EP0700485A1 - Mikroventil - Google Patents
MikroventilInfo
- Publication number
- EP0700485A1 EP0700485A1 EP94916136A EP94916136A EP0700485A1 EP 0700485 A1 EP0700485 A1 EP 0700485A1 EP 94916136 A EP94916136 A EP 94916136A EP 94916136 A EP94916136 A EP 94916136A EP 0700485 A1 EP0700485 A1 EP 0700485A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- membrane structure
- membrane
- micro valve
- microvalve
- heating elements
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15C—FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING OR CONTROL PURPOSES
- F15C3/00—Circuit elements having moving parts
- F15C3/04—Circuit elements having moving parts using diaphragms
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Theoretical Computer Science (AREA)
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Mechanical Engineering (AREA)
- Fluid-Driven Valves (AREA)
- Temperature-Responsive Valves (AREA)
- Micromachines (AREA)
- Valve-Gear Or Valve Arrangements (AREA)
- Forging (AREA)
Description
Claims
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE4317676 | 1993-05-27 | ||
DE4317676 | 1993-05-27 | ||
PCT/DE1994/000599 WO1994028318A1 (de) | 1993-05-27 | 1994-05-21 | Mikroventil |
Publications (2)
Publication Number | Publication Date |
---|---|
EP0700485A1 true EP0700485A1 (de) | 1996-03-13 |
EP0700485B1 EP0700485B1 (de) | 1997-08-13 |
Family
ID=6489068
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP94916136A Expired - Lifetime EP0700485B1 (de) | 1993-05-27 | 1994-05-21 | Mikroventil |
Country Status (6)
Country | Link |
---|---|
US (1) | US5681024A (de) |
EP (1) | EP0700485B1 (de) |
JP (1) | JP3418741B2 (de) |
AT (1) | ATE156895T1 (de) |
DE (2) | DE59403742D1 (de) |
WO (1) | WO1994028318A1 (de) |
Families Citing this family (94)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6230501B1 (en) | 1994-04-14 | 2001-05-15 | Promxd Technology, Inc. | Ergonomic systems and methods providing intelligent adaptive surfaces and temperature control |
DE4445686C2 (de) * | 1994-12-21 | 1999-06-24 | Fraunhofer Ges Forschung | Mikroventilanordnung, insbesondere für pneumatische Steuerungen |
DE19511022C1 (de) * | 1995-03-28 | 1996-06-20 | Hahn Schickard Ges | Mikromechanisches Ventil für Mikrodosiereinrichtungen |
US6141497A (en) * | 1995-06-09 | 2000-10-31 | Marotta Scientific Controls, Inc. | Multilayer micro-gas rheostat with electrical-heater control of gas flow |
US6068010A (en) * | 1995-06-09 | 2000-05-30 | Marotta Scientific Controls, Inc. | Microvalve and microthruster for satellites and methods of making and using the same |
DE19522806C2 (de) * | 1995-06-23 | 1997-06-12 | Karlsruhe Forschzent | Verfahren zur Herstellung eines Mikromembranventils |
DE19637928C2 (de) * | 1996-02-10 | 1999-01-14 | Fraunhofer Ges Forschung | Bistabile Membran-Aktivierungseinrichtung und Membran |
US5880752A (en) * | 1996-05-09 | 1999-03-09 | Hewlett-Packard Company | Print system for ink-jet pens |
DE19749011A1 (de) * | 1996-11-19 | 1998-05-20 | Lang Volker | Mikroventil |
WO1998032616A1 (en) * | 1997-01-24 | 1998-07-30 | California Institute Of Technology | Mems valve |
US6087638A (en) * | 1997-07-15 | 2000-07-11 | Silverbrook Research Pty Ltd | Corrugated MEMS heater structure |
US7214298B2 (en) * | 1997-09-23 | 2007-05-08 | California Institute Of Technology | Microfabricated cell sorter |
FR2772512B1 (fr) * | 1997-12-16 | 2004-04-16 | Commissariat Energie Atomique | Microsysteme a element deformable sous l'effet d'un actionneur thermique |
DE19816283A1 (de) * | 1998-04-11 | 1999-10-14 | Festo Ag & Co | Mengenverstärkereinrichtung für Fluidströme |
KR100414513B1 (ko) * | 1999-02-23 | 2004-01-13 | 마츠시다 덴코 가부시키가이샤 | 반도체 장치 및 이를 이용한 반도체 마이크로 액튜에이터및 반도체 마이크로 밸브 및 반도체 마이크로 릴레이 및반도체 장치의 제조 방법 및 반도체 마이크로액튜에이터의 제조 방법 |
US6540203B1 (en) * | 1999-03-22 | 2003-04-01 | Kelsey-Hayes Company | Pilot operated microvalve device |
US7214540B2 (en) | 1999-04-06 | 2007-05-08 | Uab Research Foundation | Method for screening crystallization conditions in solution crystal growth |
US7250305B2 (en) * | 2001-07-30 | 2007-07-31 | Uab Research Foundation | Use of dye to distinguish salt and protein crystals under microcrystallization conditions |
US7247490B2 (en) | 1999-04-06 | 2007-07-24 | Uab Research Foundation | Method for screening crystallization conditions in solution crystal growth |
US7244396B2 (en) * | 1999-04-06 | 2007-07-17 | Uab Research Foundation | Method for preparation of microarrays for screening of crystal growth conditions |
ATE290166T1 (de) | 1999-06-28 | 2005-03-15 | California Inst Of Techn | Elastisches mikropumpen- oder mikroventilsystem |
US7217321B2 (en) * | 2001-04-06 | 2007-05-15 | California Institute Of Technology | Microfluidic protein crystallography techniques |
US7144616B1 (en) | 1999-06-28 | 2006-12-05 | California Institute Of Technology | Microfabricated elastomeric valve and pump systems |
US8052792B2 (en) | 2001-04-06 | 2011-11-08 | California Institute Of Technology | Microfluidic protein crystallography techniques |
US7306672B2 (en) | 2001-04-06 | 2007-12-11 | California Institute Of Technology | Microfluidic free interface diffusion techniques |
US7459022B2 (en) * | 2001-04-06 | 2008-12-02 | California Institute Of Technology | Microfluidic protein crystallography |
US7052545B2 (en) * | 2001-04-06 | 2006-05-30 | California Institute Of Technology | High throughput screening of crystallization of materials |
US6899137B2 (en) * | 1999-06-28 | 2005-05-31 | California Institute Of Technology | Microfabricated elastomeric valve and pump systems |
US8550119B2 (en) * | 1999-06-28 | 2013-10-08 | California Institute Of Technology | Microfabricated elastomeric valve and pump systems |
US7195670B2 (en) | 2000-06-27 | 2007-03-27 | California Institute Of Technology | High throughput screening of crystallization of materials |
US20080277007A1 (en) * | 1999-06-28 | 2008-11-13 | California Institute Of Technology | Microfabricated elastomeric valve and pump systems |
US7244402B2 (en) * | 2001-04-06 | 2007-07-17 | California Institute Of Technology | Microfluidic protein crystallography |
US6929030B2 (en) * | 1999-06-28 | 2005-08-16 | California Institute Of Technology | Microfabricated elastomeric valve and pump systems |
US8709153B2 (en) | 1999-06-28 | 2014-04-29 | California Institute Of Technology | Microfludic protein crystallography techniques |
US20050148018A1 (en) * | 1999-10-07 | 2005-07-07 | David Weiner | Methods of identifying inverse agonists of the serotonin 2A receptor |
US7763345B2 (en) | 1999-12-14 | 2010-07-27 | Mannington Mills, Inc. | Thermoplastic planks and methods for making the same |
AU2001240040A1 (en) * | 2000-03-03 | 2001-09-17 | California Institute Of Technology | Combinatorial array for nucleic acid analysis |
US20050118073A1 (en) * | 2003-11-26 | 2005-06-02 | Fluidigm Corporation | Devices and methods for holding microfluidic devices |
US7867763B2 (en) | 2004-01-25 | 2011-01-11 | Fluidigm Corporation | Integrated chip carriers with thermocycler interfaces and methods of using the same |
US8105553B2 (en) | 2004-01-25 | 2012-01-31 | Fluidigm Corporation | Crystal forming devices and systems and methods for using the same |
US7351376B1 (en) | 2000-06-05 | 2008-04-01 | California Institute Of Technology | Integrated active flux microfluidic devices and methods |
US6494804B1 (en) * | 2000-06-20 | 2002-12-17 | Kelsey-Hayes Company | Microvalve for electronically controlled transmission |
