JP2007096278A5 - - Google Patents
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- Publication number
- JP2007096278A5 JP2007096278A5 JP2006224310A JP2006224310A JP2007096278A5 JP 2007096278 A5 JP2007096278 A5 JP 2007096278A5 JP 2006224310 A JP2006224310 A JP 2006224310A JP 2006224310 A JP2006224310 A JP 2006224310A JP 2007096278 A5 JP2007096278 A5 JP 2007096278A5
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor device
- layer
- stacked
- thermosetting resin
- solder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 claims 28
- 239000011347 resin Substances 0.000 claims 9
- 229920005989 resin Polymers 0.000 claims 9
- 229920001187 thermosetting polymer Polymers 0.000 claims 8
- 229910000679 solder Inorganic materials 0.000 claims 6
- 238000010438 heat treatment Methods 0.000 claims 4
- 238000004519 manufacturing process Methods 0.000 claims 3
- 238000002844 melting Methods 0.000 claims 2
- 230000008018 melting Effects 0.000 claims 2
- 239000000853 adhesive Substances 0.000 claims 1
- 230000001070 adhesive effect Effects 0.000 claims 1
- 238000001816 cooling Methods 0.000 claims 1
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006224310A JP5116268B2 (ja) | 2005-08-31 | 2006-08-21 | 積層型半導体装置およびその製造方法 |
| US11/468,181 US20070045788A1 (en) | 2005-08-31 | 2006-08-29 | Stacking semiconductor device and production method thereof |
| US12/501,939 US7863101B2 (en) | 2005-08-31 | 2009-07-13 | Stacking semiconductor device and production method thereof |
| US12/958,584 US20110084405A1 (en) | 2005-08-31 | 2010-12-02 | Stacking semiconductor device and production method thereof |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005250511 | 2005-08-31 | ||
| JP2005250511 | 2005-08-31 | ||
| JP2006224310A JP5116268B2 (ja) | 2005-08-31 | 2006-08-21 | 積層型半導体装置およびその製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2007096278A JP2007096278A (ja) | 2007-04-12 |
| JP2007096278A5 true JP2007096278A5 (enExample) | 2009-09-17 |
| JP5116268B2 JP5116268B2 (ja) | 2013-01-09 |
Family
ID=37802903
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2006224310A Expired - Fee Related JP5116268B2 (ja) | 2005-08-31 | 2006-08-21 | 積層型半導体装置およびその製造方法 |
Country Status (2)
| Country | Link |
|---|---|
| US (3) | US20070045788A1 (enExample) |
| JP (1) | JP5116268B2 (enExample) |
Families Citing this family (26)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006324568A (ja) * | 2005-05-20 | 2006-11-30 | Matsushita Electric Ind Co Ltd | 多層モジュールとその製造方法 |
| JP5116268B2 (ja) * | 2005-08-31 | 2013-01-09 | キヤノン株式会社 | 積層型半導体装置およびその製造方法 |
| JP4742844B2 (ja) * | 2005-12-15 | 2011-08-10 | ルネサスエレクトロニクス株式会社 | 半導体装置の製造方法 |
| US8110899B2 (en) * | 2006-12-20 | 2012-02-07 | Intel Corporation | Method for incorporating existing silicon die into 3D integrated stack |
| US7692946B2 (en) * | 2007-06-29 | 2010-04-06 | Intel Corporation | Memory array on more than one die |
