JP2006515466A - 低標準偏差の高抵抗値分割ポリp抵抗器 - Google Patents
低標準偏差の高抵抗値分割ポリp抵抗器 Download PDFInfo
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- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims abstract description 88
- 229920005591 polysilicon Polymers 0.000 claims abstract description 88
- 238000000034 method Methods 0.000 claims abstract description 40
- 229910052751 metal Inorganic materials 0.000 claims abstract description 18
- 239000002184 metal Substances 0.000 claims abstract description 18
- 229910021332 silicide Inorganic materials 0.000 claims abstract description 18
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 claims abstract description 17
- 239000007943 implant Substances 0.000 claims abstract description 9
- 238000011065 in-situ storage Methods 0.000 claims abstract description 5
- 239000004065 semiconductor Substances 0.000 claims abstract description 4
- 238000005530 etching Methods 0.000 claims description 8
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 6
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 6
- 229910052721 tungsten Inorganic materials 0.000 claims description 6
- 239000010937 tungsten Substances 0.000 claims description 6
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 5
- 238000000059 patterning Methods 0.000 claims description 5
- 239000010936 titanium Substances 0.000 claims description 5
- 229910052719 titanium Inorganic materials 0.000 claims description 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 3
- 229910052782 aluminium Inorganic materials 0.000 claims description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 3
- 229910017052 cobalt Inorganic materials 0.000 claims description 3
- 239000010941 cobalt Substances 0.000 claims description 3
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 claims description 3
- 229910052802 copper Inorganic materials 0.000 claims description 3
- 239000010949 copper Substances 0.000 claims description 3
- 238000005137 deposition process Methods 0.000 claims description 3
- 239000012535 impurity Substances 0.000 claims description 3
- 150000002739 metals Chemical class 0.000 claims description 3
- 229910052697 platinum Inorganic materials 0.000 claims description 3
- 239000010410 layer Substances 0.000 claims 40
- 238000004519 manufacturing process Methods 0.000 claims 2
- 230000002093 peripheral effect Effects 0.000 claims 2
- 239000011241 protective layer Substances 0.000 claims 1
- 230000008021 deposition Effects 0.000 abstract description 2
- 230000000295 complement effect Effects 0.000 abstract 1
- 229910044991 metal oxide Inorganic materials 0.000 abstract 1
- 150000004706 metal oxides Chemical class 0.000 abstract 1
- 239000002019 doping agent Substances 0.000 description 6
- 239000000463 material Substances 0.000 description 5
- 230000007423 decrease Effects 0.000 description 3
- 238000005468 ion implantation Methods 0.000 description 3
- 238000001465 metallisation Methods 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 239000003990 capacitor Substances 0.000 description 2
- 238000005755 formation reaction Methods 0.000 description 2
- 230000000873 masking effect Effects 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 229910021417 amorphous silicon Inorganic materials 0.000 description 1
