JP2006286933A - 固体撮像素子 - Google Patents
固体撮像素子 Download PDFInfo
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- JP2006286933A JP2006286933A JP2005104896A JP2005104896A JP2006286933A JP 2006286933 A JP2006286933 A JP 2006286933A JP 2005104896 A JP2005104896 A JP 2005104896A JP 2005104896 A JP2005104896 A JP 2005104896A JP 2006286933 A JP2006286933 A JP 2006286933A
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- 239000007787 solid Substances 0.000 title abstract description 4
- 239000004065 semiconductor Substances 0.000 claims abstract description 184
- 238000002955 isolation Methods 0.000 claims abstract description 9
- 239000010410 layer Substances 0.000 claims description 236
- 239000000758 substrate Substances 0.000 claims description 168
- 239000012535 impurity Substances 0.000 claims description 84
- 238000003384 imaging method Methods 0.000 claims description 40
- 239000002344 surface layer Substances 0.000 claims description 36
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical group [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims description 27
- 229910052796 boron Inorganic materials 0.000 claims description 27
- 230000004888 barrier function Effects 0.000 claims description 15
- 238000006243 chemical reaction Methods 0.000 claims description 11
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims description 8
- 229910052698 phosphorus Inorganic materials 0.000 claims description 8
- 239000011574 phosphorus Substances 0.000 claims description 8
- 238000009792 diffusion process Methods 0.000 claims description 5
- 238000005520 cutting process Methods 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 abstract description 20
- 230000035945 sensitivity Effects 0.000 abstract description 19
- 238000000034 method Methods 0.000 description 37
- 230000008569 process Effects 0.000 description 26
- 238000001514 detection method Methods 0.000 description 17
- 238000009826 distribution Methods 0.000 description 15
- 230000000052 comparative effect Effects 0.000 description 13
- 238000005468 ion implantation Methods 0.000 description 9
- 230000006866 deterioration Effects 0.000 description 7
- 150000002500 ions Chemical class 0.000 description 6
- 238000010438 heat treatment Methods 0.000 description 5
- 230000007423 decrease Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 230000003321 amplification Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000000969 carrier Substances 0.000 description 2
- 230000015556 catabolic process Effects 0.000 description 2
- 238000006731 degradation reaction Methods 0.000 description 2
- 238000003199 nucleic acid amplification method Methods 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000006104 solid solution Substances 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14683—Processes or apparatus peculiar to the manufacture or treatment of these devices or parts thereof
- H01L27/14689—MOS based technologies
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/1463—Pixel isolation structures
Abstract