| US7619305B2 (en) * | 2007-08-15 | 2009-11-17 | Powertech Technology Inc. | Semiconductor package-on-package (POP) device avoiding crack at solder joints of micro contacts during package stacking |
| US8105915B2 (en) * | 2009-06-12 | 2012-01-31 | Stats Chippac, Ltd. | Semiconductor device and method of forming vertical interconnect structure between non-linear portions of conductive layers |
| JP2011077108A (ja) * | 2009-09-29 | 2011-04-14 | Elpida Memory Inc | 半導体装置 |
| JP5409427B2 (ja) * | 2010-02-17 | 2014-02-05 | キヤノン株式会社 | プリント回路板及び半導体装置 |
| JP2012033875A (ja) | 2010-06-30 | 2012-02-16 | Canon Inc | 積層型半導体装置 |
| KR101712043B1 (ko) * | 2010-10-14 | 2017-03-03 | 삼성전자주식회사 | 적층 반도체 패키지, 상기 적층 반도체 패키지를 포함하는 반도체 장치 및 상기 적층 반도체 패키지의 제조 방법 |
| US8299596B2 (en) * | 2010-12-14 | 2012-10-30 | Stats Chippac Ltd. | Integrated circuit packaging system with bump conductors and method of manufacture thereof |
| KR101740483B1 (ko) * | 2011-05-02 | 2017-06-08 | 삼성전자 주식회사 | 고정 부재 및 할로겐-프리 패키지간 연결부를 포함하는 적층 패키지 |
| US9934836B2 (en) * | 2011-06-27 | 2018-04-03 | Thin Film Electronics Asa | Short circuit reduction in an electronic component comprising a stack of layers arranged on a flexible substrate |
| KR20130005465A (ko) * | 2011-07-06 | 2013-01-16 | 삼성전자주식회사 | 반도체 스택 패키지 장치 |
| TWI546911B (zh) * | 2012-12-17 | 2016-08-21 | 巨擘科技股份有限公司 | 封裝結構及封裝方法 |
| US9059241B2 (en) * | 2013-01-29 | 2015-06-16 | International Business Machines Corporation | 3D assembly for interposer bow |
| CN104465427B (zh) * | 2013-09-13 | 2018-08-03 | 日月光半导体制造股份有限公司 | 封装结构及半导体工艺 |
| CN107109140A (zh) | 2014-12-19 | 2017-08-29 | 3M创新有限公司 | 在电子装置中替换油墨阶挡板的粘合剂 |
| US10163871B2 (en) * | 2015-10-02 | 2018-12-25 | Qualcomm Incorporated | Integrated device comprising embedded package on package (PoP) device |
| JP6916471B2 (ja) | 2017-01-19 | 2021-08-11 | 株式会社村田製作所 | 電子部品及び電子部品の製造方法 |
| US9947634B1 (en) * | 2017-06-13 | 2018-04-17 | Northrop Grumman Systems Corporation | Robust mezzanine BGA connector |
| CN110634806A (zh) * | 2018-06-21 | 2019-12-31 | 美光科技公司 | 半导体装置组合件和其制造方法 |
| US11282716B2 (en) * | 2019-11-08 | 2022-03-22 | International Business Machines Corporation | Integration structure and planar joining |
| CN113053833A (zh) * | 2019-12-26 | 2021-06-29 | 财团法人工业技术研究院 | 一种半导体装置及其制作方法 |
| US11502056B2 (en) * | 2020-07-08 | 2022-11-15 | Taiwan Semiconductor Manufacturing Company, Ltd. | Joint structure in semiconductor package and manufacturing method thereof |
Family Cites Families (28)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2944449B2 (ja) * | 1995-02-24 | 1999-09-06 | 日本電気株式会社 | 半導体パッケージとその製造方法 |
| JP2806357B2 (ja) * | 1996-04-18 | 1998-09-30 | 日本電気株式会社 | スタックモジュール |
| JPH10294423A (ja) * | 1997-04-17 | 1998-11-04 | Nec Corp | 半導体装置 |
| US6104093A (en) * | 1997-04-24 | 2000-08-15 | International Business Machines Corporation | Thermally enhanced and mechanically balanced flip chip package and method of forming |