- 238000010420 art technique Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 238000002513 implantation Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 238000004886 process control Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
- H01L28/20—Resistors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
- H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
- H01L21/8248—Combination of bipolar and field-effect technology
- H01L21/8249—Bipolar and MOS technology
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
- H01L27/06—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration
- H01L27/0611—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration integrated circuits having a two-dimensional layout of components without a common active region
- H01L27/0617—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration integrated circuits having a two-dimensional layout of components without a common active region comprising components of the field-effect type
- H01L27/0635—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration integrated circuits having a two-dimensional layout of components without a common active region comprising components of the field-effect type in combination with bipolar transistors and diodes, or resistors, or capacitors
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
- H01L27/08—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind
- H01L27/0802—Resistors only
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- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Semiconductor Integrated Circuits (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Abstract
Description
Claims (21)
- 半導体ウエハ上に形成さている高抵抗値ポリシリコン抵抗器であって、
少なくとも1つの酸化物層と、
前記少なくとも1つの酸化物層上に構成されている第1のポリシリコン層であって、パターニングされてエッチングされ少なくとも1つの酸化物層を露出する開口を有し、このエッチングされた開口の周縁部が垂直の縁部を画定する第1のポリシリコン層と、
前記第1のポリシリコン層の表面、前記垂直の縁部、前記エッチングされた開口のいくつかの露出された酸化物の全体を覆って付着されている約100 nm(1000 Å)の厚みの第2のポリシリコン層であって、前記露出された酸化物及び前記垂直の縁部上の当該第2のポリシリコン層が、パターニングされてエッチングされ前記高抵抗値抵抗器の外側縁部及び長さ部分を画定し、前記第1のポリシリコン層上の当該第2のポリシリコン層が、パターニングされてエッチングされ前記高抵抗値抵抗器の端部を画定する第2のポリシリコン層と、
前記高抵抗値抵抗器及び前記端部を覆う誘電体と、
前記誘電体を介して前記端部のそれぞれに達し、それによって前記高抵抗値抵抗器に電気的な接続を形成する金属接触子とからなる高抵抗値ポリシリコン抵抗器。 - 前記第2のポリシリコン層へのインプラントをさらに含み、前記第2のポリシリコン層単体の電気的なシート抵抗が310Ω/cm2(平方インチ当たり2000 Ω)を超えている請求項1に記載の高抵抗値ポリシリコン抵抗器。
- 前記第2のポリシリコン層がドープされた層からなり、その層がエピ堆積工程の間その場でドープされ、そのドープされた第2のポリシリコン層の電気的なシート抵抗が310Ω/cm2(平方インチ当たり2000 Ω)を超えている請求項1に記載の高抵抗値ポリシリコン抵抗器。
- 前記高抵抗値抵抗器の端部へのインプラントをさらに含み、前記端部の不純物ドープレベルが増加している請求項1に記載の高抵抗値ポリシリコン抵抗器。
- 少なくとも1つの端部に構成されている自己整合珪化物層をさらに含む請求項1に記載の高抵抗値ポリシリコン抵抗器。
- 前記珪化物層が、チタン、タングステン、コバルト、白金、又は珪化物層に対して当業界で公知のような金属からなる群より選択された金属を含む請求項5に記載の高抵抗値ポリシリコン抵抗器。
- 前記金属接触子が金属プラグである請求項1に記載の高抵抗値ポリシリコン抵抗器。
- 前記金属プラグが、タングステン、銅、アルミニウム又はチタン、あるいはそれらの組み合わせである請求項7に記載の高抵抗値ポリシリコン抵抗器。
- 前記抵抗器が、その抵抗器の長さに沿って少なくとも1つの屈曲部を有する細長い形状に配列されている請求項1に記載の高抵抗値ポリシリコン抵抗器。
- 前記第2のポリシリコン層の厚みが100 nm(1000 Å)未満である請求項1に記載の高抵抗値ポリシリコン抵抗器。
- 高抵抗値ポリシリコン抵抗器を半導体ウエハ上に製造する方法であって、
少なくとも1つの酸化物層を形成し、
前記少なくとも1つの酸化物層上に第1のポリシリコン層を作り上げ、
前記第1のポリシリコン層に開口をパターニングしてエッチングし、少なくとも1つの酸化物層を露出させ、その開口が垂直の縁部を画定する周縁部を有し、
前記第1のポリシリコン層の表面、前記垂直の縁部、前記エッチングされた開口のいくつかの露出された酸化物の全体を覆う、約100 nm(1000Å)の厚みの第2のポリシリコン層を作り上げ、
前記露出された酸化物及び前記垂直の縁部上の前記第2のポリシリコン層をパターニングしてエッチングし、前記高抵抗値抵抗器の外側縁部及び長さ部分を画定し、
前記第1のポリシリコン層上の前記第2のポリシリコン層をパターニングしてエッチングし、前記高抵抗値抵抗器の端部を画定し、
前記高抵抗値抵抗器及び前記端部を誘電体で覆い、
前記誘電体を介して前記端部のそれぞれに達し、それによって前記高抵抗値抵抗器に電気的な接続を形成する金属接触子を形成するステップからなる方法。 - 前記抵抗器の長さに沿って少なくとも1つの屈曲部を有する細長い形状として前記抵抗器を形成するステップをさらに含む請求項11に記載の方法。
