DE69930169D1 - Mikromechanischer schalter - Google Patents

Mikromechanischer schalter

Info

Publication number
DE69930169D1
DE69930169D1 DE69930169T DE69930169T DE69930169D1 DE 69930169 D1 DE69930169 D1 DE 69930169D1 DE 69930169 T DE69930169 T DE 69930169T DE 69930169 T DE69930169 T DE 69930169T DE 69930169 D1 DE69930169 D1 DE 69930169D1
Authority
DE
Germany
Prior art keywords
micromechanical switch
micromechanical
switch
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69930169T
Other languages
English (en)
Other versions
DE69930169T2 (de
Inventor
Shuguang Chen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Publication of DE69930169D1 publication Critical patent/DE69930169D1/de
Application granted granted Critical
Publication of DE69930169T2 publication Critical patent/DE69930169T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/12—Contacts characterised by the manner in which co-operating contacts engage
    • H01H1/14—Contacts characterised by the manner in which co-operating contacts engage by abutting
    • H01H1/20—Bridging contacts
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
DE69930169T 1999-11-18 1999-11-18 Mikromechanischer schalter Expired - Fee Related DE69930169T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP1999/006439 WO2001037303A1 (fr) 1999-11-18 1999-11-18 Commutateur de micromachine

Publications (2)

Publication Number Publication Date
DE69930169D1 true DE69930169D1 (de) 2006-04-27
DE69930169T2 DE69930169T2 (de) 2006-08-03

Family

ID=14237322

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69930169T Expired - Fee Related DE69930169T2 (de) 1999-11-18 1999-11-18 Mikromechanischer schalter

Country Status (4)

Country Link
US (1) US6784769B1 (de)
EP (1) EP1235244B1 (de)
DE (1) DE69930169T2 (de)
WO (1) WO2001037303A1 (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7310033B2 (en) * 2004-08-19 2007-12-18 Teravicta Technologies, Inc. MEMS switch electrode configuration to increase signal isolation
EP1850360A1 (de) * 2006-04-26 2007-10-31 Seiko Epson Corporation Mikroschalter mit einem ersten betätigbaren Teil und mit einem zweiten Kontaktteil
JP2010061976A (ja) * 2008-09-03 2010-03-18 Toshiba Corp スイッチ及びｅｓｄ保護素子
JP2010166201A (ja) * 2009-01-14 2010-07-29 Seiko Epson Corp Ｍｅｍｓデバイス及びその製造方法
JP2012129605A (ja) * 2010-12-13 2012-07-05 Seiko Epson Corp Ｍｅｍｓ振動子、発振器、およびｍｅｍｓ振動子の製造方法
JP2014072876A (ja) 2012-10-02 2014-04-21 Seiko Epson Corp Ｍｅｍｓ素子および発振器
FR3041810B1 (fr) 2015-09-24 2018-11-16 Radiall Sa Dispositif de commutation sans frottement pour ouvrir et fermer une ligne electrique, a precision de manœuvre amelioree
WO2018132977A1 (zh) * 2017-01-18 2018-07-26 中国科学院深圳先进技术研究院 L 型静电驱动微型机器人及其制造方法、控制方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04133226A (ja) 1990-09-25 1992-05-07 Matsushita Electric Works Ltd 静電リレー
US5619061A (en) 1993-07-27 1997-04-08 Texas Instruments Incorporated Micromechanical microwave switching
DE69714408T2 (de) 1997-04-23 2003-04-24 Asulab Sa Magnetischer Mikroschalter und Herstellungsverfahren
JP3087741B2 (ja) * 1998-11-04 2000-09-11 日本電気株式会社 マイクロマシンスイッチ

Also Published As

Publication number Publication date
EP1235244A4 (de) 2004-03-03
EP1235244B1 (de) 2006-03-01
DE69930169T2 (de) 2006-08-03
US6784769B1 (en) 2004-08-31
WO2001037303A1 (fr) 2001-05-25
EP1235244A1 (de) 2002-08-28

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee