JP2009516072A5 - - Google Patents
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- Publication number
- JP2009516072A5 JP2009516072A5 JP2008540057A JP2008540057A JP2009516072A5 JP 2009516072 A5 JP2009516072 A5 JP 2009516072A5 JP 2008540057 A JP2008540057 A JP 2008540057A JP 2008540057 A JP2008540057 A JP 2008540057A JP 2009516072 A5 JP2009516072 A5 JP 2009516072A5
- Authority
- JP
- Japan
- Prior art keywords
- particulate material
- supply
- forming
- layer
- container
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000011236 particulate material Substances 0.000 claims 5
- 238000009834 vaporization Methods 0.000 claims 2
- 238000000151 deposition Methods 0.000 claims 1
Claims (3)
- 粒子状材料を気化させて表面に堆積させることによって層を形成する方法であって、
(a)シールされたインターフェイスフィッティングを有する補充容器の中に粒子状材料を供給するステップと;
(b)その補充容器を、少なくとも1つの供給用開口部を画定する供給ホッパーに取り付け、インターフェイスフィッティングの位置でシールを破るステップと;
(c)上記補充容器から上記供給ホッパーに粒子状材料を移動させるステップと;
(d)上記供給用開口部を通過したその粒子状材料を供給路に沿って気化ゾーンまで移動させ、その気化ゾーンにおいてその粒子状材料の少なくとも1つの成分を気化させた後、表面に供給して層を形成するステップを含む方法。 - 上記補充容器の体積が上記供給ホッパーよりも大きい、請求項1に記載の方法。
- 上記供給路がスクリューによって画定される、請求項1に記載の方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/273,268 US7638168B2 (en) | 2005-11-10 | 2005-11-10 | Deposition system using sealed replenishment container |
US11/273,268 | 2005-11-10 | ||
PCT/US2006/042605 WO2007058775A2 (en) | 2005-11-10 | 2006-11-01 | Deposition system using sealed replenishment container |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2009516072A JP2009516072A (ja) | 2009-04-16 |
JP2009516072A5 true JP2009516072A5 (ja) | 2010-02-18 |
JP5054020B2 JP5054020B2 (ja) | 2012-10-24 |
Family
ID=37964945
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2008540057A Active JP5054020B2 (ja) | 2005-11-10 | 2006-11-01 | シールされた補充容器を用いた堆積システム |
Country Status (5)
Country | Link |
---|---|
US (1) | US7638168B2 (ja) |
EP (1) | EP1971702B1 (ja) |
JP (1) | JP5054020B2 (ja) |
TW (1) | TWI377715B (ja) |
WO (1) | WO2007058775A2 (ja) |
Families Citing this family (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5011013B2 (ja) * | 2007-07-24 | 2012-08-29 | 大陽日酸株式会社 | 二フッ化キセノンガス供給装置 |
US7883583B2 (en) * | 2008-01-08 | 2011-02-08 | Global Oled Technology Llc | Vaporization apparatus with precise powder metering |
US7972443B2 (en) * | 2008-11-14 | 2011-07-05 | Global Oled Technology Llc | Metering of particulate material and vaporization thereof |
US8048230B2 (en) * | 2008-11-14 | 2011-11-01 | Global Oled Technology Llc | Metering and vaporizing particulate material |
US8062427B2 (en) * | 2008-11-14 | 2011-11-22 | Global Oled Technology Llc | Particulate material metering and vaporization |
GB2472817A (en) | 2009-08-19 | 2011-02-23 | Queen Mary & Westfield College | Powder dispenser with permanently-open linear-taper nozzle operated by vibration |
CN102576665A (zh) * | 2009-08-26 | 2012-07-11 | 泰拉半导体株式会社 | 蒸镀气体供给装置 |
JP4974036B2 (ja) | 2009-11-19 | 2012-07-11 | 株式会社ジャパンディスプレイセントラル | 有機el装置の製造方法 |
JP2012046814A (ja) * | 2010-08-30 | 2012-03-08 | Kaneka Corp | 蒸着装置 |
KR101402526B1 (ko) | 2011-12-26 | 2014-06-09 | 삼성디스플레이 주식회사 | 수명이 향상된 유기발광소자 및 그 제조방법 |
US9156055B2 (en) * | 2012-01-10 | 2015-10-13 | Hzo, Inc. | Precursor supplies, material processing systems with which precursor supplies are configured to be used and associated methods |