WO2002000343A2 (en) | 2000-06-27 | 2002-01-03 | Fluidigm Corporation | A microfluidic design automation method and system |
AU2001290879A1 (en) | 2000-09-15 | 2002-03-26 | California Institute Of Technology | Microfabricated crossflow devices and methods |
US7097809B2 (en) * | 2000-10-03 | 2006-08-29 | California Institute Of Technology | Combinatorial synthesis system |
EP1322936A2 (de) * | 2000-10-03 | 2003-07-02 | California Institute Of Technology | Mikrofluidvorrichtungen und verwendungsverfahren |
US7678547B2 (en) * | 2000-10-03 | 2010-03-16 | California Institute Of Technology | Velocity independent analyte characterization |
AU1189702A (en) | 2000-10-13 | 2002-04-22 | Fluidigm Corp | Microfluidic device based sample injection system for analytical devices |
WO2002033268A2 (en) | 2000-10-18 | 2002-04-25 | Research Foundation Of State University Of New York | Microvalve |
US7232109B2 (en) * | 2000-11-06 | 2007-06-19 | California Institute Of Technology | Electrostatic valves for microfluidic devices |
US6644944B2 (en) * | 2000-11-06 | 2003-11-11 | Nanostream, Inc. | Uni-directional flow microfluidic components |
AU2002248149A1 (en) * | 2000-11-16 | 2002-08-12 | Fluidigm Corporation | Microfluidic devices for introducing and dispensing fluids from microfluidic systems |
EP1343973B2 (de) | 2000-11-16 | 2020-09-16 | California Institute Of Technology | Vorrichtung und verfahren zur durchführung von assays und screening mit hohem durchsatz |
US6626417B2 (en) | 2001-02-23 | 2003-09-30 | Becton, Dickinson And Company | Microfluidic valve and microactuator for a microvalve |
US20050196785A1 (en) * | 2001-03-05 | 2005-09-08 | California Institute Of Technology | Combinational array for nucleic acid analysis |
US7670429B2 (en) | 2001-04-05 | 2010-03-02 | The California Institute Of Technology | High throughput screening of crystallization of materials |
WO2002081729A2 (en) | 2001-04-06 | 2002-10-17 | California Institute Of Technology | Nucleic acid amplification utilizing microfluidic devices |
US7005493B2 (en) | 2001-04-06 | 2006-02-28 | Fluidigm Corporation | Polymer surface modification |
US6752922B2 (en) * | 2001-04-06 | 2004-06-22 | Fluidigm Corporation | Microfluidic chromatography |
US20020164816A1 (en) * | 2001-04-06 | 2002-11-07 | California Institute Of Technology | Microfluidic sample separation device |
US20050149304A1 (en) * | 2001-06-27 | 2005-07-07 | Fluidigm Corporation | Object oriented microfluidic design method and system |
US6768412B2 (en) * | 2001-08-20 | 2004-07-27 | Honeywell International, Inc. | Snap action thermal switch |
JP2003062798A (ja) * | 2001-08-21 | 2003-03-05 | Advantest Corp | アクチュエータ及びスイッチ |
US7075162B2 (en) * | 2001-08-30 | 2006-07-11 | Fluidigm Corporation | Electrostatic/electrostrictive actuation of elastomer structures using compliant electrodes |
US7025323B2 (en) | 2001-09-21 | 2006-04-11 | The Regents Of The University Of California | Low power integrated pumping and valving arrays for microfluidic systems |
US7192629B2 (en) | 2001-10-11 | 2007-03-20 | California Institute Of Technology | Devices utilizing self-assembled gel and method of manufacture |
US8440093B1 (en) | 2001-10-26 | 2013-05-14 | Fuidigm Corporation | Methods and devices for electronic and magnetic sensing of the contents of microfluidic flow channels |
US7691333B2 (en) | 2001-11-30 | 2010-04-06 | Fluidigm Corporation | Microfluidic device and methods of using same |
JP4355210B2 (ja) | 2001-11-30 | 2009-10-28 | フルイディグム コーポレイション | 微小流体デバイスおよび微小流体デバイスの使用方法 |
US7025324B1 (en) | 2002-01-04 | 2006-04-11 | Massachusetts Institute Of Technology | Gating apparatus and method of manufacture |
US7312085B2 (en) | 2002-04-01 | 2007-12-25 | Fluidigm Corporation | Microfluidic particle-analysis systems |
