JP2004340932A5 - - Google Patents

Download PDF

Info

Publication number
JP2004340932A5
JP2004340932A5 JP2004079889A JP2004079889A JP2004340932A5 JP 2004340932 A5 JP2004340932 A5 JP 2004340932A5 JP 2004079889 A JP2004079889 A JP 2004079889A JP 2004079889 A JP2004079889 A JP 2004079889A JP 2004340932 A5 JP2004340932 A5 JP 2004340932A5
Authority
JP
Japan
Prior art keywords
phosphor
support
scintillator layer
vapor deposition
scintillator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2004079889A
Other languages
English (en)
Japanese (ja)
Other versions
JP2004340932A (ja
Filing date
Publication date
Priority claimed from EP03100723A external-priority patent/EP1460642B1/en
Application filed filed Critical
Publication of JP2004340932A publication Critical patent/JP2004340932A/ja
Publication of JP2004340932A5 publication Critical patent/JP2004340932A5/ja
Pending legal-status Critical Current

Links

JP2004079889A 2003-03-20 2004-03-19 走査装置に使用するために好適な燐光体又はシンチレータシート及びパネルの製造方法 Pending JP2004340932A (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP03100723A EP1460642B1 (en) 2003-03-20 2003-03-20 Manufacturing method of phosphor or scintillator sheets and panels suitable for use in a scanning apparatus

Publications (2)

Publication Number Publication Date
JP2004340932A JP2004340932A (ja) 2004-12-02
JP2004340932A5 true JP2004340932A5 (enExample) 2007-02-01

Family

ID=32799023

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2004079890A Pending JP2004340933A (ja) 2003-03-20 2004-03-19 燐光体又はシンチレータシートの製造方法及び走査装置に使用するために好適なパネル
JP2004079889A Pending JP2004340932A (ja) 2003-03-20 2004-03-19 走査装置に使用するために好適な燐光体又はシンチレータシート及びパネルの製造方法

Family Applications Before (1)

Application Number Title Priority Date Filing Date
JP2004079890A Pending JP2004340933A (ja) 2003-03-20 2004-03-19 燐光体又はシンチレータシートの製造方法及び走査装置に使用するために好適なパネル

Country Status (4)

Country Link
US (1) US7141135B2 (enExample)
EP (1) EP1460642B1 (enExample)
JP (2) JP2004340933A (enExample)
DE (2) DE60326429D1 (enExample)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7501155B2 (en) * 2003-03-20 2009-03-10 Agfa Healthcare Manufacturing method of phosphor or scintillator sheets and panels suitable for use in a scanning apparatus
JP2005029895A (ja) * 2003-07-04 2005-02-03 Agfa Gevaert Nv 蒸着装置
EP1646053A2 (en) 2004-10-07 2006-04-12 Agfa-Gevaert Binderless storage phosphor screen.
EP1691215B1 (de) 2005-02-15 2012-11-28 Agfa-Gevaert HealthCare GmbH Auslesevorrichtung und Verfahren zum Auslesen von in Speicherleuchtstoffschichten gespeicherten Röntgenaufnahmen
EP1691216B1 (de) 2005-02-15 2013-07-10 Agfa-Gevaert HealthCare GmbH Radiographiesystem und Verfahren zur Aufzeichnung von Röntgenaufnahmen in Speicherleuchtstoffschichten
EP1691217B1 (de) 2005-02-15 2011-11-30 Agfa-Gevaert HealthCare GmbH Auslesevorrichtung und Verfahren zum Auslesen von in Speicherleuchtstoffschichten gespeicherten Röntgenaufnahmen
US20070098881A1 (en) * 2005-10-28 2007-05-03 Jean-Pierre Tahon Method of preparing stabilized storage phosphor panels
EP1783246B1 (en) * 2005-10-28 2014-04-30 Agfa HealthCare N.V. Method of preparing stabilised storage phosphor panels.
US20070098880A1 (en) * 2005-10-28 2007-05-03 Jean-Pierre Tahon Method of vaporization of phosphor precursor raw materials
EP1889893B1 (en) * 2006-08-17 2013-03-27 Agfa HealthCare NV Method of manufacturing a radiation image storage panel
EP1890299A1 (en) * 2006-08-17 2008-02-20 Agfa HealthCare NV Method of manufacturing a radiation image storage panel
JP4983911B2 (ja) * 2007-03-08 2012-07-25 コニカミノルタエムジー株式会社 シンチレータパネルの製造方法及びシンチレータパネル用基板の厚さの下限設定方法
US20090162535A1 (en) * 2007-12-21 2009-06-25 Jean-Pierre Tahon Method of forming a phosphor or scintillator material and vapor deposition apparatus used therefor
DE102008024372B4 (de) * 2008-05-20 2013-08-22 Von Ardenne Anlagentechnik Gmbh Verfahren zum Transport von Substraten in Vakuumbeschichtungseinrichtungen
CN101684546B (zh) * 2008-09-25 2012-05-23 鸿富锦精密工业（深圳）有限公司 软性基板镀膜治具
TWI477646B (zh) * 2010-08-09 2015-03-21 Hon Hai Prec Ind Co Ltd 化學氣相沉積設備
AT512949B1 (de) * 2012-06-04 2016-06-15 Leica Microsysteme Gmbh Verfahren zur Beschichtung mit einem Verdampfungsmaterial
US9507968B2 (en) * 2013-03-15 2016-11-29 Cirque Corporation Flying sense electrodes for creating a secure cage for integrated circuits and pathways
CN107937869A (zh) * 2016-10-12 2018-04-20 上海和辉光电有限公司 一种镀膜装置及镀膜方法
CN107177820B (zh) * 2017-06-12 2019-05-24 哈尔滨光宇电源股份有限公司 高速连续卷绕式真空蒸镀锂设备及利用其实现基材蒸镀锂的方法
CN109746142B (zh) * 2017-11-06 2021-04-02 张家港康得新光电材料有限公司 镀膜装置
CN111254407A (zh) * 2018-11-30 2020-06-09 中国科学院大连化学物理研究所 使用热蒸发镀膜法在柔性衬底上制备薄膜的真空镀膜设备
CN112746322B (zh) * 2020-12-30 2022-08-26 安徽中飞科技有限公司 制备多晶硒化锌的物理气相沉积装置及方法

