JP2011009723A5 - - Google Patents

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Publication number
JP2011009723A5
JP2011009723A5 JP2010119101A JP2010119101A JP2011009723A5 JP 2011009723 A5 JP2011009723 A5 JP 2011009723A5 JP 2010119101 A JP2010119101 A JP 2010119101A JP 2010119101 A JP2010119101 A JP 2010119101A JP 2011009723 A5 JP2011009723 A5 JP 2011009723A5
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JP
Japan
Prior art keywords
semiconductor substrate
substrate
tray
recess
semiconductor
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JP2010119101A
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English (en)
Japanese (ja)
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JP2011009723A (ja
JP5619474B2 (ja
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Priority to JP2010119101A priority Critical patent/JP5619474B2/ja
Priority claimed from JP2010119101A external-priority patent/JP5619474B2/ja
Publication of JP2011009723A publication Critical patent/JP2011009723A/ja
Publication of JP2011009723A5 publication Critical patent/JP2011009723A5/ja
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Publication of JP5619474B2 publication Critical patent/JP5619474B2/ja
Expired - Fee Related legal-status Critical Current
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JP2010119101A 2009-05-26 2010-05-25 Ｓｏｉ基板の作製方法 Expired - Fee Related JP5619474B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2010119101A JP5619474B2 (ja) 2009-05-26 2010-05-25 Ｓｏｉ基板の作製方法

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2009126962 2009-05-26
JP2009126962 2009-05-26
JP2010119101A JP5619474B2 (ja) 2009-05-26 2010-05-25 Ｓｏｉ基板の作製方法

Publications (3)

Publication Number Publication Date
JP2011009723A JP2011009723A (ja) 2011-01-13
JP2011009723A5 true JP2011009723A5 (enExample) 2013-06-13
JP5619474B2 JP5619474B2 (ja) 2014-11-05

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JP2010119101A Expired - Fee Related JP5619474B2 (ja) 2009-05-26 2010-05-25 Ｓｏｉ基板の作製方法

Country Status (3)

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US (1) US8432021B2 (enExample)
JP (1) JP5619474B2 (enExample)
KR (1) KR101651206B1 (enExample)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013002227A1 (ja) * 2011-06-30 2013-01-03 シャープ株式会社 半導体基板の製造方法、半導体基板作成用基板、積層基板、半導体基板、及び電子デバイス
WO2013057771A1 (ja) * 2011-10-21 2013-04-25 株式会社島津製作所 薄膜トランジスタの製造方法
JPWO2013057771A1 (ja) * 2011-10-21 2015-04-02 株式会社島津製作所 薄膜トランジスタの製造方法
US9041147B2 (en) * 2012-01-10 2015-05-26 Sharp Kabushiki Kaisha Semiconductor substrate, thin film transistor, semiconductor circuit, liquid crystal display apparatus, electroluminescent apparatus, semiconductor substrate manufacturing method, and semiconductor substrate manufacturing apparatus
KR20130104546A (ko) 2012-03-14 2013-09-25 삼성디스플레이 주식회사 도너 필름용 트레이
JP2014011394A (ja) * 2012-07-02 2014-01-20 Sumitomo Heavy Ind Ltd イオン注入用基板載置部材及びイオン注入方法
US9184211B2 (en) 2012-07-05 2015-11-10 Semiconductor Energy Laboratory Co., Ltd. Light-emitting device and method for fabricating the same
KR102173801B1 (ko) 2012-07-12 2020-11-04 가부시키가이샤 한도오따이 에네루기 켄큐쇼 표시 장치, 및 표시 장치의 제작 방법
US9016552B2 (en) * 2013-03-15 2015-04-28 Sanmina Corporation Method for forming interposers and stacked memory devices
DE102015000449A1 (de) 2015-01-15 2016-07-21 Siltectra Gmbh Festkörperteilung mittels Stoffumwandlung
US10290908B2 (en) 2014-02-14 2019-05-14 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and electronic device
CN107000125B (zh) 2014-11-27 2022-08-12 西尔特克特拉有限责任公司 基于激光器的分离方法
KR20180059569A (ko) 2014-11-27 2018-06-04 실텍트라 게엠베하 재료의 전환을 이용한 고체의 분할
KR102631767B1 (ko) * 2019-08-22 2024-02-01 주식회사 효산 디스플레이 제조용 기판 및 이의 제조 방법

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FR2681472B1 (fr) 1991-09-18 1993-10-29 Commissariat Energie Atomique Procede de fabrication de films minces de materiau semiconducteur.
JP3324469B2 (ja) 1997-09-26 2002-09-17 信越半導体株式会社 Ｓｏｉウエーハの製造方法ならびにこの方法で製造されるｓｏｉウエーハ
US6287941B1 (en) 1999-04-21 2001-09-11 Silicon Genesis Corporation Surface finishing of SOI substrates using an EPI process
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JP2002353082A (ja) * 2001-05-28 2002-12-06 Shin Etsu Handotai Co Ltd 貼り合わせウェーハの製造方法
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JP4772258B2 (ja) 2002-08-23 2011-09-14 シャープ株式会社 Ｓｏｉ基板の製造方法
US7119365B2 (en) 2002-03-26 2006-10-10 Sharp Kabushiki Kaisha Semiconductor device and manufacturing method thereof, SOI substrate and display device using the same, and manufacturing method of the SOI substrate
KR100511656B1 (ko) 2002-08-10 2005-09-07 주식회사 실트론 나노 에스오아이 웨이퍼의 제조방법 및 그에 따라 제조된나노 에스오아이 웨이퍼
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JP5452900B2 (ja) * 2007-09-21 2014-03-26 株式会社半導体エネルギー研究所 半導体膜付き基板の作製方法
TWI437696B (zh) * 2007-09-21 2014-05-11 半導體能源研究所股份有限公司 半導體裝置及其製造方法
JP2009094488A (ja) * 2007-09-21 2009-04-30 Semiconductor Energy Lab Co Ltd 半導体膜付き基板の作製方法
JP5250228B2 (ja) * 2007-09-21 2013-07-31 株式会社半導体エネルギー研究所 半導体装置の作製方法
JP5506172B2 (ja) * 2007-10-10 2014-05-28 株式会社半導体エネルギー研究所 半導体基板の作製方法
US7947570B2 (en) * 2008-01-16 2011-05-24 Semiconductor Energy Laboratory Co., Ltd. Manufacturing method and manufacturing apparatus of semiconductor substrate
SG159476A1 (en) * 2008-08-28 2010-03-30 Semiconductor Energy Lab Method for manufacturing semiconductor layer and semiconductor device

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