JP2009516072A5 - - Google Patents

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Publication number
JP2009516072A5
JP2009516072A5 JP2008540057A JP2008540057A JP2009516072A5 JP 2009516072 A5 JP2009516072 A5 JP 2009516072A5 JP 2008540057 A JP2008540057 A JP 2008540057A JP 2008540057 A JP2008540057 A JP 2008540057A JP 2009516072 A5 JP2009516072 A5 JP 2009516072A5
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JP
Japan
Prior art keywords
particulate material
supply
forming
layer
container
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2008540057A
Other languages
English (en)
Japanese (ja)
Other versions
JP2009516072A (ja
JP5054020B2 (ja
Filing date
Publication date
Priority claimed from US11/273,268 external-priority patent/US7638168B2/en
Application filed filed Critical
Publication of JP2009516072A publication Critical patent/JP2009516072A/ja
Publication of JP2009516072A5 publication Critical patent/JP2009516072A5/ja
Application granted granted Critical
Publication of JP5054020B2 publication Critical patent/JP5054020B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2008540057A 2005-11-10 2006-11-01 シールされた補充容器を用いた堆積システム Active JP5054020B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US11/273,268 US7638168B2 (en) 2005-11-10 2005-11-10 Deposition system using sealed replenishment container
US11/273,268 2005-11-10
PCT/US2006/042605 WO2007058775A2 (en) 2005-11-10 2006-11-01 Deposition system using sealed replenishment container

Publications (3)

Publication Number Publication Date
JP2009516072A JP2009516072A (ja) 2009-04-16
JP2009516072A5 true JP2009516072A5 (enExample) 2010-02-18
JP5054020B2 JP5054020B2 (ja) 2012-10-24

Family

ID=37964945

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008540057A Active JP5054020B2 (ja) 2005-11-10 2006-11-01 シールされた補充容器を用いた堆積システム

Country Status (5)

Country Link
US (1) US7638168B2 (enExample)
EP (1) EP1971702B1 (enExample)
JP (1) JP5054020B2 (enExample)
TW (1) TWI377715B (enExample)
WO (1) WO2007058775A2 (enExample)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5011013B2 (ja) * 2007-07-24 2012-08-29 大陽日酸株式会社 二フッ化キセノンガス供給装置
US7883583B2 (en) * 2008-01-08 2011-02-08 Global Oled Technology Llc Vaporization apparatus with precise powder metering
US8048230B2 (en) * 2008-11-14 2011-11-01 Global Oled Technology Llc Metering and vaporizing particulate material
US8062427B2 (en) * 2008-11-14 2011-11-22 Global Oled Technology Llc Particulate material metering and vaporization
US7972443B2 (en) * 2008-11-14 2011-07-05 Global Oled Technology Llc Metering of particulate material and vaporization thereof
GB2472817A (en) 2009-08-19 2011-02-23 Queen Mary & Westfield College Powder dispenser with permanently-open linear-taper nozzle operated by vibration
JP2013503256A (ja) * 2009-08-26 2013-01-31 株式会社テラセミコン 蒸着ガス供給装置
JP4974036B2 (ja) 2009-11-19 2012-07-11 株式会社ジャパンディスプレイセントラル 有機ｅｌ装置の製造方法
JP2012046814A (ja) * 2010-08-30 2012-03-08 Kaneka Corp 蒸着装置
KR101402526B1 (ko) 2011-12-26 2014-06-09 삼성디스플레이 주식회사 수명이 향상된 유기발광소자 및 그 제조방법
AU2013208044A1 (en) * 2012-01-10 2014-03-20 Hzo, Inc. Precursor supplies, material processing systems with which precursor supplies are configured to be used and associated methods
US9578718B2 (en) * 2012-05-04 2017-02-21 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing light-emitting element and deposition apparatus
GB201300828D0 (en) 2013-01-17 2013-03-06 Varydose Ltd Apparatus and method for dispensing powders
FR3020381B1 (fr) * 2014-04-24 2017-09-29 Riber Cellule d'evaporation
CN104498889B (zh) * 2014-12-18 2017-02-22 光驰科技(上海)有限公司 自动化连续式防污膜镀膜装置
KR101641453B1 (ko) * 2015-01-14 2016-07-21 에스엔유 프리시젼 주식회사 박막 증착 장치
KR20160123438A (ko) * 2015-04-15 2016-10-26 삼성디스플레이 주식회사 유기 발광 디스플레이 장치용 증착원
TWI737718B (zh) 2016-04-25 2021-09-01 美商創新先進材料股份有限公司 含有瀉流源的沉積系統及相關方法
US11293551B2 (en) 2018-09-30 2022-04-05 ColdQuanta, Inc. Break-seal system with breakable-membrane bridging rings
KR20210134976A (ko) 2019-03-13 2021-11-11 메트옥스 테크놀로지스 인코포레이티드 박막 증착용 고체 전구체 공급 시스템
US20220274338A1 (en) * 2019-09-16 2022-09-01 Hewlett-Packard Development Company, L.P. Build material loading
DE102020103822A1 (de) 2020-02-13 2021-08-19 Apeva Se Vorrichtung zum Verdampfen eines organischen Pulvers
DE102020118015A1 (de) * 2020-07-08 2022-01-13 Thyssenkrupp Steel Europe Ag Beschichtungsvorrichtung zum Ablagern eines Beschichtungsmaterials auf einem Substrat
CN113737137B (zh) * 2021-11-05 2022-01-18 苏州盛曼特新材料有限公司 一种金属膜蒸镀加工设备

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2447789A (en) * 1945-03-23 1948-08-24 Polaroid Corp Evaporating crucible for coating apparatus
US3693840A (en) * 1970-12-18 1972-09-26 George N Starr Dispensing device for salt and the like
US4885211A (en) * 1987-02-11 1989-12-05 Eastman Kodak Company Electroluminescent device with improved cathode
US4769292A (en) * 1987-03-02 1988-09-06 Eastman Kodak Company Electroluminescent device with modified thin film luminescent zone
KR920003591B1 (ko) * 1988-04-11 1992-05-04 미쯔비시주우고오교오 가부시기가이샤 연속진공증착장치
EP0585848A1 (de) 1992-09-02 1994-03-09 Hoechst Aktiengesellschaft Verfahren und Vorrichtung zur chemischen Gasphasenabscheidung dünner Schichten
JP3586551B2 (ja) * 1998-01-27 2004-11-10 松下電器産業株式会社 光記録媒体の製造方法及び製造装置
US5945163A (en) * 1998-02-19 1999-08-31 First Solar, Llc Apparatus and method for depositing a material on a substrate
JP2000068055A (ja) 1998-08-26 2000-03-03 Tdk Corp 有機ｅｌ素子用蒸発源、この有機ｅｌ素子用蒸発源を用いた有機ｅｌ素子の製造装置および製造方法
JP2003216681A (ja) 2002-01-24 2003-07-31 Fujitsu Ltd 電磁界強度算出方法および算出装置
TWI277363B (en) * 2002-08-30 2007-03-21 Semiconductor Energy Lab Fabrication system, light-emitting device and fabricating method of organic compound-containing layer
KR101137901B1 (ko) * 2003-05-16 2012-05-02 에스브이티 어소시에이츠, 인코포레이티드 박막 증착 증발기
US7501151B2 (en) * 2004-09-21 2009-03-10 Eastman Kodak Company Delivering particulate material to a vaporization zone

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