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3838273A (en) 1972-05-30 1974-09-24 Gen Electric X-ray image intensifier input
US3859527A (en) 1973-01-02 1975-01-07 Eastman Kodak Co Apparatus and method for producing images corresponding to patterns of high energy radiation
CH652754A5 (de) 1981-03-13 1985-11-29 Balzers Hochvakuum Anordnung zum beschichten von substraten in einer vakuumbeschichtungsanlage.
US5055681A (en) * 1984-09-18 1991-10-08 Konica Corporation Radiographic image storage panel and process for reading out a radiographic image
DE3578359D1 (de) 1984-12-17 1990-07-26 Konishiroku Photo Ind Schirm zum speichern eines strahlungsbildes.
KR940000259A (ko) * 1992-06-12 1994-01-03 게리 리 그리스월드 테이프 지지체상에서의 다층 필름 제조 시스템 및 방법
GB2339800B (en) * 1998-07-24 2003-04-09 Gen Vacuum Equipment Ltd A vacuum process for depositing zinc sulphide and other coatings on flexible moving web
WO2001003156A1 (en) * 1999-07-02 2001-01-11 Symyx Technologies, Inc. METHOD FOR PREPARING A CsX PHOTOSTIMULABLE PHOSPHOR AND PHOSPHORS THEREFROM
EP1113458B1 (en) * 1999-12-27 2005-02-02 Agfa-Gevaert A binderless storage phosphor screen with needle shaped crystals and methods for producing the same
US6402905B1 (en) 2001-03-16 2002-06-11 4 Wave, Inc System and method for controlling deposition thickness using a mask with a shadow that varies along a radius of a substrate
JP2003113466A (ja) 2001-07-31 2003-04-18 Fuji Photo Film Co Ltd 真空蒸着装置

Similar Documents

Publication Publication Date Title
JP2004340932A5 (enExample)
JP2008163457A5 (ja) 成膜装置
TW200505280A (en) Manufacturing method and manufacturing apparatus of organic thin film
JP2003313654A5 (ja) 成膜装置および成膜方法
JP2012519950A5 (enExample)
JP2009144242A5 (ja) タングステン膜の製造方法および装置
TWI335356B (en) Apparatus and method for depositing thin films
WO2008078502A1 (ja) 成膜装置および成膜方法
JP2004340933A5 (ja) 走査装置に使用するために好適な燐光体又はシンチレータシート及びパネルの製造方法
JP2013186971A (ja) 成膜装置、成膜方法
TW200628619A (en) Vacuum coating system
JP2011505262A5 (enExample)
JP2009079276A5 (enExample)
JP2009506200A5 (enExample)
KR102210379B1 (ko) 증착막 균일도 개선을 위한 박막 증착장치
JP2004217970A5 (ja) 蒸着装置および蒸着方法
JP2011146506A5 (enExample)
JP2012519981A5 (enExample)
CN104775102A (zh) 卷对卷磁控溅射阴极与柱状多弧源相结合的真空镀膜系统
JP2006523778A5 (enExample)
JP2004263299A5 (ja) 成膜装置及び成膜方法
JP2008532769A5 (enExample)
WO2006130817A3 (en) Deposition of uniform layer of desired material
EP1523014A3 (en) Radiographic image conversion panel and method for manufacturing the radiographic image conversion panel
JP2010095735A (ja) 成膜装置、成膜方法およびガスバリアフィルム