JP2007070687A5 - - Google Patents

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Publication number
JP2007070687A5
JP2007070687A5 JP2005258558A JP2005258558A JP2007070687A5 JP 2007070687 A5 JP2007070687 A5 JP 2007070687A5 JP 2005258558 A JP2005258558 A JP 2005258558A JP 2005258558 A JP2005258558 A JP 2005258558A JP 2007070687 A5 JP2007070687 A5 JP 2007070687A5
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JP
Japan
Prior art keywords
deposition material
evaporation source
substrate
scanning
maintaining
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JP2005258558A
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English (en)
Japanese (ja)
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JP4789551B2 (ja
JP2007070687A (ja
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Priority claimed from JP2005258558A external-priority patent/JP4789551B2/ja
Priority to JP2005258558A priority Critical patent/JP4789551B2/ja
Priority to US11/510,996 priority patent/US20070054051A1/en
Priority to TW095131779A priority patent/TWI438826B/zh
Priority to CN2006101281807A priority patent/CN1928149B/zh
Priority to CN2011101021073A priority patent/CN102199745A/zh
Publication of JP2007070687A publication Critical patent/JP2007070687A/ja
Publication of JP2007070687A5 publication Critical patent/JP2007070687A5/ja
Publication of JP4789551B2 publication Critical patent/JP4789551B2/ja
Application granted granted Critical
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2005258558A 2005-09-06 2005-09-06 有機ｅｌ成膜装置 Expired - Fee Related JP4789551B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2005258558A JP4789551B2 (ja) 2005-09-06 2005-09-06 有機ｅｌ成膜装置
US11/510,996 US20070054051A1 (en) 2005-09-06 2006-08-28 Deposition device
TW095131779A TWI438826B (zh) 2005-09-06 2006-08-29 沉積裝置
CN2011101021073A CN102199745A (zh) 2005-09-06 2006-09-06 沉积装置
CN2006101281807A CN1928149B (zh) 2005-09-06 2006-09-06 沉积装置和用于制造显示装置的方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005258558A JP4789551B2 (ja) 2005-09-06 2005-09-06 有機ｅｌ成膜装置

Publications (3)

Publication Number Publication Date
JP2007070687A JP2007070687A (ja) 2007-03-22
JP2007070687A5 true JP2007070687A5 (enExample) 2008-09-11
JP4789551B2 JP4789551B2 (ja) 2011-10-12

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Family Applications (1)

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JP2005258558A Expired - Fee Related JP4789551B2 (ja) 2005-09-06 2005-09-06 有機ｅｌ成膜装置

Country Status (4)

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US (1) US20070054051A1 (enExample)
JP (1) JP4789551B2 (enExample)
CN (2) CN1928149B (enExample)
TW (1) TWI438826B (enExample)

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CN109207954B (zh) * 2018-10-19 2021-04-20 布勒莱宝光学设备（北京）有限公司 多色膜玻璃及其生产方法与设备
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