DE69811563D1 - Mikromechanischer optischer Schalter - Google Patents

Mikromechanischer optischer Schalter

Info

Publication number
DE69811563D1
DE69811563D1 DE69811563T DE69811563T DE69811563D1 DE 69811563 D1 DE69811563 D1 DE 69811563D1 DE 69811563 T DE69811563 T DE 69811563T DE 69811563 T DE69811563 T DE 69811563T DE 69811563 D1 DE69811563 D1 DE 69811563D1
Authority
DE
Germany
Prior art keywords
optical switch
micromechanical optical
micromechanical
switch
optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69811563T
Other languages
English (en)
Other versions
DE69811563T2 (de
Inventor
Vladimir Anatolyevich Aksyuk
Peter Ledel Gammel
David John Bishop
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nokia of America Corp
Original Assignee
Lucent Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lucent Technologies Inc filed Critical Lucent Technologies Inc
Application granted granted Critical
Publication of DE69811563D1 publication Critical patent/DE69811563D1/de
Publication of DE69811563T2 publication Critical patent/DE69811563T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/26Optical coupling means
    • G02B6/35Optical coupling means having switching means
    • G02B6/3564Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3568Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
    • G02B6/357Electrostatic force
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/26Optical coupling means
    • G02B6/35Optical coupling means having switching means
    • G02B6/351Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G02B6/3512Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
    • G02B6/3514Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror the reflective optical element moving along a line so as to translate into and out of the beam path, i.e. across the beam path
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/26Optical coupling means
    • G02B6/35Optical coupling means having switching means
    • G02B6/351Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G02B6/353Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being a shutter, baffle, beam dump or opaque element
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/26Optical coupling means
    • G02B6/35Optical coupling means having switching means
    • G02B6/354Switching arrangements, i.e. number of input/output ports and interconnection types
    • G02B6/35442D constellations, i.e. with switching elements and switched beams located in a plane
    • G02B6/35481xN switch, i.e. one input and a selectable single output of N possible outputs
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/26Optical coupling means
    • G02B6/35Optical coupling means having switching means
    • G02B6/354Switching arrangements, i.e. number of input/output ports and interconnection types
    • G02B6/35442D constellations, i.e. with switching elements and switched beams located in a plane
    • G02B6/35481xN switch, i.e. one input and a selectable single output of N possible outputs
    • G02B6/35521x1 switch, e.g. on/off switch
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/26Optical coupling means
    • G02B6/35Optical coupling means having switching means
    • G02B6/3594Characterised by additional functional means, e.g. means for variably attenuating or branching or means for switching differently polarized beams

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
DE69811563T 1997-05-15 1998-05-05 Mikromechanischer optischer Schalter Expired - Lifetime DE69811563T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US856569 1997-05-15
US08/856,569 US5923798A (en) 1997-05-15 1997-05-15 Micro machined optical switch

Publications (2)

Publication Number Publication Date
DE69811563D1 true DE69811563D1 (de) 2003-04-03
DE69811563T2 DE69811563T2 (de) 2004-02-19

Family

ID=25323975

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69811563T Expired - Lifetime DE69811563T2 (de) 1997-05-15 1998-05-05 Mikromechanischer optischer Schalter

Country Status (4)

Country Link
US (1) US5923798A (de)
EP (1) EP0880040B1 (de)
JP (1) JP3212554B2 (de)
DE (1) DE69811563T2 (de)

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US6173105B1 (en) * 1998-11-20 2001-01-09 Lucent Technologies Optical attenuator
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US6480646B2 (en) 2000-05-12 2002-11-12 New Jersey Institute Of Technology Micro-mirror and actuator with extended travel range
US6628041B2 (en) 2000-05-16 2003-09-30 Calient Networks, Inc. Micro-electro-mechanical-system (MEMS) mirror device having large angle out of plane motion using shaped combed finger actuators and method for fabricating the same
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US7085445B2 (en) * 2000-08-04 2006-08-01 Seungug Koh Micro-opto-electro-mechanical waveguide switches
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US6647170B2 (en) 2000-09-19 2003-11-11 Newport Opticom, Inc. Optical switching system that uses movable microstructures to switch optical signals in three dimensions
US6690847B2 (en) 2000-09-19 2004-02-10 Newport Opticom, Inc. Optical switching element having movable optically transmissive microstructure
US6388789B1 (en) 2000-09-19 2002-05-14 The Charles Stark Draper Laboratory, Inc. Multi-axis magnetically actuated device
US6694071B2 (en) 2000-09-19 2004-02-17 Newport Opticom, Inc. Method and apparatus for switching optical signals using rotatable optically transmissive microstructure
US6647168B2 (en) 2000-09-19 2003-11-11 Newport Opticom, Inc. Low loss optical switching system
US6954579B2 (en) * 2000-09-19 2005-10-11 Ying Wen Hsu Method and apparatus for changing the optical intensity of an optical signal using a movable light transmissive structure
US6807331B2 (en) * 2000-09-19 2004-10-19 Newport Opticom, Inc. Structures that correct for thermal distortion in an optical device formed of thermally dissimilar materials
US6825967B1 (en) 2000-09-29 2004-11-30 Calient Networks, Inc. Shaped electrodes for micro-electro-mechanical-system (MEMS) devices to improve actuator performance and methods for fabricating the same
US6567574B1 (en) 2000-10-06 2003-05-20 Omm, Inc. Modular three-dimensional optical switch
US6556741B1 (en) 2000-10-25 2003-04-29 Omm, Inc. MEMS optical switch with torsional hinge and method of fabrication thereof
US6647164B1 (en) 2000-10-31 2003-11-11 3M Innovative Properties Company Gimbaled micro-mirror positionable by thermal actuators
JP2002169104A (ja) * 2000-12-01 2002-06-14 Sumitomo Electric Ind Ltd 光デバイス
US6445858B1 (en) * 2000-12-11 2002-09-03 Jds Uniphase Inc. Micro-alignment of optical components
FR2817974B1 (fr) * 2000-12-12 2003-09-12 Commissariat Energie Atomique Micro-actionneur optique, composant optique utilisant le micro-actionneur, et procede de realisation d'un micro-actionneur optique
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US6901180B2 (en) * 2001-01-24 2005-05-31 Adc Telecommunications, Inc. MEMS optical switch on a single chip and method
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US6571029B1 (en) 2001-02-13 2003-05-27 Omm, Inc. Method for determining and implementing electrical damping coefficients
JP3923265B2 (ja) * 2001-02-15 2007-05-30 古河電気工業株式会社 可変光減衰器
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US7522790B1 (en) * 2002-12-20 2009-04-21 Raytheon Company Optical communications system with selective block/add capability of an optical channel
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JP5624058B2 (ja) 2009-01-30 2014-11-12 ケイアム・コーポレーションKaiam Corp. マイクロ機構により整列された光学アセンブリ
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JP5767819B2 (ja) * 2011-02-02 2015-08-19 株式会社Ihi プラズマ処理装置
CN102854568A (zh) * 2012-09-29 2013-01-02 江苏省电力公司电力科学研究院 智能变电站无源光纤开关及其安措隔离方法
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Also Published As

Publication number Publication date
DE69811563T2 (de) 2004-02-19
EP0880040A2 (de) 1998-11-25
EP0880040A3 (de) 1999-02-03
JPH1144852A (ja) 1999-02-16
JP3212554B2 (ja) 2001-09-25
EP0880040B1 (de) 2003-02-26
US5923798A (en) 1999-07-13

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Legal Events

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8364 No opposition during term of opposition