JP2007524763A5 - - Google Patents

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Publication number
JP2007524763A5
JP2007524763A5 JP2007500861A JP2007500861A JP2007524763A5 JP 2007524763 A5 JP2007524763 A5 JP 2007524763A5 JP 2007500861 A JP2007500861 A JP 2007500861A JP 2007500861 A JP2007500861 A JP 2007500861A JP 2007524763 A5 JP2007524763 A5 JP 2007524763A5
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JP
Japan
Prior art keywords
container
heating
opening
conductance
vessel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2007500861A
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English (en)
Japanese (ja)
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JP4718538B2 (ja
JP2007524763A (ja
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Publication date
Priority claimed from US10/786,859 external-priority patent/US6893939B1/en
Application filed filed Critical
Publication of JP2007524763A publication Critical patent/JP2007524763A/ja
Publication of JP2007524763A5 publication Critical patent/JP2007524763A5/ja
Application granted granted Critical
Publication of JP4718538B2 publication Critical patent/JP4718538B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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JP2007500861A 2004-02-25 2005-02-11 凝縮効果が最少にされた蒸着源 Expired - Lifetime JP4718538B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US10/786,859 US6893939B1 (en) 2004-02-25 2004-02-25 Thermal physical vapor deposition source with minimized internal condensation effects
US10/786,859 2004-02-25
PCT/US2005/004394 WO2005083145A2 (en) 2004-02-25 2005-02-11 Vapor deposition source with minimized condensation effects

Publications (3)

Publication Number Publication Date
JP2007524763A JP2007524763A (ja) 2007-08-30
JP2007524763A5 true JP2007524763A5 (enExample) 2008-03-21
JP4718538B2 JP4718538B2 (ja) 2011-07-06

Family

ID=34574859

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007500861A Expired - Lifetime JP4718538B2 (ja) 2004-02-25 2005-02-11 凝縮効果が最少にされた蒸着源

Country Status (6)

Country Link
US (1) US6893939B1 (enExample)
JP (1) JP4718538B2 (enExample)
KR (1) KR101136879B1 (enExample)
CN (1) CN1922339B (enExample)
TW (1) TWI394854B (enExample)
WO (1) WO2005083145A2 (enExample)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7364772B2 (en) * 2004-03-22 2008-04-29 Eastman Kodak Company Method for coating an organic layer onto a substrate in a vacuum chamber
KR101106289B1 (ko) * 2006-08-04 2012-01-18 순천향대학교 산학협력단 증착 공정을 위한 선형 증착 소스
EP2109899A4 (en) * 2006-12-19 2012-12-12 Veeco Instr Inc SOURCES OF VAPOR DEPOSITION AND METHODS
WO2010080109A1 (en) * 2008-12-18 2010-07-15 Veeco Instruments Inc. Vacuum deposition sources having heated effusion orifices
US9062369B2 (en) * 2009-03-25 2015-06-23 Veeco Instruments, Inc. Deposition of high vapor pressure materials
US20110195187A1 (en) * 2010-02-10 2011-08-11 Apple Inc. Direct liquid vaporization for oleophobic coatings
US8715779B2 (en) 2011-06-24 2014-05-06 Apple Inc. Enhanced glass impact durability through application of thin films
JP2014189807A (ja) * 2013-03-26 2014-10-06 Canon Tokki Corp 蒸発源装置
CN104099570B (zh) * 2013-04-01 2016-10-05 上海和辉光电有限公司 单点线性蒸发源系统
KR102096049B1 (ko) * 2013-05-03 2020-04-02 삼성디스플레이 주식회사 증착장치, 이를 이용한 유기발광 디스플레이 장치 제조 방법 및 유기발광 디스플레이 장치
CN104213077A (zh) * 2013-05-30 2014-12-17 海洋王照明科技股份有限公司 一种用于有机电致发光器件的蒸发设备
WO2018114373A1 (en) * 2016-12-22 2018-06-28 Flisom Ag Linear source for vapor deposition with at least three electrical heating elements
JP7011521B2 (ja) * 2018-04-17 2022-01-26 株式会社アルバック 真空蒸着装置用の蒸着源

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4356429A (en) 1980-07-17 1982-10-26 Eastman Kodak Company Organic electroluminescent cell
US4539507A (en) 1983-03-25 1985-09-03 Eastman Kodak Company Organic electroluminescent devices having improved power conversion efficiencies
EP0134280A1 (de) * 1983-08-29 1985-03-20 idn inventions and development of novelties ag Magazin für Tonaufzeichnungsträger
US4720432A (en) 1987-02-11 1988-01-19 Eastman Kodak Company Electroluminescent device with organic luminescent medium
US4769292A (en) 1987-03-02 1988-09-06 Eastman Kodak Company Electroluminescent device with modified thin film luminescent zone
JPH07118839A (ja) * 1993-10-22 1995-05-09 Mitsubishi Heavy Ind Ltd 金属蒸気発生装置
US5550066A (en) 1994-12-14 1996-08-27 Eastman Kodak Company Method of fabricating a TFT-EL pixel
US5532102A (en) * 1995-03-30 1996-07-02 Xerox Corporation Apparatus and process for preparation of migration imaging members
US6337102B1 (en) 1997-11-17 2002-01-08 The Trustees Of Princeton University Low pressure vapor phase deposition of organic thin films
US6037241A (en) * 1998-02-19 2000-03-14 First Solar, Llc Apparatus and method for depositing a semiconductor material
JPH11246963A (ja) * 1998-03-05 1999-09-14 Nikon Corp 蒸着用ボートとそれを用いて成膜した光学薄膜
US6237529B1 (en) * 2000-03-03 2001-05-29 Eastman Kodak Company Source for thermal physical vapor deposition of organic electroluminescent layers
JP2001279428A (ja) * 2000-03-31 2001-10-10 Matsushita Electric Ind Co Ltd 蒸着ボート
US20030101937A1 (en) * 2001-11-28 2003-06-05 Eastman Kodak Company Thermal physical vapor deposition source for making an organic light-emitting device
US20030168013A1 (en) 2002-03-08 2003-09-11 Eastman Kodak Company Elongated thermal physical vapor deposition source with plural apertures for making an organic light-emitting device
CN1444423A (zh) * 2002-03-08 2003-09-24 伊斯曼柯达公司 用于制造有机发光器件的长条形热物理蒸汽淀积源
US6749906B2 (en) * 2002-04-25 2004-06-15 Eastman Kodak Company Thermal physical vapor deposition apparatus with detachable vapor source(s) and method
ATE326555T1 (de) * 2002-07-19 2006-06-15 Lg Electronics Inc Quelle zur thermischen pvd-beschichtung für organische elektrolumineszente schichten
US20040144321A1 (en) * 2003-01-28 2004-07-29 Eastman Kodak Company Method of designing a thermal physical vapor deposition system

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