JP2005521425A (ja) | 2002-04-01 | 2005-07-21 | フルイディグム コーポレイション | 微小流体粒子分析システム |
US8220494B2 (en) | 2002-09-25 | 2012-07-17 | California Institute Of Technology | Microfluidic large scale integration |
CA2500283A1 (en) * | 2002-09-25 | 2004-04-08 | California Institute Of Technology | Microfluidic large scale integration |
JP5695287B2 (ja) | 2002-10-02 | 2015-04-01 | カリフォルニア インスティテュート オブ テクノロジー | 微小流体の核酸解析 |
CN100363669C (zh) * | 2002-12-30 | 2008-01-23 | 中国科学院理化技术研究所 | 用于启、闭微/纳米流体通道的冰阀 |
US20050145496A1 (en) | 2003-04-03 | 2005-07-07 | Federico Goodsaid | Thermal reaction device and method for using the same |
US8828663B2 (en) | 2005-03-18 | 2014-09-09 | Fluidigm Corporation | Thermal reaction device and method for using the same |
WO2004089810A2 (en) | 2003-04-03 | 2004-10-21 | Fluidigm Corp. | Microfluidic devices and methods of using same |
US7604965B2 (en) | 2003-04-03 | 2009-10-20 | Fluidigm Corporation | Thermal reaction device and method for using the same |
US7476363B2 (en) | 2003-04-03 | 2009-01-13 | Fluidigm Corporation | Microfluidic devices and methods of using same |
EP1685282A2 (de) * | 2003-04-17 | 2006-08-02 | Fluidigm Corporation | Kristallziehvorrichtungen und systeme und verfahren zu deren verwendung |
WO2004103563A2 (en) * | 2003-05-20 | 2004-12-02 | Fluidigm Corporation | Method and system for microfluidic device and imaging thereof |
JP2007506943A (ja) * | 2003-07-28 | 2007-03-22 | フルイディグム コーポレイション | マイクロ流体装置用の画像処理方法およびシステム |
US7413712B2 (en) | 2003-08-11 | 2008-08-19 | California Institute Of Technology | Microfluidic rotary flow reactor matrix |
US7100889B2 (en) * | 2003-12-18 | 2006-09-05 | Delaware Capital Formation, Inc. | Miniature electrically operated solenoid valve |
US7407799B2 (en) * | 2004-01-16 | 2008-08-05 | California Institute Of Technology | Microfluidic chemostat |
US7309056B2 (en) * | 2004-03-26 | 2007-12-18 | Smc Kabushiki Kaisha | Dual pedestal shut-off valve |
US20060024751A1 (en) * | 2004-06-03 | 2006-02-02 | Fluidigm Corporation | Scale-up methods and systems for performing the same |
US7815868B1 (en) | 2006-02-28 | 2010-10-19 | Fluidigm Corporation | Microfluidic reaction apparatus for high throughput screening |
WO2007120640A2 (en) * | 2006-04-11 | 2007-10-25 | University Of South Florida | Thermally induced single-use valves and method of use |
WO2015153179A1 (en) | 2014-04-01 | 2015-10-08 | Agiltron, Inc. | Microelectromechanical displacement structure and method for controlling displacement |
JP2022541664A (ja) | 2019-07-26 | 2022-09-26 | ラム リサーチ コーポレーション | 半導体処理装置のための非エラストマ性、非ポリマ性、かつ非金属性の膜弁 |
DE102020115510A1 (de) | 2020-06-10 | 2021-12-16 | Bürkert Werke GmbH & Co. KG | Ventil und Baugruppe mit einem Ventil |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59110967A (ja) * | 1982-12-16 | 1984-06-27 | Nec Corp | 弁素子の製造方法 |
US4628576A (en) * | 1985-02-21 | 1986-12-16 | Ford Motor Company | Method for fabricating a silicon valve |
US4756508A (en) * | 1985-02-21 | 1988-07-12 | Ford Motor Company | Silicon valve |
US4647013A (en) * | 1985-02-21 | 1987-03-03 | Ford Motor Company | Silicon valve |
US5065978A (en) * | 1988-04-27 | 1991-11-19 | Dragerwerk Aktiengesellschaft | Valve arrangement of microstructured components |
DE3814150A1 (de) * | 1988-04-27 | 1989-11-09 | Draegerwerk Ag | Ventilanordnung aus mikrostrukturierten komponenten |
DE3919876A1 (de) * | 1989-06-19 | 1990-12-20 | Bosch Gmbh Robert | Mikroventil |
US5069419A (en) * | 1989-06-23 | 1991-12-03 | Ic Sensors Inc. | Semiconductor microactuator |
WO1991001464A1 (fr) * | 1989-07-19 | 1991-02-07 | Westonbridge International Limited | Clapet anti-retour, notamment pour micropompe et micropompe munie d'un tel clapet |
