen Bereichen, die mit dem Substrat verankert sind wie das Aktorgehäuse 1 und die Lagerblöcke 11 und 12, liegt keine Opferschicht.The starting point is a radiation-sensitive one up to several 100 µm thick Plastic layer. This so-called resist is by direct polymerization on a substrate with a sacrificial layer and electroplating start layer applied. The 3 - 7 µm thick sacrificial layer made of Ti was pre-structured, so that at the subsequent, adjusted x-ray radiation later moving parts of the microstructure, in the above described Actuator the piston 4 with the rods 11 and 12, on the sacrificial layer come to rest. Among the immovable areas, which are anchored to the substrate like the actuator housing 1 and the bearing blocks 11 and 12, there is no sacrificial layer.

    Die Strukturierung des Resists erfolgt durch justierte Synchrotonbestrahlung, wobei die hierbei verwendete Maske gegenüber der Opferschicht ausgerichtet wird. Die Synchrotonstrahlung hat den Vorteil, daß sie bei kleiner Wellenlänge (0,2 bis 0,5 nm) eine hohe Energiedichte und große Parallelität besitzt. Dadurch ist es möglich, eine über die gesamte Resistdicke hochpräzise Abbildung der Röntgenmaske zu erzielen. Die Genauigkeit liegt über die gesamte Strukturhöhe im Submikrometerbereich. Bei lateralen Abmessungen der Strukturen im Mikrometerbereich erreicht man ein Aspektverhältnis (d. h. das Verhältnis von Strukturhöhe zu minimaler lateraler Ausdehnung) von bis zu loo.The resist is structured by adjusted synchrotron radiation, the mask used here opposite the sacrificial layer is aligned. The synchrotron radiation has the advantage that at a small wavelength (0.2 to 0.5 nm) has a high energy density and great parallelism. This makes it possible to cover the entire resist thickness to achieve high-precision imaging of the X-ray mask. The Accuracy is in the submicron range over the entire structure height. With lateral dimensions of the structures in the micrometer range one reaches an aspect ratio (i.e. the ratio from structure height to minimal lateral expansion) from up to loo.

    Durch die Bestrahlung ändert sich die chemische Zusammensetzung des Resists so, daß bei der anschließenden Entwicklung die bestrahlten Bereiche herausgelöst werden und man ein Negativ der gewünschten Struktur erhält. Die so erzeugten Zwischenräume werden galvanisch mit einem Metall aufgefüllt. Erneutes Bestrahlen ohne Maske zum Entfernen des unbelichteten Resists ergibt die gewünschte Mikrostruktur. Schließlich wird die Ti-Schicht selektiv gegenüber den anderen Materialien weggeätzt, so daß der auf der Opferschicht aufgebaute Teil der Struktur, hier der Kolben 4, frei beweglich ist.The chemical composition changes as a result of the irradiation of the resist so that during subsequent development the irradiated areas are detached and you get a negative the desired structure. The gaps created in this way are galvanically filled with a metal. Again Irradiate without a mask to remove the unexposed Resists give the desired microstructure. Eventually the Ti layer is selectively etched away from the other materials, so that the part of the Structure, here the piston 4, is freely movable.

    Vor dem letzten Bestrahlungsschritt werden die Mikrostrukturen poliergefräst, um eine glatte Oberfläche zu erzielen, die für das dichte Schließen der Abschlußplatte notwendig ist. Before the last irradiation step, the microstructures polished to achieve a smooth surface that is suitable for tight closing of the end plate is necessary.

    Bezugszeichenliste:Reference symbol list:

    11
    AktorgehäuseActuator housing
    22nd
    SubstratplatteSubstrate plate
    33rd
    Kanalchannel
    44th
    Kolbenpiston
    55
    DruckkammerPressure chamber
    66
    Bohrungdrilling
    77
    LagerblockBearing block
    88th
    LagerblockBearing block
    99
    Schlitzslot
    1010th
    Schlitzslot
    1111
    FührungsstangeGuide rod
    1212th
    KolbenstangePiston rod
    1313
    NutGroove

    Claims (3)

    1. Micromechanical actuator (1) for generating forces of the order of magnitude ranging from a few mN to the region of approximately 100 mN with dimensions in the region of a few 100 µm, having the following features:
      a) a piston, which is displaceable in a duct and has a pressurising medium acting thereon from one side of a pressure chamber, said piston
      b) having a piston rod on the other side to remove the generated force,
      c) the piston being longitudinally displaceably guided in the lifting direction by means of guide elements,
      characterised by the additional features:
      d) the actuator has a flat housing (1), which sits securely on a substrate plate (2), and in which a duct (3) extends, in which duct an axially longitudinally displaceable piston (4) is reciprocatable,
      e) the duct (3) extends with its one end in a pressure chamber (5), which has a pressurising fluid acting thereon via a bore (6),
      f) a guide rod (11) is mounted on one side of the piston (4), and a piston rod (12) is mounted on its other side,
      g) a bearing block (7 and 8 respectively), together with the housing (1), is also mounted on the plate (2) in front of and behind the piston (4) when viewed from the pressure side,
      h) the bearing blocks (7 and 8) have slots (9 and 10) for the guidance of the piston (4), the guide rod (11) sliding in the slot (9) and the piston rod (12) sliding in the slot (10), and
      i) the housing (1) is closed at its upper end by a cover plate.
    2. Actuator according to claim 1, characterised in that the piston (4) and the rods (11 and 12) are fluidically lubricated in the duct (3) and in the slots (9 and 10).
    3. Actuator according to claim 1 or 2, characterised in that the housing (1), the bearing blocks (7 and 8) and the piston (4), i.e. the entire structure of the actuator, are produced altogether on the substrate of the base plate in the same operations by an X-ray lithographic method, by a deep X-ray lithographic-galvanoplastic method or by a technical moulding or technically moulding-galvanoplastic method derived therefrom, the mechanical separation of the moving parts being effected as a result of a separation layer being initially applied locally in the corresponding regions of the substrate, which layer is eventually removed again by an etching technique.
    EP95934081A 1994-10-08 1995-09-20 Micromechanical actuator Expired - Lifetime EP0784754B1 (en)

    Applications Claiming Priority (3)

    Application Number Priority Date Filing Date Title
    DE4436008 1994-10-08
    DE4436008A DE4436008C1 (en) 1994-10-08 1994-10-08 Micro=mechanical actuator for handling miniaturised components
    PCT/EP1995/003707 WO1996011342A1 (en) 1994-10-08 1995-09-20 Micromechanical actuator

    Publications (2)

    Publication Number Publication Date
    EP0784754A1 EP0784754A1 (en) 1997-07-23
    EP0784754B1 true EP0784754B1 (en) 1998-04-22

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    EP95934081A Expired - Lifetime EP0784754B1 (en) 1994-10-08 1995-09-20 Micromechanical actuator

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    US (1) US6055899A (en)
    EP (1) EP0784754B1 (en)
    DE (2) DE4436008C1 (en)
    WO (1) WO1996011342A1 (en)

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    WO1996011342A1 (en) 1996-04-18
    DE59502013D1 (en) 1998-05-28
    US6055899A (en) 2000-05-02
    EP0784754A1 (en) 1997-07-23
    DE4436008C1 (en) 1995-10-05

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