US9578718B2 (en) | 2012-05-04 | 2017-02-21 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing light-emitting element and deposition apparatus |
GB201300828D0 (en) | 2013-01-17 | 2013-03-06 | Varydose Ltd | Apparatus and method for dispensing powders |
FR3020381B1 (fr) * | 2014-04-24 | 2017-09-29 | Riber | Cellule d'evaporation |
CN104498889B (zh) * | 2014-12-18 | 2017-02-22 | 光驰科技(上海)有限公司 | 自动化连续式防污膜镀膜装置 |
KR101641453B1 (ko) * | 2015-01-14 | 2016-07-21 | 에스엔유 프리시젼 주식회사 | 박막 증착 장치 |
KR20160123438A (ko) * | 2015-04-15 | 2016-10-26 | 삼성디스플레이 주식회사 | 유기 발광 디스플레이 장치용 증착원 |
TWI737718B (zh) | 2016-04-25 | 2021-09-01 | 美商創新先進材料股份有限公司 | 含有瀉流源的沉積系統及相關方法 |
US11293551B2 (en) | 2018-09-30 | 2022-04-05 | ColdQuanta, Inc. | Break-seal system with breakable-membrane bridging rings |
CN114040808B (zh) * | 2019-03-13 | 2023-03-24 | 梅托克斯技术公司 | 用于薄膜沉积的固体前体进料系统 |
US20220274338A1 (en) * | 2019-09-16 | 2022-09-01 | Hewlett-Packard Development Company, L.P. | Build material loading |
DE102020118015A1 (de) | 2020-07-08 | 2022-01-13 | Thyssenkrupp Steel Europe Ag | Beschichtungsvorrichtung zum Ablagern eines Beschichtungsmaterials auf einem Substrat |
CN113737137B (zh) * | 2021-11-05 | 2022-01-18 | 苏州盛曼特新材料有限公司 | 一种金属膜蒸镀加工设备 |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2447789A (en) | 1945-03-23 | 1948-08-24 | Polaroid Corp | Evaporating crucible for coating apparatus |
US3693840A (en) * | 1970-12-18 | 1972-09-26 | George N Starr | Dispensing device for salt and the like |
US4885211A (en) | 1987-02-11 | 1989-12-05 | Eastman Kodak Company | Electroluminescent device with improved cathode |
US4769292A (en) | 1987-03-02 | 1988-09-06 | Eastman Kodak Company | Electroluminescent device with modified thin film luminescent zone |
KR920003591B1 (ko) * | 1988-04-11 | 1992-05-04 | 미쯔비시주우고오교오 가부시기가이샤 | 연속진공증착장치 |
EP0585848A1 (de) | 1992-09-02 | 1994-03-09 | Hoechst Aktiengesellschaft | Verfahren und Vorrichtung zur chemischen Gasphasenabscheidung dünner Schichten |
JP3586551B2 (ja) * | 1998-01-27 | 2004-11-10 | 松下電器産業株式会社 | 光記録媒体の製造方法及び製造装置 |
US5945163A (en) * | 1998-02-19 | 1999-08-31 | First Solar, Llc | Apparatus and method for depositing a material on a substrate |
JP2000068055A (ja) | 1998-08-26 | 2000-03-03 | Tdk Corp | 有機el素子用蒸発源、この有機el素子用蒸発源を用いた有機el素子の製造装置および製造方法 |
JP2003216681A (ja) | 2002-01-24 | 2003-07-31 | Fujitsu Ltd | 電磁界強度算出方法および算出装置 |
TWI277363B (en) * | 2002-08-30 | 2007-03-21 | Semiconductor Energy Lab | Fabrication system, light-emitting device and fabricating method of organic compound-containing layer |
US7611587B2 (en) | 2003-05-16 | 2009-11-03 | Chow Peter P | Thin-film deposition evaporator |
US7501151B2 (en) | 2004-09-21 | 2009-03-10 | Eastman Kodak Company | Delivering particulate material to a vaporization zone |
-
2005
- 2005-11-10 US US11/273,268 patent/US7638168B2/en active Active
-
2006
- 2006-11-01 WO PCT/US2006/042605 patent/WO2007058775A2/en active Application Filing
- 2006-11-01 JP JP2008540057A patent/JP5054020B2/ja active Active
- 2006-11-01 EP EP06836748.1A patent/EP1971702B1/en active Active
- 2006-11-09 TW TW095141450A patent/TWI377715B/zh active
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