JP2006200993A - 回路パターン検査装置およびその方法 - Google Patents

回路パターン検査装置およびその方法 Download PDF

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Publication number
JP2006200993A
JP2006200993A JP2005012007A JP2005012007A JP2006200993A JP 2006200993 A JP2006200993 A JP 2006200993A JP 2005012007 A JP2005012007 A JP 2005012007A JP 2005012007 A JP2005012007 A JP 2005012007A JP 2006200993 A JP2006200993 A JP 2006200993A
Authority
JP
Japan
Prior art keywords
conductive pattern
signal
inspection
pattern
conductive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2005012007A
Other languages
English (en)
Japanese (ja)
Inventor
Hiroshi Hamori
寛 羽森
Hideji Yamaoka
秀嗣 山岡
Seigo Ishioka
聖悟 石岡
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
OHT Inc
Original Assignee
OHT Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by OHT Inc filed Critical OHT Inc
Priority to JP2005012007A priority Critical patent/JP2006200993A/ja
Priority to CNA200680002739XA priority patent/CN101107536A/zh
Priority to PCT/JP2006/301075 priority patent/WO2006078043A1/fr
Priority to KR1020077018785A priority patent/KR20070104418A/ko
Priority to TW095102031A priority patent/TW200632338A/zh
Priority to TW101146840A priority patent/TWI429924B/zh
Publication of JP2006200993A publication Critical patent/JP2006200993A/ja
Pending legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/30—Structural combination of electric measuring instruments with basic electronic circuits, e.g. with amplifier
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R17/00—Measuring arrangements involving comparison with a reference value, e.g. bridge
    • G01R17/02—Arrangements in which the value to be measured is automatically compared with a reference value
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R19/00—Arrangements for measuring currents or voltages or for indicating presence or sign thereof
    • G01R19/145—Indicating the presence of current or voltage
    • G01R19/15—Indicating the presence of current
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2801—Testing of printed circuits, backplanes, motherboards, hybrid circuits or carriers for multichip packages [MCP]
    • G01R31/281—Specific types of tests or tests for a specific type of fault, e.g. thermal mapping, shorts testing
    • G01R31/2812—Checking for open circuits or shorts, e.g. solder bridges; Testing conductivity, resistivity or impedance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/282—Testing of electronic circuits specially adapted for particular applications not provided for elsewhere
    • G01R31/2829—Testing of circuits in sensor or actuator systems
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/50—Testing of electric apparatus, lines, cables or components for short-circuits, continuity, leakage current or incorrect line connections
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/50—Testing of electric apparatus, lines, cables or components for short-circuits, continuity, leakage current or incorrect line connections
    • G01R31/52—Testing for short-circuits, leakage current or ground faults
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G01R31/312—Contactless testing by capacitive methods
JP2005012007A 2005-01-19 2005-01-19 回路パターン検査装置およびその方法 Pending JP2006200993A (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2005012007A JP2006200993A (ja) 2005-01-19 2005-01-19 回路パターン検査装置およびその方法
CNA200680002739XA CN101107536A (zh) 2005-01-19 2006-01-18 电路图案检查装置及其方法
PCT/JP2006/301075 WO2006078043A1 (fr) 2005-01-19 2006-01-18 Peripherique d’inspection d’impression de circuit et procede associe
KR1020077018785A KR20070104418A (ko) 2005-01-19 2006-01-18 회로 패턴 검사 장치 및 그 방법
TW095102031A TW200632338A (en) 2005-01-19 2006-01-19 Circuit pattern inspection device and inspection method thereof
TW101146840A TWI429924B (zh) 2005-01-19 2006-01-19 Circuit pattern checking device and method thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005012007A JP2006200993A (ja) 2005-01-19 2005-01-19 回路パターン検査装置およびその方法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2009100719A Division JP5122512B2 (ja) 2009-04-17 2009-04-17 回路パターン検査装置

Publications (1)

Publication Number Publication Date
JP2006200993A true JP2006200993A (ja) 2006-08-03

Family

ID=36692412

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005012007A Pending JP2006200993A (ja) 2005-01-19 2005-01-19 回路パターン検査装置およびその方法

Country Status (5)

Country Link
JP (1) JP2006200993A (fr)
KR (1) KR20070104418A (fr)
CN (1) CN101107536A (fr)
TW (2) TW200632338A (fr)
WO (1) WO2006078043A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008026320A (ja) * 2006-07-20 2008-02-07 Microinspection Inc 非接触シングルサイドプローブ及び、これを用いたパターン電極の断線・短絡検査装置及びその方法
JP2009080042A (ja) * 2007-09-26 2009-04-16 Oht Inc 回路パターン検査装置

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4723664B2 (ja) * 2009-08-17 2011-07-13 株式会社エフカム 導電パターン検査装置及び検査方法
CN102261886A (zh) * 2011-04-21 2011-11-30 广州市香港科大霍英东研究院 一种电容式塑料制品扫描检测系统
JP5580247B2 (ja) * 2011-04-27 2014-08-27 株式会社ユニオンアロー・テクノロジー パターン検査装置
JP5432213B2 (ja) * 2011-05-20 2014-03-05 株式会社ユニオンアロー・テクノロジー パターン検査装置
KR101300465B1 (ko) * 2012-02-06 2013-08-27 로체 시스템즈(주) 비접촉식 전극패턴 검사장치
KR101316537B1 (ko) * 2012-02-06 2013-10-15 로체 시스템즈(주) 비접촉식 어레이형 전극패턴 검사장치
US9121884B2 (en) * 2013-06-07 2015-09-01 Infineon Technologies Ag Capacitive test method, apparatus and system for semiconductor packages
CN104122689A (zh) * 2014-07-29 2014-10-29 深圳市华星光电技术有限公司 一种测试装置及其测试方法
CN105259463A (zh) * 2015-11-06 2016-01-20 天津普林电路股份有限公司 一种高密度积层板覆铜线路层短路点和断路点测试方法
CN105548752B (zh) * 2015-12-09 2018-06-26 上海华岭集成电路技术股份有限公司 可提高激励信号信噪比的测试系统
CN106102441A (zh) * 2016-08-09 2016-11-09 深圳翠涛自动化设备股份有限公司 一种焊线机的断线检测系统及方法
CN108226695B (zh) * 2018-01-02 2021-10-15 京东方科技集团股份有限公司 邻近金属线短路的检测及定位装置和方法
TWI712317B (zh) * 2019-02-22 2020-12-01 興城科技股份有限公司 用於檢查玻璃基板的開路/短路檢查機及其檢查方法
CN110118817A (zh) * 2019-05-31 2019-08-13 云谷（固安）科技有限公司 导线检测装置及其检测方法
CN110672948B (zh) * 2019-09-29 2021-04-20 云谷（固安）科技有限公司 触控面板检测设备和系统

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4246987B2 (ja) * 2002-11-27 2009-04-02 日本電産リード株式会社 基板検査装置および基板検査方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008026320A (ja) * 2006-07-20 2008-02-07 Microinspection Inc 非接触シングルサイドプローブ及び、これを用いたパターン電極の断線・短絡検査装置及びその方法
JP2009080042A (ja) * 2007-09-26 2009-04-16 Oht Inc 回路パターン検査装置

Also Published As

Publication number Publication date
KR20070104418A (ko) 2007-10-25
TW200632338A (en) 2006-09-16
TWI429924B (zh) 2014-03-11
WO2006078043A1 (fr) 2006-07-27
TW201321770A (zh) 2013-06-01
CN101107536A (zh) 2008-01-16

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