JP2011198962A5 - - Google Patents
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- Publication number
- JP2011198962A5 JP2011198962A5 JP2010063288A JP2010063288A JP2011198962A5 JP 2011198962 A5 JP2011198962 A5 JP 2011198962A5 JP 2010063288 A JP2010063288 A JP 2010063288A JP 2010063288 A JP2010063288 A JP 2010063288A JP 2011198962 A5 JP2011198962 A5 JP 2011198962A5
- Authority
- JP
- Japan
- Prior art keywords
- laminate
- metal layer
- cleavage direction
- substrate
- manufacturing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000003776 cleavage reaction Methods 0.000 claims description 8
- 239000002184 metal Substances 0.000 claims description 8
- 230000007017 scission Effects 0.000 claims description 8
- 239000000758 substrate Substances 0.000 claims description 6
- 239000004065 semiconductor Substances 0.000 claims description 5
- 238000004519 manufacturing process Methods 0.000 claims description 4
- 238000000034 method Methods 0.000 claims 1
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010063288A JP2011198962A (ja) | 2010-03-18 | 2010-03-18 | 半導体発光素子の製造方法 |
| US12/956,245 US20110229997A1 (en) | 2010-03-18 | 2010-11-30 | Method for manufacturing semiconductor light emitting device |
| EP10195103A EP2367209A2 (en) | 2010-03-18 | 2010-12-15 | Method for manufacturing semiconductor light emitting device |
| TW100105421A TW201214746A (en) | 2010-03-18 | 2011-02-18 | Method for manufacturing semiconductor light emitting device |
| CN2011100669676A CN102194933A (zh) | 2010-03-18 | 2011-03-04 | 半导体发光元件的制造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010063288A JP2011198962A (ja) | 2010-03-18 | 2010-03-18 | 半導体発光素子の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2011198962A JP2011198962A (ja) | 2011-10-06 |
| JP2011198962A5 true JP2011198962A5 (enExample) | 2012-03-22 |
Family
ID=44202051
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2010063288A Pending JP2011198962A (ja) | 2010-03-18 | 2010-03-18 | 半導体発光素子の製造方法 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US20110229997A1 (enExample) |
| EP (1) | EP2367209A2 (enExample) |
| JP (1) | JP2011198962A (enExample) |
| CN (1) | CN102194933A (enExample) |
| TW (1) | TW201214746A (enExample) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100599012B1 (ko) * | 2005-06-29 | 2006-07-12 | 서울옵토디바이스주식회사 | 열전도성 기판을 갖는 발광 다이오드 및 그것을 제조하는방법 |
| JP2010109015A (ja) * | 2008-10-28 | 2010-05-13 | Panasonic Electric Works Co Ltd | 半導体発光素子の製造方法 |
| TWI478384B (zh) | 2011-12-28 | 2015-03-21 | Toshiba Kk | Semiconductor light emitting element and manufacturing method thereof |
| FR2992466A1 (fr) | 2012-06-22 | 2013-12-27 | Soitec Silicon On Insulator | Procede de realisation de contact pour led et structure resultante |
| JP7347197B2 (ja) * | 2019-12-19 | 2023-09-20 | トヨタ自動車株式会社 | 回転電機コアの製造方法および製造装置 |
Family Cites Families (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3230638B2 (ja) * | 1993-02-10 | 2001-11-19 | シャープ株式会社 | 発光ダイオードの製造方法 |
| JP2820120B2 (ja) * | 1996-06-03 | 1998-11-05 | 日本電気株式会社 | 半導体基板の製造方法 |
| TW502458B (en) * | 1999-06-09 | 2002-09-11 | Toshiba Corp | Bonding type semiconductor substrate, semiconductor light emission element and manufacturing method thereof |
| US6333208B1 (en) * | 1999-07-13 | 2001-12-25 | Li Chiung-Tung | Robust manufacturing method for making a III-V compound semiconductor device by misaligned wafer bonding |
| JP2002134374A (ja) * | 2000-10-25 | 2002-05-10 | Mitsubishi Electric Corp | 半導体ウェハ、その製造方法およびその製造装置 |
| CN100403543C (zh) * | 2001-12-04 | 2008-07-16 | 信越半导体株式会社 | 贴合晶片及贴合晶片的制造方法 |
| TWI287880B (en) | 2004-03-18 | 2007-10-01 | Showa Denko Kk | Group III nitride semiconductor light-emitting device and method of producing the same |
| JP4952883B2 (ja) * | 2006-01-17 | 2012-06-13 | ソニー株式会社 | 半導体発光素子 |
| JP4935136B2 (ja) * | 2006-03-22 | 2012-05-23 | パナソニック株式会社 | 発光素子 |
| US7795054B2 (en) * | 2006-12-08 | 2010-09-14 | Samsung Led Co., Ltd. | Vertical structure LED device and method of manufacturing the same |
| JP4888276B2 (ja) * | 2007-08-09 | 2012-02-29 | 三菱電機株式会社 | 半導体ウエハ装置 |
| JP4471003B2 (ja) * | 2008-01-23 | 2010-06-02 | セイコーエプソン株式会社 | 接合体の形成方法 |
| JP4492733B2 (ja) * | 2008-05-27 | 2010-06-30 | ソニー株式会社 | 発光装置及び発光装置の製造方法 |
| JP2010186829A (ja) * | 2009-02-10 | 2010-08-26 | Toshiba Corp | 発光素子の製造方法 |
-
2010
- 2010-03-18 JP JP2010063288A patent/JP2011198962A/ja active Pending
- 2010-11-30 US US12/956,245 patent/US20110229997A1/en not_active Abandoned
- 2010-12-15 EP EP10195103A patent/EP2367209A2/en not_active Withdrawn
-
2011
- 2011-02-18 TW TW100105421A patent/TW201214746A/zh unknown
- 2011-03-04 CN CN2011100669676A patent/CN102194933A/zh active Pending
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