CN110882867B - 丙烯汽化器 - Google Patents
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Abstract
本发明的课题在于防止原料液体的空化。在原料液体以被吹到汽化板(8)的方式流动的原料液体导入路(6),配置有棒状的阻力体(7),使原料液体导入路(6)相对于原料液体的导入率下降。由于液体质量流量控制器的出口侧的压力上升,与液体质量流量控制器的入口侧的压力的压力差变小,因而能够防止空化的发生。能够使阻力体(7)以多个构成。
Description
技术领域
本发明涉及使丙烯树脂原料汽化的技术,尤其涉及使丙烯树脂原料的气体产生速度稳定的技术。
背景技术
作为含有具有容易因水分或氧等而劣化的性质的化合物的元件,已知例如有机EL(Electro Luminescence(电致发光))元件等。关于这样的元件,进行通过形成含有该化合物的层与覆盖该层的保护层的层叠构造而抑制水分等侵入到元件内的尝试。例如,在下述专利文献1中,记载了在上部电极层上具有由无机膜与有机膜的层叠膜构成的保护层的发光元件。
当形成丙烯树脂薄膜时,在丙烯汽化器使丙烯树脂的原料液体汽化而生成原料气体,供给至成膜对象物的表面而使其附着于该表面,加热而使丙烯树脂原料聚合,形成丙烯树脂膜。
为了使丙烯树脂薄膜的成膜速率稳定,有必要使原料气体的供给速度稳定,因此,在丙烯汽化器与原料罐之间设有液体质量流量控制器,使由液体质量流量控制器(MFC)进行流量控制的原料液体供给至丙烯汽化器。
然而,存在从液体质量流量控制器供给的丙烯树脂原料的量有时候瞬间地变动而在短时间的成膜等等的情况下成为问题的可能性。
在先技术文献
专利文献
专利文献1:日本特开2013-73880号公报。
发明内容
发明要解决的课题
在对从液体质量流量控制器供给至丙烯汽化器的液体的丙烯树脂原料进行观察,理解在丙烯树脂原料中发生由于压力差而导致的空化(cavitation),确认从液体质量流量控制器供给的丙烯树脂原料的量瞬间地变动的原因在于空化。
关于空化,为了将原料液体从原料罐送出而使用的推压气体溶解于原料液体中被认为是一个原因,因而考虑将难溶性的气体用于推压气体。
另外,考虑在液体质量流量控制器与原料罐之间设有真空脱气装置而除去溶解于原料液体中的气体。
可是,这些对策为高价的,另外,由于管理的人工也增加而为不理想的。
本发明的课题在于,提供在从液体质量流量控制器供给的液体的丙烯树脂原料未使空化发生的便宜并且可靠的技术。
用于解决课题的方案
为了解决上述课题,本发明是一种丙烯汽化器,其具有:原料液体导入路,由液体质量流量控制器进行流量控制的丙烯树脂膜的原料液体流动于原料液体导入路;喷出口,流动至前述原料液体导入路的前述原料液体到达喷出口;载气导入路,其将载气供给至前述喷出口;密闭容器,其具有前述原料液体的微量液滴(小液滴的原料液体)和前述载气从前述喷出口喷出的内部空间;汽化板,其配置于前述内部空间,前述原料液体的微量液滴接触汽化板;加热装置,其对前述汽化板进行加热;以及原料气体供给配管,作为前述微量液滴与由前述加热装置进行前述加热后的前述汽化板接触而生成的前述原料液体的气体的原料气体流动于原料气体供给配管,通过在前述原料液体导入路配置有棒状的阻力体,使前述原料液体流动至前述阻力体与前述原料液体导入路的壁面之间的间隙,从而前述原料液体导入路相对于前述原料液体的导入率下降。
另外,本发明是一种丙烯汽化器,其具有在前述密闭容器设置的原料液体导入配管和在前述密闭容器的前述内部空间侧的壁面设置的喷嘴装置,在前述原料液体导入配管设置的第一液体导入孔、在前述密闭容器的顶板设置的第二液体导入孔、以及在前述喷嘴装置设置的第三液体导入孔连通而形成前述原料液体导入路,前述阻力体配置于前述第一至第三液体导入孔的任一个或多个的内部。
另外,本发明是前述阻力体分割成两个以上的丙烯汽化器。