【解決手段】N/P+ 基板1を用いてCMOSイメージセンサー13を製造する。基板1は、Bを含むP型半導体基板2および基板2上に設けられているリンを含むN型エピタキシャル成長層3からなる。層3の基板2側には、Bを含むPウェル5が設けられている。層3の表層部には、リンからなるフォトダイオード8が互いに独立して複数箇所に設けられている。各ダイオード8を個別に囲んで、層3の表層部に設けられている各STI9に沿って各STI9からPウェル5の表層部に達して第2のP型半導体層10が連続して設けられている。また、基板1を複数個のチップに切り分けるチップ切断部11に沿って層3の表面からPウェル5の表層部に達して第2のP型半導体層10が連続して設けられている。
【選択図】 図6
Description
Claims (5)
- P型の不純物を含む基板本体およびこの基板本体上に設けられているN型の不純物を含む第1のN型半導体層からなるとともに、この第1のN型半導体層の前記基板本体側に前記P型の不純物を含む第1のP型半導体層が設けられている半導体基板と、
前記第1のN型半導体層の表層部において互いに独立して複数箇所に設けられている第2のN型半導体層からなる光電変換部と、
これら各光電変換部を個別に囲んで前記第1のN型半導体層の表層部の複数箇所に設けられている素子分離領域に沿って、前記第1のN型半導体層の表層部から前記第1のP型半導体層の表層部に達して連続して設けられている第2のP型半導体層と、
を具備することを特徴とする固体撮像素子。 - 前記各第2のP型半導体層は、前記素子分離領域の下側に形成されていることを特徴とする請求項1に記載の固体撮像素子。
- 前記各第2のP型半導体層は、前記第1のP型半導体層とともに前記各光電変換部を隣接する他の前記各光電変換部から電気的に切り離すバリア層として機能することを特徴とする請求項1に記載の固体撮像素子。
- 前記各第2のP型半導体層は、さらに前記半導体基板を複数個のチップに切り分けるチップ切断部に沿って前記第1のN型半導体層の表面から前記第1のP型半導体層の表層部に達して連続して設けられていることを特徴とする請求項1に記載の固体撮像素子。
- 前記半導体基板および前記第1のP型半導体層に含まれる前記P型の不純物はボロンであり、前記第1のP型半導体層は熱拡散により前記半導体基板から拡散されたボロンにより形成されており、前記第1のN型半導体層は前記N型の不純物としてリンを含むエピタキシャル成長層であり、かつ、前記各第2のP型半導体層はイオン注入されたボロンからなることを特徴とする請求項1に記載の固体撮像素子。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005104896A JP4718875B2 (ja) | 2005-03-31 | 2005-03-31 | 固体撮像素子 |
TW095110246A TW200635036A (en) | 2005-03-31 | 2006-03-24 | Solid state imaging device and manufacturing method thereof |
CNB2006100716695A CN100490168C (zh) | 2005-03-31 | 2006-03-30 | 固体摄像元件及其制造方法 |
US11/392,616 US7554141B2 (en) | 2005-03-31 | 2006-03-30 | Solid-state image pickup device and method of manufacturing the same |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005104896A JP4718875B2 (ja) | 2005-03-31 | 2005-03-31 | 固体撮像素子 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2006286933A true JP2006286933A (ja) | 2006-10-19 |
JP4718875B2 JP4718875B2 (ja) | 2011-07-06 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2005104896A Expired - Fee Related JP4718875B2 (ja) | 2005-03-31 | 2005-03-31 | 固体撮像素子 |
Country Status (4)
Country | Link |
---|---|
US (1) | US7554141B2 (ja) |
JP (1) | JP4718875B2 (ja) |
CN (1) | CN100490168C (ja) |
TW (1) | TW200635036A (ja) |
Cited By (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006310650A (ja) * | 2005-04-28 | 2006-11-09 | Canon Inc | 撮像装置 |
KR100860198B1 (ko) | 2005-11-11 | 2008-09-24 | 가부시끼가이샤 도시바 | 고체 촬상 장치 |
JP2009212465A (ja) * | 2008-03-06 | 2009-09-17 | Canon Inc | 撮像装置及び撮像システム |
US7855406B2 (en) | 2006-07-13 | 2010-12-21 | Kabushiki Kaisha Toshiba | Solid-state imaging device and method of manufacturing the same |
JP2011124451A (ja) * | 2009-12-11 | 2011-06-23 | Canon Inc | 固体撮像装置およびカメラ |
US8334916B2 (en) | 2009-05-29 | 2012-12-18 | Kabushiki Kaisha Toshiba | Solid-state image sensor with reduced signal noise |
US8435823B2 (en) | 2009-08-25 | 2013-05-07 | Kabushiki Kaisha Toshiba | Solid-state imaging device and method of manufacturing the same |
JP2013236075A (ja) * | 2012-05-04 | 2013-11-21 | Taiwan Semiconductor Manufacturing Co Ltd | イメージデバイスおよびその形成方法 |
US8643131B2 (en) | 2010-03-19 | 2014-02-04 | Kabushiki Kaisha Toshiba | Solid-state imaging device and method of manufacturing the same |