US5238223A (en) * | 1989-08-11 | 1993-08-24 | Robert Bosch Gmbh | Method of making a microvalve |
DE3926647A1 (de) * | 1989-08-11 | 1991-02-14 | Bosch Gmbh Robert | Verfahren zur herstellung eines mikroventils |
US5058856A (en) * | 1991-05-08 | 1991-10-22 | Hewlett-Packard Company | Thermally-actuated microminiature valve |
US5176358A (en) * | 1991-08-08 | 1993-01-05 | Honeywell Inc. | Microstructure gas valve control |
US5333831A (en) * | 1993-02-19 | 1994-08-02 | Hewlett-Packard Company | High performance micromachined valve orifice and seat |
-
1994
- 1994-05-21 EP EP94916136A patent/EP0700485B1/de not_active Expired - Lifetime
- 1994-05-21 WO PCT/DE1994/000599 patent/WO1994028318A1/de active IP Right Grant
- 1994-05-21 AT AT94916136T patent/ATE156895T1/de not_active IP Right Cessation
- 1994-05-21 JP JP50010695A patent/JP3418741B2/ja not_active Expired - Fee Related
- 1994-05-21 US US08/556,911 patent/US5681024A/en not_active Expired - Lifetime
- 1994-05-21 DE DE59403742T patent/DE59403742D1/de not_active Expired - Fee Related
- 1994-05-26 DE DE4418450A patent/DE4418450C2/de not_active Expired - Fee Related
Non-Patent Citations (1)
Title |
---|
See references of WO9428318A1 * |
Also Published As
Publication number | Publication date |
---|---|
EP0700485B1 (de) | 1997-08-13 |
DE4418450A1 (de) | 1994-12-01 |
DE4418450C2 (de) | 1996-07-25 |
JP3418741B2 (ja) | 2003-06-23 |
ATE156895T1 (de) | 1997-08-15 |
WO1994028318A1 (de) | 1994-12-08 |
JPH09501265A (ja) | 1997-02-04 |
DE59403742D1 (de) | 1997-09-18 |
US5681024A (en) | 1997-10-28 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
EP0700485B1 (de) | Mikroventil | |
EP0914564B1 (de) | Piezoelektrisch betätigtes mikroventil | |
EP0521117B1 (de) | Mikroventil | |
EP2556282B1 (de) | Mikroventil mit elastisch verformbarer ventillippe, herstellungsverfahren und mikropumpe | |
DE4422942B4 (de) | Vorrichtung für den Antrieb eines Mikroventils | |
WO1998023868A1 (de) | Piezoelektrisch betätigtes mikroventil | |
WO1990015933A1 (de) | Mikroventil | |
EP1320686A1 (de) | Mikroventil mit einem normalerweise geschlossenen zustand | |
EP1576294B1 (de) | Normal doppelt geschlossenes mikroventil | |
EP0829649B1 (de) | Mikroventil mit vorgespannter Ventilklappenstruktur | |
EP0834031B1 (de) | Verfahren zur herstellung eines mikromembranventiles | |
EP2059698A1 (de) | Verfahren zur herstellung von bauteilen zur steuerung eines fluidflusses sowie bauteile, hergestellt nach diesem verfahren | |
DE19538596A1 (de) | Piezoaktorbetätigtes Steuerventil | |
EP1502046B1 (de) | Piezoelektrisch betätigbares ventil | |
DE19511022C1 (de) | Mikromechanisches Ventil für Mikrodosiereinrichtungen | |
DE10243997B4 (de) | Mikroventil in Mehrschichtaufbau | |
DE102009033780A1 (de) | Arbeitsvorrichtung für Ventile und Stelleinrichtungen | |
DE102018219017A1 (de) | Elektrisch betätigbares Ventil |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
Free format text: ORIGINAL CODE: 0009012 |
|
17P | Request for examination filed |
Effective date: 19950929 |
|
AK | Designated contracting states |
Kind code of ref document: A1 Designated state(s): AT BE CH DE FR GB IT LI NL |
|
GRAG | Despatch of communication of intention to grant |
Free format text: ORIGINAL CODE: EPIDOS AGRA |
|
17Q | First examination report despatched |
Effective date: 19960805 |
|
GRAH | Despatch of communication of intention to grant a patent |
Free format text: ORIGINAL CODE: EPIDOS IGRA |
|
GRAH | Despatch of communication of intention to grant a patent |
Free format text: ORIGINAL CODE: EPIDOS IGRA |
|
GRAA | (expected) grant |
Free format text: ORIGINAL CODE: 0009210 |
|
AK | Designated contracting states |
Kind code of ref document: B1 Designated state(s): AT BE CH DE FR GB IT LI NL |
|
REF | Corresponds to: |