另外,本发明是棒状的前述阻力体的外径比前述原料液体导入路的内径更小的丙烯汽化器。
另外,本发明是前述阻力体配置于在前述原料液体导入路的内部设置的支撑部上的丙烯汽化器。
发明的效果
由于能够防止空化的发生,因而能够使丙烯树脂膜的原料气体的生成速度稳定。
附图说明
图1是用于说明使用本发明的丙烯汽化器的丙烯树脂膜制造装置的框图;
图2是本发明的丙烯汽化器。
具体实施方式
图1是用于说明形成丙烯树脂膜的丙烯树脂膜制造装置10的框图,对于用于在处理对象物的表面形成丙烯树脂膜的原料,在本发明中,使用一种原料液体,其为液体的单体,如果聚合,则得到高分子的丙烯树脂。
该原料液体储液于原料罐52。
首先,如果说明丙烯树脂膜制造装置10的动作的概要,则原料罐52经由液体质量流量控制器53来连接至丙烯汽化器2,如果储液于原料罐52的原料液体在通过液体质量流量控制器53而进行流量控制的状态下供给至丙烯汽化器2,则液体的原料液体在丙烯汽化器2的内部汽化,生成作为丙烯树脂的原料的气体的原料气体。
在成膜装置56的内部,配置有成膜对象物,通过真空排气装置57而对成膜装置56的内部进行真空排气。
在丙烯汽化器2生成的原料气体供给至成膜装置56,附着于成膜对象物,通过成膜对象物的加热或对成膜对象物的紫外线照射等硬化手段而聚合,在成膜对象物的表面形成丙烯树脂膜。
接着,如果说明丙烯汽化器2的动作,则参照图2,丙烯汽化器2具有密闭容器11,在密闭容器11的外部,配置有原料液体导入配管31、载气输送配管34以及原料气体供给配管37。
在原料液体导入配管31的内部,形成有第一液体导入孔13,在密闭容器11的壁,形成有第二液体导入孔14、第一气体导入孔26以及原料气体供给孔27。对于密闭容器11的壁,除了侧表面的壁以外,还包含顶板和底板。在此,第二液体导入孔14和第一气体导入孔26设于顶板,原料气体供给孔27设于侧表面的壁,但不限定于此。
而且,在第二液体导入孔14,原料液体导入配管31一端固定于密闭容器11,另一端连接至连接部32,使得第一液体导入孔13和第二液体导入孔14连通。原料液体输送配管33(其一端连接至液体质量流量控制器53)的另一端连接至连接部32,原料液体输送配管33的内部的用于液体的常规配管孔35和原料液体导入配管31的第一液体导入孔13在连接部32中连通。
此外,在连接部32中,在原料液体导入配管31的上述另一端形成的凸缘61和在原料液体输送配管33的上述另一端形成的凸缘62经由金属垫片64来密合,在两个凸缘61、62装配有带有螺纹的盖63,两个凸缘61、62通过盖63而互相推压。由于该构造而在连接部32中不存在液体泄漏。
此外,原料液体导入配管31固定于密闭容器11,当将丙烯汽化器2从原料液体输送配管33拆卸时,将连接部32的盖63拧松,保持着原料液体导入配管31固定于密闭容器11的状态,使原料液体导入配管31从原料液体输送配管33分离。
在载气输送配管34的内部,形成有气体配管孔38,载气输送配管34一端固定于密闭容器11,使得气体配管孔38和第一气体导入孔26连通。载气输送配管34的另一端连接至载气源54,载气源54所供给的载气穿过气体配管孔38而到达第一气体导入孔26。
在原料气体供给配管37,配置有原料气体导入孔39,原料气体供给配管37一端固定于密闭容器11,使得原料气体导入孔39和原料气体供给孔27连通。原料气体供给配管37的另一端连接至成膜装置56,使得原料气体穿过原料气体导入孔39而供给至成膜装置56。
接着,对原料液体的输送进行说明。
如果推压气体源51连接至原料罐52,推压气体从推压气体源51供给至原料罐52,则储液于原料罐52的原料液体被推压气体推压,原料液体流动于配管而到达液体质量流量控制器53。
液体质量流量控制器53以对流动于内部的液体的流量进行控制的方式构成,在液体质量流量控制器53的内部,对到达液体质量流量控制器53的原料液体进行流量控制,在每单位时间内,一定量的原料液体通过液体质量流量控制器53。
