JP2008088489A5 - - Google Patents

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Publication number
JP2008088489A5
JP2008088489A5 JP2006269085A JP2006269085A JP2008088489A5 JP 2008088489 A5 JP2008088489 A5 JP 2008088489A5 JP 2006269085 A JP2006269085 A JP 2006269085A JP 2006269085 A JP2006269085 A JP 2006269085A JP 2008088489 A5 JP2008088489 A5 JP 2008088489A5
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JP
Japan
Prior art keywords
vapor
vapor deposition
deposition apparatus
forming material
processing chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2006269085A
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English (en)
Japanese (ja)
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JP5173175B2 (ja
JP2008088489A (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from JP2006269085A external-priority patent/JP5173175B2/ja
Priority to JP2006269085A priority Critical patent/JP5173175B2/ja
Priority to TW096136640A priority patent/TW200835796A/zh
Priority to PCT/JP2007/069187 priority patent/WO2008041671A1/ja
Priority to US12/441,934 priority patent/US20100071623A1/en
Priority to KR1020097005687A priority patent/KR101075130B1/ko
Priority to DE112007002217T priority patent/DE112007002217T5/de
Publication of JP2008088489A publication Critical patent/JP2008088489A/ja
Publication of JP2008088489A5 publication Critical patent/JP2008088489A5/ja
Publication of JP5173175B2 publication Critical patent/JP5173175B2/ja
Application granted granted Critical
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2006269085A 2006-09-29 2006-09-29 蒸着装置 Expired - Fee Related JP5173175B2 (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2006269085A JP5173175B2 (ja) 2006-09-29 2006-09-29 蒸着装置
TW096136640A TW200835796A (en) 2006-09-29 2007-09-29 Vapor-deposition apparatus
KR1020097005687A KR101075130B1 (ko) 2006-09-29 2007-10-01 증착 장치
US12/441,934 US20100071623A1 (en) 2006-09-29 2007-10-01 Evaporating apparatus
PCT/JP2007/069187 WO2008041671A1 (fr) 2006-09-29 2007-10-01 Appareil de dépôt par évaporation
DE112007002217T DE112007002217T5 (de) 2006-09-29 2007-10-01 Bedampfungsvorrichtung

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006269085A JP5173175B2 (ja) 2006-09-29 2006-09-29 蒸着装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2011236147A Division JP5511767B2 (ja) 2011-10-27 2011-10-27 蒸着装置

Publications (3)

Publication Number Publication Date
JP2008088489A JP2008088489A (ja) 2008-04-17
JP2008088489A5 true JP2008088489A5 (enExample) 2011-12-08
JP5173175B2 JP5173175B2 (ja) 2013-03-27

Family

ID=39268526

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006269085A Expired - Fee Related JP5173175B2 (ja) 2006-09-29 2006-09-29 蒸着装置

Country Status (6)

Country Link
US (1) US20100071623A1 (enExample)
JP (1) JP5173175B2 (enExample)
KR (1) KR101075130B1 (enExample)
DE (1) DE112007002217T5 (enExample)
TW (1) TW200835796A (enExample)
WO (1) WO2008041671A1 (enExample)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5020650B2 (ja) * 2007-02-01 2012-09-05 東京エレクトロン株式会社 蒸着装置、蒸着方法および蒸着装置の製造方法
JP4847496B2 (ja) * 2008-07-29 2011-12-28 東京エレクトロン株式会社 蒸着源ユニット、蒸着方法、蒸着源ユニットの制御装置および成膜装置
EP2168644B1 (en) * 2008-09-29 2014-11-05 Applied Materials, Inc. Evaporator for organic materials and method for evaporating organic materials
KR101226518B1 (ko) 2008-09-30 2013-01-25 도쿄엘렉트론가부시키가이샤 증착 장치, 증착 방법 및 프로그램을 기억한 기억 매체
DE102010041376A1 (de) 2009-09-25 2011-04-07 Von Ardenne Anlagentechnik Gmbh Verdampfereinrichtung für eine Beschichtungsanlage und Verfahren zur Koverdampfung von mindestens zwei Substanzen
JP5452178B2 (ja) * 2009-11-12 2014-03-26 株式会社日立ハイテクノロジーズ 真空蒸着装置、真空蒸着方法、および、有機ｅｌ表示装置の製造方法
JP5473675B2 (ja) * 2010-03-01 2014-04-16 株式会社アルバック 薄膜形成装置
JP2014095131A (ja) * 2012-11-09 2014-05-22 Tokyo Electron Ltd 成膜装置
US10458014B2 (en) * 2015-03-24 2019-10-29 Siva Power, Inc. Thin-film deposition methods with thermal management of evaporation sources
US10593967B2 (en) * 2016-06-30 2020-03-17 Honeywell International Inc. Modulated thermal conductance thermal enclosure
KR102609612B1 (ko) * 2018-07-30 2023-12-05 삼성디스플레이 주식회사 표시 장치의 제조장치 및 표시 장치의 제조방법

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0210476B1 (en) * 1985-08-01 1990-05-23 American Cyanamid Company Bubbler cylinder device
JP3734239B2 (ja) 1999-04-02 2006-01-11 キヤノン株式会社 有機膜真空蒸着用マスク再生方法及び装置
JP2002322556A (ja) 2001-02-21 2002-11-08 Semiconductor Energy Lab Co Ltd 成膜方法及び成膜装置
JP3705237B2 (ja) * 2001-09-05 2005-10-12 ソニー株式会社 有機電界発光素子を用いた表示装置の製造システムおよび製造方法
JP2004059992A (ja) * 2002-07-29 2004-02-26 Sony Corp 有機薄膜形成装置
JP4013859B2 (ja) * 2003-07-17 2007-11-28 富士電機ホールディングス株式会社 有機薄膜の製造装置
JP2005203248A (ja) * 2004-01-16 2005-07-28 Sony Corp 蒸着方法及び蒸着装置
US7364772B2 (en) 2004-03-22 2008-04-29 Eastman Kodak Company Method for coating an organic layer onto a substrate in a vacuum chamber
JP2006104497A (ja) * 2004-10-01 2006-04-20 Hitachi Zosen Corp 蒸着装置
JP4535908B2 (ja) * 2005-03-14 2010-09-01 日立造船株式会社 蒸着装置

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