JP2020017682A (ja) * | 2018-07-26 | 2020-01-30 | キヤノン株式会社 | 固体撮像装置、基板および撮像システム |
US10686086B2 (en) | 2017-10-27 | 2020-06-16 | Canon Kabushiki Kaisha | Photoelectric conversion device, manufacturing method thereof, and apparatus |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003142674A (ja) * | 2001-11-07 | 2003-05-16 | Toshiba Corp | Mos型固体撮像装置 |
JP4960058B2 (ja) * | 2006-10-04 | 2012-06-27 | 株式会社東芝 | 増幅型固体撮像素子 |
JP2008103566A (ja) * | 2006-10-19 | 2008-05-01 | Toshiba Corp | 固体撮像装置 |
JP4977181B2 (ja) * | 2009-08-10 | 2012-07-18 | 株式会社東芝 | 固体撮像装置およびその製造方法 |
JP2012164768A (ja) | 2011-02-04 | 2012-08-30 | Toshiba Corp | 固体撮像装置 |
US10009552B2 (en) * | 2012-09-20 | 2018-06-26 | Semiconductor Components Industries, Llc | Imaging systems with front side illuminated near infrared imaging pixels |
US9876045B2 (en) * | 2015-05-06 | 2018-01-23 | Cista System Corp. | Back side illuminated CMOS image sensor arrays |
JP2017045873A (ja) * | 2015-08-27 | 2017-03-02 | ルネサスエレクトロニクス株式会社 | 半導体装置の製造方法および半導体装置 |
CN106783903B (zh) * | 2016-12-28 | 2019-12-13 | 上海集成电路研发中心有限公司 | 防止划片造成短路的cmos图像传感器结构及制作方法 |
US11387232B2 (en) * | 2017-03-23 | 2022-07-12 | Taiwan Semiconductor Manufacturing Co., Ltd. | Semiconductor device and manufacturing method thereof |
KR20190041678A (ko) * | 2017-10-13 | 2019-04-23 | 삼성전자주식회사 | 반도체 칩 검사 장치 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02266566A (ja) * | 1989-04-07 | 1990-10-31 | Olympus Optical Co Ltd | 固体撮像装置及びその製造方法 |
JPH04271171A (ja) * | 1991-02-27 | 1992-09-28 | Sanyo Electric Co Ltd | 光半導体装置 |
JP2000150848A (ja) * | 1998-11-09 | 2000-05-30 | Toshiba Corp | 固体撮像装置 |
JP2000299453A (ja) * | 1999-02-09 | 2000-10-24 | Sony Corp | 固体撮像装置及びその製造方法 |
JP2004304198A (ja) * | 2004-05-17 | 2004-10-28 | Toshiba Corp | 固体撮像装置 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3315962B2 (ja) | 1999-12-01 | 2002-08-19 | イノテック株式会社 | 固体撮像素子、その製造方法及び固体撮像装置 |
TW494574B (en) | 1999-12-01 | 2002-07-11 | Innotech Corp | Solid state imaging device, method of manufacturing the same, and solid state imaging system |
JP3664968B2 (ja) | 1999-12-01 | 2005-06-29 | イノテック株式会社 | 固体撮像素子、その製造方法及び固体撮像装置 |
JP4419238B2 (ja) * | 1999-12-27 | 2010-02-24 | ソニー株式会社 | 固体撮像素子及びその製造方法 |
US6504196B1 (en) | 2001-08-30 | 2003-01-07 | Micron Technology, Inc. | CMOS imager and method of formation |
US7091536B2 (en) | 2002-11-14 | 2006-08-15 | Micron Technology, Inc. | Isolation process and structure for CMOS imagers |
JP4794821B2 (ja) * | 2004-02-19 | 2011-10-19 | キヤノン株式会社 | 固体撮像装置および撮像システム |
US7154137B2 (en) * | 2004-10-12 | 2006-12-26 | Omnivision Technologies, Inc. | Image sensor and pixel having a non-convex photodiode |
-
2005
- 2005-03-31 JP JP2005104896A patent/JP4718875B2/ja not_active Expired - Fee Related
-
2006
- 2006-03-24 TW TW095110246A patent/TW200635036A/zh not_active IP Right Cessation
- 2006-03-30 US US11/392,616 patent/US7554141B2/en active Active
- 2006-03-30 CN CNB2006100716695A patent/CN100490168C/zh not_active Expired - Fee Related
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02266566A (ja) * | 1989-04-07 | 1990-10-31 | Olympus Optical Co Ltd | 固体撮像装置及びその製造方法 |