Ref document number: 156895 Country of ref document: AT Date of ref document: 19970815 Kind code of ref document: T |
|
REG | Reference to a national code |
Ref country code: CH Ref legal event code: NV Representative=s name: PATENTANWAELTE GEORG ROEMPLER UND ALDO ROEMPLER Ref country code: CH Ref legal event code: EP |
|
GBT | Gb: translation of ep patent filed (gb section 77(6)(a)/1977) |
Effective date: 19970814 |
|
REF | Corresponds to: |
Ref document number: 59403742 Country of ref document: DE Date of ref document: 19970918 |
|
ET | Fr: translation filed | ||
ITF | It: translation for a ep patent filed |
Owner name: UFFICIO BREVETTI RICCARDI & C. |
|
PLBE | No opposition filed within time limit |
Free format text: ORIGINAL CODE: 0009261 |
|
STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT |
|
26N | No opposition filed | ||
REG | Reference to a national code |
Ref country code: GB Ref legal event code: IF02 |
|
REG | Reference to a national code |
Ref country code: CH Ref legal event code: PFA Owner name: FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWA Free format text: FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.#LEONRODSTRASSE 54#80636 MUENCHEN (DE) -TRANSFER TO- FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.#HANSASTRASSE 27 C#80686 MUENCHEN (DE) |
|
REG | Reference to a national code |
Ref country code: CH Ref legal event code: PCAR Free format text: ALDO ROEMPLER PATENTANWALT;BRENDENWEG 11 POSTFACH 154;9424 RHEINECK (CH) |
|
PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: NL Payment date: 20090520 Year of fee payment: 16 |
|
PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: IT Payment date: 20090527 Year of fee payment: 16 Ref country code: FR Payment date: 20090519 Year of fee payment: 16 Ref country code: AT Payment date: 20090522 Year of fee payment: 16 |
|
PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: BE Payment date: 20090526 Year of fee payment: 16 |
|
PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: CH Payment date: 20090525 Year of fee payment: 16 |
|
PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: GB Payment date: 20090528 Year of fee payment: 16 Ref country code: DE Payment date: 20090727 Year of fee payment: 16 |
|
BERE | Be: lapsed |
Owner name: *FRAUNHOFER-GESELLSCHAFT ZUR FORDERUNG DER ANGEWAN Effective date: 20100531 |
|
REG | Reference to a national code |
Ref country code: NL Ref legal event code: V1 Effective date: 20101201 |
|
REG | Reference to a national code |
Ref country code: CH Ref legal event code: PL |
|
GBPC | Gb: european patent ceased through non-payment of renewal fee |
Effective date: 20100521 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: AT Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20100521 |
|
REG | Reference to a national code |
Ref country code: FR Ref legal event code: ST Effective date: 20110131 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: LI Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20100531 Ref country code: CH Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20100531 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: BE Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20100531 Ref country code: IT Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20100521 Ref country code: NL Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20101201 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: DE Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20101201 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: FR Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20100531 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: GB Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20100521 |