| JPH11204679A (ja) * | 1998-01-08 | 1999-07-30 | Mitsubishi Electric Corp | 半導体装置 |
| JP2000208698A (ja) * | 1999-01-18 | 2000-07-28 | Toshiba Corp | 半導体装置 |
| US6274929B1 (en) * | 1998-09-01 | 2001-08-14 | Texas Instruments Incorporated | Stacked double sided integrated circuit package |
| JP3147087B2 (ja) * | 1998-06-17 | 2001-03-19 | 日本電気株式会社 | 積層型半導体装置放熱構造 |
| US5854507A (en) * | 1998-07-21 | 1998-12-29 | Hewlett-Packard Company | Multiple chip assembly |
| US6316289B1 (en) * | 1998-11-12 | 2001-11-13 | Amerasia International Technology Inc. | Method of forming fine-pitch interconnections employing a standoff mask |
| US6369448B1 (en) * | 2000-01-21 | 2002-04-09 | Lsi Logic Corporation | Vertically integrated flip chip semiconductor package |
| US7247932B1 (en) * | 2000-05-19 | 2007-07-24 | Megica Corporation | Chip package with capacitor |
| JP3722209B2 (ja) * | 2000-09-05 | 2005-11-30 | セイコーエプソン株式会社 | 半導体装置 |
| JP4023159B2 (ja) * | 2001-07-31 | 2007-12-19 | ソニー株式会社 | 半導体装置の製造方法及び積層半導体装置の製造方法 |
| JP2003318361A (ja) * | 2002-04-19 | 2003-11-07 | Fujitsu Ltd | 半導体装置及びその製造方法 |
| JP2004281818A (ja) * | 2003-03-17 | 2004-10-07 | Seiko Epson Corp | 半導体装置、電子デバイス、電子機器、キャリア基板の製造方法、半導体装置の製造方法および電子デバイスの製造方法 |
| JP2004281919A (ja) | 2003-03-18 | 2004-10-07 | Seiko Epson Corp | 半導体装置、電子デバイス、電子機器、半導体装置の製造方法および電子デバイスの製造方法 |
| JP4096774B2 (ja) * | 2003-03-24 | 2008-06-04 | セイコーエプソン株式会社 | 半導体装置、電子デバイス、電子機器、半導体装置の製造方法及び電子デバイスの製造方法 |
| JP3786103B2 (ja) * | 2003-05-02 | 2006-06-14 | セイコーエプソン株式会社 | 半導体装置、電子デバイス、電子機器および半導体装置の製造方法 |
| US7173325B2 (en) * | 2003-08-29 | 2007-02-06 | C-Core Technologies, Inc. | Expansion constrained die stack |
| US7180165B2 (en) * | 2003-09-05 | 2007-02-20 | Sanmina, Sci Corporation | Stackable electronic assembly |
| KR100585226B1 (ko) * | 2004-03-10 | 2006-06-01 | 삼성전자주식회사 | 방열판을 갖는 반도체 패키지 및 그를 이용한 적층 패키지 |
| JP2006114604A (ja) * | 2004-10-13 | 2006-04-27 | Toshiba Corp | 半導体装置及びその組立方法 |
| JP5116268B2 (ja) * | 2005-08-31 | 2013-01-09 | キヤノン株式会社 | 積層型半導体装置およびその製造方法 |
| JP4719009B2 (ja) * | 2006-01-13 | 2011-07-06 | ルネサスエレクトロニクス株式会社 | 基板および半導体装置 |
| JP2007266111A (ja) * | 2006-03-27 | 2007-10-11 | Sharp Corp | 半導体装置、それを用いた積層型半導体装置、ベース基板、および半導体装置の製造方法 |
| JP5075463B2 (ja) * | 2007-04-19 | 2012-11-21 | ルネサスエレクトロニクス株式会社 | 半導体装置 |
| US20090039490A1 (en) * | 2007-08-08 | 2009-02-12 | Powertech Technology Inc. | Mounting assembly of semiconductor packages prevent soldering defects caused by substrate warpage |
-
2006
- 2006-08-21 JP JP2006224310A patent/JP5116268B2/ja not_active Expired - Fee Related
- 2006-08-29 US US11/468,181 patent/US20070045788A1/en not_active Abandoned
-
2009
- 2009-07-13 US US12/501,939 patent/US7863101B2/en not_active Expired - Fee Related
-
2010
- 2010-12-02 US US12/958,584 patent/US20110084405A1/en not_active Abandoned
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