通过液体质量流量控制器53而进行流量控制的原料液体导入至原料液体输送配管33的内部的用于液体的常规配管孔35中,在连接部32中从用于液体的常规配管孔35导入至原料液体导入配管31的内部的第一液体导入孔13,流动于第一液体导入孔13而移动至第二液体导入孔14。
在密闭容器11的内部,形成有内部空间19,在密闭容器11的内部空间19侧的壁面,固定有喷嘴装置12。在此,喷嘴装置12设于密闭容器11的顶板的壁面。
在喷嘴装置12的内部,形成有第三液体导入孔15和第二气体导入孔24,第三液体导入孔15配置于与第二液体导入孔14连通的位置,第二气体导入孔24配置于与第一气体导入孔26连通的位置。
到达第一气体导入孔26的载气从第一气体导入孔26移动至第二气体导入孔24内。
在第二气体导入孔24的下端,配置有喷出口25,流动于第二气体导入孔24内的载气到达喷出口25,喷出至内部空间19。
喷出口25的位置也是第三液体导入孔15的下端,如果流动于第二液体导入孔14的原料液体转移至第三液体导入孔15,流动于第三液体导入孔15而到达喷出口25,则原料液体被到达喷出口25的载气吹散而成为雾状的微量液滴,与载气一起从喷出口25喷出至密闭容器11的内部空间19。
接着,如果对原料液体的汽化进行说明,则在内部空间19的下方,配置有汽化板8。在汽化板8,设有通过通电而发热的加热装置5,如果加热装置5发热,则汽化板8被加热。汽化板8的表面侧与喷嘴装置12面对面,在背面侧,设有储存部21,多余的原料液体等落下至储存部21。
从喷出口25喷出至内部空间19的雾状的原料液体的微量液滴在内部空间19中沿汽化板8方向飞行,到达汽化板8。原料液体的微量液滴如果与汽化板8接触,则升温而汽化,生成作为原料液体的蒸气的原料气体。
第一气体导入孔26和第二气体导入孔24在从载气输送配管34至喷出孔25之间作为一个载气导入路9而起作用。
第一液体导入孔13成为最上方,第三液体导入孔15成为最下方,第一至第三液体导入孔13至15铅垂地配置成一条直线,当在丙烯汽化器2生成原料气体时,原料液体以丙烯汽化器2所具有的第一至第三液体导入孔13至15作为通路而移动,直到原料液体从原料液体输送配管33到达喷出口25为止。因此,在丙烯汽化器2的内部,第一至第三液体导入孔13至15作为一个铅垂的原料液体导入路6而起作用。
而且,在该原料液体导入路6的内部,配置有棒状的阻力体7。
在此,阻力体7能够由分别在第一液体导入孔13、第二液体导入孔14以及第三液体导入孔15配置的棒状的第一至第三柱体构成。
在此,关于第一至第三柱体,也能够如图2那样由将第一柱体和第二柱体接合的一根接合柱体16构成。在此情况下,接合柱体16遍及第一液体导入孔13和第二液体导入孔14而配置,在第三液体导入孔15,配置有第三柱体17。也能够在第一至第三液体导入孔13至15分别配置有分离的第一至第三柱体,也能够将在第一至第三液体导入孔13至15中的任一个或多个液体导入孔配置的柱体用作阻力体7。
原料液体导入路6的截面形状是圆形,第一至第三柱体是圆柱形形状,铅垂地配置。第一至第三柱体的底面的直径比配置有各柱体的第一至第三液体导入孔13至15的直径更小,因此,在第一至第三柱体的侧表面与配置有各柱体的第一至第三液体导入孔13至15的内周面之间,分别形成有间隙。
总之,阻力体7的圆形的截面形状成为比原料液体导入路6的圆形的截面形状更小的形状。因此,构成原料液体导入路6的第一至第三液体导入孔13至15中的构成第一液体导入孔13的壁面的原料液体导入配管31的内周侧表面、构成第二液体导入孔14的壁面的密闭容器11的顶板的部件、以及构成喷嘴装置12(其构成第三液体导入孔15的壁面)的部件在与阻力体7的侧表面面对面时,在与阻力体7的侧表面之间形成有间隙,原料液体穿过该间隙而移动。
