JP2009512786A5 - - Google Patents

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Publication number
JP2009512786A5
JP2009512786A5 JP2008537742A JP2008537742A JP2009512786A5 JP 2009512786 A5 JP2009512786 A5 JP 2009512786A5 JP 2008537742 A JP2008537742 A JP 2008537742A JP 2008537742 A JP2008537742 A JP 2008537742A JP 2009512786 A5 JP2009512786 A5 JP 2009512786A5
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JP
Japan
Prior art keywords
cartridge
cavity
vapor deposition
supply path
deposition chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2008537742A
Other languages
English (en)
Japanese (ja)
Other versions
JP2009512786A (ja
JP5155173B2 (ja
Filing date
Publication date
Priority claimed from US11/264,349 external-priority patent/US7993459B2/en
Application filed filed Critical
Publication of JP2009512786A publication Critical patent/JP2009512786A/ja
Publication of JP2009512786A5 publication Critical patent/JP2009512786A5/ja
Application granted granted Critical
Publication of JP5155173B2 publication Critical patent/JP5155173B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2008537742A 2005-10-24 2006-10-11 気化ゾーンへの粒子状材料の供給 Active JP5155173B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US11/264,349 US7993459B2 (en) 2005-10-24 2005-10-24 Delivering particulate material to a vaporization zone
US11/264,349 2005-10-24
PCT/US2006/039756 WO2007050293A1 (en) 2005-10-24 2006-10-11 Delivering particulate material to a vaporization zone

Publications (3)

Publication Number Publication Date
JP2009512786A JP2009512786A (ja) 2009-03-26
JP2009512786A5 true JP2009512786A5 (enExample) 2009-05-07
JP5155173B2 JP5155173B2 (ja) 2013-02-27

Family

ID=37853028

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008537742A Active JP5155173B2 (ja) 2005-10-24 2006-10-11 気化ゾーンへの粒子状材料の供給

Country Status (7)

Country Link
US (1) US7993459B2 (enExample)
EP (1) EP1966409B1 (enExample)
JP (1) JP5155173B2 (enExample)
KR (1) KR101196334B1 (enExample)
DE (1) DE602006016863D1 (enExample)
TW (1) TWI377714B (enExample)
WO (1) WO2007050293A1 (enExample)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7883583B2 (en) * 2008-01-08 2011-02-08 Global Oled Technology Llc Vaporization apparatus with precise powder metering
US8741062B2 (en) * 2008-04-22 2014-06-03 Picosun Oy Apparatus and methods for deposition reactors
US8048230B2 (en) * 2008-11-14 2011-11-01 Global Oled Technology Llc Metering and vaporizing particulate material
US8062427B2 (en) * 2008-11-14 2011-11-22 Global Oled Technology Llc Particulate material metering and vaporization
US7972443B2 (en) * 2008-11-14 2011-07-05 Global Oled Technology Llc Metering of particulate material and vaporization thereof
JP2013503256A (ja) * 2009-08-26 2013-01-31 株式会社テラセミコン 蒸着ガス供給装置
KR101225377B1 (ko) * 2012-04-02 2013-01-25 주식회사 야스 유기물질 카트리지 및 박막제작에 이를 사용하는 방법
DE102016111214B3 (de) * 2016-06-20 2017-06-29 Ancosys Gmbh Vorrichtung zur Pulverdosierung für chemische Produktionsprozesse unter Reinraumbedingungen, Verwendung derselben und Zudosierungsverfahren
CN107088150B (zh) * 2017-05-01 2023-02-28 宁德职业技术学院 一种葡萄籽花青素蒸脸美容器

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2447789A (en) 1945-03-23 1948-08-24 Polaroid Corp Evaporating crucible for coating apparatus
US2524560A (en) * 1945-09-22 1950-10-03 Us Automatic Box Machinery Co Method and machine for filling containers with powdered material and for removing dust and airborne particles at region ambient the container
US2800252A (en) * 1954-03-17 1957-07-23 Eugene A Wahl Powder-feeding apparatus
US3270857A (en) * 1964-02-24 1966-09-06 Deere & Co Screw-conveyor feeder
US3447789A (en) * 1967-05-31 1969-06-03 Chemrock Corp Portable perlite handling apparatus and method
US3754529A (en) * 1970-06-08 1973-08-28 Nat Beryllia Corp Apparatus for continuously depositing beryllia through vaporization of a basic formate
US4885211A (en) 1987-02-11 1989-12-05 Eastman Kodak Company Electroluminescent device with improved cathode
US4990371A (en) * 1989-08-01 1991-02-05 Gte Products Corporation Process for coating small solids
EP0585848A1 (de) * 1992-09-02 1994-03-09 Hoechst Aktiengesellschaft Verfahren und Vorrichtung zur chemischen Gasphasenabscheidung dünner Schichten
US5937996A (en) * 1998-01-13 1999-08-17 Vibrascrew Inc. Vibrating screw feeder
US6685762B1 (en) * 1998-08-26 2004-02-03 Superior Micropowders Llc Aerosol method and apparatus for making particulate products
JP2000068055A (ja) 1998-08-26 2000-03-03 Tdk Corp 有機ｅｌ素子用蒸発源、この有機ｅｌ素子用蒸発源を用いた有機ｅｌ素子の製造装置および製造方法
DE10048759A1 (de) * 2000-09-29 2002-04-11 Aixtron Gmbh Verfahren und Vorrichtung zum Abscheiden insbesondere organischer Schichten im Wege der OVPD
US6774318B2 (en) * 2001-02-14 2004-08-10 Process Control Corporation Removable material hopper assembly and method of using same to eliminate residual ingredient material
US6749906B2 (en) 2002-04-25 2004-06-15 Eastman Kodak Company Thermal physical vapor deposition apparatus with detachable vapor source(s) and method
US20040144321A1 (en) 2003-01-28 2004-07-29 Eastman Kodak Company Method of designing a thermal physical vapor deposition system
KR101137901B1 (ko) 2003-05-16 2012-05-02 에스브이티 어소시에이츠, 인코포레이티드 박막 증착 증발기
JP4551996B2 (ja) * 2003-10-09 2010-09-29 グローバル・オーエルイーディー・テクノロジー・リミテッド・ライアビリティ・カンパニー 蒸発装置
US7501152B2 (en) 2004-09-21 2009-03-10 Eastman Kodak Company Delivering particulate material to a vaporization zone

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