JPH04271171A (ja) * | 1991-02-27 | 1992-09-28 | Sanyo Electric Co Ltd | 光半導体装置 |
JP2000150848A (ja) * | 1998-11-09 | 2000-05-30 | Toshiba Corp | 固体撮像装置 |
JP2000299453A (ja) * | 1999-02-09 | 2000-10-24 | Sony Corp | 固体撮像装置及びその製造方法 |
JP2004304198A (ja) * | 2004-05-17 | 2004-10-28 | Toshiba Corp | 固体撮像装置 |
Cited By (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006310650A (ja) * | 2005-04-28 | 2006-11-09 | Canon Inc | 撮像装置 |
KR100860198B1 (ko) | 2005-11-11 | 2008-09-24 | 가부시끼가이샤 도시바 | 고체 촬상 장치 |
US7855406B2 (en) | 2006-07-13 | 2010-12-21 | Kabushiki Kaisha Toshiba | Solid-state imaging device and method of manufacturing the same |
JP2009212465A (ja) * | 2008-03-06 | 2009-09-17 | Canon Inc | 撮像装置及び撮像システム |
US8334916B2 (en) | 2009-05-29 | 2012-12-18 | Kabushiki Kaisha Toshiba | Solid-state image sensor with reduced signal noise |
US9276024B2 (en) | 2009-08-25 | 2016-03-01 | Kabushiki Kaisha Toshiba | Solid-state imaging device and method of manufacturing the same |
US8435823B2 (en) | 2009-08-25 | 2013-05-07 | Kabushiki Kaisha Toshiba | Solid-state imaging device and method of manufacturing the same |
US9876041B2 (en) | 2009-08-25 | 2018-01-23 | Kabushiki Kaisha Toshiba | Solid-state imaging device and method of manufacturing the same |
JP2011124451A (ja) * | 2009-12-11 | 2011-06-23 | Canon Inc | 固体撮像装置およびカメラ |
US8648944B2 (en) | 2009-12-11 | 2014-02-11 | Canon Kabushiki Kaisha | Solid-state image sensor and camera having impurity diffusion region |
US8643131B2 (en) | 2010-03-19 | 2014-02-04 | Kabushiki Kaisha Toshiba | Solid-state imaging device and method of manufacturing the same |
US8883544B2 (en) | 2012-05-04 | 2014-11-11 | Taiwan Semiconductor Manufacturing Company, Ltd. | Method of forming an image device |
US9406715B2 (en) | 2012-05-04 | 2016-08-02 | Taiwan Semiconductor Manufacturing Co., Ltd. | Image sensor device |
JP2013236075A (ja) * | 2012-05-04 | 2013-11-21 | Taiwan Semiconductor Manufacturing Co Ltd | イメージデバイスおよびその形成方法 |
US10163951B2 (en) | 2012-05-04 | 2018-12-25 | Taiwan Semiconductor Manufacturing Co., Ltd. | Image sensor device |
US10734428B2 (en) | 2012-05-04 | 2020-08-04 | Taiwan Semiconductor Manufacturing Co., Ltd. | Image sensor device |
US11502121B2 (en) | 2012-05-04 | 2022-11-15 | Taiwan Semiconductor Manufacturing Company, Ltd. | Image sensor device |
US10686086B2 (en) | 2017-10-27 | 2020-06-16 | Canon Kabushiki Kaisha | Photoelectric conversion device, manufacturing method thereof, and apparatus |
JP2020017682A (ja) * | 2018-07-26 | 2020-01-30 | キヤノン株式会社 | 固体撮像装置、基板および撮像システム |
US11239380B2 (en) | 2018-07-26 | 2022-02-01 | Canon Kabushiki Kaisha | Photoelectric conversion device, substrate, and system with semiconductor regions |
JP7097773B2 (ja) | 2018-07-26 | 2022-07-08 | キヤノン株式会社 | 固体撮像装置、基板および撮像システム |
Also Published As
Publication number | Publication date |
---|---|
TW200635036A (en) | 2006-10-01 |
JP4718875B2 (ja) | 2011-07-06 |
CN1855520A (zh) | 2006-11-01 |
TWI304653B (ja) | 2008-12-21 |
CN100490168C (zh) | 2009-05-20 |
US7554141B2 (en) | 2009-06-30 |
US20060219867A1 (en) | 2006-10-05 |
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