- 前記第2のポリシリコン層に打ち込むステップをさらに含み、当該第2のポリシリコン層単体の電気的なシート抵抗が310Ω/cm2(平方インチ当たり2000 Ω)を超える請求項11に記載の方法。
- エピ堆積工程の間に前記第2のポリシリコン層をその場でドープするステップをさらに含み、それによって310Ω/cm2(平方インチ当たり2000 Ω)を超えるシート抵抗のドープされた第2のポリシリコン層を形成する請求項11に記載の方法。
- 第1のポリシリコン層を作り上げることがエピに基づくBiCMOS工程の部分であり、前記第1のポリシリコン層が、CMOS及び他の能動又は受動電気デバイス構造に対する保護層を形成する請求項11に記載の方法。
- 前記高抵抗値抵抗器の端部に打ち込み、当該端部の不純物ドープレベルを増加させるステップをさらに含む請求項11に記載の方法。
- 前記端部の少なくとも1つに自己整合珪化物層を作り上げるステップをさらに含む請求項11に記載の方法。
- 前記珪化物層が、チタン、タングステン、コバルト、白金、又は珪化物層に対して当業界で公知のような金属からなる群より選択された金属を含む請求項17に記載の方法。
- 前記金属接触子が金属プラグである請求項11に記載の方法。
- 前記金属プラグが、タングステン、銅、アルミニウム又はチタン、あるいはそれらの組み合わせである請求項19に記載の方法。
- 前記第2のポリシリコン層の厚みが100 nm(1000 Å)未満である請求項11に記載の方法。
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Application Number | Priority Date | Filing Date | Title |
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US10/355,317 US6885280B2 (en) | 2003-01-31 | 2003-01-31 | High value split poly p-resistor with low standard deviation |
PCT/US2003/040454 WO2004070777A2 (en) | 2003-01-31 | 2003-12-17 | High value split poly p-resistor with low standard deviation |
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JP2006515466A true JP2006515466A (ja) | 2006-05-25 |
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US (2) | US6885280B2 (ja) |
JP (1) | JP2006515466A (ja) |
KR (1) | KR101050867B1 (ja) |
CN (1) | CN100399506C (ja) |
AU (1) | AU2003297987A1 (ja) |
DE (1) | DE10394085T5 (ja) |
WO (1) | WO2004070777A2 (ja) |
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US5959343A (en) * | 1997-04-21 | 1999-09-28 | Seiko Instruments R&D Center Inc. | Semiconductor device |
US6211031B1 (en) * | 1998-10-01 | 2001-04-03 | Taiwan Semiconductor Manufacturing Company | Method to produce dual polysilicon resistance in an integrated circuit |
SE513116C2 (sv) * | 1998-11-13 | 2000-07-10 | Ericsson Telefon Ab L M | Polykiselresistor och sätt att framställa sådan |
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2003
- 2003-01-31 US US10/355,317 patent/US6885280B2/en not_active Expired - Fee Related
- 2003-12-17 WO PCT/US2003/040454 patent/WO2004070777A2/en active Application Filing
- 2003-12-17 DE DE10394085T patent/DE10394085T5/de not_active Withdrawn
- 2003-12-17 CN CNB2003801093855A patent/CN100399506C/zh not_active Expired - Fee Related
- 2003-12-17 AU AU2003297987A patent/AU2003297987A1/en not_active Abandoned
- 2003-12-17 KR KR1020057014061A patent/KR101050867B1/ko not_active IP Right Cessation
- 2003-12-17 JP JP2004568037A patent/JP2006515466A/ja active Pending
-
2004
- 2004-12-21 US US11/018,041 patent/US7078305B2/en not_active Expired - Lifetime
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JPS62285462A (ja) * | 1986-06-03 | 1987-12-11 | Sony Corp | 半導体装置 |
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JP2011066418A (ja) * | 2009-09-15 | 2011-03-31 | Samsung Electronics Co Ltd | 抵抗素子を有する半導体装置及びその製造方法 |
Also Published As
Publication number | Publication date |
---|---|
WO2004070777A2 (en) | 2004-08-19 |
AU2003297987A1 (en) | 2004-08-30 |
US6885280B2 (en) | 2005-04-26 |
CN1879194A (zh) | 2006-12-13 |
US7078305B2 (en) | 2006-07-18 |
WO2004070777A3 (en) | 2006-06-01 |
KR101050867B1 (ko) | 2011-07-20 |
KR20060010715A (ko) | 2006-02-02 |
DE10394085T5 (de) | 2005-12-22 |
CN100399506C (zh) | 2008-07-02 |
AU2003297987A8 (en) | 2004-08-30 |
US20040150507A1 (en) | 2004-08-05 |
US20050106805A1 (en) | 2005-05-19 |
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