当原料液体在原料液体导入路6移动时,如果对在原料液体导入路6未配置阻力体7的情况和配置有阻力体7的情况进行比较,则配置有阻力体7的情况比未配置的情况更难以移动,因而原料液体导入路6的对于原料液体的移动的导入率比未配置阻力体7时更小。此外,阻力体7的截面形状比原料液体导入路6的截面形状更小即可,阻力体7的截面形状或原料液体导入路6的截面形状不限于圆形形状。
阻力体7能够插入至原料液体导入路6即可,棒状的阻力体7的外径比原料液体导入路6的内径更小即可。
另外,也可以将原料液体导入路6的一部分的内径比阻力体7的外径更小地形成,以较小地形成内径的部分作为支撑部,将阻力体7配置于支撑部上,使得阻力体7不落下。另外,当在原料液体导入路6的一部分的内周面设有凸状部时,也可以将凸状部作为支撑部,将阻力体7配置于支撑部上,使得阻力体7不落下。图2的符号22表示由凸状部构成的支撑部,凸状部或较小地形成内径的支撑部22是如下的构造:在配置有阻力体7的状态下,通过使原料液体流动于多个支撑部22之间,从而确保原料液体的流路。
通过将阻力体7配置于原料液体导入路6的内部,使得液体质量流量控制器53与原料液体输送配管33的连接部分的压力在配置有阻力体7的情况下比未配置时更高,液体质量流量控制器53的两端的压力差变小。通过减小压力差而防止发生空化,气泡未侵入丙烯汽化器2的内部,因而从原料液体生成原料气体的生成速度更稳定。
以稳定的生成速度汽化的原料气体穿过原料气体供给配管37的原料气体供给孔27而供给至成膜装置56,附着于成膜对象物而通过加热等硬化手段来聚合,形成丙烯树脂膜。
通过如本发明的实施例那样作为能够将阻力体7插入的构造,从而能够容易变更阻力体7的长度或直径。即,通过将阻力体7变更成不同的形状,从而能够容易调整液体质量流量控制器53与原料液体输送配管33的连接部分的压力。对于阻力体7的形状,除了截面面积的形状以外,还包含阻力体7的长度。
符号说明
2……丙烯汽化器
5……加热装置
6……原料液体导入路
7……阻力体
8……汽化板
9……载气导入路
12……喷嘴装置
13……第一液体导入孔
14……第二液体导入孔
15……第三液体导入孔
21……储存部
22……支撑部
24……第二气体导入孔
25……喷出口
26……第一气体导入孔
37……原料气体供给配管
53……液体质量流量控制器。
Claims (5)
1.一种丙烯汽化器,具有:
原料液体导入路,由液体质量流量控制器进行流量控制的丙烯树脂膜的原料液体流动于所述原料液体导入路;
喷出口,流动至所述原料液体导入路的所述原料液体到达所述喷出口;
载气导入路,其将载气供给至所述喷出口;
密闭容器,其具有所述原料液体的微量液滴和所述载气从所述喷出口喷出的内部空间;
汽化板,其配置于所述内部空间,所述原料液体的微量液滴接触所述汽化板;
加热装置,其对所述汽化板进行加热;以及
原料气体供给配管,作为所述微量液滴与由所述加热装置进行所述加热后的所述汽化板接触而生成的所述原料液体的气体的原料气体流动于所述原料气体供给配管,
通过在所述原料液体导入路配置有棒状的阻力体,使所述原料液体流动至所述阻力体与所述原料液体导入路的壁面之间的间隙,从而所述原料液体导入路相对于所述原料液体的导入率下降。
2.根据权利要求1所述的丙烯汽化器,其特征在于,具有:
原料液体导入配管,其设于所述密闭容器;和
喷嘴装置,其设于所述密闭容器的所述内部空间侧的壁面,
在所述原料液体导入配管设置的第一液体导入孔、在所述密闭容器的顶板设置的第二液体导入孔、以及在所述喷嘴装置设置的第三液体导入孔连通而形成所述原料液体导入路,
所述阻力体配置于所述第一至第三液体导入孔的任一个或多个的内部。
3.根据权利要求2所述的丙烯汽化器,其特征在于,所述阻力体分割成两个以上。
4.根据权利要求2所述的丙烯汽化器,其特征在于,棒状的所述阻力体的外径比所述原料液体导入路的内径更小。
5.根据权利要求4所述的丙烯汽化器,其特征在于,所述阻力体配置于在所述原料液体导入路的内部设置的支撑部上。
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